JPS58118116A - 電極コネクタ - Google Patents

電極コネクタ

Info

Publication number
JPS58118116A
JPS58118116A JP57000038A JP3882A JPS58118116A JP S58118116 A JPS58118116 A JP S58118116A JP 57000038 A JP57000038 A JP 57000038A JP 3882 A JP3882 A JP 3882A JP S58118116 A JPS58118116 A JP S58118116A
Authority
JP
Japan
Prior art keywords
wire
electrode
etching
wafer
contact section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57000038A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0136249B2 (2
Inventor
Kunihiko Kanda
神田　邦彦
Michio Takano
高野　径郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SIGMA GIJUTSU KOGYO KK
Original Assignee
SIGMA GIJUTSU KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SIGMA GIJUTSU KOGYO KK filed Critical SIGMA GIJUTSU KOGYO KK
Priority to JP57000038A priority Critical patent/JPS58118116A/ja
Publication of JPS58118116A publication Critical patent/JPS58118116A/ja
Publication of JPH0136249B2 publication Critical patent/JPH0136249B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices

Landscapes

  • Weting (AREA)
JP57000038A 1982-01-05 1982-01-05 電極コネクタ Granted JPS58118116A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57000038A JPS58118116A (ja) 1982-01-05 1982-01-05 電極コネクタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57000038A JPS58118116A (ja) 1982-01-05 1982-01-05 電極コネクタ

Publications (2)

Publication Number Publication Date
JPS58118116A true JPS58118116A (ja) 1983-07-14
JPH0136249B2 JPH0136249B2 (2) 1989-07-31

Family

ID=11463149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57000038A Granted JPS58118116A (ja) 1982-01-05 1982-01-05 電極コネクタ

Country Status (1)

Country Link
JP (1) JPS58118116A (2)

Also Published As

Publication number Publication date
JPH0136249B2 (2) 1989-07-31

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