JPS5873840A - Optical characteristic measuring apparatus for optical system - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an apparatus for automatically measuring various properties of an optical system, such as the spherical refractive power of the optical system, the cylindrical refractive power and its axial direction, the prismatic refractive power and its base direction, do. The detailed raw materials and examples of the present invention mainly relate to the method and apparatus for measuring the above-mentioned properties of ophthalmic lenses. This does not mean that it is applied only to so-called lens meters, but can also be used to measure the optical III characteristics of lens optical systems that are widely used for optical functions.

In recent years, the so-called automatic lens meter that objectively determines the optical characteristics of Hansei lenses, such as the spherical refractive power, cylindrical refractive power, and its axial direction, has been developed. ! lI! Kame is being suggested by Yuzu. One of them is US-registered #'l-g3dzao, S25. This device based on the American IJI needle captures parallel light.

It is intended to determine the basic characteristics of the test lens from the polarization of the emitted light by making the light incident on the test lens □ parallel to the optical axis of the test lens. A mask is arranged so that the branch point aperture is located off the optical axis of the lens to be tested, and a detection surface 't- is provided at a predetermined distance from the mask in the optical axis direction, and the light beam passing through the aperture of the mask is detected. Detects the coordinates of the point where the laser beam reaches the detection surface, and calculates the polarization direction and false cover of the incident light by comparing these detected coordinates with the coordinates of the aperture on the mask. , is configured to know the optical characteristics of the object to be tested. In this case, it is necessary
! In order to obtain accurate information, a minimum of three apertures are required in the mask.

In the device based on this US patent, it is necessary to accurately detect the dark point-to-point correspondence between the apertures on the mask and the arrival point on the detection surface, and each aperture must be arranged in a plane so that the emitted light beam must be made to be a non-coplanar luminous flux. For this purpose, it is necessary to scan a two-dimensional plane, #cilL
But overall, it has to be expensive.・'Also, it is necessary to solve the S-element simultaneous equations f using the coordinate information of at least three points, and the calculation mechanism becomes complicated and expensive.

Things that can solve the huge amount of information processing that accompanies the emergence of such a co-dimensional plane include American nationality needles, 1gO,
There is a device described as ``3ko5-ttK''.

This Vt wrinkle is created by focusing light from a point light source near the lens to be tested, selecting the rays of light that are parallel to the optical axis out of this light beam using a rotating disk with a special central turn, and then The refractive characteristic of the lens to be tested is determined by 11jV from the rotation angle of the rotating disk. However, in this & Tortoise, the Noreen on the rotating disk is 1 & axis in the non-electrical direction, and the detection of its rotational position has a meaning of cost for the non-electrical model. There will be major changes in measurement and installation, such as rotational position detection accuracy and rotational position detection accuracy.

The present applicant has solved the above-mentioned drawbacks of the conventional iron directivity, and has made it possible to perform the detection and the subsequent TIIL calculation relatively easily.
-30222, %IIIA Introduction 31. - Proposed in gs'190. Those inventions have a tilt angle of 0 and a pitch P
When the plane light beam generated by the parallel one-hole aperture of the square group is passed through a certain optical string, even if its narrow angle 0 and pitch P change, I! iL Yarisha This is based on the physics concept of having no problem with each method, and it includes a collimator means that converts the light beam from the light source into a parallel light beam, and a collimator means behind this collimator lens that is arranged in different ways. A mask means formed with an open curve or a turn consisting of a pair of parallel beams is disposed, and an inspection lens is disposed between this mask means and the collimator 7, and the refraction of the lens to be inspected is The light flux deflected by the lens and traced by the mask means is detected by mutually intersecting linear sensors disposed within the focal length circumference β of the test lens, and a projected image of the mountain line opening/crosstalk on the mask is detected. The object of item C) is to provide an optical system for an optical system which is subject to deterioration in refraction.

A third object of the present invention is to provide an automatic lens meter in which the m@ri MA stage is particularly used in an automatic lens meter, and which has a short side leg time -1 and a high accuracy in L2 measurement.

A third object of the present invention is that there are no mechanically movable parts inside the iron fitting, which makes it easy to manufacture the iron fitting. An object of the present invention is to provide an automatic lens meter, which is a device for measuring the optical characteristics of an optical system that does not necessarily require a wide range of values.

In other words, the structural features of the present invention include: a holding hand plate that holds a test optical system; a light source that has a large number of light emitting units that project a luminous flux onto the test optical system essentially in a second order plane; Luminous flux t- from the light distribution source
Select #/#Lil1 consisting of at least two parallel calf turns! / 4 turn park and #m / 11 thin arm turn / turf and at least one parallel straight line with its distribution U direction 1 different / # turf consisting essentially of a group of turns A luminous flux limiting hand plate is provided in the same plane between the front light distribution source and the 1111 distributed test beam, and the 1st and 2nd a dye source means for guiding only the light beams made into ten-stroke light by the system to the aperture means; a detection means for detecting the light that has passed through the aperture level; and the detection means directs the optical axis. Based on the luminescence topology information of the luminescence unit of the light source when detected, the first and third turn groups are determined based on the kinship locus on the ligand surface, such as fc, -r. 1. A light-year system optical characteristic measuring device characterized in that it comprises a calculation means for calculating the optical character characteristics of a light-year optical system.

Hereinafter, the present invention will be described in detail with reference to the attached inner surface.

