JPS584488A - Pattern position detector - Google Patents

Abstract

PURPOSE:To accurately detect a projected pattern to X or Y axis, by detecting the direction when a pattern is tilted and reading the information in a detection window toward the tilted detection angle. CONSTITUTION:An output signal from the 1st binary processing means 4a is detected for a tilt with a tip tilt detection means 15, and a reading angle is calculated with a calculating means 16 for in-window signal reading angle. In the means 15, as shown in Figure, scanning is made vertically and horizontally at location apart from lx1 and ly1 at right and lower side from a corner C1 to detect shifts DELTAx1 and DELTAy1 due to tilt. Thus, the calculation means calculates the reading angle. The address of a pad pattern P'1 in a window 11 is read out toward a tilted direction with a pad detection window signal reading means 17 with this output. Thus, the address of the center point is recognized from both x and y coordinates.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a pattern position detection device, which detects 4IK recognized Δ.
The present invention relates to a one-turn position detection device that can accurately detect pattern positions even when turns are arranged at an angle.

It is necessary to detect the position of the wires formed on the semiconductor IC chip during the automatic wire bonding process with high precision and at high speed, and these problems can be solved. In order to
Partial information of the turn is detected, a detection window is set at a predetermined position on the recognized/arm turn based on the data, and, for example, ? A flat turn position detection device is required to recognize turns such as turn, do, and arm turn.

The present applicant previously proposed a pattern position detection device as described above. This summary will be briefly explained with reference to FIGS. 1 to 6.

Fig. 1 shows a conventional arm-turn position recognition means. When the arm-turn position recognition means is the arm-turn pattern of an IC semiconductor, the IC chip of I4 turn to be recognized is placed on the mounting table l. , an imaging device 3 is provided on the IC chip f8, and an image of the IC chip f8t is taken through the imaging lens 2 of the imaging device. The output of the image pickup device 3 is processed by the binarization signal processing circuit 4 into a 200 million signal signal of the chips and nodes at a specific slice level.In the present invention, the processing circuit is It is defined as a second binarization processing means.

What is shown in FIG. 2 (1) K is a top view of lCf9f8 imaged by the image pickup device 3, and the J4 hood Δ denoted by reference numeral 8a.
It has turf. The imaged video signal is enlarged and imaged at a predetermined channel 8a as shown in FIG.

FIG. 2 (6) shows the case where the 6o video signal from the imaging device is processed by the 102nd value conversion processing means 4aK.
This shows a signal pattern 8k of a portion.

The signal from the *10 binary signal processing means 4& is subjected to image detection of an F8 outline by the detection means 5, and the detected position information is given to the detection window calculation means 6.

The detection window calculation means 6 includes terras 7'8 and 4. P pattern 8
Data is given from the memory 7a in which aO relative address data is stored and the memory 7b in which window size data is stored. Of course, in this case, please send this information to the above email address.
It may be given directly from sources other than 9.

A signal in which the position and size of the pad detection window are calculated by the detection window calculation means 6, and the /4-sight image is binarized by the second binarization signal processing means 4b.

is given to the yarn paths 1 and 2), and a Δ sheet pattern image is detected by the detection means 9. In this case, the detection window calculation means 6 is turned off)
The video signal of the Av do Δ turn in the 9th area is the first
Binarization processing is performed at a slice level different from that of the binarization signal processing means.

The pad pattern 8al rattan treated in this way is shown in Figure 2, where 11 is the detection window area and 81' is the non-recognition area Δg.
Do d turn! be. Note that 10 indicates recognition of the Δ and P positions.

The procedure for detecting the 9F image is as shown in Figure 3 (&). Scan the corpse image area diagonally in the direction of the arrow from the upper left corner, set the address cl in the upper left corner, and then as shown in No. 31) Scan the video area diagonally in the direction of the arrow from the bottom right corner C of the video area (Mu IICD) O.

! The chip position is detected using the address C, which collided with the signal, as the lower right chip corner. ・t+, the detection window is cut out at the tip corner C1t- the distance x1 from the chip corner input in advance as the base point to the center of the detection window. 71
A pre-entered size x centered on a distant position
pl, yPl) is set as shown in FIG. Then, the /4-1 tono turn within the detection window is recognized.

Since the *-v top turn image cut out within such a detection window has been binarized, the pad/g turn II theory is the /mother, de/false turn binary conversion as shown in Figure 5. The signal image pl/ is projected onto the X-axis and the X-axis, and the pattern width and its center tube are determined from the number of signal bits. In Fig. 5, 13am and 13b are the binary signals/mother turns that do not require recognition, 14 is the P-P flaw, and X-Y is the X-axis and y-axis projected turn of the binary signal Pt'. .

According to such a 9-turn position detection device, as shown in Fig. 5, if the tip is tilted, the signal image PK of the binary digitized / mother and de ∆ turns does not need to be recognized. When the 4-turn 13m of a binary signal such as a lead is near the above signal image, the projection of the X-axis and Y-axis / 4-turn becomes close to a trapezoid, and is projected vertically on the X-axis and Y-axis as shown in Figure 6. For example, the projection of the X axis/arm turn 2 mountains) 1
It has the disadvantage that it appears as a mountain and the detection accuracy decreases.

