JPS58211717A - Composite optical waveguide - Google Patents
Composite optical waveguideInfo
- Publication number
- JPS58211717A JPS58211717A JP9474982A JP9474982A JPS58211717A JP S58211717 A JPS58211717 A JP S58211717A JP 9474982 A JP9474982 A JP 9474982A JP 9474982 A JP9474982 A JP 9474982A JP S58211717 A JPS58211717 A JP S58211717A
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- waveguides
- optical
- semi
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1342—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using diffusion
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
- G02B6/1245—Geodesic lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
- G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
(1)発明の技術分野
本発明は、複合光導波路に関し、特にブレーナ型および
チャネル型等の光導波路を複合して構成することによっ
てこれら各種の光導波路の持つ利点を活用した複合光導
波路に関する。DETAILED DESCRIPTION OF THE INVENTION (1) Technical field of the invention The present invention relates to a composite optical waveguide, and in particular to a composite optical waveguide that utilizes the advantages of various types of optical waveguides by combining optical waveguides such as a Brener type and a channel type. Regarding the utilized composite optical waveguide.
(2)技術の背景
最近、ガラス等の基板上に光導波路および光スィッチ等
の各種の光素子を構成した光集積回路が注目されている
。このような光集積回路においては、光の伝達を行なう
光導波路のIrj性が光集積回路全体に与える影響が大
きく、従って光導波路の持つ利点を充分に活用すること
が必要とされる。(2) Background of the Technology Recently, optical integrated circuits in which various optical elements such as optical waveguides and optical switches are constructed on a substrate such as glass have been attracting attention. In such optical integrated circuits, the Irj properties of the optical waveguides that transmit light have a large influence on the entire optical integrated circuit, and therefore it is necessary to fully utilize the advantages of the optical waveguides.
(3)従来技術と問題点
従来、光集積回路に使用される光導波路としてはガラス
等の基板の上に平面的に形成されたプレーナ型導波路と
、ガラス等の基板の上に線状に形成されたチャネル型導
波路とが用いられていた。(3) Prior art and problems Conventionally, optical waveguides used in optical integrated circuits include planar waveguides formed flat on a substrate such as glass, and linear waveguides formed on a substrate such as glass. A formed channel type waveguide was used.
プレーナ型導波路は、広いビーム幅の光を伝達するのに
適しておりブラッグ回折スイッチ等幅広い、ビーム径の
光を必要とする光回路素子に適してい志。またチャネル
型は光フアイバケーブルのように低損失で光信号の伝送
を行なうことができ、方向性結台器叫微Aiuな柘造を
持つ光回路素子に用いられる。Planar waveguides are suitable for transmitting light with a wide beam width, and are suitable for optical circuit elements that require light with a wide beam diameter, such as Bragg diffraction switches. In addition, the channel type can transmit optical signals with low loss like an optical fiber cable, and is used for optical circuit elements with a directional connector and a thin structure.
しかしながら、前記従来形の光集積回路においては、プ
レーナ型およびチャネル型の各党導波路がそれぞれ別個
に使用されていたため、例えば横方向の幅の広い平行光
線を得るような場合にはレンズ等の機能部品を使用する
必要があった。即ち、幅広い平行光線を得る場合には、
チャネル型導波路からの光を一旦空中に拡散させこの拡
散した光を凸レンズ等によって広い断面積を有する平行
ビームに変換し、このような平行ビームをプレーナ型導
波路に人力することによって平板状の平行ビームを得て
いた。したがって凸レンズ等の機能素子を別個に必要と
するため装置の構成が複雑になるとともに高価になると
いう不都合があった。However, in the conventional optical integrated circuit, planar waveguides and channel waveguides are used separately, so when obtaining parallel light beams with a wide width in the lateral direction, for example, lenses, etc. I had to use parts. In other words, when obtaining a wide range of parallel rays,
The light from the channel waveguide is first diffused into the air, and then this diffused light is converted into a parallel beam with a wide cross-sectional area using a convex lens, etc., and by manually inputting such a parallel beam into the planar waveguide, it is possible to create a planar waveguide. I had a parallel beam. Therefore, since a functional element such as a convex lens is separately required, the structure of the apparatus becomes complicated and expensive.