A spherical lens, a cylindrical lens, or an astigmatic lens VC When parallel light rays are incident on the lens, the original light is refracted according to the refraction ratio of the lens. Here, a spherical lens is a lens that is made up of λ spherical surfaces, a cylindrical lens is a lens that has at least one surface between cylinders, and an astigmatic lens is a lens that has at least one surface or a toroidal surface. This is well known. Now, a toroidal surface has a maximum radius of curvature kj:□' that is perpendicular to each other, and a joint curve 1!
I-Ushizumi is also connected to 41. The main f& line. A spherical surface can be thought of as a toroidal surface where the radii of curvature of the two orthogonal main edges are infinite. 9E can be considered as a special case of a toroidal surface, such as a toroidal surface or a cylindrical surface. In the following detailed description of the present invention, an astigmatic lens consisting of a toroidal surface will be taken as an example, and spherical lenses and cylindrical lenses will be treated as special cases.

When a parallel leading edge is incident on the test lens, which is an astigmatic lens, and the ray after refraction is considered, if the incident light is a circular bundle of rays, then the exiting ray is an elliptical beam! It is known that it becomes FIIjk, but the incident light? In the case of kt'' direct kfL4 flux, the emitted ray flux becomes a planar luminous flux (if there is a cylindrical refractive power, it becomes a 1 twist 7'C" plane luminous flux), and the traveling direction and tilt of the luminous flux are as follows. Although it changes depending on the optical characteristics of the optical system, the basic property is that the projection object onto a plane perpendicular to the incident parallel ray is always a straight line.

If we consider a light source that emits a diffused light flux to a location corresponding to the projection law based on the principle of optical fusion inversion, some of the light flux emitted from this light source has the planar light flux; There is a pre-shutdown that will advance to the next stage. In other words, if we put a plane in the direction of F9T away from the test lens and consider a large number of light-emitting points that create a divergent light beam on that plane, some rays in the light flux from these light-emission points will be emitted after passing through the test lens. , is changed depending on the optical characteristics of the lens to be tested, and after the inspection/repair lens is pulled out, it becomes a ray parallel to the optical axis of the lens to be tested. A geometric locus formed by connecting a large number of light emitting points forming such a light ray coincides with the MiJ projection image and is always a direct ←. The present invention utilizes this principle to measure the optical characteristics of a test optical system. Here, the refractive axis property means that the toroidal surface of the lens to be tested has a shape b5. The refractive powers of two narrow royal diameters with maximum and minimum radii of curvature of l-, the inclination angle of these two principal meridians from a predetermined reference line, and the geometric center of the test lens. The amount of deviation from the optical center is the setting deviation of the tested lens.
is the amount of prism that represents

[2] However, if a mask is placed in a straight chain of the lens to be tested and various diverging light beams are made to enter the lens to be tested, then the emitted light beam is restricted by the mask and the light beam becomes a parallel light beam. In the case of determining whether or not this is the case, another refractive physical property, that is, two shear factors in both refractive directions are added.

The addition of this new refractive characteristic means that the relationship between the incident light flux and the exit light flux changes due to a difference in at least one of the radius of curvature of the seventh surface, center thickness, and refractive index of the lens to be tested. ing. This shift factor gives unnecessary uncertainty to the measurement of the refractive properties that the present invention attempts to complete. This addition of a shape factor can be avoided by limiting the divergent ray bundle from the light beam before passing through the lens to be tested. In other words, it is possible to know the refractive properties of the tentative lens that are not affected by the cyano factor by detecting that a general ray bundle passes through a certain citron aperture. As described above, in the present invention, the mask means having an aperture/4' turn km can be used to
There is a must-have for everyone.

Consider an optical surface S in which a large number of light emitting unit points S1, S, , S, . . . So are densely distributed in VC. -111■-1 Also, consider the system X. A mask M^ is arranged with its center aligned with the device optical axis 0K4j.

This mask MIC is formed as an opening so that parallel @s#L consisting of at least two straight lines with a pitch P intersect with the X axis at an inclination m.

Further, behind the mask MA+7), there is a test lens-eT having a first main radius line R1 having a minimum curvature median diameter and a first principal radius line R1 having a maximum curvature median diameter separated by a distance Δd. , whose optical axis σ is from the measurement optical axis 0 to the measurement optical axis 11°K! 0゛-"1..'"lK・+o-'t'mn-cy
si″4KEv, shifted by tear −H in the X-axis direction, and meridian R2 is arranged obliquely with the X-axis.

Furthermore, behind the test lens (■) is a condenser lens (CL) whose focal point is located at a pinhole (PH) located on the optical axis (O).
is arranged, and behind the pinhole PH, a photodetector probe DT is arranged to detect the light beam passing through the pinhole PH.

A large number of light emitting unit points S, S2, S,... on the light source surface S.
Some of the many light rays included in the light beam 11 emitted from So passes through the i1 ray opening and turning of the mask M^ and is incident on the test lens TK. Some of the light rays incident on this test lens T are affected by the optical characteristics of this test lens T, and after exiting the test lens, a parallel light ray PL becomes a flat material for light -〇. Become. This parallel light beam PL, and only it, is allowed to pass through the pinhole PH by the condenser lens CL, and is detected by the detection means DT. This parallel light 1iPL is composed of a focal line F of the first principal radial line R1 of the lens to be tested and a focal line f of the first principal radial line R1.
Injection from liF2, parallel straight i11# of mask M^
This is the same ray as the ray that passed through 1-L. A light ray PL is emitted from this raw salt in the opposite direction, and then a light beam PL is emitted from the light emitting point S, and a locus formed by connecting the light rays PL in a pneumatic manner on the gold light source #US is formed by a group L'
By knowing this, you can know the optical characteristics of the lens being tested.

And this trajectory +[)L' has a pitch of P'KS
Also, the slope from the X navy blue is M.

In this ζ, the distance from t mask MA to focal line F is 1
Z2! , the distance to the bifocal line F2, the slope M of t is expressed by the following equation.

