JPS58178227A - Multiple wavelength spectroscope device - Google Patents

Multiple wavelength spectroscope device

Info

Publication number
JPS58178227A
JPS58178227A JP6101382A JP6101382A JPS58178227A JP S58178227 A JPS58178227 A JP S58178227A JP 6101382 A JP6101382 A JP 6101382A JP 6101382 A JP6101382 A JP 6101382A JP S58178227 A JPS58178227 A JP S58178227A
Authority
JP
Japan
Prior art keywords
light
photodiode
dispersed
inputted
astray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6101382A
Other languages
Japanese (ja)
Inventor
Shigeru Sonobe
園部 茂
Iwao Kato
加藤 「巌」
Makoto Watanabe
渡辺 寔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6101382A priority Critical patent/JPS58178227A/en
Publication of JPS58178227A publication Critical patent/JPS58178227A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/20Rowland circle spectrometers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0262Constructional arrangements for removing stray light

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To enhance light measuring accuracy by a simple improvement, by providing a light shielding plate, which shields the straight input of dispersed light, for at least one light receiving element in an image forming region of the dispersed light, detecting the amount of stray light, and correcting the amount of the stray light with respect to the measured values of the light from other light emitting elements. CONSTITUTION:The light, which is inputted to an incident slit 1 from a light source, is dispersed on a photodiode array 4 and an image is formed. The photodiode array 4 is arranged on a Rowland circle, and the light is dispersed sequentially from a short wavelength side between l0 and ln. When diffracted light in the range of l1-ln is inputted to the photodiode array 4, the light is reflected and scattered on the surface of each of photodiodes 61-6n. The light is further reflected by a light receiving window 7 and inputted again. At this time, the scattered and astrayed light is distributed to the photodiode 60 on the short wavelength side, and the largest effect is received. Since the direct propgressing light is not inputted to the photodiode 60, only the astray light is detected. The same amount of the astray light is inputted to the neighboring photodiode 6a. When the detected astray signal of the photodiode 60 is subtracted from the detected signal of the photodiode 6a, the effect of the astray light of the photodiode 6a is mostly eliminated.

Description

【発明の詳細な説明】 本発明は多波長分光測光装置に係り、特に、受光素子と
してプレイ聾光検出器を用いた多波長分光側光装置に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a multi-wavelength spectrophotometric device, and more particularly to a multi-wavelength spectrophotometric device using a play-deaf photodetector as a light receiving element.

未知試料の分光吸収特性tMi時間で測定するには多波
長分光測光法が優れている。この方法は試料を透過して
きた白色光を回折格子等の分散子によって波長成分毎に
分散し、所望の複数個所の波長光結儂位置に該当した受
光素子で検知する。こ71らの受光素子の光電出力は所
望の波長における試料成分m度に関連するもので、複数
成分の情報〃−−挙に求約られるようになった。
Multi-wavelength spectrophotometry is excellent for measuring the spectral absorption characteristics of unknown samples in terms of tMi time. In this method, white light transmitted through a sample is dispersed into wavelength components by a dispersor such as a diffraction grating, and detected by light receiving elements corresponding to a plurality of desired wavelength light convergence positions. The photoelectric output of these 71 light-receiving elements is related to m degrees of sample components at a desired wavelength, and information on a plurality of components can now be determined at once.

上記の方法は波長走査の機構系が不敬であり、装置ケ小
型に、かつ、簡略化することかできるの1゛高速の波長
走査が実現できる。しかるにその反面、迷光か多く測光
精度に低いという欠点をもっていた。即ち、複数個の受
光素子を配列したホ1タイオートアレイには分散子で分
散された光がJAMスペクトルとして結像しているが、
これらの光かホトターイオードアレイの受光面ケカバー
している透明受光窓と受光面との間を分射したり散乱す
る。これらの光が短波長側の受光素子に迷光となって再
入射して測定信号光と共に検知される。
The above method does not require a mechanical system for wavelength scanning, and the apparatus can be made compact and simple, and wavelength scanning can be performed at a speed of 1°. However, on the other hand, it had the disadvantage of a lot of stray light and poor photometry accuracy. In other words, light dispersed by a dispersion element is imaged as a JAM spectrum on a photo-auto array in which a plurality of light-receiving elements are arranged.
These lights are split or scattered between the light receiving surface and the transparent light receiving window covering the light receiving surface of the photodiode array. These lights re-enter the light receiving element on the shorter wavelength side as stray light and are detected together with the measurement signal light.

