JPS579875A - Etching solution for nickel - Google Patents

Etching solution for nickel

Info

Publication number
JPS579875A
JPS579875A JP8171880A JP8171880A JPS579875A JP S579875 A JPS579875 A JP S579875A JP 8171880 A JP8171880 A JP 8171880A JP 8171880 A JP8171880 A JP 8171880A JP S579875 A JPS579875 A JP S579875A
Authority
JP
Japan
Prior art keywords
compound
soln
aliphatic
etching
org
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8171880A
Other languages
Japanese (ja)
Other versions
JPS5749632B2 (en
Inventor
Kazuhiko Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8171880A priority Critical patent/JPS579875A/en
Publication of JPS579875A publication Critical patent/JPS579875A/en
Publication of JPS5749632B2 publication Critical patent/JPS5749632B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/10Etching compositions
    • C23F1/14Aqueous compositions
    • C23F1/16Acidic compositions
    • C23F1/28Acidic compositions for etching iron group metals
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/44Compositions for etching metallic material from a metallic material substrate of different composition
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/067Etchants

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

PURPOSE:To maintain the power for selectively etching Ni over a long term by properly blending sulfuric acid, an aqueous hydrogen peroxide soln., an aliphatic amine compound, an aliphatic carboxylic acid compound, an org. sulfur compound and an aromatic nitro compound. CONSTITUTION:This etching soln. for nickel consists of 2.6-9.1wt% sulfuric acid, 1.5-5.6% aqueous hydrogen peroxide soln., 2.5-5% aliphatic amine compound, 0.5-1% aliphatic carboxylic acid compound, 0.25-0.5% org. sulfur compound, 0.15-0.3% aliphatic nitro compound and the balance water. When the soln. is used to selectively etch Ni among >=2 kinds of metals including Ni, it can etch Ni independently of the purity of Ni. Accordingly, the etching soln. can be utilized effectively in the manufacture of a printed wiring plate having a through hole and a circuit pattern, etc.
JP8171880A 1980-06-17 1980-06-17 Etching solution for nickel Granted JPS579875A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8171880A JPS579875A (en) 1980-06-17 1980-06-17 Etching solution for nickel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8171880A JPS579875A (en) 1980-06-17 1980-06-17 Etching solution for nickel

Publications (2)

Publication Number Publication Date
JPS579875A true JPS579875A (en) 1982-01-19
JPS5749632B2 JPS5749632B2 (en) 1982-10-22

Family

ID=13754183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8171880A Granted JPS579875A (en) 1980-06-17 1980-06-17 Etching solution for nickel

Country Status (1)

Country Link
JP (1) JPS579875A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0337352U (en) * 1989-08-18 1991-04-11

Also Published As

Publication number Publication date
JPS5749632B2 (en) 1982-10-22

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