JPS5841310A - Magnetism detecting device - Google Patents

Magnetism detecting device

Info

Publication number
JPS5841310A
JPS5841310A JP13973681A JP13973681A JPS5841310A JP S5841310 A JPS5841310 A JP S5841310A JP 13973681 A JP13973681 A JP 13973681A JP 13973681 A JP13973681 A JP 13973681A JP S5841310 A JPS5841310 A JP S5841310A
Authority
JP
Japan
Prior art keywords
sensor
hole
thin film
substrate
magnetic thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13973681A
Other languages
Japanese (ja)
Inventor
Sadao Sekizawa
関沢 貞夫
Toshio Seki
敏夫 関
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13973681A priority Critical patent/JPS5841310A/en
Publication of JPS5841310A publication Critical patent/JPS5841310A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE:To enhance reliability and manufacturing property and to make it possible to perform highly accurate magnetism detection, by bridging a sensor on a through hole of a substrate and attaching it thereto, and bringing a magneic thin film closer to the sensor from the lower part through said hole. CONSTITUTION:The magnetism detecting device 9 comprising the sensor 92 which is supported by a glass substrate 91 is bridged on the through hole 8 in the substrate 7. The sensor 92 is directed to the through hole 8 and connected to a printed wiring around the through hole 8. A rotary disk 3 is positioned so as to face the through hole 8. The magnetic thin film 4 which is supported by the outer surface of the rotary disk 3 is brought to the sensor 92 as closely as possible. When the rotary disk 3 is rotated by a motor 1, the sensor 92 sequentially detects magnetized parts 5 of the magnetic thin film 4. The change in internal resistance of the sensor 92 is detected by a voltage comparator 10, and the number of rotation of a rotary shaft 2 is measured. Since lead wires are not required, the reliability and manufacturing property are enhanced and the highly accurate detection of the magnetism is performed.

Description

【発明の詳細な説明】 本発明は磁気検出装置に関し、特に磁気薄膜の着磁部を
セ/すにて検出するのに好適な磁気検出装置に関するも
のである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic detection device, and more particularly to a magnetic detection device suitable for detecting a magnetized portion of a magnetic thin film in a cell.

磁気薄膜に着磁された着磁部を例えばホール素子からな
るセンナで検出し、回転角度や回転速度を検出するもの
は従来から知られている。又、センサはセンサ部分を支
持する基板上の配線にリード線により接続されている。
It is conventionally known to detect a magnetized portion of a magnetic thin film using, for example, a sensor made of a Hall element to detect the rotation angle and rotation speed. Further, the sensor is connected by a lead wire to wiring on a substrate that supports the sensor portion.

しかし、セ/すにより検出できる電圧は100 m V
p−p以下と非常に小さいため、リード線が拾う外部ノ
イズで誤動作する虞れがある。
However, the voltage that can be detected by the cell is 100 mV
Since it is very small, less than pp, there is a risk of malfunction due to external noise picked up by the lead wire.

又、リード線と基板の配線との接続作業も非常に難しく
、接続不良、接続状態のばらつきによっても磁気検出装
置に影響を与えている。
Furthermore, the work of connecting the lead wires and the wiring on the board is extremely difficult, and poor connections and variations in connection status also affect the magnetic detection device.

これを解決する方法としてはセンサに印加する電圧をあ
る程度上げればよいが、電源装置やセンサの電圧、電流
容量の点からも限度がある。
One way to solve this problem is to increase the voltage applied to the sensor to some extent, but there are limits due to the voltage and current capacity of the power supply and sensor.

本発明は前記諸点に着目し、センナをリード線・なしで
基板のプリント配線に接続し、センサに磁気薄膜を十分
に接近させることにより、外部ノイズに強く、信頼性、
製作性が高く、しかも高精度の検出を可能にする磁気検
出装置を得ることを目的とするものである。
The present invention has focused on the above points, and by connecting the sensor to the printed wiring of the board with or without lead wires and bringing the magnetic thin film sufficiently close to the sensor, it is strong against external noise, has high reliability,
The object of the present invention is to obtain a magnetic detection device that is highly manufacturable and enables highly accurate detection.

以下本発明の一実施例を第1図ないし第3図に基づいて
説明する。図面において、1は電動機、2は電動機1の
回転軸、3はこの回転軸2に取付けられた回転板でその
外周面には磁気薄膜4が担持されている。この磁気薄膜
4には周方向に並設された多数個の着磁部5を有する。
An embodiment of the present invention will be described below with reference to FIGS. 1 to 3. In the drawing, 1 is an electric motor, 2 is a rotating shaft of the electric motor 1, and 3 is a rotating plate attached to this rotating shaft 2, and a magnetic thin film 4 is supported on the outer peripheral surface of the rotating plate. This magnetic thin film 4 has a large number of magnetized parts 5 arranged in parallel in the circumferential direction.