...-(1) Also, the pitch P' is O...@(2) It is expressed as

Equations (11, (21)) If we trace the changes in these groups by focusing only on their inclination and pitch, what is related to these changes is the refractive power of one 1 &!! , it can be seen that the amount of prism related to the deviation 1iEH%Ev is only the inclination angle and is not involved in any way.This means that the calculation of the prism lid can be performed by a calculation means completely different from the refractive power of the test lens. 9 means simplification of arithmetic processing and shortening of operation S#.

! i1! During the actual measurement, from Equations (1) and (2) rc, the trajectory @ straight #parallel straight of i group L'? In order to determine the refractive characteristics of the test lens T from the change in its inclination and pitch with respect to the IM group, the formula (1), +21, o unia is z,, 12%.
Since there are three of θ, it can be seen that solutions to the fringe equations (1) and (2) cannot be obtained by changing only one ten-line orthogonal group.

Therefore, in reality, the light 1MP "1□'□Li irradiates, which passes through one parallel straight line group together with the other seven parallel straight line groups, and becomes parallel to the optical axis 0 by the '1 comfortable lens T. It is essential to know the inclination of the trajectory straight line group of the light emitting unit and the change in pitch P'7-.This configuration is shown in Figure 1. A group of parallel straight lines with a slope m2 and a pitch P2, and a group L2 of parallel straight lines with a slope m2 and a pitch P2.
After passing through this aperture and exiting the test lens, the trajectory created by the light emitting unit emitted from the parallel light leg PLI has an inclination m,', a pitch P, ′ parallel locus [1i1 group, I and slope m2′
, a group of parallel locus straight lines with pitch P2', / is formed. From these two sets of locus direct 111 groups, two sets of equations (1) and (21) are obtained, totaling DA equations, so the (11, 1
2) The unknowns θ, zl, and z in the equation can be found and b. Second Mankishiki Mill, (Solving equation 21, 21.23,
If calculating # is complicated in arithmetic processing and increases processing costs and processing time, it is better to use the following intermediate deductive method.

Figure 3a shows a turn opening L (,,'' 2k) formed in the first mask MA.The slope of L is m,
Degetsuchiwo i'□'? ,L, has a slope of m2 and a pitch of P
2 is the same as the Brown 2 diagram. Now, the e false distance of the parallel straight line group, of / book 'TI'' to pitch P,
P, parallel HU■, distance & fP, parallel 1ml
! Think about armor.

Another parallel and straight 1m! The distance line quadrilateral uvwg is shaped JjlL from / book '21 of the 11 houses L2, and the xO-y of these four vertices, the virtual coordinates of the coordinate thread are U(.
), V(.x,,.y,),w(ox,,.y,),Q
(0×as.'J4).

Figure 3b is % ah 3 aperture a in figure a? This is a diagram showing a group of parallel locus straight lines, ′, L12 in the light source direction corresponding to the parallel straight line groups L1 and L2, which are turns, and LX is the slope m
'Pitch p, I, L12 has slope m2', pinch P,'
This change is the same as in Figure 2.

This trajectory thI edge group is x
A linear system in which a large number of light-emitting unit elements are arranged in a straight line on an xl-yl locus that has an origin σ at a point translated by ξ in the axial direction and DA in the y-axis direction, and intersects at a diagonal angle r. Assuming that light emitting units on the light emitting element array S2 are detected, the linear light emitting element array S is detected.

A parallel locus straight line is formed by connecting the light emitting unit points A, H, C, and II of the linear light emitting element array S, and the light emitting unit points H, H, G, and H of the linear light emitting element array S. Form a shadow. This is the light emitting unit point, 7 of the trajectory 1!1##+1. ′,
Also, from the light emitting unit points C and G to L2. ′ is calculated by calculating the equation. Similarly, from the light emitting unit points A and E, the other one of the trajectory Iw group, 2', the light emitting point 2, Chikarari, 2
′ by calculating each equation, and from this, 1.
The pitch p, I of ', L12' and the pitch P2' of L□', L□' can be calculated. Then, from , ′ to pitch P
,' is multiplied by the magnification in Figure 3a and N times the magnification ・eP
,' can be considered as parallel #U'V', and similarly fP, 'parallel mqw of pitch, L7. ' From gp 21 bitutino parallel string v'w can be considered as hP2'pitch's 1000 line string U'Q' e, and these parallel, IILPV', Q'V/, V'VI/, U'Q'
-1) hukUB'F-rl quadrilateral υI VI Vl
/ qt can also be determined. The virtual coordinates in the x-y coordinate thread of the four TJ points of this virtual parallelogram are 'Lj
'(x,,y,),V'(x2,y2),W'(x
,, y3), Q'(x4, y4), then the virtual parallelogram UVWQ in Fig. 3a and the virtual parallelogram vv'vrq in Fig. 3b correspond, and this change is exactly due to the lens under test. No bend? It is related to r% property.

Now, the following coefficients and equations are defined for the virtual q point.

Here, 1, j, and ' are assumed to be 1 or k with 1 as the reference. From the virtual point, there are l possible combinations.

Using the above equation (3-), zl, 12 regarding the refractive power of the 12 main trouts can be expressed by the following quadratic equation.

-＾lk'i J -BI jCik) (-)+(A
ikBl j −AI jBik) =0...(
3b) ζThe bracket expression for the above coefficient is now defined as follows.

(9% Q) E g) 1QII, -QBI) 11゜ [9% q) = - (qSp) Here, assuming that plq is either A or 8%C10, equation (3b) is ...(3C) It is expressed as. '□ d is the distance 4 between the mechanical lens T and the mask MA as shown in FIG. 1, and Z is the distance 10 between the mask MA and its focal point.

Therefore, as shown in No. 2-, there are two parallel trajectory groups of koji, I,
Determine the pitches P1', P2' and slopes m1', m2' of L12, create a virtual parallelogram as shown in Figure 3b, and form the parallelogram by selecting the vertices and using the two equations (3). By solving the following equation, the root 2. ．． 2. can be found. This root 2. ．． 2. From the first principal diameter of the lens to be tested!
! Rw and the refractive power of the main meridian R2, , D, can be determined as each.

