JPS58105042A - ウエハー洗浄廃水の再利用システムに於けるメチルアルコール検知測定方法 - Google Patents

ウエハー洗浄廃水の再利用システムに於けるメチルアルコール検知測定方法

Info

Publication number: JPS58105042A
Authority: JP; Japan
Prior art keywords: methyl alcohol; absorption; reaction tank; tank; measuring
Prior art date: 1981-12-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP20419881A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0123056B2 (2

Inventor

Takehiko Osawa

武彦大澤

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Takenaka Komuten Co Ltd

Original Assignee

Takenaka Komuten Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1981-12-17

Filing date

1981-12-17

Publication date

1983-06-22

1981-12-17 Application filed by Takenaka Komuten Co Ltd filed Critical Takenaka Komuten Co Ltd

1981-12-17 Priority to JP20419881A priority Critical patent/JPS58105042A/ja

1983-06-22 Publication of JPS58105042A publication Critical patent/JPS58105042A/ja

1989-04-28 Publication of JPH0123056B2 publication Critical patent/JPH0123056B2/ja

Status Granted legal-status Critical Current

Links

OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 title claims abstract description 69
239000002351 wastewater Substances 0.000 title claims description 15
238000010521 absorption reaction Methods 0.000 claims abstract description 16
229910021642 ultra pure water Inorganic materials 0.000 claims abstract description 12
239000012498 ultrapure water Substances 0.000 claims abstract description 12
238000005259 measurement Methods 0.000 claims abstract description 9
ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 claims abstract description 8
238000006243 chemical reaction Methods 0.000 claims abstract description 8
229910052740 iodine Inorganic materials 0.000 claims abstract description 8
239000011630 iodine Substances 0.000 claims abstract description 8
238000004611 spectroscopical analysis Methods 0.000 claims abstract description 5
238000004140 cleaning Methods 0.000 claims description 15
238000000034 method Methods 0.000 claims description 10
230000003287 optical effect Effects 0.000 claims description 3
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 20
238000005303 weighing Methods 0.000 abstract description 5
239000000126 substance Substances 0.000 abstract description 3
239000010453 quartz Substances 0.000 abstract description 2
238000005070 sampling Methods 0.000 abstract description 2
VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 2
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
229910052799 carbon Inorganic materials 0.000 description 6
238000004519 manufacturing process Methods 0.000 description 6
239000004065 semiconductor Substances 0.000 description 5
229910002092 carbon dioxide Inorganic materials 0.000 description 3
239000001569 carbon dioxide Substances 0.000 description 3
238000010586 diagram Methods 0.000 description 3
238000005516 engineering process Methods 0.000 description 3
239000005416 organic matter Substances 0.000 description 3
239000003054 catalyst Substances 0.000 description 2
230000003647 oxidation Effects 0.000 description 2
238000007254 oxidation reaction Methods 0.000 description 2
238000004064 recycling Methods 0.000 description 2
WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 1
238000005238 degreasing Methods 0.000 description 1
238000001514 detection method Methods 0.000 description 1
239000010419 fine particle Substances 0.000 description 1
235000019256 formaldehyde Nutrition 0.000 description 1
239000007789 gas Substances 0.000 description 1
238000004817 gas chromatography Methods 0.000 description 1
238000004128 high performance liquid chromatography Methods 0.000 description 1
239000007788 liquid Substances 0.000 description 1
244000005700 microbiome Species 0.000 description 1
229910052760 oxygen Inorganic materials 0.000 description 1
239000001301 oxygen Substances 0.000 description 1
238000004886 process control Methods 0.000 description 1
238000003908 quality control method Methods 0.000 description 1
238000005406 washing Methods 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/78—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour

Landscapes

Physics & Mathematics (AREA)
Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Chemical Kinetics & Catalysis (AREA)
Plasma & Fusion (AREA)
Health & Medical Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
Analytical Chemistry (AREA)
Biochemistry (AREA)
General Health & Medical Sciences (AREA)
General Physics & Mathematics (AREA)
Immunology (AREA)
Pathology (AREA)
Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)

JP20419881A 1981-12-17 1981-12-17 ウエハー洗浄廃水の再利用システムに於けるメチルアルコール検知測定方法 Granted JPS58105042A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP20419881A JPS58105042A (ja)	1981-12-17	1981-12-17	ウエハー洗浄廃水の再利用システムに於けるメチルアルコール検知測定方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP20419881A JPS58105042A (ja)	1981-12-17	1981-12-17	ウエハー洗浄廃水の再利用システムに於けるメチルアルコール検知測定方法

