JPS58100992A - Gold-tin composite brazing filler metal and its production - Google Patents
Gold-tin composite brazing filler metal and its productionInfo
- Publication number
- JPS58100992A JPS58100992A JP19906381A JP19906381A JPS58100992A JP S58100992 A JPS58100992 A JP S58100992A JP 19906381 A JP19906381 A JP 19906381A JP 19906381 A JP19906381 A JP 19906381A JP S58100992 A JPS58100992 A JP S58100992A
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- phases
- filler metal
- brazing filler
- total weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering or brazing
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Die Bonding (AREA)
Abstract
Description
【発明の詳細な説明】
本発明はろう付けのため用いられるろう材に関し、特に
半導体素子等を具備する各種電子部品のろう付けに供し
て好適なＡｕ Ｓｎ系のろう材と、その製造方法に係
るものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a brazing material used for brazing, and in particular to an AuSn-based brazing material suitable for brazing various electronic components including semiconductor elements, and a method for manufacturing the same. This is related.
従来から、上記電子部品のろう付けにあっては、ろう付
けに際し半導体素子を高温にさらして、その特性を劣化
させたり、ライフを旬かくしてしまうことのないよう、
２３２℃等の低融点をもったＡｕ Ｓｎ共晶型合金、
特に８０Ａｕ−２０Ｓｎ ろう材が広く一般に用いられ
ている。Conventionally, when brazing the above-mentioned electronic components, precautions have been taken to avoid exposing semiconductor elements to high temperatures during brazing, which may deteriorate their characteristics or shorten their lifespan.
Au-Sn eutectic alloy with a low melting point such as 232°C,
In particular, 80Au-20Sn brazing filler metal is widely used.
しかしながら、溶解法によって得られる上記Ａｕ−８ｎ
共晶型合金ろう拐は、共晶合金であるため極めて脆く加
工性が非常に悪いので、ろう付は作業に際して、当該ろ
う材を圧延、伸線、切断、打抜き加工して所定形状のも
のを得ようより多くの労力と時間とを費さねばｌらず、
しかも当該加工中にろう材が欠落したり破断してし１う
ため歩留りの低下を来し、さらに実際」二複雑な形状の
ものについては打抜きが不可能となってし甘うといった
重大な欠陥を有している０１だ当該ろう材の溶融温度範
囲は極めて狭いので、融点に達したろうは瞬時に流動す
る性質をもっており、従って第１図のようにろう付素材
Ａ、Ｈのろう付間隙Ｃが比較的狭く、かつ均−巾である
場合には上記流動状態となったろうが、ろう付間隙Ｃの
毛細管現象により速やかに、当該間隙Ｃに充満して、略
満足すべきろう付けができるのであるが、第２図のよう
ｌころう付素材Ａ Ｉ 、’ Ｂ Ｔのろう付間隙Ｃ′
が、一定巾でなく、その形状が複雛である場合には、ろ
う付間隙Ｃ′における狭巾間隙部り、、Ｄ′ ・・・・
・には瞬時流動のろうが充満きれるもの＼、広巾間隙部
Ｅ、Ｅ’ ・・・・・に対するろう回りが不足してし
１う現象が生じ、このため不完全なろう付状態となるこ
とが多く、シかもこの極めて急激な溶融により、瞬時の
溶融膨張となって流動ろうの飛散が起り、これがその近
傍の諸部伺に何着して各種の悪影響を及ぼすといった問
題も発生している。However, the above Au-8n obtained by the dissolution method
Because eutectic alloy brazing is a eutectic alloy, it is extremely brittle and has very poor workability. Therefore, during brazing, the brazing material must be rolled, wire drawn, cut, and punched into a predetermined shape. You have to spend more effort and time than you can get,
Moreover, during the processing, the filler metal may be missing or broken, resulting in a decrease in yield, and in fact, there are serious defects such as making it impossible to punch out products with complex shapes. Since the melting temperature range of the brazing filler metal is extremely narrow, the brazing filler metal has the property of instantaneously flowing once it reaches its melting point. When C is relatively narrow and uniform in width, the solder in the above-mentioned fluid state quickly fills the brazing gap C due to the capillary action of the brazing gap C, and substantially satisfactory brazing can be achieved. However, as shown in Fig. 2, the brazing gap C' between the brazing material A I and ' B T is
However, if the width is not constant and the shape is multiple, the narrow gap portion in the brazing gap C', D'...