Also, the angle θ of the cylinder axis (M/main diameter IIIR1 in Fig. 7)
The relationship between the angle θ formed by θ and the x-axis is θ=9+900.

)teeth ・・１・(5) It can be found as

As mentioned above, in Figures 3a and 3b, to obtain the virtual parallelogram, the pitches P, , P2, P, ', and ~' are multiplied by arbitrary magnification e% 's gs ', respectively. are virtual parallelograms U, V, W, with e=/, g=/
Q, and HiU(1'v@'W, 'Q', but the processing can be simplified accordingly.

Also, the coordinates of each vertex of the virtual parallelogram are x. -y0 orthogonal coordinate system and x-y orthogonal coordinate system, but the oblique coordinate thread x
'-y'M! ! Considering the collar thread, the x-y orthogonal coordinate system and x
As shown in Figure 1, the curves between I and I oblique kneeling threads are such that the x-axis and x'-axis intersect at an angle α, the y-axis and y'-axis intersect at an angle β, and xI −, I The origin σ of the coordinate system is x−yI
The M thread is shifted by ξ in the X-axis direction and η in the y-axis direction from the zero origin σ. At this time, the locus 41I from the X/ ++ yl coordinate system to the x-y coordinate system! From equation (3) above, f conversion is ^i = (oxi -x+) - (OxJ - x 1) Substituting equation (6) into this, ^13 = ((. ξ
)-(x'1slnα+y'5inlI-Fξ))-
[(o” yslnα ten. y'1slnβ+ξ) −(
X'l5lnα−y'JSinItenξ)) = sinα((.X' 1 − X' cloudy)−(
. X' j -X' ρ) 10Sinβ(□y'1-
y'l) - (.y') - y'3)) = A' 1
3$inα+B'13sinβ...(7a) 8 again
13 = (oyl −yl) −(.V3− Vl)
Then, using the same calculation as above, Town 1 = Cogβ1゜y'H-'/'H) - (.l'
j −Y' January −cosα((.X', −X'i
) −(.X'j −X'j))"= 8' 1C(H
! β-^'lIC08a...(7b) Similarly, C11= C'17Slnα+D'13sinβ −
-----('7C)OHJ: D' I JCO$β
-C'1co$α...(7d).
・'1゜Here [C0D], (B, C), (AID), [^, &
), formulas (7a) to (d)% formula% ) ) Similarly, (B, C) = (sinαsinβ+sin7yc
osα) (A', 8') (A, D) = 5inaco
sβ(A', D')-sinαcosa(A'
, C')+1nβcosβ(sl, □I)
−5lnβcosα(By, (:,I)(A,
B) = (sin α cos β + cos α sin β) (
A'*s') and (B, C) - (^, D) = (sin α cos β + c
osαsinβ)((s', c') - [A'
, D' month Therefore, the formula (3C) is '°3''bi・,)゛+[^',B'))=0 ・・・・・・(8)
So, what is in parentheses is the quadratic equation of formula (3C) and the 4-form, and from this, it can be seen that the quadratic equation of formula (3C) is an invariant equation that is independent of how the coordinate system is taken. . This means that there is a very large degree of freedom in the arrangement of the IJ near light emitting element array as a light source. The orthogonal phase transformation and alignment of the original axis can be made irrelevant to both feet II degrees without considering them at all. When measuring, parallel and straight one mother turn L1, L2 without inserting the target / lens into the IM optical system.
11 - Passing oblique coordinate thread ytl-yl coordinate x'@1
Detect the light emitting point positions of the linear light emitting element arrays S, S2 arranged on the y' axis, set the virtual parallelogram %UVWQ created from this detection as is virtual parallelogram, and then measure it. Insert the lens to be tested into the measuring Kuji thread, and then connect the measuring foot virtual parallelogram 1 No. IV' W Q'.
Second, the refractive characteristics of the compound lens are determined from the reference virtual parallelogram and the measuring virtual parallelogram. In this case, the inner parallelogram can be arbitrarily selected as a diagonal thread XI-y
The coordinate system t- is considered only for the l coordinate thread VC, and this oblique coordinate system It is an invariant equation that has no relation to the quadratic equation of It has a very effective effect of not doing so.

The cylindrical axis direction of the lens to be tested is given by equation (5).

Equation (5) is the equation when the orthogonal coordinate system x
If there is a luminescent cord array in '-y', use the following formula to ice the result with the oblique coordinate thread using @M coordinate thread [
It can be calculated as 1 as the inner column axis when 7.

e=-tan Ko Calligraphy/proboscis...(9) The cylinder axis θ is determined from θ in equation (9) above. θ=θ+900 It is also recognized as

Next, the principle of measuring prism refractive power will be explained based on Fig. S.

×. -yo, the calculation of the prism value using the x-y orthogonal coordinate thread is the parallel @ line IFL of pitch P, which is arranged under the same angle ir with respect to the yo axis, and the parallel kinship group L2 of pitch P2. It is best to remove one of the seven lines from each of them and take them so that the west apex of the virtual parallelogram υVWQc is aligned with the x0 axis and the yo axis. That is, if the virtual parallelogram is made to be symmetrical with respect to the measurement optical axis 0, the center of this virtual parallelogram is aligned with the measurement V optical axis O. Next, measure the parallel trajectory 1iL per group LI by 1 test.
Determine Ll, ゛,...:.

