JPS5796206A - Graphic inspection - Google Patents

Graphic inspection

Info

Publication number
JPS5796206A
JPS5796206A JP17304280A JP17304280A JPS5796206A JP S5796206 A JPS5796206 A JP S5796206A JP 17304280 A JP17304280 A JP 17304280A JP 17304280 A JP17304280 A JP 17304280A JP S5796206 A JPS5796206 A JP S5796206A
Authority
JP
Japan
Prior art keywords
light transmitting
graphic
piled
drawn
graphics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17304280A
Other languages
Japanese (ja)
Inventor
Eiji Nishikata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17304280A priority Critical patent/JPS5796206A/en
Publication of JPS5796206A publication Critical patent/JPS5796206A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To enable a simple and accurate detection of differences between graphics required to be the same originally drawn on two light transmitting thin plates by comparing signals generated corresponding to each graphic by two photoelectric systems after they are piled up together. CONSTITUTION:Two light transmitting thin plates on which graphics required to be the same originally are drawn with non-light transmitting material are piled up together and signals are compared from two photoelectric conversion systems focusing on the position of each graphic to detect differences between the graphics. For example, glass base plates 11 and 11' on which graphics required to be the same originally are drawn with non-light transmitting materials 12 and 12' are piled up together to match one graphic with the other and two optical systems comprising a light source 15, an opaque mirror 16, a lens 17 and the like are focused on the position of each image moving it by a stage drive system 14. Two outputs of photoelectric converters 18 and 18' are compared with a comparator 19 whose outputs are sent to an evaluation system with a coordinate signal to detect the position showing a difference.
JP17304280A 1980-12-08 1980-12-08 Graphic inspection Pending JPS5796206A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17304280A JPS5796206A (en) 1980-12-08 1980-12-08 Graphic inspection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17304280A JPS5796206A (en) 1980-12-08 1980-12-08 Graphic inspection

Publications (1)

Publication Number Publication Date
JPS5796206A true JPS5796206A (en) 1982-06-15

Family

ID=15953122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17304280A Pending JPS5796206A (en) 1980-12-08 1980-12-08 Graphic inspection

Country Status (1)

Country Link
JP (1) JPS5796206A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6093305A (en) * 1983-10-27 1985-05-25 Fujitsu Ltd Method for mask examination

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6093305A (en) * 1983-10-27 1985-05-25 Fujitsu Ltd Method for mask examination

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