JPS5777905A - Measurement of three-dimensional measuring machine - Google Patents

Measurement of three-dimensional measuring machine

Info

Publication number
JPS5777905A
JPS5777905A JP15345380A JP15345380A JPS5777905A JP S5777905 A JPS5777905 A JP S5777905A JP 15345380 A JP15345380 A JP 15345380A JP 15345380 A JP15345380 A JP 15345380A JP S5777905 A JPS5777905 A JP S5777905A
Authority
JP
Japan
Prior art keywords
slider
axis direction
supporting member
movement detector
lateral member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15345380A
Other languages
Japanese (ja)
Inventor
Etsuo Nagashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP15345380A priority Critical patent/JPS5777905A/en
Publication of JPS5777905A publication Critical patent/JPS5777905A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE:To enable a highly accurate measurement by performing as specified correction or adjusting the quantity of air fed to individual bearings depending on the movement of a slider from the reference position as the variable. CONSTITUTION:A slider supporting member 4 is supported on a surface plate 3 on a base 2 of a support bed 1 through air bearings 5 and 6 in such a manner as to be free to move in the Y axis direction. A Y axis movement detector 7 such as linear gauge is provided between the surface plate 3 and the supporting member 4. A slider 9 is supported on a lateral member 8 on the supporting member 4 in such a manner as to be free to move in the X axis direction while an X axis movement detector 10 is provided. The slider 9 is provided with a probe shaft 11 movable in the Z axis direction, a probe 12 and a Z axis movement detector. A correction is applied to the lift level of struts 4A and 4B corresponding to a displacement from the center (reference position) of the lateral member 8 of the slider 9 or the pressure of the air bearings 5 and 6 so as to make the lateral member 8 horizontal thereby enabling a highly accurate measurement.
JP15345380A 1980-10-31 1980-10-31 Measurement of three-dimensional measuring machine Pending JPS5777905A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15345380A JPS5777905A (en) 1980-10-31 1980-10-31 Measurement of three-dimensional measuring machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15345380A JPS5777905A (en) 1980-10-31 1980-10-31 Measurement of three-dimensional measuring machine

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP24908784A Division JPS60149909A (en) 1984-11-26 1984-11-26 Measurement of three dimensional measuring machine

Publications (1)

Publication Number Publication Date
JPS5777905A true JPS5777905A (en) 1982-05-15

Family

ID=15562880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15345380A Pending JPS5777905A (en) 1980-10-31 1980-10-31 Measurement of three-dimensional measuring machine

Country Status (1)

Country Link
JP (1) JPS5777905A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59202008A (en) * 1983-04-30 1984-11-15 Fanuc Ltd Position correcting method
JPS61123913U (en) * 1985-01-22 1986-08-04
US4941265A (en) * 1987-07-16 1990-07-17 Barry Controls Gmbh Apparatus for preventing changes of the positions of machines
JP2006287098A (en) * 2005-04-04 2006-10-19 Nsk Ltd Positioning device
WO2007128431A3 (en) * 2006-05-08 2008-08-21 Zeiss Ind Messtechnik Gmbh Machine for measuring or machining workpieces, especially coordinate measuring machine
JP2020091208A (en) * 2018-12-06 2020-06-11 株式会社ミツトヨ Three-dimensional measuring device and measuring method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59202008A (en) * 1983-04-30 1984-11-15 Fanuc Ltd Position correcting method
JPS61123913U (en) * 1985-01-22 1986-08-04
US4941265A (en) * 1987-07-16 1990-07-17 Barry Controls Gmbh Apparatus for preventing changes of the positions of machines
JP2006287098A (en) * 2005-04-04 2006-10-19 Nsk Ltd Positioning device
WO2007128431A3 (en) * 2006-05-08 2008-08-21 Zeiss Ind Messtechnik Gmbh Machine for measuring or machining workpieces, especially coordinate measuring machine
JP2020091208A (en) * 2018-12-06 2020-06-11 株式会社ミツトヨ Three-dimensional measuring device and measuring method

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