JPS578401A - Method of and apparatus for measuring optical path difference with optical interferometer - Google Patents

Method of and apparatus for measuring optical path difference with optical interferometer

Info

Publication number
JPS578401A
JPS578401A JP6544380A JP6544380A JPS578401A JP S578401 A JPS578401 A JP S578401A JP 6544380 A JP6544380 A JP 6544380A JP 6544380 A JP6544380 A JP 6544380A JP S578401 A JPS578401 A JP S578401A
Authority
JP
Japan
Prior art keywords
path difference
optical path
interferometer
optical
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6544380A
Other languages
Japanese (ja)
Inventor
Barasuburamanian Enu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP6544380A priority Critical patent/JPS578401A/en
Publication of JPS578401A publication Critical patent/JPS578401A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP6544380A 1980-05-19 1980-05-19 Method of and apparatus for measuring optical path difference with optical interferometer Pending JPS578401A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6544380A JPS578401A (en) 1980-05-19 1980-05-19 Method of and apparatus for measuring optical path difference with optical interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6544380A JPS578401A (en) 1980-05-19 1980-05-19 Method of and apparatus for measuring optical path difference with optical interferometer

Publications (1)

Publication Number Publication Date
JPS578401A true JPS578401A (en) 1982-01-16

Family

ID=13287275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6544380A Pending JPS578401A (en) 1980-05-19 1980-05-19 Method of and apparatus for measuring optical path difference with optical interferometer

Country Status (1)

Country Link
JP (1) JPS578401A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6182113A (en) * 1984-09-29 1986-04-25 Satoru Toyooka Measuring method of optical fine displacement
JPS61137013A (en) * 1984-09-29 1986-06-24 Satoru Toyooka Optical measurement of minute displacement
JPS61221616A (en) * 1984-09-29 1986-10-02 Satoru Toyooka Optical measuring method for fine displacement
JPH01187406A (en) * 1988-01-22 1989-07-26 Rikagaku Kenkyusho Position detection method and position detection device for equally spaced interference fringes

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6182113A (en) * 1984-09-29 1986-04-25 Satoru Toyooka Measuring method of optical fine displacement
JPS61137013A (en) * 1984-09-29 1986-06-24 Satoru Toyooka Optical measurement of minute displacement
JPS61221616A (en) * 1984-09-29 1986-10-02 Satoru Toyooka Optical measuring method for fine displacement
JPH01187406A (en) * 1988-01-22 1989-07-26 Rikagaku Kenkyusho Position detection method and position detection device for equally spaced interference fringes

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JPS578401A (en) Method of and apparatus for measuring optical path difference with optical interferometer