JPS5849434A - 超音波処理装置 - Google Patents

超音波処理装置

Info

Publication number
JPS5849434A
JPS5849434A JP14712981A JP14712981A JPS5849434A JP S5849434 A JPS5849434 A JP S5849434A JP 14712981 A JP14712981 A JP 14712981A JP 14712981 A JP14712981 A JP 14712981A JP S5849434 A JPS5849434 A JP S5849434A
Authority
JP
Japan
Prior art keywords
ultrasonic
space
inner tank
area
oscillators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14712981A
Other languages
English (en)
Japanese (ja)
Other versions
JPS621291B2 (2
Inventor
Norihiko Inuzuka
犬塚　敬彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14712981A priority Critical patent/JPS5849434A/ja
Publication of JPS5849434A publication Critical patent/JPS5849434A/ja
Publication of JPS621291B2 publication Critical patent/JPS621291B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/10—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing sonic or ultrasonic vibrations

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electroplating Methods And Accessories (AREA)
JP14712981A 1981-09-17 1981-09-17 超音波処理装置 Granted JPS5849434A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14712981A JPS5849434A (ja) 1981-09-17 1981-09-17 超音波処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14712981A JPS5849434A (ja) 1981-09-17 1981-09-17 超音波処理装置

Publications (2)

Publication Number Publication Date
JPS5849434A true JPS5849434A (ja) 1983-03-23
JPS621291B2 JPS621291B2 (2) 1987-01-12

Family

ID=15423208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14712981A Granted JPS5849434A (ja) 1981-09-17 1981-09-17 超音波処理装置

Country Status (1)

Country Link
JP (1) JPS5849434A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009242868A (ja) * 2008-03-31 2009-10-22 Toshiba Corp めっき装置、めっき方法、および電子デバイスの製造方法
CN103572344A (zh) * 2013-09-29 2014-02-12 杭州电子科技大学 超声波精密电镀装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009242868A (ja) * 2008-03-31 2009-10-22 Toshiba Corp めっき装置、めっき方法、および電子デバイスの製造方法
CN103572344A (zh) * 2013-09-29 2014-02-12 杭州电子科技大学 超声波精密电镀装置

Also Published As

Publication number Publication date
JPS621291B2 (2) 1987-01-12

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