JPS5773923A - Preparation of magnetic bubble memory element - Google Patents

Preparation of magnetic bubble memory element

Info

Publication number
JPS5773923A
JPS5773923A JP15006680A JP15006680A JPS5773923A JP S5773923 A JPS5773923 A JP S5773923A JP 15006680 A JP15006680 A JP 15006680A JP 15006680 A JP15006680 A JP 15006680A JP S5773923 A JPS5773923 A JP S5773923A
Authority
JP
Japan
Prior art keywords
film
plasma
prepared
resist
permalloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15006680A
Other languages
Japanese (ja)
Other versions
JPS6137769B2 (en
Inventor
Niwaji Majima
Shiro Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15006680A priority Critical patent/JPS5773923A/en
Publication of JPS5773923A publication Critical patent/JPS5773923A/en
Publication of JPS6137769B2 publication Critical patent/JPS6137769B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To enable emplyment of O2 plasma for removing a resist mask by forming a thin inorganic insulator film on a resin layer prior to forming a permalloy pattern. CONSTITUTION:A thin magnetic film 14 is prepared on a non-magnetic substrate 13 by the liquid-phase epitaxial method, an SiO2 film 15 is made by spattering, Mo, Au and Mo are evaporated, a resist mask is made, ion etching is applied, and thus a conductor pattern 16 is prepared. The resist is removed by O2 plasma and PIQ or polyladder organosiloxane resin 17 is applied on the whole surface by rotation. Next, the thin insulator film 18 formed of an inorganic substance such as Al2O3, SiO2 and Si3N4 is made by spattering, later permalloy is evaporated and the resist mask 19 is applied, whereby the permalloy pattern 20 is prepared. Lastly the resist 19 is removed by O2 plasma. Thus, the resin layer 17 is protected from erosion by the inorganic film 18.
JP15006680A 1980-10-28 1980-10-28 Preparation of magnetic bubble memory element Granted JPS5773923A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15006680A JPS5773923A (en) 1980-10-28 1980-10-28 Preparation of magnetic bubble memory element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15006680A JPS5773923A (en) 1980-10-28 1980-10-28 Preparation of magnetic bubble memory element

Publications (2)

Publication Number Publication Date
JPS5773923A true JPS5773923A (en) 1982-05-08
JPS6137769B2 JPS6137769B2 (en) 1986-08-26

Family

ID=15488764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15006680A Granted JPS5773923A (en) 1980-10-28 1980-10-28 Preparation of magnetic bubble memory element

Country Status (1)

Country Link
JP (1) JPS5773923A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0182753U (en) * 1987-11-25 1989-06-01

Also Published As

Publication number Publication date
JPS6137769B2 (en) 1986-08-26

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