・A phenomenon occurs in which the solder is filled with instantaneous flowing solder, and there is insufficient solder coverage for the wide gaps E, E', etc., resulting in an incomplete brazed state. This extremely rapid melting may cause instantaneous melt expansion and scattering of the flowing solder, which may land on nearby parts and cause various adverse effects. .
本発明は、か＼る難点を解消し得るろう材とその製造方
法を提供しようとするものて、当該ろう材の特徴とする
ところは、Ａ１１相とＳｎ相との間【こ、両相を連着す
るＡｕＸＳｎ の拡散相が介装されており、かつこの
際上記Ａｕ と Ｓｎの各全重量が、所望Ａｕ−８ｎ
共晶型合金ろう祠の組成重量係宛となっていることであ
る。The present invention aims to provide a brazing filler metal and a method for manufacturing the same that can overcome the above-mentioned difficulties. A continuous diffused phase of AuXSn is interposed, and in this case, the total weight of each of the above Au and Sn is equal to the desired Au-8n.
It is addressed to the person in charge of the composition and weight of eutectic alloy brazes.
そこで上記金−錫複合ろう材を製造するには、ＡＩ］原
伺（１）とＳｎ原材（２）とを重ね合せることｌこより
重積原材（３）を形成する。Therefore, in order to manufacture the above-mentioned gold-tin composite brazing material, a laminated raw material (3) is formed by stacking an AI raw material (1) and a Sn raw material (2).
こ＼で上記両原材ｔｌＬｆ２）は少なくとも各１個を必
要とするが、所要複数個だけ交互に重ね合せるのがよく
、重積原材（３）の形態としては、第３図のように平板
状の原材ｔｌ）＋２）を用い、５ｎ−Ａｕ−８ｎ−Ａｕ
Ｓｎの５層に積層することで、Ｓｎ ３−
原材＋２＋ ＋２１が外表側に配されるようにしたり、
第４図の（イ）に示す如く、板材によるＳｎ原材（２）
を蛇行状に屈曲させ、その蛇行間隙（２＋’ ＋２１’
・・・・に平板状のＡｕ原材ｔｌ） ｔｌｌ・・・・・
を挾持するようにしてもよく、また同図（ロ）の通り蛇
行状のＳｎ原材（２）と、曲成させた板材によるＡｕ原
材（］）＋１＋とを噛み合せ状態に挾持させるなどのも
のであってもよい。At least one of each of the above-mentioned raw materials tlLf2) is required, but it is better to alternately stack as many as required, and the form of the stacked raw materials (3) is as shown in Figure 3. 5n-Au-8n-Au using flat plate-shaped raw material tl)+2)
By laminating five layers of Sn, the Sn 3- raw material +2+ +21 is arranged on the outer surface side,
As shown in Figure 4 (a), Sn raw material (2) made of plate material
is bent in a meandering manner, and the meandering gap (2+'+21'
Flat plate-shaped Au raw material tll) tll...
Alternatively, as shown in the same figure (b), a meandering Sn raw material (2) and a bent Au raw material (])+1+ may be held in an interlocking state. It may be something.
