JPS5777039A - Manufacture of layer of fine glass particle for glass waveguide - Google Patents

Manufacture of layer of fine glass particle for glass waveguide

Info

Publication number
JPS5777039A
JPS5777039A JP55152173A JP15217380A JPS5777039A JP S5777039 A JPS5777039 A JP S5777039A JP 55152173 A JP55152173 A JP 55152173A JP 15217380 A JP15217380 A JP 15217380A JP S5777039 A JPS5777039 A JP S5777039A
Authority
JP
Japan
Prior art keywords
temp
substrates
section
gradient
fine glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55152173A
Other languages
Japanese (ja)
Other versions
JPS6232141B2 (en
Inventor
Hidefumi Mori
Tatsuo Izawa
Nobuo Shimizu
Taiji Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP55152173A priority Critical patent/JPS5777039A/en
Priority to US06/213,069 priority patent/US4425146A/en
Priority to FR8026682A priority patent/FR2486250A1/en
Priority to CA000366893A priority patent/CA1145171A/en
Priority to GB8040392A priority patent/GB2066805B/en
Priority to DE3047589A priority patent/DE3047589C2/en
Publication of JPS5777039A publication Critical patent/JPS5777039A/en
Publication of JPS6232141B2 publication Critical patent/JPS6232141B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/40—Coatings comprising at least one inhomogeneous layer
    • C03C2217/42—Coatings comprising at least one inhomogeneous layer consisting of particles only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

PURPOSE:To form homogeneous layers of fine glass particles for waveguides with high reproducibility in large quantities by leading fine glass particles produced in a reaction section onto a plurality of substrates in a deposition section having a temp. gradient. CONSTITUTION:Halides 4, 5, 6 of Si, Ge, Ti, P, B, etc. are stored in saturators 7, 8, 9 in the reaction section of a reactor. The section is heated to >=1,000 deg.C, each of the saturators 7, 8, 9 is kept at a prescribed temp., and gaseous oxygen is blown and satd. with vapor of the each of starting materials. The gaseous oxygen contg. the starting materials is introduced into a quartz tube 1 together sith gaseous oxygen fed from a bypass 10. The internal temp. of the tube 1 is >=900 deg.C which is lower than the temp. of the reaction section, the tube 1 is provided with 1-20 deg.C/cm temp. gradient, and the deposition section is formed with a plurality of substrates 3. Fine glass particles of the introduced product are uniformly deposited on the substrates 3 provided with such a temp. gradient, and they are converted into tansparent glass by heating each of the substrates 3 to a necessary temp.
JP55152173A 1979-12-17 1980-10-31 Manufacture of layer of fine glass particle for glass waveguide Granted JPS5777039A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP55152173A JPS5777039A (en) 1980-10-31 1980-10-31 Manufacture of layer of fine glass particle for glass waveguide
US06/213,069 US4425146A (en) 1979-12-17 1980-12-04 Method of making glass waveguide for optical circuit
FR8026682A FR2486250A1 (en) 1979-12-17 1980-12-16 GLASS WAVEGUIDE FOR OPTICAL CIRCUIT AND METHOD OF MANUFACTURE
CA000366893A CA1145171A (en) 1979-12-17 1980-12-16 Glass waveguide for optical circuit and fabrication method thereof
GB8040392A GB2066805B (en) 1979-12-17 1980-12-17 Glass waveguide for optical circuit and fabrication method thereof
DE3047589A DE3047589C2 (en) 1979-12-17 1980-12-17 Process for the production of optical waveguides from glass for optical circuits and optical waveguides which can be produced according to this process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55152173A JPS5777039A (en) 1980-10-31 1980-10-31 Manufacture of layer of fine glass particle for glass waveguide

Publications (2)

Publication Number Publication Date
JPS5777039A true JPS5777039A (en) 1982-05-14
JPS6232141B2 JPS6232141B2 (en) 1987-07-13

Family

ID=15534631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55152173A Granted JPS5777039A (en) 1979-12-17 1980-10-31 Manufacture of layer of fine glass particle for glass waveguide

Country Status (1)

Country Link
JP (1) JPS5777039A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63177542U (en) * 1987-05-11 1988-11-17
JPH08128134A (en) * 1994-11-01 1996-05-21 Kuwashiro Giken Kogyosha:Kk Partition wall, and structure of ceiling base

Also Published As

Publication number Publication date
JPS6232141B2 (en) 1987-07-13

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