JPS587152U - Optical member drive device - Google Patents
Optical member drive deviceInfo
- Publication number
- JPS587152U JPS587152U JP9930181U JP9930181U JPS587152U JP S587152 U JPS587152 U JP S587152U JP 9930181 U JP9930181 U JP 9930181U JP 9930181 U JP9930181 U JP 9930181U JP S587152 U JPS587152 U JP S587152U
- Authority
- JP
- Japan
- Prior art keywords
- guide bushing
- guide
- optical member
- hole
- traveling body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Or Original Feeding In Electrophotography (AREA)
- Optical Systems Of Projection Type Copiers (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の光学部材駆動装置を用いる露光装置の
概略を示す正面図、第２図は本考案の光学部材駆動装置
を示す一部切欠斜面図、第３図および第４図は同上装置
の要部を拡大して示す一部切欠正面図、第５図は同上装
置のガイドブツシュの他の実施例を示す英面図、並びに
、第６図は同上装置のガイドブツシュを示す側面図でア
ル。
３・・・・・・第１ミラー、４・・・・・・第２ミラー
、９・・間第１走行体、１０．１１・・・・・・ガイド
ロッド、１２゜１４・・・・・・コロ、１３・・・・・
・第２走行体、９ｂ。
１３ｂ・・・・・・ガイドブツシュ、９Ｃ，１３Ｃ・・
・・・・締付中間部材、９ｄ、１３ｄ・・・・・・締付
座金、９ｆ、１３ｆ・・・・・・ウェーブワッシャ。Fig. 1 is a front view schematically showing an exposure apparatus using the optical member driving device of the present invention, Fig. 2 is a partially cutaway perspective view showing the optical member driving device of the present invention, and Figs. 3 and 4 are the same as above. FIG. 5 is a partially cutaway front view showing an enlarged view of the main parts of the device, FIG. 5 is a front view showing another embodiment of the guide bushing of the same device, and FIG. Al in side view. 3...First mirror, 4...Second mirror, 9...First traveling body, 10.11...Guide rod, 12°14... ...Koro, 13...
- Second running body, 9b. 13b...Guide bushing, 9C, 13C...
...Tightening intermediate member, 9d, 13d...Tightening washer, 9f, 13f... Wave washer.
Claims (1)
けると共にこのコロをガイドロッドに載置し、上記走行
体の他端部に孔を形成すると共にこの孔に弾性を有する
ガイドブツシュを設け、このガイドブツシュをガイドロ
ッドに摺動自在に嵌合し、ガイドブツシュ側の走行体の
端部に駆動手段の駆動力を伝える光学部材駆動装置にお
いて、上記ガイドブツシュの両端部の外周部を傾斜面と
し、これらの傾斜面に当接するような傾斜面を有する締
付中間部材をガイドブツシュに当接させ、上記走行体の
孔の両側の壁部に締付座金を取り付け、これらの締付座
金と締付中間部材との間に弾性部材を配置し、締付座金
の位置を変えることによりガイドブツシュに対する押圧
力を変えてガイドブツシュのガイドロッドへの接触圧力
を調整可能とじた光学部材駆動装置。A roller is installed at one end of the running body that holds the optical benefit.
At the same time, this roller is placed on a guide rod, a hole is formed in the other end of the traveling body, an elastic guide bushing is provided in the hole, and this guide bushing is slidably fitted onto the guide rod. In the optical member driving device that transmits the driving force of the driving means to the end of the traveling body on the guide bushing side, the outer circumferential portion of both ends of the guide bushing is formed into an inclined surface, and the outer periphery of the guide bushing is arranged so as to come into contact with these inclined surfaces. A clamping intermediate member having a sloped surface is brought into contact with the guide bushing, clamping washers are attached to the walls on both sides of the hole of the traveling body, and an elastic force is created between the clamping washers and the clamping intermediate member. An optical member driving device in which the contact pressure of the guide bushing against the guide rod can be adjusted by changing the pressing force against the guide bushing by arranging the members and changing the position of the tightening washer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9930181U JPS587152U (en) | 1981-07-03 | 1981-07-03 | Optical member drive device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9930181U JPS587152U (en) | 1981-07-03 | 1981-07-03 | Optical member drive device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS587152U true JPS587152U (en) | 1983-01-18 |
Family
ID=29894042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9930181U Pending JPS587152U (en) | 1981-07-03 | 1981-07-03 | Optical member drive device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS587152U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61146647U (en) * | 1985-03-01 | 1986-09-10 | ||
| JPS6231740A (en) * | 1985-08-05 | 1987-02-10 | Toyoda Autom Loom Works Ltd | Transmission in fork-lift |
| JPS63111345A (en) * | 1986-10-28 | 1988-05-16 | Fuji Tool & Die Co Ltd | Manual transmission for vehicle |
| JPS63111346A (en) * | 1986-10-28 | 1988-05-16 | Fuji Tool & Die Co Ltd | Manual transmission for vehicle |
| JP2008032942A (en) * | 2006-07-27 | 2008-02-14 | Murata Mach Ltd | Image reader |
-
1981
- 1981-07-03 JP JP9930181U patent/JPS587152U/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61146647U (en) * | 1985-03-01 | 1986-09-10 | ||
| JPS6231740A (en) * | 1985-08-05 | 1987-02-10 | Toyoda Autom Loom Works Ltd | Transmission in fork-lift |
| JPS63111345A (en) * | 1986-10-28 | 1988-05-16 | Fuji Tool & Die Co Ltd | Manual transmission for vehicle |
| JPS63111346A (en) * | 1986-10-28 | 1988-05-16 | Fuji Tool & Die Co Ltd | Manual transmission for vehicle |
| JP2008032942A (en) * | 2006-07-27 | 2008-02-14 | Murata Mach Ltd | Image reader |
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