また重積原材（３）としては、上記実施例の如く平板状
に積層するのではなく、例えば第４図の（ハ）に示す通
り線拐たるＳｎ原材（２）に、順次異径円筒状としたＡ
ｕ原材Ｌｌ）、Ｓｎ原材（２）を交互に被嵌させて線状
に形成してもよく、さらに線状となるよう積層するため
、同図のに）に例示の如く、板状のＡｕ原材（２）を重
積させ、これを端面が渦巻状となるよう巻回するように
してもよい０こ＼でざらに重要なことは、上記重積原材
（３）を形成するに際し、例えば前記第３図の実施例で
は２枚の板状Ａｕ原材（１）と３枚の板状Ｓｎ原材（２
）とを積層したが、これら２枚のＡｕ原材＋１．）−４
＝
によるＡｕの全重量と、３枚のＳｎ原材（２）によるＳ
ｎの全重量とが、所望Ａｕ Ｓｎ共晶合金ろう拐の組
成重量％となるよう調整されていることである。In addition, the laminated raw material (3) is not stacked in a flat plate shape as in the above embodiment, but for example, as shown in FIG. A cylindrical shape
The u raw material Ll) and the Sn raw material (2) may be alternately fitted to form a linear shape, and in order to further laminate them into a linear shape, a plate-like The Au raw materials (2) may be piled up and then wound so that the end faces become spiral-shaped.What is roughly important is that the stacked Au raw materials (3) are formed. For example, in the embodiment shown in FIG. 3, two plate-shaped Au raw materials (1) and three plate-shaped Sn raw materials (2) are used.
), but these two Au raw materials + 1. )-4
= Total weight of Au according to and S according to three Sn raw materials (2)
The total weight of n is adjusted to be the compositional weight percent of the desired Au Sn eutectic alloy solder.
すなわち前記の如く多用されている８０Ａｕ−２０Ｓｎ
共晶型合金ろう材が所望のろう材であるならば、Ａｕ原
材の全重量８０に対し、Ｓｎ原材の全重量が２０の重量
比となるようＡｕ原＋ａ’（１）、Ｓｎ原材（２）の厚
さ、巾、長さそして枚数等を予め調整しておかねばなら
ない。In other words, 80Au-20Sn, which is widely used as mentioned above,
If the eutectic type alloy brazing material is the desired brazing material, the Au raw material + a' (1) and the Sn raw material should be mixed so that the total weight of the Sn raw material is 20 to the total weight of the Au raw material 80. The thickness, width, length, number, etc. of the material (2) must be adjusted in advance.
次にこのようにして得られた重積原材（３）につき、こ
れに先ず冷間圧延（圧接）加工を施すのであるが、これ
には前記第３図、第４図の（イ）（ロ）ζ°こ例示の場
合であれば、重積原材（３）を適宜の圧延機により上下
から挟圧すればよく、第４図の（ハ）に）１こ示した線
状の重積原材（３）であれば、これを絞搾して縮径加工
を施すこと＼ｌす、この際当該１回の冷間圧延加工によ
る加工率（圧延率、減面比）は１０〜５０チ程度とする
のが望寸しい０
次いで上記冷間圧延加工が終ったならば、これによＶ得
られたものＣごつき、歪取り加熱処理を施すのであり、
このための加熱温度としては室温よりも高温とするのが
１６０℃以下とし、当該焼鈍時間としては約１時間とす
るのがよい。Next, the piled raw material (3) obtained in this way is first subjected to cold rolling (pressure welding), which involves (a) (a) in Figs. 3 and 4 above. b) ζ° In this case, it is sufficient to press the stacked raw material (3) from above and below using an appropriate rolling mill, and the linear weight shown in (c) in Fig. 4 is used. If it is a laminated raw material (3), it is squeezed and subjected to diameter reduction processing.At this time, the processing rate (rolling rate, area reduction ratio) of one cold rolling process is 10~ The desired size is about 50 inches.Next, once the above cold rolling process is completed, the obtained product is subjected to heat treatment to remove roughness and distortion.
The heating temperature for this purpose is preferably 160° C. or lower, which is higher than room temperature, and the annealing time is preferably about 1 hour.
そして上記の冷間圧延加工と歪取り加熱処理とは、その
後生なくとも１回、望オしくに数回繰返し実施するので
ある。The above-mentioned cold rolling and strain relief heat treatment are then repeated at least once, preferably several times.