広波長域の光源として一般に使用されているり光 ンクステンラングは長波長〜エネルギーが大きいので、
エネルギーの少ない短波長光に長彼長光を多く含む迷光
が混入すると測光精度ri者しく低下きせていた。これ
を改善するために従来は各受光素子に整合するマスク全
波せたり、隣接素子間に側壁を設ける等して入射光の空
間分離性を向上させていた。
Generally used as a light source with a wide wavelength range, the light beam has a long wavelength and large energy, so
When stray light containing a large amount of long wavelength light mixes with short-wavelength light with little energy, the photometry accuracy deteriorates dramatically. In order to improve this problem, conventional methods have been to improve the spatial separation of incident light by using a full-wave mask that matches each light-receiving element, or by providing side walls between adjacent elements.

しかるにこの方法は同時に信号光自体も幾分カットして
いるので、測定系としてはS/N比があまり改善されて
いない。更に、この方法は受光素子間隔が非常に近接し
ているホトダイオードアレイ(通常0.1〜0.025
mm間隔を用いた場合は上記のようなマスクや側壁を設
けることは困難となり、特にそのようなものを作っても
極めて高価になる。
However, since this method also cuts the signal light itself to some extent, the S/N ratio of the measurement system is not improved much. Furthermore, this method uses a photodiode array in which the spacing between the photodetectors is very close (usually 0.1 to 0.025
When mm spacing is used, it becomes difficult to provide masks and side walls as described above, and in particular, even if they are made, they are extremely expensive.

ま九他の方法としては、結像領域外に迷光を検知する受
光素子全配置してその出力を信号光を検知し之受光素子
群の各出力から差引くという考えがめる。この方法では
迷光検知用の受光素子(以後迷光モニタと記す)が設置
されている場所が受光素子群の設置場所とは異なってい
るので迷光量も異なり、測定誤差を十分に解消すること
はできない。
Another method is to arrange all the light-receiving elements for detecting stray light outside the imaging area, detect the signal light, and subtract their output from each output of the light-receiving element group. In this method, the location where the light-receiving element for stray light detection (hereinafter referred to as stray light monitor) is installed is different from the location where the light-receiving element group is installed, so the amount of stray light is also different, and measurement errors cannot be fully eliminated. .

本発明は従来技術の欠点を解消し、測光精度を向上きせ
るのに好適な多波長分光測光装置!IJtを提供するこ
とを目的とし、その特徴とするところは、分散光の結像
領域内の受光素子の少なくとも4個に分散光の直進入射
を妨ける通光板を設置して迷光Jill全検知し、これ
以外の受光素子の測光値に対し迷光量に関する補正を行
うことく構成したことVCある。
The present invention is a multi-wavelength spectrophotometric device suitable for eliminating the drawbacks of the prior art and improving photometric accuracy! The purpose of the IJt is to provide IJt, and its feature is that a light transmitting plate is installed on at least four of the light receiving elements in the imaging area of the dispersed light to prevent the direct incidence of the dispersed light, so that all stray light can be detected. There is a VC that is configured without performing correction regarding the amount of stray light with respect to the photometric values of other light-receiving elements.

第1図は本発明の一実施例である受光素子群を備えた″
4彼要分光測光装置の光学系図である。光源より入射ス
リット1に入射した光は凹面回折格子2で回折し平面鏡
3で反射し、ホトタイオードアレイ4に分散結像する。
FIG. 1 shows a device equipped with a light receiving element group which is an embodiment of the present invention.
4 is an optical system diagram of a spectrophotometric device. Light that enters the entrance slit 1 from the light source is diffracted by the concave diffraction grating 2, reflected by the plane mirror 3, and formed into a dispersed image on the photodiode array 4.

このホトダイオードアレイ4は入射スリット1、凹面回
折格子2で形成するローランド円上に配置され、短波長
側から順次VC1o ”” t I、間に分散する。
This photodiode array 4 is arranged on a Rowland circle formed by the entrance slit 1 and the concave diffraction grating 2, and is sequentially dispersed between VC1o ``'' tI and from the short wavelength side.

