JPS5785230A - Substrate treatment - Google Patents

Substrate treatment

Info

Publication number
JPS5785230A
JPS5785230A JP16171380A JP16171380A JPS5785230A JP S5785230 A JPS5785230 A JP S5785230A JP 16171380 A JP16171380 A JP 16171380A JP 16171380 A JP16171380 A JP 16171380A JP S5785230 A JPS5785230 A JP S5785230A
Authority
JP
Japan
Prior art keywords
substrate
film
protective resin
resin film
photoresisting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16171380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6137775B2 (ko
Inventor
Eiji Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16171380A priority Critical patent/JPS5785230A/ja
Publication of JPS5785230A publication Critical patent/JPS5785230A/ja
Publication of JPS6137775B2 publication Critical patent/JPS6137775B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP16171380A 1980-11-17 1980-11-17 Substrate treatment Granted JPS5785230A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16171380A JPS5785230A (en) 1980-11-17 1980-11-17 Substrate treatment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16171380A JPS5785230A (en) 1980-11-17 1980-11-17 Substrate treatment

Publications (2)

Publication Number Publication Date
JPS5785230A true JPS5785230A (en) 1982-05-27
JPS6137775B2 JPS6137775B2 (ko) 1986-08-26

Family

ID=15740456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16171380A Granted JPS5785230A (en) 1980-11-17 1980-11-17 Substrate treatment

Country Status (1)

Country Link
JP (1) JPS5785230A (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6250758A (ja) * 1985-08-29 1987-03-05 Fujitsu Ltd パタ−ン形成方法
JP2022118376A (ja) * 2021-02-02 2022-08-15 東京エレクトロン株式会社 基板処理装置、基板処理システム、基板処理方法及びコンピュータ記憶媒体

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6250758A (ja) * 1985-08-29 1987-03-05 Fujitsu Ltd パタ−ン形成方法
JP2022118376A (ja) * 2021-02-02 2022-08-15 東京エレクトロン株式会社 基板処理装置、基板処理システム、基板処理方法及びコンピュータ記憶媒体

Also Published As

Publication number Publication date
JPS6137775B2 (ko) 1986-08-26

Similar Documents

Publication Publication Date Title
ATE284072T1 (de) Integrierter strahlenschutz
ZA774018B (en) Process for the manufacture of oriented sheets of thermoplastic resin which are protected against the action of ultraviolet rays
JPS5355362A (en) Organopolysiloxane composition
JPS5785230A (en) Substrate treatment
JPS5580410A (en) Manufacture of laminates and high pressure polyethylene coated resin
JPS52152434A (en) Application of melamine resin plates
JPS5313072A (en) Method of forming gas chamber of gas enclosure type closed cylinder
JPS51134475A (en) An incombustible and highly efficient air filter material
JPS5483971A (en) Crosslinked olefinic resin film having improved heat sealability
JPS528686A (en) Ultraviolet light irradition device
JPS52131097A (en) Radiation shielding material of sheet form with flexibility
JPS5411970A (en) Method of producing decorative sheet
JPS51118133A (en) Shutting valve for gas leakage
JPS5367673A (en) Exchanging method for window foil of incidence window of reactor fortreating exhaust gas irradiated with radioactive rays
JPS5232942A (en) Synthetic resin composition
JPS5675601A (en) Plastic optical parts
JPS5356243A (en) Curing of ethylene resin with ultraviolet rays
JPS5551433A (en) Ultraviolet irradiation curing treatment device
JPS5244601A (en) Method for treatment of surface of turn-table sheet etc.
JPS5352359A (en) Resin mold type semiconductor device
JPS5345341A (en) Radiation furing oven
JPS5360981A (en) Ultraviolet curable composition
JPS5323341A (en) Tack masking film
JPS52109536A (en) Method of curing paint film
JPS5279442A (en) Noise protecting device for freight handling vehicle