(4)4発明の目的
本発明の目的は前述の従来形における問題点に鑑み、光
集積回路等に用いられる複合光導波路において、光導波
路を複数種類の導波路の組合わせによって構成し、少な
くとも1種類の導波路が他の種類の導波路に包含される
ようにするという構想に基づき、プレーナ型およびチャ
ネル型筒の各種の光導波路の持つ利点を充分に活用しか
つ別個の機能素子を用いることなく種々の光ビームを得
ることができるようにすることにある。(4) 4 Objects of the Invention In view of the problems with the conventional type described above, an object of the present invention is to provide a composite optical waveguide used for optical integrated circuits, etc., in which the optical waveguide is configured by a combination of a plurality of types of waveguides, and at least Based on the idea that one type of waveguide is included in another type of waveguide, the advantages of planar and channel type optical waveguides are fully exploited and separate functional elements are used. The object of the present invention is to make it possible to obtain various light beams without any interference.
(5)発明の構成
そしてこの目的は、本発明によれば、はは線状のチャネ
ル型導波路と光信号の広が9幅に比し充分広幅のプレ〒
す型導波路とこれら2種類の導波路の中間幅を有する半
プレーナ壓導波路とによって構成され、これら3種の導
波路の内部なくとも2種類は一方が他方を包含するよう
に構成されていることを%徴とする複合光導波路を提供
することによって達成される。(5) Structure and object of the invention According to the present invention, a linear channel type waveguide and a plate having a sufficiently wide width compared to the width of the optical signal.
It consists of a square waveguide and a semi-planar waveguide having a width intermediate between these two types of waveguides, and at least two of these three types of waveguides are configured such that one of them contains the other. This is achieved by providing a composite optical waveguide with a characteristic of
(6)発明の実施例 以下図面を用いて本発明の1実施例を説明する。(6) Examples of the invention An embodiment of the present invention will be described below with reference to the drawings.
第1図は、本発明の1実施例に係わる複合光導波路の構
成を示す概略的斜視図である。また、第2図は第1図の
複合光導波路の■−■線における断面図である。これら
の図から明らかなように、本発明の1実施例に係わる複
合先導波路は、ガラス等の基板1上に構成されたプレー
ナ型導波路2、該プレーナ型導波路2内に包含されるよ
うに構成された半プレーナ型導波路3および半プレーナ
型導波路3内に包含されるように構成されたチャネル型
導波路4を具備する。プレーナ型導波路2は例えばニオ
ブ酸リチウム(tt2Nb o5 )等によって構成さ
れ、半プレーナ屋導波路3およびチャネル型導波路4は
該プレーナ型導波路2内の所要領域を例えばチタン等を
熱拡散して屈折率を大きくして構成される。また、プレ
ーナ型導波路2は基板1上に平面的に構成され、チャネ
ル型導波路4はほぼ線状の狭い幅の導波路として構成さ
れている。FIG. 1 is a schematic perspective view showing the configuration of a composite optical waveguide according to an embodiment of the present invention. Further, FIG. 2 is a cross-sectional view of the composite optical waveguide of FIG. 1 taken along the line ■--■. As is clear from these figures, the composite guided waveguide according to one embodiment of the present invention includes a planar waveguide 2 configured on a substrate 1 such as glass, and a structure included in the planar waveguide 2. A semi-planar waveguide 3 configured as shown in FIG. The planar waveguide 2 is made of, for example, lithium niobate (tt2Nb o5 ), and the semi-planar waveguide 3 and the channel waveguide 4 are made by thermally diffusing, for example, titanium or the like in the required area within the planar waveguide 2. It is constructed by increasing the refractive index. Further, the planar waveguide 2 is configured in a plane on the substrate 1, and the channel type waveguide 4 is configured as a substantially linear waveguide with a narrow width.
