JPS5777871A - Thin film dryer - Google Patents

Thin film dryer

Info

Publication number
JPS5777871A
JPS5777871A JP15324980A JP15324980A JPS5777871A JP S5777871 A JPS5777871 A JP S5777871A JP 15324980 A JP15324980 A JP 15324980A JP 15324980 A JP15324980 A JP 15324980A JP S5777871 A JPS5777871 A JP S5777871A
Authority
JP
Japan
Prior art keywords
thin film
film dryer
dryer
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15324980A
Other languages
Japanese (ja)
Other versions
JPS5933001B2 (en
Inventor
Masaru Watanabe
Satoru Matsumura
Kazuyoshi Amada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP15324980A priority Critical patent/JPS5933001B2/en
Publication of JPS5777871A publication Critical patent/JPS5777871A/en
Publication of JPS5933001B2 publication Critical patent/JPS5933001B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP15324980A 1980-10-31 1980-10-31 thin film dryer Expired JPS5933001B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15324980A JPS5933001B2 (en) 1980-10-31 1980-10-31 thin film dryer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15324980A JPS5933001B2 (en) 1980-10-31 1980-10-31 thin film dryer

Publications (2)

Publication Number Publication Date
JPS5777871A true JPS5777871A (en) 1982-05-15
JPS5933001B2 JPS5933001B2 (en) 1984-08-13

Family

ID=15558319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15324980A Expired JPS5933001B2 (en) 1980-10-31 1980-10-31 thin film dryer

Country Status (1)

Country Link
JP (1) JPS5933001B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03129313A (en) * 1989-07-14 1991-06-03 Nippon Telegr & Teleph Corp <Ntt> Optical switch using bimorph piezoelectric element

Also Published As

Publication number Publication date
JPS5933001B2 (en) 1984-08-13

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