このようにして最終的に得られるろう材は、第５図のよ
う（こ、Ａｕ原材、Ｓｎ原材の個数に対応してＡｕ相（
４）・・・・・、Ｓｎ相（５）・・・・・が重積状態と
７１ｉ：す、かつ当該両相ｆ４） ［５）は、これに介
装されているＡｕ、Ｓｎの拡散相（６）・・・・・によ
り連着されたものとなる。The brazing filler metal finally obtained in this way has an Au phase (corresponding to the number of Au raw materials and Sn raw materials) as shown in Figure 5.
4) ..., the Sn phase (5) ... is in a stacked state 71i: and both the phases f4) [5) are due to the diffusion of Au and Sn interposed therein. It is linked by phase (6)...
こＸで本発明に係る製造方法の一具体例を示せば、厚さ
ｔ、ｏ′ｙｎ、 巾４０％、長さ２００″ＸｎのＳｎ
原材を板状に３枚加工し、一方厚さ１５χ、巾４ｏ’／
、、長さ２００ｒｙｎのＡｕ原材を２枚板状に加工し、
」二記Ｓｎ原＋ｔ、Ａｕ原材を順次交互に重積すること
により重積原材とする。Here, a specific example of the manufacturing method according to the present invention is shown.
The raw material was processed into three plates, each with a thickness of 15χ and a width of 4o'/
,, Processing 200 ryn long Au raw material into two plate shapes,
2. The Sn raw material + t and the Au raw material are sequentially and alternately stacked to obtain a stacked raw material.
次にこの重積原材をその厚さが４ｎＸｎとなるまで冷間
圧延し、これにより得られたものを１５０℃で１時間保
持することにより歪取り加熱処理を行い、さらに室温ま
で冷却した後、第２回の冷間圧延加工を施して厚さが２
瓢となるよう圧接し、これに前記と同一条件にて第２回
の歪取り加熱処理を施し、その後さらに上記の冷間圧延
加工と、１５０℃、１時間の焼鈍とを繰り返すことによ
り、厚さ５０μの製品たる複合ろう材を得た。Next, this stacked raw material was cold rolled until its thickness became 4nXn, and the resulting material was heated to remove strain by holding it at 150°C for 1 hour, and then cooled to room temperature. , the thickness is 2 after the second cold rolling process.
This was pressure-welded to form a gourd, subjected to a second strain relief heat treatment under the same conditions as above, and then further repeated the above cold rolling process and annealing at 150°C for 1 hour to reduce the thickness. A composite brazing filler metal product with a diameter of 50 μm was obtained.
そして上記製品につきＡｕの定量分析を行ったところ、
８０２８重量％となっており、８０Ａｕ−２０Ｓ ｎ共
晶型合金ろう材と略同−組成となっていることが確認さ
れ、式らに当該製品につきその断面状態を顕微鏡により
観察したところ、Ａｕ相とＳｎ 相とが全５層に重なり
、両相の境界には約３μの相互拡散相が存在していた。When we conducted a quantitative analysis of Au on the above product, we found that
It was confirmed that the composition was 8028% by weight, which was approximately the same as that of the 80Au-20S n eutectic type alloy brazing filler metal.When Shiki et al. observed the cross-sectional state of the product under a microscope, it was found that the Au phase and the Sn phase overlapped in a total of five layers, and an interdiffusion phase of about 3μ existed at the boundary between the two phases.
