JPS58144732A - 欠陥検査装置及び方法 - Google Patents
欠陥検査装置及び方法Info
- Publication number
- JPS58144732A JPS58144732A JP57026753A JP2675382A JPS58144732A JP S58144732 A JPS58144732 A JP S58144732A JP 57026753 A JP57026753 A JP 57026753A JP 2675382 A JP2675382 A JP 2675382A JP S58144732 A JPS58144732 A JP S58144732A
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- image
- picture
- contour
- noise
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57026753A JPS58144732A (ja) | 1982-02-23 | 1982-02-23 | 欠陥検査装置及び方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57026753A JPS58144732A (ja) | 1982-02-23 | 1982-02-23 | 欠陥検査装置及び方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58144732A true JPS58144732A (ja) | 1983-08-29 |
| JPH0444682B2 JPH0444682B2 (fr) | 1992-07-22 |
Family
ID=12202039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57026753A Granted JPS58144732A (ja) | 1982-02-23 | 1982-02-23 | 欠陥検査装置及び方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58144732A (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007271434A (ja) * | 2006-03-31 | 2007-10-18 | Mitsubishi Heavy Ind Ltd | 検査装置、検査方法、検査プログラムおよび検査システム |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5263751A (en) * | 1975-11-21 | 1977-05-26 | Nippon Steel Corp | Automatic detection of translating specific pattern |
| JPS5675141A (en) * | 1979-11-22 | 1981-06-22 | Fuji Photo Film Co Ltd | Radiation picture treating method and its device |
-
1982
- 1982-02-23 JP JP57026753A patent/JPS58144732A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5263751A (en) * | 1975-11-21 | 1977-05-26 | Nippon Steel Corp | Automatic detection of translating specific pattern |
| JPS5675141A (en) * | 1979-11-22 | 1981-06-22 | Fuji Photo Film Co Ltd | Radiation picture treating method and its device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007271434A (ja) * | 2006-03-31 | 2007-10-18 | Mitsubishi Heavy Ind Ltd | 検査装置、検査方法、検査プログラムおよび検査システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0444682B2 (fr) | 1992-07-22 |
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