この着磁部5は第2図において多数本の線で示されてい
る。角度検出を1度単位まで行うものであれば、この着
磁部5は均等間隔で360箇所存在する。
This magnetized portion 5 is shown by multiple lines in FIG. If angle detection is performed in units of 1 degree, there are 360 magnetized portions 5 at equal intervals.

6は電動機1の一方のエンドブラケット、7はこのエン
ドブラケット6に取付けられ、セラミック板で構成され
る基板、8はこの基板7に設けられた長方形の透口であ
る。
Reference numeral 6 denotes one end bracket of the electric motor 1, 7 a substrate made of a ceramic plate and attached to the end bracket 6, and 8 a rectangular opening provided in the substrate 7.

又、この基板7には磁気検出器9、ボルテージコンパレ
ータ10、コンデンサ11,12、および前記磁気検出
器9のセンサ92に定電圧を送るだめの定電圧装置を構
成するトランジスタ13が取付けられている。基板7面
にはこれらの部品9゜1o、11.12および13を電
気的に接続するために、図示されていないがパターン化
された配線がプリントされている。
Also attached to this board 7 are a magnetic detector 9, a voltage comparator 10, capacitors 11 and 12, and a transistor 13 constituting a constant voltage device for sending a constant voltage to the sensor 92 of the magnetic detector 9. . Patterned wiring (not shown) is printed on the surface of the substrate 7 to electrically connect these components 9°1o, 11, 12, and 13.

前記磁気検出器9は0.6〜1ミリメートル程度の厚さ
のガラス基板91と、このガラス基板91の表面(第1
図においては下面)にこの例では1度の角度を検出する
のに最適なパターン化されて担持されたセンサ92とか
ら構成されている。このセンサ92は磁束を感じて電気
抵抗が変化する、いわゆるホール素子である。そして、
とのセンサ92は前記基板7上のプリント配線にフリッ
プチップボンディング、リードビームボンディング等の
ワイヤレスボンディングにより電気的に接続する。
The magnetic detector 9 includes a glass substrate 91 having a thickness of about 0.6 to 1 mm, and a surface (first surface) of this glass substrate 91.
In this example, the sensor 92 is patterned and carried on the bottom surface (in the figure), which is optimal for detecting an angle of 1 degree. This sensor 92 is a so-called Hall element that senses magnetic flux and changes its electrical resistance. and,
The sensor 92 is electrically connected to the printed wiring on the substrate 7 by wireless bonding such as flip chip bonding or lead beam bonding.

14は前記基板7とセンサ92間に介在した半田ペース
トで、加熱炉あるいはマイクロ波加熱等によシ、この半
田ペースト14を溶解し、基板7のプリント配線とセン
サ92を接続するものである。
Reference numeral 14 denotes a solder paste interposed between the substrate 7 and the sensor 92, and the solder paste 14 is melted using a heating furnace or microwave heating to connect the printed wiring of the substrate 7 and the sensor 92.

前記磁気検出器9は第2図で明らかなように、基板7の
透口8に差渡しし、センサ92を透口8に向け、透口8
の周面プリント配線に接続するものである。すなわち、
センサ92は透口8を通して下面から臨めるようになっ
ている。そして、回転板3が透口8の下方からその一部
を透口8に挿入し、磁気薄膜4を前記センサ92にでき
る限シ接近させるようにする。具体的にはセンサ92と
磁気薄膜4との距離は100ミクロンかそれ以下にする
。これ以上の距離があると、センサ92により着磁部5
の確実な検出が不可能になる。言葉を変えれば、角度検
出するために必要な電圧が得られなくなるということで
ある。透口8の大きさは、当然ながらセンサ92に磁気
薄膜4を前記距離だけ近づけたときに、磁気薄膜4が基
板7に当たらない大きさである。
As is clear from FIG.
It is connected to the printed wiring on the periphery of the That is,
The sensor 92 can be viewed from below through the opening 8. Then, a portion of the rotary plate 3 is inserted into the through hole 8 from below the through hole 8, so that the magnetic thin film 4 is brought as close as possible to the sensor 92. Specifically, the distance between the sensor 92 and the magnetic thin film 4 is set to 100 microns or less. If the distance is longer than this, the sensor 92 detects that the magnetized part 5
reliable detection becomes impossible. In other words, it becomes impossible to obtain the voltage necessary to detect the angle. The size of the opening 8 is, of course, such that the magnetic thin film 4 does not come into contact with the substrate 7 when the magnetic thin film 4 is brought close to the sensor 92 by the distance described above.