本発明に係る複合ろう材は上記実施例によって具現され
る構成を有しているから、これを用いて電子部品等のろ
う付は作業を行うようにすすること＼なり、次いでＡｕ
ＸＳｎ の拡散相が加熱により全体に及んでいくから
、例えば８゜Ａｕ−２０Ｓｎ 共晶型合金ろう材がも
つ２８０℃の融点にて、全体が融解していくこと＼ｌす
、従って加熱温度の上昇に伴い低融点相から順次高融点
相に融解が順次段階的に時間的遅延をもって進行するこ
と＼ｌす、この結果順次遅延して溶は出してくる流動ろ
う材がろう付間隙の広巾間隙部まで円滑に流入し、完全
なろう付けを期待し得ると共に、共晶型合金ろう材のよ
うに瞬時に融解しないため、流動ろう材の飛散が見られ
ず、電子部品等に対する悪影響を解消することができる
。Since the composite brazing material according to the present invention has the structure embodied in the above embodiment, it is possible to braze electronic parts etc. using it, and then Au
Since the diffused phase of XSn spreads throughout the entire body by heating, for example, the entire body melts at the melting point of 8° Au-20Sn eutectic alloy brazing material, which is 280°C. As the temperature rises, the melting progresses from a low melting point phase to a high melting point phase in a stepwise manner with a time delay. As a result, the fluidized brazing filler metal, which melts gradually and comes out, spreads through the wide gap of the brazing gap. It flows smoothly to all parts, allowing for perfect brazing, and since it does not melt instantaneously like eutectic alloy brazing filler metal, there is no scattering of fluid brazing filler metal, eliminating any negative effects on electronic components, etc. be able to.
またその製造方法も、複合材に対する冷間圧延加工と歪
取り加熱処理の繰り返しにて実施できるものであるから
、Ａｕｓ Ｓｎの良好な伸展性を活用して、冷間にて、
しかも低い温度の加熱にて極めて作業性よく、所望薄肉
の製品が得られ、複雑な形状の打抜き作業も欠損や破断
の心配な〈実施し得るから、８０Ａｕ−２０Ｓｎ 共
晶型合金ろう伺の前記諸欠陥を悉く排除することができ
る。In addition, the manufacturing method can be carried out by repeating cold rolling processing and strain relief heat treatment on the composite material, so by taking advantage of the good extensibility of AuSn,
Moreover, it is extremely easy to work with low temperature heating, and products with the desired thin walls can be obtained, and punching operations of complex shapes can be carried out without worrying about chipping or breakage. All defects can be eliminated.
第１図と第２図は異種ろう付間隙を示するう付素利の各
平面図、第３図は本発明に係る重積原材の一例を示す縦
断面面図、弔４図の（イ）〜に）は夫々同重積原材の異
種例を示した縦断正面図、第５図は本発明に係るろう材
の縦断正面説明図である。
（１）・・・・・Ａｕ原材
（２）・−１ｅＳｎ原材
（３）・・・・・重積原材
（４）・・・・・Ａｕ相
（５）・・・・・Ｓｎ相
（６）・・・・・ＡｕＸＳｎ 拡散相
特許出願人
代理人 弁理士 井 藤 誠Figures 1 and 2 are plan views of soldering blanks showing different types of brazing gaps, Figure 3 is a vertical sectional view showing an example of stacked raw material according to the present invention, and Figure 4 ( A) to B) are longitudinal sectional front views showing different examples of the same stacked raw material, respectively, and FIG. 5 is a longitudinal sectional front explanatory view of the brazing filler metal according to the present invention. (1)...Au raw material (2)...-1eSn raw material (3)...Stacked raw material (4)...Au phase (5)...Sn Phase (6)・・・AuXSn Diffusion phase patent applicant agent Patent attorney Makoto Ito
Claims (4)
、所望Ａｕ−８ｎ共晶型合金ろう材の組成重量％宛とな
っていることを特徴とする金−錫複合ろう材。(1) Au that connects both phases between the Au and Sn phases. A gold-tin composite brazing material characterized in that a diffused phase of Sn is interposed, and the total weight of each of Au and Sn corresponds to the composition weight percentage of a desired Au-8n eutectic alloy brazing material.
る特許請求の範囲第１項記載の金−錫複合ろう材。(2) The gold-tin composite brazing material according to claim 1, characterized in that a Sn phase is arranged on the outer surface side.