半グレーナ型導波路3Fi、プレーナ型導波路2および
チャネル型導波路4の中間幅を有する導波路として構成
されている。チャネル型導波路4は、半グレーナ屋導波
路3の内部で除々に細くなる形状に切断されている。半
プレーナ屋導波路3はプレーナ型導波路2内で円弧型の
断面に切断されている。また、基板1、ブレーナ製溝波
路2半シレーす型導波路3およびチャネル型導波路4の
屈折率をそれぞれFIB T fl! + t13お
よびn4とするとこれらの各屈折率の間には次の関係が
成立する。It is configured as a waveguide having an intermediate width among the half-grainer waveguide 3Fi, the planar waveguide 2, and the channel waveguide 4. The channel waveguide 4 is cut into a shape that gradually becomes thinner inside the semi-grainer waveguide 3. The semi-planar waveguide 3 is cut into an arc-shaped cross section within the planar waveguide 2. In addition, the refractive indexes of the substrate 1, Brehner groove waveguide 2, half-silver waveguide 3, and channel waveguide 4 are determined as FIB T fl! +t13 and n4, the following relationship holds true between these respective refractive indices.
n4)ns )ns >ns
上述の複合光導波路においては、チャネル型導波路4に
矢印A方向から入力されfc光信号は、チャネル型導波
路4内を通シ該チャネル型導波路4の切断部41から半
プレーナ屋導波路3内にビーム幅を広げながら入射され
る。この場合、チャネル型導波路4の切断部4′は前述
のように徐々に細くされているので不要反射が少なくな
シ効率的に光ビームの拡散が行なわれる。このようにし
て半ゾレーナ型導波路3内に広げられた光ビームは該半
グレーナ型導波路3の円弧状断面3′において凸レンズ
としての作用を受け、プレーナ型導波路2内に幅広の平
行光線として伝達される。第1図の点線は光ビームの伝
達の様子を概略的に示すものである。このようにして第
1図および第2図に示される複合光導波路によって凸レ
ンズ等を別個に設けることなく広幅の平行ビームを得る
ことが可能となり、ブラッグ反射を用いたブラッグスイ
ッチ等に入力するのに適した光ビームを得ることができ
る。n4) ns ) ns > ns In the above-mentioned composite optical waveguide, the fc optical signal inputted to the channel type waveguide 4 from the direction of arrow A passes through the channel type waveguide 4 and passes through the cut portion of the channel type waveguide 4. 41 into the semi-planar waveguide 3 while widening the beam width. In this case, since the cut portion 4' of the channel waveguide 4 is gradually tapered as described above, unnecessary reflections are reduced and the light beam is efficiently diffused. The light beam spread in the semi-solenar waveguide 3 in this way is acted as a convex lens at the arc-shaped cross section 3' of the semi-solena waveguide 3, and a wide parallel beam is formed in the planar waveguide 2. It is transmitted as The dotted line in FIG. 1 schematically shows how the light beam is transmitted. In this way, the composite optical waveguide shown in Figures 1 and 2 makes it possible to obtain a wide parallel beam without separately providing a convex lens, etc., and it is suitable for input into a Bragg switch using Bragg reflection. A suitable light beam can be obtained.
なお、基板1および各導波路2,3.4の屈折率の関係
は前述のものに限らず例えば
n4 ) n z ) ns > nsのようにしても
よく、この場合はブレーナ型溝波路2内における半グレ
ーナ型導波路3の切断面3′は第1図におけるような突
出形状でなく、第3図に示される凹型の円弧状断面とす
ることによって第1図の複合光導波路と同様の機能を持
たせることができる。Note that the relationship between the refractive index of the substrate 1 and each waveguide 2, 3.4 is not limited to the above-mentioned one, but may be such that, for example, n4) nz) ns > ns. The cut surface 3' of the semi-grainer waveguide 3 in FIG. 1 is not a protruding shape as in FIG. 1, but has a concave arc-shaped cross section as shown in FIG. 3, thereby achieving the same function as the composite optical waveguide in FIG. 1. can have.
