JPS58168246A - 選別収納装置 - Google Patents

選別収納装置

Info

Publication number
JPS58168246A
JPS58168246A JP57051993A JP5199382A JPS58168246A JP S58168246 A JPS58168246 A JP S58168246A JP 57051993 A JP57051993 A JP 57051993A JP 5199382 A JP5199382 A JP 5199382A JP S58168246 A JPS58168246 A JP S58168246A
Authority
JP
Japan
Prior art keywords
defective
sorting
chute
storage
storage device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57051993A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0421342B2 (2
Inventor
Naohiko Urasaki
浦崎　直彦
Masatoshi Mishima
三嶋　正敏
Shigeki Takeo
竹尾　重樹
Iwao Yamazaki
巌 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP57051993A priority Critical patent/JPS58168246A/ja
Publication of JPS58168246A publication Critical patent/JPS58168246A/ja
Publication of JPH0421342B2 publication Critical patent/JPH0421342B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Chutes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57051993A 1982-03-30 1982-03-30 選別収納装置 Granted JPS58168246A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57051993A JPS58168246A (ja) 1982-03-30 1982-03-30 選別収納装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57051993A JPS58168246A (ja) 1982-03-30 1982-03-30 選別収納装置

Publications (2)

Publication Number Publication Date
JPS58168246A true JPS58168246A (ja) 1983-10-04
JPH0421342B2 JPH0421342B2 (2) 1992-04-09

Family

ID=12902373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57051993A Granted JPS58168246A (ja) 1982-03-30 1982-03-30 選別収納装置

Country Status (1)

Country Link
JP (1) JPS58168246A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6358768U (2) * 1986-10-03 1988-04-19

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441173U (2) * 1977-08-26 1979-03-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441173U (2) * 1977-08-26 1979-03-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6358768U (2) * 1986-10-03 1988-04-19

Also Published As

Publication number Publication date
JPH0421342B2 (2) 1992-04-09

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