JPS5844845U - 吸着ステ−ジ - Google Patents

吸着ステ−ジ

Info

Publication number
JPS5844845U
JPS5844845U JP14028481U JP14028481U JPS5844845U JP S5844845 U JPS5844845 U JP S5844845U JP 14028481 U JP14028481 U JP 14028481U JP 14028481 U JP14028481 U JP 14028481U JP S5844845 U JPS5844845 U JP S5844845U
Authority
JP
Japan
Prior art keywords
stage
shaft
outer periphery
center
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14028481U
Other languages
English (en)
Other versions
JPS6138189Y2 (ja
Inventor
永田　兼俊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP14028481U priority Critical patent/JPS5844845U/ja
Publication of JPS5844845U publication Critical patent/JPS5844845U/ja
Application granted granted Critical
Publication of JPS6138189Y2 publication Critical patent/JPS6138189Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図は本考案の吸着ステージの断面図、第２図は第１
図のｎ−ｎ断面図。 １・・・・・・ウェハー、２・・・・・・ステージ、３
・・・・・・外周突出部、４・・・・・・中央突出部、
６・・・・・・ヒータ板もしくは冷却板、７・・・・・
・円板、１１・・・・・・垂直軸、１４・・・・・・中
央孔、１５・・・・・・溝、１６．１７・・・・・・エ
アーニップル。

Claims (2)

    【実用新案登録請求の範囲】
  1. （１）上面に吸着用孔を有するステージの中央及び外周
    の下方に突出部を設け、下部底円板を中央においてステ
    ージのブロックに固定して、外周突出部との間を気密に
    し、かつステージの下面にヒート板もしくは冷却板を取
    付け、軸上部の中央孔と外周との間に複数条の溝を設け
    、底円板と軸とを固定した吸着ステージ。
  2. （２）請求の範囲第１項において軸上部の中央孔に空気
    を導入し溝を通し、て流出させる吸着ステージ。
JP14028481U 1981-09-21 1981-09-21 吸着ステ−ジ Granted JPS5844845U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14028481U JPS5844845U (ja) 1981-09-21 1981-09-21 吸着ステ−ジ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14028481U JPS5844845U (ja) 1981-09-21 1981-09-21 吸着ステ−ジ

Publications (2)

Publication Number Publication Date
JPS5844845U true JPS5844845U (ja) 1983-03-25
JPS6138189Y2 JPS6138189Y2 (ja) 1986-11-05

Family

ID=29933448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14028481U Granted JPS5844845U (ja) 1981-09-21 1981-09-21 吸着ステ−ジ

Country Status (1)

Country Link
JP (1) JPS5844845U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02116950U (ja) * 1989-03-07 1990-09-19
JPH08162508A (ja) * 1994-12-01 1996-06-21 Nec Corp シリコン・テスタの測定装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101408728B1 (ko) * 2007-12-18 2014-07-02 세메스 주식회사 기판 고정 유닛 및 이를 포함하는 다이 본딩 장치
KR101324711B1 (ko) * 2013-03-15 2013-11-05 쿠어스텍아시아 유한회사 반경 방향으로 순차적으로 배치되는 진공 공간에 진공 흡입홀이 교번하여 형성되는 웨이퍼 척 장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02116950U (ja) * 1989-03-07 1990-09-19
JPH08162508A (ja) * 1994-12-01 1996-06-21 Nec Corp シリコン・テスタの測定装置

Also Published As

Publication number Publication date
JPS6138189Y2 (ja) 1986-11-05

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