JPS5777101A - Conveyor for substrate - Google Patents

Conveyor for substrate

Info

Publication number
JPS5777101A
JPS5777101A JP15181580A JP15181580A JPS5777101A JP S5777101 A JPS5777101 A JP S5777101A JP 15181580 A JP15181580 A JP 15181580A JP 15181580 A JP15181580 A JP 15181580A JP S5777101 A JPS5777101 A JP S5777101A
Authority
JP
Japan
Prior art keywords
substrate
belts
conveyor
conveying
conveying sections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15181580A
Other languages
Japanese (ja)
Inventor
Nobuyuki Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP15181580A priority Critical patent/JPS5777101A/en
Publication of JPS5777101A publication Critical patent/JPS5777101A/en
Pending legal-status Critical Current

Links

Landscapes

  • Discharge Of Articles From Conveyors (AREA)
  • Structure Of Belt Conveyors (AREA)

Abstract

PURPOSE: To enable lifting members to move up while perfectly supporting an article around conveyor belts, by dividing the conveyor belts into two conveying sections and driving both the belts synchronously to each other.
CONSTITUTION: Belts 2 for conveying a substrate 1 is driven by a driving shaft 3 to constitute two conveying sections located at a distance from each other between pulleys 10, 10'. A substrate holding mechanism 12 is provided around the rear parts of the conveying sections to lift the substrate 1 from the belts 2 and feed the substrate to another processing unit. Since a conventional conveyor has only one horizontal belt, its substrate holding mechanism cannot support the substrate on its total periphery and could have supported only unstably, but according to the present invention, the substrate 1 is stably supported.
COPYRIGHT: (C)1982,JPO&Japio
JP15181580A 1980-10-29 1980-10-29 Conveyor for substrate Pending JPS5777101A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15181580A JPS5777101A (en) 1980-10-29 1980-10-29 Conveyor for substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15181580A JPS5777101A (en) 1980-10-29 1980-10-29 Conveyor for substrate

Publications (1)

Publication Number Publication Date
JPS5777101A true JPS5777101A (en) 1982-05-14

Family

ID=15526910

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15181580A Pending JPS5777101A (en) 1980-10-29 1980-10-29 Conveyor for substrate

Country Status (1)

Country Link
JP (1) JPS5777101A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63291432A (en) * 1987-05-25 1988-11-29 Tokyo Electron Ltd Transfer device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4819748U (en) * 1971-07-17 1973-03-06
JPS535731U (en) * 1976-07-01 1978-01-19

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4819748U (en) * 1971-07-17 1973-03-06
JPS535731U (en) * 1976-07-01 1978-01-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63291432A (en) * 1987-05-25 1988-11-29 Tokyo Electron Ltd Transfer device

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