JPS5794811U - - Google Patents

Info

Publication number
JPS5794811U
JPS5794811U JP15962281U JP15962281U JPS5794811U JP S5794811 U JPS5794811 U JP S5794811U JP 15962281 U JP15962281 U JP 15962281U JP 15962281 U JP15962281 U JP 15962281U JP S5794811 U JPS5794811 U JP S5794811U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15962281U
Other languages
Japanese (ja)
Other versions
JPS6023689Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15962281U priority Critical patent/JPS6023689Y2/ja
Publication of JPS5794811U publication Critical patent/JPS5794811U/ja
Application granted granted Critical
Publication of JPS6023689Y2 publication Critical patent/JPS6023689Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP15962281U 1981-10-28 1981-10-28 微小凹凸の検出装置 Expired JPS6023689Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15962281U JPS6023689Y2 (ja) 1981-10-28 1981-10-28 微小凹凸の検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15962281U JPS6023689Y2 (ja) 1981-10-28 1981-10-28 微小凹凸の検出装置

Publications (2)

Publication Number Publication Date
JPS5794811U true JPS5794811U (cs) 1982-06-11
JPS6023689Y2 JPS6023689Y2 (ja) 1985-07-15

Family

ID=29518637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15962281U Expired JPS6023689Y2 (ja) 1981-10-28 1981-10-28 微小凹凸の検出装置

Country Status (1)

Country Link
JP (1) JPS6023689Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017058157A (ja) * 2015-09-14 2017-03-23 株式会社東芝 振動計測システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017058157A (ja) * 2015-09-14 2017-03-23 株式会社東芝 振動計測システム

Also Published As

Publication number Publication date
JPS6023689Y2 (ja) 1985-07-15

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