JPS581958Y2 - イオン源部真空排気装置 - Google Patents

イオン源部真空排気装置

Info

Publication number
JPS581958Y2
JPS581958Y2 JP1977017788U JP1778877U JPS581958Y2 JP S581958 Y2 JPS581958 Y2 JP S581958Y2 JP 1977017788 U JP1977017788 U JP 1977017788U JP 1778877 U JP1778877 U JP 1778877U JP S581958 Y2 JPS581958 Y2 JP S581958Y2
Authority
JP
Japan
Prior art keywords
ion source
exhaust pipe
pump system
vacuum exhaust
exhaust device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977017788U
Other languages
English (en)
Japanese (ja)
Other versions
JPS53113072U (2
Inventor
河合禎
山田進
大西豊一
Original Assignee
日新ハイボルテ−ジ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日新ハイボルテ−ジ株式会社 filed Critical 日新ハイボルテ−ジ株式会社
Priority to JP1977017788U priority Critical patent/JPS581958Y2/ja
Publication of JPS53113072U publication Critical patent/JPS53113072U/ja
Application granted granted Critical
Publication of JPS581958Y2 publication Critical patent/JPS581958Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP1977017788U 1977-02-15 1977-02-15 イオン源部真空排気装置 Expired JPS581958Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977017788U JPS581958Y2 (ja) 1977-02-15 1977-02-15 イオン源部真空排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977017788U JPS581958Y2 (ja) 1977-02-15 1977-02-15 イオン源部真空排気装置

Publications (2)

Publication Number Publication Date
JPS53113072U JPS53113072U (2) 1978-09-08
JPS581958Y2 true JPS581958Y2 (ja) 1983-01-13

Family

ID=28843827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977017788U Expired JPS581958Y2 (ja) 1977-02-15 1977-02-15 イオン源部真空排気装置

Country Status (1)

Country Link
JP (1) JPS581958Y2 (2)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5225999Y2 (2) * 1971-05-11 1977-06-13
JPS54373B2 (2) * 1975-01-20 1979-01-10

Also Published As

Publication number Publication date
JPS53113072U (2) 1978-09-08

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