JPS5773938A - Correcting apparatus for electron beam rotation on electro optical mirror - Google Patents

Correcting apparatus for electron beam rotation on electro optical mirror

Info

Publication number
JPS5773938A
JPS5773938A JP55150982A JP15098280A JPS5773938A JP S5773938 A JPS5773938 A JP S5773938A JP 55150982 A JP55150982 A JP 55150982A JP 15098280 A JP15098280 A JP 15098280A JP S5773938 A JPS5773938 A JP S5773938A
Authority
JP
Japan
Prior art keywords
rotation
angle
electric current
rotation angle
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55150982A
Other languages
Japanese (ja)
Inventor
Tatsu Murashita
Korehito Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP55150982A priority Critical patent/JPS5773938A/en
Publication of JPS5773938A publication Critical patent/JPS5773938A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To detect and correct the directions of rotation against an axis of deflection of a beam in short time by detecting, memorizing and calculating the deviations in electric current values of form shaped beam crossing a cross-wire caused by the deflecting distances of the beam and rotation angles. CONSTITUTION:A cross-wire 2 is arranged to match with the axis of deflection of beam and a form shaped beam 1 is deflected and made to scan in the direction (x). Electric current reaching at a Farady cup 3 is detected as a signal. This signal is amplified and passed through differentiators 5 and 6 to obtain deviation characteristic of elctric current density distribution at beam scanning. A peak value IP6 of the obtained deviation characteristics is sent to a differntiator 8 as well as angle information from a rotation correction circyit 9, and is differentiated to the rotation angle. The above process is repeated by changing the rotation angle of the beam 1 little by little, and a correlation curve expressing degree of deviation of IP6 against roation angle theta is put into a memory 7. An electric current value (Error in angle is zero) of a coil 10 when this curve shows the maximum value or the minimum value is detected, and rotation angle is corrected. By this method, detection and correction can be done highly sensitively even if the beam edge is irregular.
JP55150982A 1980-10-28 1980-10-28 Correcting apparatus for electron beam rotation on electro optical mirror Pending JPS5773938A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55150982A JPS5773938A (en) 1980-10-28 1980-10-28 Correcting apparatus for electron beam rotation on electro optical mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55150982A JPS5773938A (en) 1980-10-28 1980-10-28 Correcting apparatus for electron beam rotation on electro optical mirror

Publications (1)

Publication Number Publication Date
JPS5773938A true JPS5773938A (en) 1982-05-08

Family

ID=15508694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55150982A Pending JPS5773938A (en) 1980-10-28 1980-10-28 Correcting apparatus for electron beam rotation on electro optical mirror

Country Status (1)

Country Link
JP (1) JPS5773938A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5922326A (en) * 1982-07-28 1984-02-04 Hitachi Ltd Electron beam exposure device
JPS59181019A (en) * 1983-03-30 1984-10-15 Fujitsu Ltd Electron beam exposure device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5922326A (en) * 1982-07-28 1984-02-04 Hitachi Ltd Electron beam exposure device
JPS59181019A (en) * 1983-03-30 1984-10-15 Fujitsu Ltd Electron beam exposure device

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