Subtract e'P', 'K・some mmU'V' from the parallel locus straight line i1'''
/ Q', gpI, ψ, h'P'2 te U'Q', subtract 8 k-imaginary parallelogram u'v'w' q7. This virtual parallelogram &! ! ! In the X-y coordinate system, the l vertex is hi(X, e y,), ψ(X2+V2), W(xs
, y, ), Q'<x4.y4> Tonashi, the horizontal prism amount P8 and the blood purification prism amount P■ from the four vertices of the eel
is expressed by the following equation.

Here, d is the distance between the grudge lens and the mask surface.

In the following case, when measuring in the oblique coordinate system x/-y/, from the principle of symmetry, the initial virtual point is (.X
, t. y,)(.x2..y2)(.xs,.y,)1
(.×4..y4), and the horizontal prism position P, the vertical prism amount P%/i, and H% are each given by formula a. If we convert the happy I formula using the 16th formula, then we convert the p1 extra large similarly using the K Jig 16) formula.
It becomes L. The prism positions PH and Pv are the locus Il(.''1, oV'- in the oblique coordinates of the initial virtual A(x y) when no inspection lens is inserted, and the uncorking lens is placed in the measurement system. Since it is the difference from the coordinate (x'1% y'-) in the oblique coordinate system of the measurement coordinate when inserted, the (II, 6th
4) From the equation, the following equation is obtained.

da d This formula represents the prism value.

As described above, in the present invention, the refractive power of the lens to be ground can be measured using an invariant equation that is independent of the coordinate system, but oblique-orthogonal coordinate transformation is required for the cylinder axis and prism value. Equation 1, (requires conversion of Equation 15,
If the calculation i/j II is complicated in structure, the column fixed position 411 (X', y') in the oblique coordinate system is converted to IK (after orthogonal coordinate conversion using formula 61, the calculation formula using the orthogonal coordinate system is (5),
The astigmatism axis and prism value kjl may be obtained using the trout formula.

In this way, in the present invention, the parallel fL groups 1 and L2 on the mask are measured without inserting the test lens into the optical system.
A reference virtual parallelogram symmetrical with respect to the optical axis 0 is created from , and then inserted into the test lens system #j constant optical system, and a similar detailed virtual parallelogram is created from the parallel locus normal N image. This means that the norism filter can be calculated, and in this calculation, the refractive power of the lens to be tested (m/%#i2-principal diameter -) and its inclination angle can be measured independently without knowing anything. With a conventional lens meter, this is
Lt) II# output is very advantageous considering that it could only be calculated by knowing the refraction time of the lens to be measured, and the step of calculating the refractive characteristics of the lens to be measured. Since the prism value extraction step and the prism value extraction step can proceed independently and in parallel, the calculation time can be significantly shortened.

Further, the present invention is not limited to a so-called lens meter for measuring ocular lenses, but can be widely applied to devices for determining optical characteristics of optical systems.

Is it a virtual parallelogram? When creating, the straight line L11,
L21 K A virtual parallelogram tube was created by multiplying the pitch In of the @line group to which those one gun belongs and drawing a virtual straight line sr in parallel to the line #L52, '21. How to create a virtual parallelogram This is not something to be confused with, but tI43
IwiIL1. , the slope of angle β *1
Motsu virtual ■Iwao! 2. r, and the angle α with respect to the straight line L*zK
の矧=i virtual direct WiI no 21 ``Saku'1: [ 9, this work...': virtual iik #-611, form 21
``It goes without saying that a virtual parallelogram uvwqi may be created based on this VC, but the measurement principle of the present application will not change from this VC.

An embodiment of an optical lens refraction measuring apparatus based on the measurement principle described above will be described in detail below with reference to the drawings.

FIG. 6 is a diagram showing the arrangement of the optical system of the apparatus according to the present invention. In the figure, a linear light emitting element array 2.8t=t, which will be described later, is alternately emitted and scanned by a rotational operation circuit lK-. The linear light emitting element array 2.8 is an array element formed by linearly arranging a large number of minute diodes.
~-〇〇〇Elements arranged in a straight line are used. A part of the luminous flux emitted from the Y light emitting element array 2 is transmitted through the semi-transmissive and semi-reflective surface 5a of the half mirror 60 and is irradiated onto the mask 4, and the remainder is transmitted by the hand and is transmitted and semi-reflected [5-
It is reflected by the beam and irradiated onto the mask 4b.

Masks 4m and 4b6'j are shown in Figure 7a and Theory 7b, respectively.
A mask elbow turn is formed as shown in the figure.

That is, the mask 4aK has a slope m2 and a pitch pt.
) 1,000 strokes consisting of straight 1jl-rono and turn are 11!
Ii groups 20 are formed, and at least one straight line pattern 22 among them is a thick opening/main turn in order to distinguish it from other straight line main turns. In the mask 4bK, a parallel straight line group 21 consisting of a plurality of straight open arm turns with an inclination ml and a pitch p is formed by tilting the arrangement direction of the straight line ego of the mask 4a by an angle θ, and at least one of them straight line pattern 2811; t mask 4
A is similarly formed as a thick open pattern in order to distinguish it from other line III arm turns. On the other hand, a part of the light beam emitted from the linear light emitting element array 8 is gradually reflected by the semi-transmissive and semi-reflective surface 5a of the half mirror 6 to the mask 4aK, and the remaining part is transmitted to the hand and transmitted to the mask 4b. is irradiated.

For mask 4, shutter 174 = open, shutter 16
When M is closed, its optical conjugate image is transferred to the virtual mask surface M by the relay lens 8 via the mirror 6 and the half mirror 7.
A K image is formed. Similarly,
The mask 4b is also optically conjugated by the relay lens 8 via the mirror 9 half mirror 7 when the shutter 16 is open and the shutter 17 is closed. is imaged on the virtual mask surface M^. -10,000, linear light emitting element array 2.8U This relay lens 8 forms images on the virtual light source surface S so that their optical conjugate images intersect with each other at an angle r. The virtual mask plane M^ and the virtual light source 1+Sti are separated by a distance d on the optical axis 0 of the apparatus, as in the case of FIG. virtual mask thIM
After a distance Δd from ^, the test lens 10 is held by the test lens holding means 11.