第2図は第1図のホトタイオードアレイの正面図て、第
3図は第2図のA−B断面図である。矩形状の容器5内
にはホトダイオード6゜〜6.が配列設置され、すべて
の波長光を良く透過させる石英板製の受光窓7によって
封止されている。この受光窓7の表面の一部には遮光板
8が貼付され、その内側にあるホトダイオード6oには
直進光toか入射しないように迩られている。ホトダイ
オードアレイ4にt、〜t1の回折光が入射すると、各
ホトダイオード61〜6.の表面で反射および散乱し、
更に受光窓7で反射して再入射したりする。このとき短
波長側のホトダイオード6゜へもこれらの散乱迷光が同
様に散布されるので、蛙も大きな影響を受けることにな
る。何故ならば、ホトダイオード6の感[は短波長で低
く、長波長側で高い。また、光源にタングステン打金用
いたときは特に長波長光となる程エネルギーが急激に増
すからである。
FIG. 2 is a front view of the photodiode array shown in FIG. 1, and FIG. 3 is a sectional view taken along the line AB in FIG. Inside the rectangular container 5 are photodiodes 6° to 6. are arranged in an array and sealed with a light receiving window 7 made of a quartz plate that transmits light of all wavelengths well. A light-shielding plate 8 is attached to a part of the surface of the light-receiving window 7, and a light-shielding plate 8 is passed through to prevent straight light to from entering the photodiode 6o located inside the light-shielding plate 8. When the diffracted light at t, -t1 enters the photodiode array 4, each photodiode 61-6. reflected and scattered on the surface of
Furthermore, it is reflected by the light receiving window 7 and enters again. At this time, these scattered stray lights are also scattered to the photodiode 6° on the short wavelength side, so the frog is also greatly affected. This is because the sensitivity of the photodiode 6 is low at short wavelengths and high at long wavelengths. Further, when a tungsten metal plate is used as a light source, the energy increases rapidly especially as the wavelength of the light increases.

さて、上記ホトダイオード6゜にも迷光が入射するが、
このホトダイオード6゜には直進光が入射していないの
で迷光だけが検知される。また、隣接しているホトダイ
オード6、にも同量の迷光が入射しているので、ホトダ
イオード6、の検知信号からホトダイオード6゜の迷光
検知信号を差し引けば、ホトダイオード61の迷光の影
響は殆んど除去されることになる。発明者等の実験によ
れば、ホトダイオード6゜の迷光量カバ遮光板8との位
置関係から、実際にはホトダイオードfi。
Now, stray light also enters the photodiode 6°, but
Since no straight light is incident on this photodiode 6°, only stray light is detected. Also, since the same amount of stray light is incident on the adjacent photodiode 6, if the stray light detection signal of the photodiode 6° is subtracted from the detection signal of the photodiode 6, the influence of the stray light of the photodiode 61 is almost eliminated. It will be removed. According to experiments by the inventors, the amount of stray light of the photodiode is 6 degrees, and the positional relationship with the cover light-shielding plate 8 indicates that the photodiode is actually fi.

よりもやや低めに表われるので、この出力がほぼ等しく
なるように予め較正する必要がめる。
Since the outputs appear slightly lower than the output values, it is necessary to calibrate the outputs in advance so that they are approximately equal.

例えばホトダイオード6、と6oの出力が等しくなるよ
うにホトダイオード6Gに対する較正係数αを定めて置
けば、その後は次式によって吸光度(Abs)を求める
ことができる。
For example, if the calibration coefficient α for the photodiode 6G is determined so that the outputs of the photodiodes 6 and 6o are equal, then the absorbance (Abs) can be determined by the following equation.

但し、Drは参照光受光時のホトダイオード6゜の出力 Dsは試料光受光時のホトダイオード6Gの出力 S は試料光受光時の他のホトダイオード6の出力 Rは参照光受光時の他のホトダイオード6の出力 なお、この式の演算は分光測光装置が備えているマイク
ロコンピュータによって実施される。
However, Dr is the output Ds of the photodiode 6° when receiving the reference light, and the output S of the photodiode 6G when receiving the sample light is the output R of the other photodiode 6 when receiving the sample light. Output Note that the calculation of this equation is performed by a microcomputer included in the spectrophotometer.