(7)発明の効果
このように、本発明によれば、別個にレンズ等を設ける
ことなく簡単な構成によシプレーナ型およびチャネル型
導波路の持つ利点を活用し、種々の光機能を実現するた
めの複合光導波路を構成することが可能となる。(7) Effects of the Invention As described above, according to the present invention, various optical functions can be realized by utilizing the advantages of the siplanar type and channel type waveguides with a simple configuration without providing a separate lens or the like. It becomes possible to construct a composite optical waveguide for
第1図は、本発明の1実施例に係わる複合光導波路の構
造を示す斜視図、。
第2図は、第1図の複合光導波路の■−■線から見た断
面図、そして
第3図は、本発明の他の実施例に係わる複合光導波路を
示す概略的平面図である。
1・・・基板、2・・・ブレーナ型溝波路、3・・・半
プレーナ型導波路、3’ + 3’・・・円弧状断面、
4・・・チャネル型導波路、4′・・・切断部。
特許出願人
富士通株式会社
特許出願式加入
弁理士 青 木 朗
弁理士西舘和之
弁理士内田幸男
弁理士 山 口 昭 之FIG. 1 is a perspective view showing the structure of a composite optical waveguide according to an embodiment of the present invention. FIG. 2 is a cross-sectional view of the composite optical waveguide of FIG. 1 taken along the line ■--■, and FIG. 3 is a schematic plan view showing a composite optical waveguide according to another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Substrate, 2... Brener type groove waveguide, 3... Semi-planar type waveguide, 3'+3'... Arc-shaped cross section,
4... Channel type waveguide, 4'... Cutting section. Patent applicant Fujitsu Limited Patent application ceremony Participating patent attorney Akira Aoki Patent attorney Kazuyuki Nishidate Patent attorney Yukio Uchida Patent attorney Akira Yamaguchi
Claims (1)
比し充分広幅のプレーナ型導波路とこれら2種類の導波
路の中間幅を有する半プレーナ型導波路とによって構成
され、これら3種の導波路の内少なくとも2種類は一方
が他方を包含するように構成されていることを特徴とす
る複合光導波路0 26 該チャネル型導波路は該半プレーナ型導波路内
に包含され該半グレーナ型導波路中で断続されることに
よシ光ビームを広げ、該半プレーナ型導波路はこの広け
られた光ビームを機能処理する導波路断面を有すること
を特徴とする特許請求の範囲第1項に記載の複合光導波
路。[Claims] 1. A diagonal channel-type cardiac waveguide, a planar waveguide whose width is sufficiently wider than the width of the optical signal, and a semi-planar waveguide having a width intermediate between these two types of waveguides. A composite optical waveguide comprising a waveguide, and at least two of these three types of waveguides are configured such that one encompasses the other. The semi-planar waveguide is contained within a semi-planar waveguide and is interrupted in the semi-planar waveguide to widen the light beam, the semi-planar waveguide having a waveguide cross-section that functions to process the widened light beam. A composite optical waveguide according to claim 1, characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9474982A JPS58211717A (en) | 1982-06-04 | 1982-06-04 | Composite optical waveguide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9474982A JPS58211717A (en) | 1982-06-04 | 1982-06-04 | Composite optical waveguide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58211717A true JPS58211717A (en) | 1983-12-09 |
| JPH0361924B2 JPH0361924B2 (en) | 1991-09-24 |
Family
ID=14118770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9474982A Granted JPS58211717A (en) | 1982-06-04 | 1982-06-04 | Composite optical waveguide |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58211717A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61200507A (en) * | 1985-03-01 | 1986-09-05 | Mitsubishi Electric Corp | Optical waveguide lens |
| JPS6442606A (en) * | 1987-08-10 | 1989-02-14 | Hitachi Ltd | Branch waveguide type optical multiplexer and demultiplexer |
| US5078516A (en) * | 1990-11-06 | 1992-01-07 | Bell Communications Research, Inc. | Tapered rib waveguides |
| US6810160B2 (en) * | 2001-02-28 | 2004-10-26 | Fujitsu Limited | Optical wiring substrate, method of manufacturing optical wiring substrate and multilayer optical wiring |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55149908A (en) * | 1979-03-05 | 1980-11-21 | Hughes Aircraft Co | Light coupler |
-
1982
- 1982-06-04 JP JP9474982A patent/JPS58211717A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55149908A (en) * | 1979-03-05 | 1980-11-21 | Hughes Aircraft Co | Light coupler |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61200507A (en) * | 1985-03-01 | 1986-09-05 | Mitsubishi Electric Corp | Optical waveguide lens |
| JPS6442606A (en) * | 1987-08-10 | 1989-02-14 | Hitachi Ltd | Branch waveguide type optical multiplexer and demultiplexer |
| US5078516A (en) * | 1990-11-06 | 1992-01-07 | Bell Communications Research, Inc. | Tapered rib waveguides |
| US6810160B2 (en) * | 2001-02-28 | 2004-10-26 | Fujitsu Limited | Optical wiring substrate, method of manufacturing optical wiring substrate and multilayer optical wiring |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0361924B2 (en) | 1991-09-24 |
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