The present invention provides a turn position detection device which eliminates the above-mentioned drawbacks, and is characterized by detecting the direction of the tilted pattern when the pattern to be recognized is tilted, and The purpose is to accurately detect the projection pattern on the X or Y axis by reading the information in the direction of the tilted detection angle.

That is, the present invention includes an imaging means for imaging the recognized no-no-turn, a first binarization processing means for binarizing the evening video output from the imaging means at a first level, and a second binarization processing means for performing binarization processing at the level of [1]; a position detection means for detecting the position of the pattern to be recognized by the first binarization processing means; and a tilt detection means for detecting the tilt of the Wa/# turn to be recognized by the processing means, the second binarization processing means, and the predetermined mother turn recognized by the position detection means and the tilt detection means. The present invention provides an arm turn position detection device characterized by detecting the position and reading along the inclination. FIG. 7 shows a system diagram of the recognition device, and the same parts as in FIG. 1 are given the same reference numerals and redundant explanation will be omitted. The output signal from the first binarization processing means 41 is transmitted to the slag inclination detection means 15.
The inclination of the chip is detected, and then the in-window signal reading angle calculation means 16 calculates the signal reading angle in the window based on the detection output. In the above h and f inclination detection means 15, as shown in FIG. 8, the chip; The droplet is scanned in the horizontal direction at a position a predetermined distance t71 away, and the deviation and ΔA□ due to the inclination of the chi 9f are detected.

X! The reading angle is calculated by the in-window signal reading angle calculation means based on Δx1 and Δa.

Based on this calculated force, the address of the four turns P1' cut out in the window 11 is read out in a diagonal direction by the detection window signal reading means 17.
For example, to obtain the pattern width projected on the X-axis in FIG. 9, the length of a continuous bit string from above the projected bit signal X in the direction along the X-axis is counted, for example, tl·tl. If the length of the bit string is not greater than the pre-input standard pattern radius t, then shift it one line downwards and recheck the length of the continuous bit string, for example!
211@f! 11, compare these with t′o, repeat such operations, and only when you have obtained a continuous bit string larger than to, say ml, and n
Recognize l as the width of the turn. Then, the start point address X (and the end point address) of the bit string n1, and the l coordinate center point address of the 4th turn of the tonneau are determined.

Similarly, for the y-axis projection pattern, the width of the main turn in the KF axis direction and the 1-coordinate center point address are determined, and the center addresses of the arm and toe turns (10) are recognized from the l-coordinate center point address and the X-coordinate center point address.

As another detection means for detecting the position and inclination of the chip, as shown in FIG.

! Scan the memory screen of [18] and find the intersection address C11y*Ctm*Css+ of the scanning line and each side of the chip.
C14a C1l e C1@m CI? ICII
Detected s C11C1@eCII CII #C
1l cts s C14C@t midpoint 1-F,
GH may be calculated, and the center address 0 of the chip f8 may be determined from the address of the midpoint, and Cs*Ca may be determined at the chip's first and second addresses CI and Ch.

Since the present invention is configured as described above, even if the recognized turn is tilted, the reading can be performed by detecting the wax and performing the reading along the tilt of the projection of the X or Y coordinate. It is possible to accurately recognize a false turn, and the recognition is performed without being affected by the pattern O in the vicinity of the Δ turn to be recognized, thereby improving reliability.

[Brief explanation of the drawing]

Figure 1 is a system diagram of the conventional Noban turn position detection device, Atsushi 2.
Figures (a) to (d) are plan views of the object to be recognized showing the amount turning process in Figure 1, Figures 3 (, 3, and 4) (b) are explanatory diagrams of the conventional chip image detection means, and Figure 4 is an illustration of the conventional chip image detection means. 5 and 6 are explanatory diagrams of conventional detection window cutting means, and FIGS. 5 and 6 are X-axis and Y-axis projection diagrams of the conventional tonneau with and without tilted tonneau turns. FIG. A system diagram showing one embodiment of the pattern position detection device of the present invention, FIG. 8 is a line diagram for explaining means for detecting the tilt of a chip of the present invention, and FIG. 9 is a parable of the pattern position detection device of the present invention. FIG. 10 is a diagram showing a ninth other embodiment of the inclination detection method of the present invention. l... Mounting table, 2... Imaging lens, 3... Imaging device, 4ma4b... First and second binarized signal processing circuit, 5... Chip image detection means, 6...・Detection window calculation means, 7m, 7b...memory, 8...chv7''-8
m... Ritual delta turn, 9... Rinut pattern detection means, 11... Detection window area, 15... Chip inclination detection means, 16... Signal reading angle calculation means, 17. Rig. code detection window No. 0 reading means.

Claims (1)

[Claims] The image capturing means for capturing an image of the pattern to be recognized and the video output from the corpse image capturing means are subjected to binarization processing at 10 levels.
a binary conversion processing means for performing binary conversion processing at a second level; and a position detection means for detecting the position of the d-turn of the iron to be recognized based on the 102-valued signal. , an inclination detecting means for detecting the pattern to be recognized by the first binary signal; A pattern position detection device characterized by detecting a position and reading along a nod.