他の波長光についても同機に算出すれば迷光による測定
WA差は補正されるが、迷光モニタで心るホトダイオー
ド6゜との距離か大きくなると迷光量は異なってくる。
If other wavelengths of light are calculated by the same device, the measured WA difference due to stray light will be corrected, but the amount of stray light will differ as the distance from the photodiode, which is 6° as expected by the stray light monitor, increases.

しかし、タングステン灯を光源として用いた場合は、長
波長側になる程入射光量が急増するので、迷光の含有率
は小さくなって迷光除去のメリットは減少する。即ち、
上記のごとく入射光量が少ない短波長側に迷光モニタを
設けるのが最も効果があるといえる。
However, when a tungsten lamp is used as a light source, the amount of incident light increases rapidly as the wavelength becomes longer, so the content of stray light decreases and the merit of removing stray light decreases. That is,
As mentioned above, it can be said that it is most effective to provide a stray light monitor on the short wavelength side where the amount of incident light is small.

上記の実施例においてはホトダイオードアレイ4の各ホ
トダイオード間の距離はα12mmであり、沃素タング
ステン灯を光源として用いたときの線分散は25 nm
 7mmの光度針を用いて行っている。また、340n
mにおける迷光含有率はO,S 嘩、迷光モニタの受光
面と遮光板8との間隙は1.5mrnである。
In the above example, the distance between each photodiode in the photodiode array 4 is α12 mm, and the linear dispersion when an iodine tungsten lamp is used as a light source is 25 nm.
This is done using a 7mm photometric needle. Also, 340n
The stray light content rate at m is O, S. The gap between the light receiving surface of the stray light monitor and the light shielding plate 8 is 1.5 mrn.

第4図は本実施例の多波長分光測光装置を用いてNAD
Hのアルカリ希釈液の検量#全従来゛法と本実施例の方
法とで比較測定しえ結果を示す線図で、測定波長はNA
DH(デーホスホピリジン−ヌクレオチド2−Na)が
もつ吸収帯である3 4 Q nmで行っている。横軸
はNADHアルカリ浴液の希釈度(濃度)を示し、縦軸
は吸光度(Abs)を示している。破線で示す従来法で
は吸光度が0.65付近から湾曲しているが、本実施例
の迷光較正手段を用いたときの実線は吸光度2.5付近
まで直線となっており、直線性は大幅に向上している。
Figure 4 shows the NAD measurement using the multi-wavelength spectrophotometer of this example.
Calibration of alkaline diluted solution of
The measurement is performed at 3 4 Q nm, which is the absorption band of DH (dephosphopyridine-nucleotide 2-Na). The horizontal axis shows the dilution (concentration) of the NADH alkaline bath solution, and the vertical axis shows the absorbance (Abs). In the conventional method shown by the broken line, the absorbance is curved from around 0.65, but when the stray light calibration means of this example is used, the solid line is a straight line until the absorbance is around 2.5, and the linearity is significantly improved. It's improving.

本実施例の多波長分光測光装置は、ホトダイオードアレ
イを光検知器としてホトダイオード素子の前に遮光板を
設置して迷光だけを検知するごとく構成し、他のホトダ
イオードの光検知信号より上記迷光量に位置に関する補
正を加えて測光値より差1〜引く計算を自動的に実施し
て表示することは二より、測定ff1lを大鴫に向上は
せることができるという効果が得られる。
The multi-wavelength spectrophotometer of this embodiment uses a photodiode array as a photodetector, and a light-shielding plate is installed in front of the photodiode element to detect only stray light. Second, automatically performing and displaying the calculation of subtracting the difference by 1 to the photometric value with the addition of positional correction has the effect that the measured ff1l can be greatly improved.

本発明の多、波長分光測光装置は、比較的簡単な改良に
よって測光精度を向上させるという効果が祷られる。
The multi-wavelength spectrophotometric device of the present invention is expected to have the effect of improving photometric accuracy through relatively simple improvements.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例である多波長分光測光mto
党学系図、第2IQは第11Q4D実施例におけるホト
ダイオードプレイの正面図、第3図は第2図のムーB断
面図、第4!11は検量線を比較した図である。
Figure 1 shows a multi-wavelength spectrophotometry mto, which is an embodiment of the present invention.
Part 2 IQ is a front view of the photodiode play in the 11th Q4D embodiment, FIG. 3 is a cross-sectional view of MuB in FIG. 2, and No. 4!11 is a diagram comparing calibration curves.

