JPS58201023A - Device for supporting searching of cause of defect - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

Detailed Description of the Invention The present invention provides automatic display of inspection work history information (inspection instruction information) and surface measurement necessary for supporting the search for the cause of defects for inspection objects determined to be defective. The present invention relates to a failure cause search support device for performing physical alignment and the like.

For example, in inspection work for semiconductor products that requires complex work procedures, the unit to be inspected (inspection lot)
The content differs depending on the product type, inspection items, or work history.

In addition, since this type of inspection work is often done using a sampling inspection method, the number of samples and the number of measurements (scores) per sample are determined based on the average quality estimated based on past measurement results. , which must be changed sequentially.

That is, when a defect occurs in a certain lot, it is necessary to quickly search and investigate the cause of the defect in order to prevent the cause of the defect from being introduced into other lots being produced.

Traditionally, this type of work to search for the cause of defects has not been automated and has been done manually, by organizing and investigating forms that record work history information, measurement results, etc. of defective inspection lots. The method was to select an object to be inspected that had already been measured from the lot, locate the measurement position, and investigate the cause by re-inspecting, magnifying observation, etc.

Therefore, a lot of time was spent organizing and investigating documents, aligning measurement positions, etc., and observing all the incorrect measurement positions, resulting in a delay in discovering the true cause of the defect. There was a fear that it would continue.

The purpose of the present invention is to overcome all the drawbacks of the prior art described above, and to fully automatically display inspection work history information and measurement results for inspection objects determined to be defective, as well as select and measure measurement positions of the inspection objects. The object of the present invention is to provide a failure cause search support device capable of supporting and investigating the cause of the failure in a short period of time.

The present invention is characterized by a storage device that stores all of the work history information, inspection instruction information, and other inspection results of each inspection work unit to be inspected, and each selection identification information given to each inspection work unit. a human-powered device that reads sounds, a display device that displays the work history information and each inspection result, and that can input identification information of the inspection target whose cause of the defect should be fully investigated based on the display of the inspection results; An automatic inspection device that can fully automatically take out the inspection work unit according to the identification information of the inspection target and measure the characteristics at a specified position, and the inspection work unit that is taken out according to the measurement position information included in the above inspection instruction information. a measurement positioning device for setting the device at a desired measurement position; and reading out the work history information, inspection instruction information, and measurement result sound from the storage device according to the selection identification information of the inspection work unit read by the input device, and reading out the measurement result sound for the inspection. A control processing device that displays information regarding the inspection work of each work unit on the display device, and performs necessary control and processing regarding the automatic inspection device and the measurement position enlargement device based on the identification number of the inspection target that is input from now on. There is a failure cause search support device composed of the following.

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a block diagram of an embodiment of a failure cause search support device according to the present invention.

Here, 1 is a storage device, 2 is a barcode reader related to an input device, 3 is a display device and is a CRT terminal with a touch panel tablet, 4 is an automatic inspection device, and 5 is a measurement positioning device. , a necessary controller and a power unit are attached. 6 is a bus, and 7 is a control processing device.

First, the storage device 1 stores required work history information and data in advance.
Inspection instruction information is stored for each inspection work unit IU (one or more inspected items to be inspected as a unit of inspection object determined by sampling etc.), and this stored information is stored in the device itself. Or updated to the latest status each time by other systems. Note that program information necessary for the operation of this device is also stored.

The barcode reader 2 reads the selected identification information display (for example, printing or pasting of a barcode BCD) on each inspection work unit IU itself or its container, and inputs it to the control processing device 7.

Under the control of the control processing device 7, the C1aT terminal 3 displays the work history information (inspection work information) regarding the inspection work unit IU for defect cause search read out from the storage device 1, and also displays the work history information (inspection work information) on the touch panel tablet. The identification information of the object to be inspected is input to the control processing device 7.

The automatic inspection device 5 performs XY inspection under the control of the control processing device 7.
Automatically take out the inspection work unit IUk onto table 5,
The required measurement points are inspected according to the measurement positioning.

Note that the control processing device 7 can control and process in a multiplex manner not only one set of each of the above-mentioned devices but also other systems of inspection devices or failure cause search devices.

Next, when the operator reads the barcode BCD of the inspection work unit IU for defect cause search from the barcode reader 2, the corresponding work history information is read from the storage device 1 into the control processing device 7.

The control processing device 7 calculates all information related to the corresponding inspection work from the work history information, and transmits information required to the T terminal 3 (for example, storage position information of the object to be measured, measurement position information, measurement conditions, etc.) Display.

After considering the content and measurement results of the inspection target based on the display, the operator enters the identification information (number) of the inspection target that has already been measured, including both measurements and magnified observation, using the touch panel tablet from the kcRT terminal. input.

Upon receiving this, the control processing device 7 sends the number of the inspection object to the automatic inspection device 4 and all the measurement positions (addresses) to the XY table 5.

As a result, the automatic inspection device 4 automatically takes out the inspection object and sets it on the XY table 5, and the XY table 5 holds the inspection object at the specified measurement position based on the information regarding the measurement position (address). do.

The operator immediately performs re-examination, magnified observation, etc. at the held measurement position, performs additional measurements as necessary, and sends the results directly to the automatic inspection device 4 or via the CRT terminal 3. Report to the control processing device 7.

The control processing device 7 updates information on the work history and test results of the inspection target each time the instructed inspection work is completed.

In this way, the work history of defective inspection lots,
The inspection results are automatically displayed and the measurement position is automatically set, making it possible to search for the cause of the defect in a short time.It also prevents observation at the wrong measurement position and helps identify the true cause of the defect at an early stage. It becomes possible to understand.

As described in detail above, according to the present invention, it is possible to realize a failure cause search support device that supports and investigates the cause of failure regarding a defective inspection lot in a short time. A remarkable effect can be obtained in improving the efficiency and reliability of inspection work.

[Brief explanation of the drawing]

FIG. 1 is a block diagram of an embodiment of a failure cause search support device according to the present invention. 1...Storage device, 2...Barcode reader, 3...
・C'RT terminal, 4...Automatic inspection device, 5...XY
Table, 6...Bus, 7...Control processing unit. Agent: Patent attorney Kosaku Fukuda (and one other person)

Claims (1)

[Claims] 1. A storage device that stores all the work history information, inspection instruction information, and other necessary information for each inspection work unit to be inspected, and an input device that reads the selection identification information given to each inspection work unit. , a display device capable of displaying the work history information and each of the inspection results, and inputting identification information of the inspection target whose cause of the defect is to be investigated based on the display of the inspection results; and identification information of the inspection target. an automatic inspection device that can automatically take out the inspection work unit and measure the characteristics at a specified position according to the above-mentioned inspection instruction information; According to the selection identification information of the inspection work unit read by the input device and the measurement positioning device for setting the inspection work unit, the work history information, inspection instruction information, and the measurement result are read from the storage device, and the inspection work of the inspection work unit is read out from the storage device. information on the automatic inspection device and measurement positioning device is displayed on the display device, and the necessary control and control regarding the automatic inspection device and measurement positioning device is performed based on the input identification number of the inspection target.
1. A failure cause search support device comprising: a control processing device that performs processing;