前記構成において、電動機1に通電することにより回転
板3は回転する。回転板3が回転すると、センサ92は
磁気薄膜4の着磁部5を順次検出することができる。セ
ンサ92にはトランジスタ13による定電圧装置により
、数ボルトの定電圧が印加されており、着磁部5の磁気
によシセンサ92の内部抵抗が変化する。この変化をボ
ルテージコンパレータ10で処理することにより着磁部
5を検出することができる。
In the above configuration, the rotating plate 3 is rotated by energizing the electric motor 1. When the rotating plate 3 rotates, the sensor 92 can sequentially detect the magnetized portions 5 of the magnetic thin film 4. A constant voltage of several volts is applied to the sensor 92 by a constant voltage device using a transistor 13, and the internal resistance of the sensor 92 changes due to the magnetism of the magnetized portion 5. By processing this change with the voltage comparator 10, the magnetized portion 5 can be detected.

そして、この着磁部5により得られた電圧をパルス化し
、このパルスの計数によって回転軸2の回転角度、およ
び単位時間あたシのパルス数を計数することによって回
転軸2の回転速度を検出することができる。
Then, the voltage obtained by the magnetizing unit 5 is pulsed, and the rotation angle of the rotary shaft 2 is detected by counting the pulses, and the rotation speed of the rotary shaft 2 is detected by counting the number of pulses per unit time. can do.

この角度や回転速度によって得られた信号を電動機の制
御に応用すれば、電動機を任意の位置に停止したり、あ
るいは速度も自由に制御できるものである。
If the signals obtained from this angle and rotational speed are applied to control the motor, the motor can be stopped at any position or the speed can be freely controlled.

前記実施例の構成によれば、基板7の透口8に直接セン
サ92を取付けることができるので、センサ92と他の
電気部品との接続をワイヤレスボンデ十りグによって接
続可能になる。
According to the configuration of the embodiment, the sensor 92 can be directly attached to the through hole 8 of the substrate 7, so that the sensor 92 and other electrical components can be connected by wireless bonding.

又、長いワイヤ、リード線を使用すると、外部ノイズの
影響を受は易くなるが、前記一実施例では、いわゆるリ
ード線がなくなるのでノイズに強く、誤動作のしない装
置を提供することができる。
Further, when long wires or lead wires are used, the device is easily affected by external noise, but in the above-mentioned embodiment, since there is no so-called lead wire, it is possible to provide a device that is resistant to noise and does not malfunction.

又、リード線やその接続部の断線の心配がない。Furthermore, there is no need to worry about breakage of the lead wires or their connections.

更に、本発明の一実施例のように、各種の電気部品とセ
ンサ92部を基板7の同一面(図示したものは上面)に
配置したので、基板7に施すプリント配線、電気部品と
このプリント配線との接続が一工程でできる効果がある
Furthermore, as in one embodiment of the present invention, various electrical components and the sensor 92 are arranged on the same surface of the board 7 (the one shown is the top surface), so that printed wiring and electrical components on the board 7 and the printed circuit board 7 are This has the advantage that connection with wiring can be made in one step.

又、透口8を通して磁気薄膜4を可能な限り接近できる
ので、それだけセンサ92の検出能力を高めることがで
きる。これは透口8の存在による。
Furthermore, since the magnetic thin film 4 can be made as close as possible through the opening 8, the detection ability of the sensor 92 can be increased accordingly. This is due to the presence of the opening 8.

もし、透口8がなければ基板7の厚さ、普通は数ミリメ
ートルよりも磁気薄膜4をセンサ92に接近させること
は不可能である。
If there were no openings 8, it would be impossible to bring the magnetic film 4 closer to the sensor 92 than the thickness of the substrate 7, typically a few millimeters.

センサ92をガラス基板91を用いないで、センサ92
単独で基板7上に取付けることができれば、磁気薄膜4
をセンサ92の図面上、上方から接近させることができ
る。しかし、センサ92は数ミクロンの厚さであり、線
材として製作することが不可能で、実際はガラス基板9
1の面に蒸着によって形成されている。
Sensor 92 without using glass substrate 91
If it can be attached on the substrate 7 alone, the magnetic thin film 4
The sensor 92 can be approached from above in the drawing. However, the sensor 92 is several microns thick and cannot be manufactured as a wire material, and in reality, the sensor 92 is made from a glass substrate 92.
1 by vapor deposition.

