JPS58169926A - 半導体ペレツトの位置決め装置 - Google Patents
半導体ペレツトの位置決め装置Info
- Publication number
- JPS58169926A JPS58169926A JP58032869A JP3286983A JPS58169926A JP S58169926 A JPS58169926 A JP S58169926A JP 58032869 A JP58032869 A JP 58032869A JP 3286983 A JP3286983 A JP 3286983A JP S58169926 A JPS58169926 A JP S58169926A
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- jaws
- pulse
- positioning
- pellets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
Landscapes
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58032869A JPS58169926A (ja) | 1983-03-02 | 1983-03-02 | 半導体ペレツトの位置決め装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58032869A JPS58169926A (ja) | 1983-03-02 | 1983-03-02 | 半導体ペレツトの位置決め装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56031244A Division JPS57147243A (en) | 1981-03-06 | 1981-03-06 | Positioning device for semiconductor pellet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58169926A true JPS58169926A (ja) | 1983-10-06 |
| JPS6226180B2 JPS6226180B2 (2) | 1987-06-08 |
Family
ID=12370864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58032869A Granted JPS58169926A (ja) | 1983-03-02 | 1983-03-02 | 半導体ペレツトの位置決め装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58169926A (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61115331A (ja) * | 1984-11-12 | 1986-06-02 | Oki Electric Ind Co Ltd | Ｉｃ組立装置 |
-
1983
- 1983-03-02 JP JP58032869A patent/JPS58169926A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61115331A (ja) * | 1984-11-12 | 1986-06-02 | Oki Electric Ind Co Ltd | Ｉｃ組立装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6226180B2 (2) | 1987-06-08 |
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