A mirror 1B, a pinhole 14, and a condensing lens 18 having a focal point behind the position V of the pinhole 14 are disposed behind the lens 10 to be tested. A light receiving collector 15 is arranged at the location of the pinhole 14.

17 and is connected to the drive-arithmetic circuit l.

First, the shutter 17 is opened, and when the shutter 17 is closed, the linear light emitting element array 2 is emitted. The optical path of the first optical path 152 consisting of the mirror 19.1 mm lens lθ, the mirror 1B, the condensing lens 18 and the pinhole 14 is traced back and detected by the light receiving element 15.The light emitting unit of the light emitting element array 2 is modified in this 1. Of the points,
When the mask 4a is opened at the ninth turn 20, a light emitting unit point from which a parallel ray T' is emitted is detected due to the refractive characteristics of the lens 10 to be tested. Next, when the linear light emitting element 8 is scanned to emit light, the linear light emitting element 8? r#-1 out,
The mask 4as is emitted by the half mirror 5 and is also a beam of light.
Mirror 6, half mirror? , relay lens 8, mirror 1
9, the lens 10 to be tested, the mirror 12, the condensing lens 1B, and the pinhole 141 are detected by the light receiving element 15.

This means that scanning was performed using a p-mask jar, 17 air light emitting elements, and 2.8 cm. Next, the shutter 1fl is opened, the shutter 17 is closed, and the second optical path 15B is similarly scanned with the mask 4bV (information about the detection element 15
It is detected by.

Here, in this example, the standard straight line)! Turns 22 and 28 are distinguished from other Naogan mother turns by having a difference r in thickness, but the present invention is not limited to this, and the turns 22 and 28 can be distinguished by having a difference r4 in light transmittance and transmission wavelength characteristics. , K may be distinguished from each other, or all straight lines may be the same, and the pinch kf of the special electric point may be used instead of the reference straight line.

Parallel j of masks 4a and 4b [N group 20.21F
i Cultivate so that on the common conjugate circle MA of the mask 4as4b by the relay lens 8 in FIG. has been done. If not implemented, θ=90° ε=qθ°
It's Nishide. In this way, a large number of straight lines/gutterfke 1 history are formed into parallel type iI1 groups, so we can obtain a large number of straight trajectories corresponding to 9 turns of each straight line,
By averaging the slope and pinch of the equation of each #L carp trajectory, a more accurate measurement can be made.

In addition, the standard Wi*"l-722, 28-shaped gL7'j is the detection rate point? When connecting them to create a straight line locus, which light emitting unit point and which light-emitting unit point IPM is a good force? This is the standard for knowing the meaning.

Note that the pitch 1 of each of the parallel planes 20.21 is selected to be the same value p, but this value r is just to facilitate the fabrication of the mask 48% 4b, and therefore, halves with different pitches are selected. It may be used for row straight line # + warehouse, or the pitch of each straight line or turn of one parallel type l115i group is also f.
I don't have to do it, III+1-.

Also - angles θ and C (optional).

Figure g shows the linear aperture t of the mask among the nine-dimensional scattered light flux from the light emitting unit point emitted by light emission scanning of the light emitting element array.
4? When the force 1 is selectively transmitted through the lens, the light detected by the light-receiving element 16 is connected geometrically to the point of emitted light. M[fJ D-9 This is a diagram showing the relationship between the straight line locus that is attached to the refractive characteristics of the lens to be tested and the refractive characteristics of the lens to be tested.

As shown in Figure g, the linear nine-ray element array 8 of Figure ^6
．． 8 are arranged in such a manner that they each have a common working surface, that is, a virtual light source surface S, and a vertical travel angle R by the relay lens 8.

Shutter 17 now? When the linear light emitting element array 21 is opened and the shutter 16r is closed, and the linear light emitting element array 21 is emitted and scanned, among the divergent light beams from each light emitting point of the 17W array 2, the light that passes through the half mirror 50 semi-transparent and semi-reflective surface 5a' is reflected by the mask 4.
Parallel straight 1 of a! Mirror 6 after being selectively transmitted by lP2O
reflected by n, reflected by half mirror 7 1. The light enters the relay lens 8. Due to the action of this relay lens 80, the linear light emitting element array 2 is moved onto the virtual mask surface M on the virtual light source surface S.
AK and mask 4ak light emission scan. The light flux that has passed through the mask 4all is incident on the test lens 1O.Due to the optical characteristics of this tentative lens, the optical axis of a part of the optical system is set to be a ray parallel to the device optical axis 0, and the action of the condenser lens 18 passes through the pinhole 14. This pinhole-passing optical axis is received by the light receiving element 15. As a result, as shown in Fig. 8, the linear element array 20 light emitting jjP points ``11,'' 12,
・1. ..."The light emitting unit point of ty is very short.Next, when the light emitting element blurs 481, the light beam selected by the mask 4- is jt approximately 15 [h luri, same as above, the light receiving element 15, the light emitting unit points of A, 1, A, 2...'Is, '19 of the light emitting elements of the linear light emitting element array 8 are determined.

Next, shutter 6, l? r switching, and in the same manner as above ItL, the linear light emitting element array 2, arab order light emission scanning, e21, "22..." 2G light emitting unit point and '21.
422...'260% rate points are each determined by the light receiving element 15. By the above operations, 119 turns 2 of the mask having refractive characteristic information 1 of the lens to be tested 10 are obtained.
A straight line trajectory on the light source plane corresponding to 0.21 can be obtained. In other words, as shown in the figure, from the light emitting unit point "++", seven of the straight open curved turns 20 of the mask 4a and the straight trajectory $20'l corresponding to the turns are " +2 and 3. From this, the straight line trajectory 20'c is subtracted. Also, the light emitting unit point '21 2. il of mask 4b from top: edge 1M lobe pattern...:, 71 of 21. The line locus 21'C corresponding to the 4 turns of book 1 and φ electric melt is tmm locus 21 from 1□2 and ``24.
'd Each is found. Similarly, the Ik line locus 20'd.