Claims (1)

【特許請求の範囲】[Claims] 1、分散子によって分散され九波長成分の光の結−像領
域内に複数個の受光素子を配置して分光特性を測定する
多波長分光測光装置において、上記受光素子の少なくと
も1個に分散光の直進入射を妨げる連光板を設置して迷
光量を検出し、これ以外の上記受光素子の測光値に対し
上記迷光量に関する補正を行うごとく構成したことt4
IglLとする多波長分光測光装置。
1. In a multi-wavelength spectrophotometer that measures spectral characteristics by arranging a plurality of light-receiving elements within an imaging region of nine wavelength components of light dispersed by a dispersion element, at least one of the light-receiving elements has dispersed light. A continuous light plate is installed to prevent the direct incidence of the light, and the amount of stray light is detected, and the photometric values of the other light-receiving elements are corrected for the amount of stray light.t4
Multi-wavelength spectrophotometer called IglL.
JP6101382A 1982-04-14 1982-04-14 Multiple wavelength spectroscope device Pending JPS58178227A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6101382A JPS58178227A (en) 1982-04-14 1982-04-14 Multiple wavelength spectroscope device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6101382A JPS58178227A (en) 1982-04-14 1982-04-14 Multiple wavelength spectroscope device

Publications (1)

Publication Number Publication Date
JPS58178227A true JPS58178227A (en) 1983-10-19

Family

ID=13159015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6101382A Pending JPS58178227A (en) 1982-04-14 1982-04-14 Multiple wavelength spectroscope device

Country Status (1)

Country Link
JP (1) JPS58178227A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62209324A (en) * 1985-12-17 1987-09-14 ボーデンゼーヴエルク・パーキン―エルマー・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Polychromator
US5128549A (en) * 1990-03-30 1992-07-07 Beckman Instruments, Inc. Stray radiation compensation
US5478060A (en) * 1993-05-19 1995-12-26 Sumitomo Wiring Systems, Ltd. Guide jig for wiring harness assembly plate
WO2002088663A3 (en) * 2001-04-26 2002-12-27 Leica Microsystems Inc Hand-held automatic refractometer
WO2001098740A3 (en) * 2000-06-21 2003-06-26 Otsuka Denshi Kk Spectrum measuring instrument
JP2013221763A (en) * 2012-04-13 2013-10-28 Shimadzu Corp Spectroscopic analyzer, spectroscopic analysis method and program for spectroscopic analyzer
JP2015177250A (en) * 2014-03-13 2015-10-05 富士フイルム株式会社 imaging system and imaging method
JPWO2023228450A1 (en) * 2022-05-27 2023-11-30

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62209324A (en) * 1985-12-17 1987-09-14 ボーデンゼーヴエルク・パーキン―エルマー・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Polychromator
US5128549A (en) * 1990-03-30 1992-07-07 Beckman Instruments, Inc. Stray radiation compensation
US5478060A (en) * 1993-05-19 1995-12-26 Sumitomo Wiring Systems, Ltd. Guide jig for wiring harness assembly plate
WO2001098740A3 (en) * 2000-06-21 2003-06-26 Otsuka Denshi Kk Spectrum measuring instrument
WO2002088663A3 (en) * 2001-04-26 2002-12-27 Leica Microsystems Inc Hand-held automatic refractometer
JP2004527753A (en) * 2001-04-26 2004-09-09 レイチャート インコーポレーテッド Portable automatic refractometer
JP2013221763A (en) * 2012-04-13 2013-10-28 Shimadzu Corp Spectroscopic analyzer, spectroscopic analysis method and program for spectroscopic analyzer
JP2015177250A (en) * 2014-03-13 2015-10-05 富士フイルム株式会社 imaging system and imaging method
JPWO2023228450A1 (en) * 2022-05-27 2023-11-30
WO2023228450A1 (en) * 2022-05-27 2023-11-30 浜松ホトニクス株式会社 Spectrometry device

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