JPS58129638U - ウエハ支持機構 - Google Patents

ウエハ支持機構

Info

Publication number
JPS58129638U
JPS58129638U JP2511482U JP2511482U JPS58129638U JP S58129638 U JPS58129638 U JP S58129638U JP 2511482 U JP2511482 U JP 2511482U JP 2511482 U JP2511482 U JP 2511482U JP S58129638 U JPS58129638 U JP S58129638U
Authority
JP
Japan
Prior art keywords
support mechanism
wafer
wafer support
outer peripheral
peripheral edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2511482U
Other languages
English (en)
Inventor
竹内　透
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2511482U priority Critical patent/JPS58129638U/ja
Publication of JPS58129638U publication Critical patent/JPS58129638U/ja
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図は本考案の一実施例であるウェハ支持具の上面を
示す図、第２図は第１図のＡ−Ａ’断面図である。図に
おいて、１はウェハ支持具、２はウェハ、３は溝、４は
開口部、５はピン挿入孔、６はテーパーピンを示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. ウェハ挿着用の開口部を有し、且つ円形をなす外周縁部
    の内側面に沿って溝部を備え、該・ウェハの外周縁を係
    止させて着脱可能としたことを特徴とするウェハ支持機
    構。
JP2511482U 1982-02-24 1982-02-24 ウエハ支持機構 Pending JPS58129638U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2511482U JPS58129638U (ja) 1982-02-24 1982-02-24 ウエハ支持機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2511482U JPS58129638U (ja) 1982-02-24 1982-02-24 ウエハ支持機構

Publications (1)

Publication Number Publication Date
JPS58129638U true JPS58129638U (ja) 1983-09-02

Family

ID=30037087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2511482U Pending JPS58129638U (ja) 1982-02-24 1982-02-24 ウエハ支持機構

Country Status (1)

Country Link
JP (1) JPS58129638U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6265142U (ja) * 1985-10-14 1987-04-22

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS503547U (ja) * 1973-05-07 1975-01-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS503547U (ja) * 1973-05-07 1975-01-14

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6265142U (ja) * 1985-10-14 1987-04-22

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