重積原材となし、この重積原材に対して順次冷間圧延加
工、歪取り加熱処理を少なくとも２回以上繰り返し行う
ようにしたことを特徴とする特許請求の範囲第１項記載
の金−錫複合ろう材の製造方法。(3) The Au raw material and the Sn raw material are overlapped to form a stacked raw material, and this stacked raw material is sequentially subjected to cold rolling processing and strain relief heat treatment at least twice or more. A method for producing a gold-tin composite brazing material according to claim 1, characterized in that:
℃以下であることを特徴とする特許請求の範囲第３項記
載の金−錫複合ろう材の製造方法。(4) In cold rolling, the rolling rate and area reduction ratio are 1-1-50%, and the strain relief heat treatment is 160%.
The method for producing a gold-tin composite brazing material according to claim 3, characterized in that the temperature is below .degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19906381A JPS58100992A (en) | 1981-12-10 | 1981-12-10 | Gold-tin composite brazing filler metal and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19906381A JPS58100992A (en) | 1981-12-10 | 1981-12-10 | Gold-tin composite brazing filler metal and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58100992A true JPS58100992A (en) | 1983-06-15 |
Family
ID=16401487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19906381A Pending JPS58100992A (en) | 1981-12-10 | 1981-12-10 | Gold-tin composite brazing filler metal and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58100992A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013136078A (en) * | 2011-12-28 | 2013-07-11 | Kawasaki Heavy Ind Ltd | Composite brazing filler metal, brazing method using the same and brazed steel product |
| WO2017047293A1 (en) * | 2015-09-15 | 2017-03-23 | 株式会社村田製作所 | Bonding member, method for producing bonding member, and bonding method |
| US10591223B2 (en) | 2015-09-28 | 2020-03-17 | Murata Manufacturing Co., Ltd. | Heat pipe, heat dissipating component, and method for manufacturing heat pipe |
| US10625377B2 (en) | 2015-11-05 | 2020-04-21 | Murata Manufacturing Co., Ltd. | Bonding member and method for manufacturing bonding member |
| CN112548306A (en) * | 2020-12-01 | 2021-03-26 | 广东省科学院中乌焊接研究所 | Tin-based brazing filler metal and preparation method and application thereof |
-
1981
- 1981-12-10 JP JP19906381A patent/JPS58100992A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013136078A (en) * | 2011-12-28 | 2013-07-11 | Kawasaki Heavy Ind Ltd | Composite brazing filler metal, brazing method using the same and brazed steel product |
| WO2017047293A1 (en) * | 2015-09-15 | 2017-03-23 | 株式会社村田製作所 | Bonding member, method for producing bonding member, and bonding method |
| CN107848075A (en) * | 2015-09-15 | 2018-03-27 | 株式会社村田制作所 | Joining member, manufacturing method of joining member, and joining method |
| US20180126495A1 (en) * | 2015-09-15 | 2018-05-10 | Murata Manufacturing Co., Ltd. | Bonding member, method for manufacturing bonding member, and bonding method |
| JPWO2017047293A1 (en) * | 2015-09-15 | 2018-05-24 | 株式会社村田製作所 | Joining member, method for producing joining member, and joining method |
| US10625376B2 (en) | 2015-09-15 | 2020-04-21 | Murata Manufacturing Co., Ltd. | Bonding member, method for manufacturing bonding member, and bonding method |
| CN107848075B (en) * | 2015-09-15 | 2021-03-19 | 株式会社村田制作所 | Joining member, manufacturing method of joining member, and joining method |
| US10591223B2 (en) | 2015-09-28 | 2020-03-17 | Murata Manufacturing Co., Ltd. | Heat pipe, heat dissipating component, and method for manufacturing heat pipe |
| US10625377B2 (en) | 2015-11-05 | 2020-04-21 | Murata Manufacturing Co., Ltd. | Bonding member and method for manufacturing bonding member |
| CN112548306A (en) * | 2020-12-01 | 2021-03-26 | 广东省科学院中乌焊接研究所 | Tin-based brazing filler metal and preparation method and application thereof |
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