JPS5859595A - Artificial light source - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an artificial light source device, and more particularly to an artificial light source device that can always maintain the light intensity on a surface to be illuminated at a predetermined value.

Artificial light S devices have recently come into widespread use as solar simulators and light sources for printing, but this! ! One of the required superimposed characteristics is that the light intensity on the irradiated surface can always be maintained at a predetermined value.

Here is an example of a conventional artificial light source device equipped with such a light intensity control means. lgl diagram κ is shown. In the figure, 1 is an artificial light source such as a xenon lamp, 2 is a condensing mirror (for example, an inertial reflector) provided on the back edge of the artificial light source 1, and 3 is a reflector that reflects the light from the artificial light source 1 and bends the optical path. It's a mirror.

4, an integrating optical system for directing and projecting the reflected light from the reflection-3 onto the irradiated surface 5; a collimator lens 61 for collimating the light projected from the 6Fi integrating optical thread 4; is a transparent plate provided around the outer periphery of the collimator lens 6.

In addition, a zoom lens system disposed between the 7fl reflecting mirror 3 and the integrating optical system 4, and an 8F'i incident lli of the integrating optical system 4
[This is an aperture with IVC arrangement. In addition, the surface on the light incident side of aperture f8 is made non-reflective.
-*L.

1014, detecting the light from the artificial light source 1 that is emitted outside the range of the condensing mirror 2, that is, the light that is not effectively used as an artificial light source. 11 is its lead.

Light emitted from an artificial light source 1 such as a xenon lamp is reflected by a condensing mirror 2 and a reflecting mirror 3 to form a real image of the light source 1 on an incident surface of a zoom lens system 7. The zoom lens system 7 further forms a reduced/enlarged image of the artificial light source 1 on the entrance surface of the integrating optical system 4. The light on the incident surface is projected onto the irradiated ilki 5 by the integrating optical system 4, as in the prior art.

If the focal length of the zoom lens system 7 is adjusted by known unreasonable means, the magnification will change and the size of the image of the artificial light source l formed on the entrance surface of the integrating optical system 4 will change. When the size of the optical system 4Klj increases, the intensity of the light incident on the integrating optical system 4Klj decreases because the aperture r8 of a constant size is provided for the incident light 11Ktj. As a result of this κ, the light intensity on the irradiated ths decreases.

Here, when the emission intensity of the artificial light source 1 changes, the detection output of the photodetector 10 changes.

Therefore, the detection output of the light detector 8110 is
a power supply device (not shown) or a drive device (not shown) for the zoom lens system 7; If you control the focal length of 7 by tell,
The light emission intensity of the artificial light source can be kept constant. , 1) Note that it is clear that the zoom lens system 7tl is not necessarily necessary and can be omitted.

However, when using a discharge lamp as an artificial light source, even if the discharge current is controlled to be constant,
The discharge becomes unstable in the vicinity of the discharge path, often causing the so-called ``fluctuation'' phenomenon. ′! There is also a phenomenon in which the bright spot of a discharge lamp, which is considered a virtual light source, moves along the electrode.

When such phenomena occur, the illuminance on the irradiated surface 5 fluctuates. However, in this case, the discharge current remains constant -
Since there is almost no change in the light emitted from the discharge lamp, the output power of the light output device 10 hardly changes.

As is clear from the above, when the above-mentioned ``1 fluctuation'' or the movement of the bright spot occurs, the value becomes K.

In the conventional device shown in Figures 1 & C, the output of the photodetector 19 and the brightness on the illuminated sliding door 5 are accurately %. L, without it, j(!xru0
・ “ ・ 4・ , J
15 Therefore, even though the black rate on the surface 5 changes during one irradiation, the output of the photodetector 10 does not change, and for this reason, the discharge current and zoom lens focal length are appropriate. Therefore, the illuminance on the irradiated surface 5 deviates from the set value, resulting in a drawback.

In order to improve the above-mentioned drawbacks and correctly detect changes in illuminance on the illuminated surface s, it is conceivable to arrange a photodetector on the illuminated surface as shown in FIGS. 2 and 3.

In FIGS. 2 and 3, the same reference numerals as in FIG. 1 represent the same parts, and IOA is a photodetector placed on the irradiated surface 5. In FIGS. Note that Figure 3 shows 1-1 in Figure 2.
gK is a plan view of the irradiated surface 5.

With such a configuration and arrangement, the photodetector 10AK
Therefore, the illuminance on the irradiated surface 5 can be detected correctly. Therefore, not only when the light intensity emitted from the discharge lamp (artificial light source) 1 fluctuates, but also when the above-mentioned "fluctuation" or luminescent spot movement occurs, the illumination on the irradiated surface 5 [ can be reliably held at the set value.

However, in this case, (1) The effective area of the irradiated surface is reduced.

(2) When placing the sample on the irradiated surface, care must be taken not to damage the photodetector, which reduces work efficiency.

This results in other drawbacks such as:

The purpose of the present invention is to eliminate all of the above-mentioned drawbacks, and to achieve the same without reducing the effective area of the irradiated surface or reducing workability.
There is provided an artificial light source device equipped with a photodetector that can accurately determine the illumination fIL of an irradiated surface.

