JPS58202862A - 表面検査方法及びその装置 - Google Patents

表面検査方法及びその装置

Info

Publication number
JPS58202862A
JPS58202862A JP8613482A JP8613482A JPS58202862A JP S58202862 A JPS58202862 A JP S58202862A JP 8613482 A JP8613482 A JP 8613482A JP 8613482 A JP8613482 A JP 8613482A JP S58202862 A JPS58202862 A JP S58202862A
Authority
JP
Japan
Prior art keywords
mirror
inspected
straight line
laser beam
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8613482A
Other languages
English (en)
Japanese (ja)
Other versions
JPH032254B2 (de
Inventor
Miyuki Igarashi
五十嵐　幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Doryokuro Kakunenryo Kaihatsu Jigyodan
Power Reactor and Nuclear Fuel Development Corp
Original Assignee
Doryokuro Kakunenryo Kaihatsu Jigyodan
Power Reactor and Nuclear Fuel Development Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Doryokuro Kakunenryo Kaihatsu Jigyodan, Power Reactor and Nuclear Fuel Development Corp filed Critical Doryokuro Kakunenryo Kaihatsu Jigyodan
Priority to JP8613482A priority Critical patent/JPS58202862A/ja
Publication of JPS58202862A publication Critical patent/JPS58202862A/ja
Publication of JPH032254B2 publication Critical patent/JPH032254B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP8613482A 1982-05-21 1982-05-21 表面検査方法及びその装置 Granted JPS58202862A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8613482A JPS58202862A (ja) 1982-05-21 1982-05-21 表面検査方法及びその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8613482A JPS58202862A (ja) 1982-05-21 1982-05-21 表面検査方法及びその装置

Publications (2)

Publication Number Publication Date
JPS58202862A true JPS58202862A (ja) 1983-11-26
JPH032254B2 JPH032254B2 (de) 1991-01-14

Family

ID=13878236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8613482A Granted JPS58202862A (ja) 1982-05-21 1982-05-21 表面検査方法及びその装置

Country Status (1)

Country Link
JP (1) JPS58202862A (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02195601A (ja) * 1989-01-24 1990-08-02 Kanegafuchi Chem Ind Co Ltd 照明方法および照明装置ならびに物体の外観検査方法
DE102014212633A1 (de) * 2014-06-30 2015-12-31 Inoex Gmbh Messvorrichtung und Verfahren zur Vermessung von Prüfobjekten
WO2016188515A1 (de) * 2015-05-22 2016-12-01 Inoex Gmbh Terahertz-messvorrichtung und verfahren zur vermessung von prüfobjekten mittels terahertz-strahlung

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02195601A (ja) * 1989-01-24 1990-08-02 Kanegafuchi Chem Ind Co Ltd 照明方法および照明装置ならびに物体の外観検査方法
DE102014212633A1 (de) * 2014-06-30 2015-12-31 Inoex Gmbh Messvorrichtung und Verfahren zur Vermessung von Prüfobjekten
DE102014212633B4 (de) * 2014-06-30 2017-03-09 Inoex Gmbh Messvorrichtung und Verfahren zur Vermessung von Prüfobjekten
WO2016188515A1 (de) * 2015-05-22 2016-12-01 Inoex Gmbh Terahertz-messvorrichtung und verfahren zur vermessung von prüfobjekten mittels terahertz-strahlung

Also Published As

Publication number Publication date
JPH032254B2 (de) 1991-01-14

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