JPS5821892A - Noiseless discharge carbon dioxide gas laser - Google Patents

Abstract

PURPOSE:To prevent the damage of a dielectric film by arranging an inorganic insulator to project it from the dielectric film of a pair of dielectric electrodes toward the discharging space and constructing not to impact the internal resonance beam directly to the film. CONSTITUTION:A voltage is applied from a high frequency power source 3 to a pair of dielectric electrodes 1. Thus, a voiceless discharge is produced in the discharging space 7, laser gas is excited, an oscillation occurs in an unstable resonator which is composed of mirrors 4, 5 due to the excitation of the laser gas, an internal oscillation beam 2 is formed, and is partly produced externally as an output beam 6. A ceramic plate 21 is projected from the glass surfaces 12a, 12b of a pair of dielectric electrodes 1 toward the side of the space 7. In this manner, the internal oscillation beam 2 is deflected by a ceramic plate 21, and the glass surfaces 12a, 12b are avoided to be damaged by the direct impact of the beam 2.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a high-output silent discharge type carbon dioxide laser device, particularly to an unstable resonator type carbon dioxide laser device.

Conventionally, there has been a device of this type as shown in FIG.

In the figure, (1) is a pair of dielectric electrodes.

The metal electrodes (11a) and (11b) are made of dielectric material such as glass, respectively, and (51 is a partially reflecting mirror consisting of a convex mirror facing the concave mirror (4), which together with the concave mirror (4) forms an unstable resonator. (6) is the output beam. Also, a pair of dielectric films'!1iL (11 and the unstable resonator are housed in a sealed container. (7) is a pair of dielectric electrodes. (1) In the discharge space between aO2-00-N
A laser gas mixture consisting of 2-Ho and the like is flowing at high speed.

Next, the operation of the conventional device configured as described above will be explained. First, a pair of dielectric electrodes (+1 is connected to a high frequency power source (
3) to about 10 kV, 100 kHz
Apply pressure. As a result, a silent discharge occurs in the discharge space (7), the laser gas is excited, and oscillation occurs in the unstable resonator formed by the mirror +4) +51, forming an internal oscillation beam (2), with a part of it being output. It will be taken out as a beam (6).

The output beam (6) extracted in this way is used as a laser beam for various purposes such as fusing and welding.

By the way, since the conventional device is configured as described above, if the opposing arrangement positions of the mirrors (51, (4) are slightly shifted), the internal oscillation beam (2) will form the dielectric electrode (1). There was a drawback that the glass (12a) or (t2b) would be hit by the glass (12a) or (12b), and therefore the glass (12a) or (t2b) would be damaged.Also, in order to eliminate this drawback, the mirror (4).

It is very difficult to adjust the positional relationship in (5).

A barrier is installed to protect the glass surface.

The purpose of the present invention is to provide a silent discharge type carbon dioxide laser device with highly reliable electrodes.

An embodiment of this principle will be described below with reference to the drawings.

Figure 2 shows an apparatus according to an embodiment of the present invention. In Figure 1, QD is a ceramic plate, which is connected to the discharge space (7) from the glass surface (12a) (121)) of the pair of dielectric electrodes (1). In this example, the concave mirror (4) side and the central glass surface (12a) (12
b). In FIG. 9, the same or corresponding parts as in FIG. 1 are given the same reference numerals, and their explanations are omitted.

Since the ceramic plates Qυ are appropriately arranged at important points in this way, even if the laser device is activated when the angular position of the mirrors (4) and (5) is incorrect, the internal oscillation beam (2)
Since the beam is deflected by the ceramic plate 6111, the glass surfaces (12a) (12b) can be avoided from being directly hit and damaged by the beam (2). Furthermore, even if the ceramic plate e2D is heated by the beam, it will affect the laser oscillation and will not be able to maintain a favorable laser output beam (6
) will be obtained.

In addition, although the ceramic board was used as a barrier in the said Example, this invention is not limited to this.

What is necessary is just to arrange|position so that it may protrude from (12b) into discharge space (7).

As described above, in the device of this invention, an inorganic insulator is appropriately arranged so as to protrude from the dielectric film of the pair of dielectric electrodes toward the discharge space, so that the internal resonant beam does not directly hit the dielectric film. Since the beam is deflected by the protruding part of the inorganic insulator, damage to the dielectric film can be prevented, and a highly reliable high-output silent discharge type carbon dioxide laser device can be achieved. be.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing the basic configuration of a conventional silent discharge type carbon dioxide laser device, and FIG. 2 is a diagram showing the configuration of an embodiment of the present invention. (1)...Dielectric electrode, (12a) (12b)
...Dielectric film. (2)...Internal oscillation beam, (3)...High frequency power supply, (4)...Concave mirror, (5)...Convex mirror,
Q...Ceramics board. The same reference numerals in the figures indicate the same or equivalent parts. ? ) Applicant: Makoto Ishiban, Director of Dingyu Technology Institute

Claims (1)

[Scope of Claims] A pair of dielectric electrodes covered with a dielectric film and facing each other with a predetermined gap therebetween, a high frequency power source connected to the pair of dielectric electrodes, and a discharge space between the pair of dielectric JK electrodes. An unstable resonator consisting of a total reflection mirror and a partial reflection mirror that face each other through a discharge space between the flowing laser gas and the pair of pre-dielectric electrodes. Note: An airtight container in which the pair of dielectric electrodes and the unstable resonator are hermetically housed, and an inorganic insulator appropriately arranged so as to protrude from the dielectric film of the pair of dielectric electrodes to the discharge space side. A silent discharge type carbon dioxide laser device.