In order to achieve the above object, in the present invention, a photodetector is arranged at a position that receives light projected from the integrating optical system that is outside the optical path leading to the irradiated surface. .

Hereinafter, a detailed explanation of the present invention will be given with reference to the drawings. FIG. 4 is a schematic diagram of an embodiment of the present invention.

In the figure, wJl, the same reference numerals as in Fig. 2 represent the same or equivalent parts. IOB is a photodetector placed at a position where it can receive light outside the beam projected from the integrating optical system 4 onto the irradiated surface 5, and IIB is its output lead wire.

As is well known, the integrating optical system 4#'i is constructed as an assembly of a large number of element lenses. In reality, some of the light K incident on each element lens of the integrating optical system is reflected a plurality of times at both end surfaces before being emitted.

Therefore, the photodetector 10B is placed outside the optical path where the light projected from the integrating optical system 4 reaches the irradiated surface, in other words, near the outside of the light beam projected from the integrating optical system 4 to the general illumination th5. Once placed, this photodetector IB10B will
It is possible to receive the light emitted from virtually all the element lenses of the integrating optical f4. In other words, with the above configuration and arrangement,
The photodetector 10B can receive light whose intensity changes in exactly the same way as the light intensity changes on the irradiated surface 5.

Therefore, using the detection output of this light detection 1610B, as described above with reference to FIG.
By controlling the drive device (not shown) and adjusting the current supplied to the discharge lamp 1 or the focal length of the zoom lens system 7, the illumination F#L on the irradiated surface 5 can always be maintained correctly at the set value. I will be able to do it.

Also, as is well known, the optical lens table (3)
There is always some light reflection. Therefore, the light beam emitted from the integrating optical system 4 and directed toward the collimator lens 6 also generates reflected light at its surface th. It is clear that the amount of this reflected light is proportional to the light intensity on the irradiated surface 5.

Therefore, as shown by the one-dot line 10C in FIG. 4, if the photodetector is placed at a position where it can receive the light reflected by the surface of the collimator lens 6 on the incident light side, it is possible to do exactly the same as described above. Light detection and constant value control of illuminance on the irradiated surface can be applied to the dust.

[Brief explanation of the drawing]

FIG. 1 is a schematic configuration diagram showing an example of a conventional artificial light source device,
Figure 2 is a schematic configuration diagram showing the main parts of another example of a conventional artificial light source device, and Figure 3 is! Plan view along line I-1 in Figure 2, No. 4
The figure is a schematic configuration diagram of an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Artificial light source (discharge lamp), 2... Condensing mirror, 3... Reflecting mirror, 4... Integrating optical system, 51
1. Irradiated surface, 6... Collimator lens, 7
...Zoom lens system, 10. IOB...Photodetector. Agent attorney Michi Hiraki, one of the most talented 1111! 1・' 22 Figure ■ 23 Kansai 4 Sensation

Claims (1)

[Scope of Claims] (1) An artificial light source, and a large amount of light that is converged by the #1e condensing mirror, which produces homogeneous light. An integral optical system for projecting an image onto the irradiated object, a means for controlling a light intensity IIL system for irradiating the irradiated object, and an integral optical system for projecting an image onto the irradiated object. A photodetector is placed at a position to receive the light projected outside the optical path leading to the irradiated surface, and the output of the light source I is placed. The light intensity control means applied to the irradiated surface is provided with means-2- for applying a negative intensity, and control is performed to maintain the degree of blackness on the irradiated surface at a set value. Artificial t, g*
Place. The artificial light source according to claim 1 (referring to claim 1), characterized in that the light 411 variable control area under the control of the general irradiation 1iK is one means for controlling the supply *'t* to one artificial light source. - Apparatus. ti *The light intensity control means in the irradiation direction is one of the zoom lens systems arranged between the condensing mirror and the integrating optical system.
The artificial light source device according to claim 1, wherein the artificial light source device is a dynamic device and produces a tIfII image. . (41) an artificial light source, a condensing mirror disposed behind the artificial light source, and an integrating optical system that receives the light converged by the condensing mirror and projects the homogeneous light onto the irradiated surface;
A means for controlling the light intensity on the irradiated surface, a collimator lens for collimating the light projected from the integral optical system, and a collimator lens arranged at a position to receive the reflected light at the light incidence of the collimator lens. It is equipped with an optical detector and a hand IR detector that negatively feeds back the output of the photodetector to the light intensity control means on the irradiated surface, and has a formula for controlling the illuminance of the 11 irradiated surface type to a fixed value of 1. Artificial light WIA device for controlling (5) The above-mentioned patent, which is a means for controlling light intensity in 1 irradiation 1 or a means for controlling a general electric field a to artificial light rays. The artificial light source device according to claim S4. (6) The artificial light according to claim 4, wherein the light intensity control means on the irradiated surface is a drive device for a zoom lens system disposed between the condensing mirror and the integrating optical system. Light source device.