Publications (2)

Publication Number	Publication Date
JPS58105042A true JPS58105042A (ja)	1983-06-22
JPH0123056B2 JPH0123056B2 (2)	1989-04-28

Family

ID=16486450

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP20419881A Granted JPS58105042A (ja)	1981-12-17	1981-12-17	ウエハー洗浄廃水の再利用システムに於けるメチルアルコール検知測定方法

Country Status (1)

Country	Link
JP (1)	JPS58105042A (2)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4739345A (en) *	1985-04-17	1988-04-19	Tdk Corporation	Optical recording disk
JP2003002706A (ja) *	2001-06-20	2003-01-08	Mitsubishi Materials Corp	工場排水の処理方法
RU205340U1 (ru) *	2020-12-04	2021-07-12	Станислав Витальевич Рыков	Индикатор наличия метанола в водных растворах

1981
- 1981-12-17 JP JP20419881A patent/JPS58105042A/ja active Granted

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4739345A (en) *	1985-04-17	1988-04-19	Tdk Corporation	Optical recording disk
JP2003002706A (ja) *	2001-06-20	2003-01-08	Mitsubishi Materials Corp	工場排水の処理方法
RU205340U1 (ru) *	2020-12-04	2021-07-12	Станислав Витальевич Рыков	Индикатор наличия метанола в водных растворах

Also Published As

Publication number	Publication date
JPH0123056B2 (2)	1989-04-28

Publication	Publication Date	Title
CN103149250B (zh)	2014-11-05	在线总有机碳水质分析仪及在线总有机碳水质分析方法
CN101907558A (zh)	2010-12-08	总有机碳在线分析仪及分析总有机碳的方法
CN101294898A (zh)	2008-10-29	烟用接装纸中铬含量的测定方法
CN110658139A (zh)	2020-01-07	一种高锰酸盐指数分析系统
KR102414181B1 (ko)	2022-06-29	총유기탄소 측정장치
CN100526863C (zh)	2009-08-12	总碱度测量仪
CN105675832A (zh)	2016-06-15	测定总有机碳(toc)的装置和方法
JPH0731112B2 (ja)	1995-04-10	粒子状物質の検出方法およびその装置
CN105738361B (zh)	2018-09-07	水中高锰酸盐指数自动分析仪及分析方法
CN101294897A (zh)	2008-10-29	烟用接装纸中镍含量的测定方法
CN203069542U (zh)	2013-07-17	在线总有机碳水质分析仪
JPH0370779B2 (2)	1991-11-08
TWM413120U (en)	2011-10-01	Water quality measurement equipment for monitoring chemical oxygen demand (COD) and suspended solid (SS)
Wang et al.	1994	Channel flow cell for UV/visible spectroelectrochemistry
CN102928354A (zh)	2013-02-13	一种测定水中六价铬的显色检测片的制备和使用方法
JPH0123056B2 (2)	1989-04-28
KR20110125510A (ko)	2011-11-21	음용수 내 세균 검사를 위한 전처리 및 검침장치와 그 방법
Goulden	1976	Automated determination of carbon in natural waters
JP3329071B2 (ja)	2002-09-30	硝酸イオンと亜硝酸イオンの分析方法及び分析装置
CN101566572A (zh)	2009-10-28	一种水质在线监测仪智能消解控制器
CN108051429A (zh)	2018-05-18	一种具有多种检测功能的水质在线检测仪及其使用方法
CN206540820U (zh)	2017-10-03	一种铬法uvcod一体机在线监测仪
JPH04343057A (ja)	1992-11-30	溶液中のアンモニアの定量方法
CN114814254B (zh)	2022-11-01	一种海水铵氮剖面连续分析装置及其分析方法
CN217084577U (zh)	2022-07-29	一种能够在线分析晶体粒径分布的双酚a结晶器

JPS58105042A - ウエハー洗浄廃水の再利用システムに於けるメチルアルコール検知測定方法 - Google Patents

Info

Links

Classifications

Landscapes

Priority Applications (1)

Applications Claiming Priority (1)

Publications (2)

Family

ID=16486450

Family Applications (1)

Country Status (1)

Cited By (3)

Cited By (3)

Also Published As

Similar Documents