JPS58111727A - 光ビ−ムの照射位置検出装置 - Google Patents

光ビ−ムの照射位置検出装置

Info

Publication number
JPS58111727A
JPS58111727A JP21576981A JP21576981A JPS58111727A JP S58111727 A JPS58111727 A JP S58111727A JP 21576981 A JP21576981 A JP 21576981A JP 21576981 A JP21576981 A JP 21576981A JP S58111727 A JPS58111727 A JP S58111727A
Authority
JP
Japan
Prior art keywords
light beam
irradiating position
detected
frequency
piezoelectric vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21576981A
Other languages
English (en)
Japanese (ja)
Other versions
JPS622245B2 (2
Inventor
Tetsuo Konno
哲郎 今野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seikosha KK
Original Assignee
Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seikosha KK filed Critical Seikosha KK
Priority to JP21576981A priority Critical patent/JPS58111727A/ja
Publication of JPS58111727A publication Critical patent/JPS58111727A/ja
Publication of JPS622245B2 publication Critical patent/JPS622245B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S3/00—Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic or electromagnetic waves, or particle emission, not having a directional significance, are being received
    • G01S3/78—Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic or electromagnetic waves, or particle emission, not having a directional significance, are being received using electromagnetic waves other than radio waves
    • G01S3/782—Systems for determining direction or deviation from predetermined direction

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP21576981A 1981-12-24 1981-12-24 光ビ−ムの照射位置検出装置 Granted JPS58111727A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21576981A JPS58111727A (ja) 1981-12-24 1981-12-24 光ビ−ムの照射位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21576981A JPS58111727A (ja) 1981-12-24 1981-12-24 光ビ−ムの照射位置検出装置

Publications (2)

Publication Number Publication Date
JPS58111727A true JPS58111727A (ja) 1983-07-02
JPS622245B2 JPS622245B2 (2) 1987-01-19

Family

ID=16677915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21576981A Granted JPS58111727A (ja) 1981-12-24 1981-12-24 光ビ−ムの照射位置検出装置

Country Status (1)

Country Link
JP (1) JPS58111727A (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3803355A1 (de) * 1988-02-05 1989-08-17 Leybold Ag Teilchenquelle fuer eine reaktive ionenstrahlaetz- oder plasmadepositionsanlage

Also Published As

Publication number Publication date
JPS622245B2 (2) 1987-01-19

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