20' @ 22'-20' g and 28', 21
'e ・21'g is so n, each one is tomera 1.

The pitch changes to eaves p' and pl/, respectively, and the crossing angle in the arrangement direction changes ε'vc.

In the actual measurement, for example, the light selected by the straight line 20d of the mask 4 and detected by the light receiving element is
A plurality of light emitting unit points that emit light continuously exist within a certain width along the arrangement direction of the IJ near light emitting element array. The positions elj, fi of the light emitting unit points in FIG. 3 above
Please note that e13 and +14 in the example represent the center point i that is actually located at the center of the plurality of light emitting unit points or calculated from the position information of the plurality of light emitting diodes. .

Therefore, each of the above-mentioned direct i1M traces also has such a light emitting unit point 1.
1. Please note that this is an imaginary trajectory that connects and swallows.

An island next? Fig. 70, specifically based on the light emitting unit point 11
, flj and 11. -1 How to find the resistance locus will be explained.

FIG. M9 (A) to ←) are diagrams showing the detection output from the light receiving element and subsequent calculation digitizing chart when the linear light emitting element array is moved to emit light.

The diagram (A) shows a pulse train for driving the linear light emitting element array 2 or 8 for light emission scanning and for detecting output of the light receiving element 15 in synchronization with this. When this pulse is input to the linear light emitting element array, the linear %
The 21 light emitting diodes constituting the optical element array kIIs are sequentially emitted and scanned at nine unit points. Matako T+, [
In synchronization with this pulse train, the detection output of the light receiving element is read out in chronological order.

FIGS. 9(B) to (E) show the light emitting travel v(L) of the linear light emitting element array 2 or 8. When the light receiving element detects the light beam, the detection output waveform from the 9-element element (packet M&)' is shown in +B) flj, the light receiving element using the mask 4aK when the linear light emitting element array 2 is in the emitting position tLfc. 15, the output waveform has a rising edge t of the detection output level according to the amount of light received when the light rays from the light emitting diode group having light emitting unit points 54, e12...e, yk are digitized. It becomes. Similarly, Figure (C) C, linear light emitting element array 8
(D) is the detection output waveform of the light receiving element 15 due to the mask 48K during emission scanning of the linear light emitting element array 20. (ε) is the detection output waveform of the light receiving element 15 due to the mask 48K during emission scanning of the linear light emitting element array 20. (ε) is the linear light emitting element Detection output waveform tube 1 of the light receiving element 15 by the mask 4bK during light emission scanning of the array 80 1,
It shows.

#! Figure 9 (F) ~ 0) Fi, the above detection output waveform (B)
~(El r This is a rectangular wave output waveform formed into a rectangular wave by the Schmitt Φ trigger circuit, and the output waveform (F) ~(
1) corresponds to the temporary output forms (However) to (E), respectively. At the same time, the center position r of each rectangular wave of the obtained rectangular wave output waveforms (F) to (+) is determined, and the center position y21 is the light emitting diode element number of the near light emitting element array, that is, the starting point unit point number, and the scale Place -' as □. ,.

In other words, the 70th VC shows El, E2,...
- EN-, , a linear light emitting element array LNS consisting of N light emitting elements up to EN number E,11 to E,+. Due to the light emission of the light emitting element numbered, a rectangular wave output eA is outputted, and a rectangular wave output eB is outputted from the light emitting elements numbered E to E7-1. The width Δ^ is the number of light emitting elements n, and the rectangular wave output is 11.
Since the width ΔB of 1B corresponds to the number m of light emitting elements, the center position of the rectangular wave output eA is 0. 2E from element 2, n / 2 pieces n E, + n /2 = E
. It can be seen that this corresponds to the first element. Similarly, the center position 02 of the square wave output e8 is El −)IT
I/2 = Ec Corresponds to the second series element. Also, in order to increase the detection level by N degrees, it is necessary to interpolate between the light emitting element pitches, but this requires the rise and fall of each output signal.
This can be achieved by detecting the center position using a pulse train whose frequency is sufficiently higher than that of the pulse train that moves the linear light emitting element array.

In this way, the light emitting position of the source position is determined by the linear light emitting probe array vJK from the center position 11k of the rectangular wave output waveform synchronized with the emitting eclipse of the light emitting element array obtained from the light receiving element. It is obtained as a coordinate value with the position H, that is, the axis of the linear light emitting element array r.

M9 diagrams (J) to -) are diagrams showing the coordinate values of each light emitting unit point on the t-linear source purple array using the above method, and the coordinate values e'41, e', 2... -'1. correspond to the light emission unit points 11, ``12...@,'', respectively.

Also, the following coordinate value 1'1. ~f'4. is the luminous unit point '11
~'1? , the ms value e'2. 〜e′2゜ is the luminous unit point.”
21 to 20, and coordinate values f'2. to f'26 correspond to light emitting points zu2. to z and □6, respectively.

Also, as shown in the @IO diagram, the sensor element #lim that outputs the rectangular wave output 68 is different from the sensor element idn that outputs the other rectangular wave output 6Ak, and since m>n, this rectangular wave output e8 It can be seen that the detection output from the light-receiving element corresponds to the reference straight line pattern consisting of the straight 1M pattern 22.28, which is thicker than other straight line patterns such as those shown in Figures 1 and 7B. In this implementation 4S, the light emitting unit points "15", "ttt" in FIGS. 3 and 9,
e26, fj, respectively, are the reference light emitting points corresponding to the mother turn of the Bube straight line.
2. It can be seen that these are the reference coordinate values of n.