いいかえれば、この種のセンサ92を製作する場合は、
ガラス基板91が必要であり、センサ92の上方から磁
気薄膜4を接近させるときは、ガラス基板91の厚さよ
りも接近させることは物理的に無理である。
In other words, when manufacturing this type of sensor 92,
A glass substrate 91 is required, and when the magnetic thin film 4 is brought closer to the sensor 92 from above, it is physically impossible to bring it closer than the thickness of the glass substrate 91.

ガラス基板91の厚さは前述のように、薄くても0.6
ミリ程度である。センサ92と磁気薄膜4がこの程度離
れてしまうと、もはや、磁気の検出はできない。そのた
めに透口8を設け、下方から磁気薄膜4を近接させるよ
うになしたものである。
As mentioned above, the thickness of the glass substrate 91 is 0.6 at the thinnest.
It is about millimeters. When the sensor 92 and the magnetic thin film 4 are separated to this extent, magnetism can no longer be detected. For this purpose, a through hole 8 is provided so that the magnetic thin film 4 can be approached from below.

以上説明したように、本発明によれば、センサを基板の
透口に差渡して取付け、透口を通して下方から磁気薄膜
をセンサに接近したので、センサをリード線なしで基板
のプリント配線に接続できると共に、センサと磁気薄膜
を十分に接近させることができ、信頼性、製作性が高く
、しかも高精度の検出が可能な磁気検出装置を得ること
ができるものである。
As explained above, according to the present invention, the sensor is mounted across the through hole of the board, and the magnetic thin film is approached to the sensor from below through the through hole, so the sensor is connected to the printed wiring of the board without lead wires. In addition, it is possible to obtain a magnetic detection device that can bring the sensor and the magnetic thin film sufficiently close to each other, has high reliability and manufacturability, and is capable of highly accurate detection.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本発明の一実施例を示すもので、第1図は電動機
に本発明装置を取付けた場合の要部断面側面図、第2図
は同要部の平面図、第3図は第2図における■−■断面
図である。
The drawings show one embodiment of the present invention, and FIG. 1 is a cross-sectional side view of the main part when the device of the present invention is attached to an electric motor, FIG. 2 is a plan view of the main part, and FIG. It is a sectional view taken along ■-■ in the figure.

Claims (1)

【特許請求の範囲】 1、回転軸に回転板を取付け、この回転返に多数個の着
磁部を有する磁気薄膜を担持し、この磁気薄膜の磁気を
検出するセンサと、とのセンサを担持する基板とからな
るものにおいて、 前記基板の透口に差渡ししてセンサを取付けるとともに
、前記センサに磁気薄膜を近接させるために、前記透口
に回転板の一部を挿入したことを特徴とする磁気検出装
置。
[Scope of Claims] 1. A rotating plate is attached to a rotating shaft, a magnetic thin film having a large number of magnetized parts is supported on the rotating shaft, and a sensor for detecting the magnetism of this magnetic thin film is supported. and a substrate, characterized in that the sensor is mounted across the through hole of the substrate, and a part of the rotary plate is inserted into the through hole in order to bring the magnetic thin film close to the sensor. magnetic detection device.
JP13973681A 1981-09-07 1981-09-07 Magnetism detecting device Pending JPS5841310A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13973681A JPS5841310A (en) 1981-09-07 1981-09-07 Magnetism detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13973681A JPS5841310A (en) 1981-09-07 1981-09-07 Magnetism detecting device

Publications (1)

Publication Number Publication Date
JPS5841310A true JPS5841310A (en) 1983-03-10

Family

ID=15252173

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13973681A Pending JPS5841310A (en) 1981-09-07 1981-09-07 Magnetism detecting device

Country Status (1)

Country Link
JP (1) JPS5841310A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6423614U (en) * 1987-07-31 1989-02-08
JPH0365913U (en) * 1989-10-27 1991-06-26
JPH0516934A (en) * 1991-07-02 1993-01-26 Toyo Seikan Kaisha Ltd Pressure resistant container
JPH05246416A (en) * 1992-02-29 1993-09-24 Nissei Asb Mach Co Ltd Self-standing bottle of synthetic resin

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6423614U (en) * 1987-07-31 1989-02-08
JPH0365913U (en) * 1989-10-27 1991-06-26
JPH0516934A (en) * 1991-07-02 1993-01-26 Toyo Seikan Kaisha Ltd Pressure resistant container
JPH05246416A (en) * 1992-02-29 1993-09-24 Nissei Asb Mach Co Ltd Self-standing bottle of synthetic resin

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