Then, the equation of the straight line trajectory 22' corresponding to the base-to-vertical pattern can be determined with reference coordinate values e', 5, zu', 6, and the equation of the straight line trajectory 22' corresponding to the base-base vertical pattern can be determined with reference coordinate values e'25, f'23. The equation of the straight line trajectory 28' can be determined.

Also, reference seat *iie', 6, "15""25%"
23 The equation of the straight line trajectory can be determined from each coordinate value ordered as a k reference to the other straight line t4 turns.For example, the next coordinate value e', 6 of the reference coordinate value e', 5 and the reference coordinate The next locus value f'1 after the value 1', 6.
The equation of 11113BO'y can be definitely obtained from . In this way, equations for many direct expansion trajectories can be determined from each coordinate value, and these! Since the L rice locus does not lose its parallelism if it belongs to the turning parallel straight line group, if we average a large number of linear equations such as ~ and n, we can obtain more accurate detection results. In addition, it is possible to obtain many values for the pitch p' of the large number of equations obtained, and by averaging these values, we obtain an accurate two-dimensional pitch p'.
k can be found.

This is a major feature of the present invention.

Next, while referring to Figures 1/1 to 13, generate a virtual straight line from the equation of the fc1m trajectory calculated from the light emitting point seat, and based on this tooth edge, create a virtual straight line that is the same as the light source surface that has a straight line trajectory. - Determine any four points on the flat surface.

A method for measuring the refractive properties of @*Relen from changes in the Da point will be described. FIG. 77 shows the curve of the straight line locus obtained on the linear light emitting element arrays 3 and 8 when the lens 8 to be tested is not inserted into the fixed optical path. At this time mm
Traces 2o" and 21" (in figure ii, reference 118@wi
j22", 28"& Him line locus B O" e -20"
f s Z l' ds B l"e
'1IjA formula and pitch P are determined. And next 4C
For $1, the straight line trajectory B g//, t-ex as reference
PfCff away position K #lI Ik f x m
The virtual straight line 8o of 2 can be generated.

, lil In addition, on the contrary, it is possible to generate a virtual (1 m81) of inclination: 1 卜f)E mH at a position where only gxP is present.

For example, using the stroke m locus 21"d as a reference *hxP7 (temporary M* of fxml at a distant position)
111B'A, 1xPff, kojire 9 position KM, fxm
1 virtual straight lines 418B can be generated. The coefficient @s to Els hs Im is a coefficient that can be arbitrarily selected, and generates a virtual straight line having the same slope as the slope ml and m2 of the straight line trajectory equation. Also, the coefficient .,gb h,I is the generated virtual tm
The intersection points 86, 87.88% and 89 of s are the center 2 of the mask
It is chosen to be symmetrical with respect to 4.

FIG. 7 shows a good state in which a virtual straight line is generated in this way. As already stated in the principle explanation, generating the virtual 1I forest in this manner facilitates calculation of the prism refractive power of the self-examination lens.

Next, insert the test lens into the measurement optical path, detect the 9f line that changes depending on the refractive characteristics of the test lens with the light receiving element, calculate the i1 point trace from the light point coordinates when it is good, and FIG. 72 shows a method for determining a virtual straight line from a straight line trajectory.

Due to the refractive characteristics of the 1m detection lens, the pitch P'P#
, and the slope m1'sm2' respectively to determine 91-trajectory BO'%21'. The equation is calculated as described above.The straight line trajectory go' corresponding to the standard Jijiuji Temple locus 20"e in Figure 2I is the virtual tmma in the GII diagram with e as a reference.

A virtual line 80' is generated at the position .xP'' using a coefficient e equal to +iy+ that was used to generate .

In addition, the thinness of this virtual straight line @a o' is as follows: Since the coefficient f of the slope fxm2 of the virtual straight line 80' is set as 1=/ in Figure 1/, the coefficient f4-1 of the slope fxm2' of the virtual line 11a80' is similar to Kf=/ It is closed. In the same way, the straight trajectory sO′・
A virtual line 1!181' is generated at the position of gxP'' with reference to 1!181', a virtual straight line 82' is generated at the position of hxP', and a virtual straight line 88' is generated at the position of lxP' using the Naomori sail track 21'd as a reference. And these virtual straight lines 80' * 81'
Th 8B' S 88' to intersection 867 k 8?
'%38'%89' can be observed, and the center 84' can be obtained from the q intersection.

Da points 86 to 89', which were sought like Jin, are *
This corresponds to points 86 to 89 obtained when the test lens 8t6Il is not placed within the constant light flux. The first one shows this situation.
Figure 3. And based on this displacement phonograph, the above-mentioned 13)
The refractive characteristics of the inspection lens can be calculated using the formula (5). As in this example, when the inspection lens is not inserted into the measurement optical path, the intersection point of the virtual i1m is used as the reference point,
*Top lk when inserting test lenses into Liadingyuan route! If you use the method of finding the displacement of the intersection point, the above-mentioned (3rd
) formula is completely unchanged for the seat system created by the linear light emitting element array, so there is no need to perform the q difference angle and the t angle of the intersecting position of the linear light emitting element array at the time of assembly. There are advantages.

The first reference is a block diagram showing an example of the drive-arithmetic circuit 1 in FIG. 6 for performing one or more arithmetic operations. It is a mourning optical system shown by the reference numeral 1ooori and figure g6. Linear light emitting cord arrays B and 8 are linear elements 1
The two drive control circuits 10G and 101 are connected to the light emission scanning of these control circuits, respectively.
The light emission is scanned by g and toa. ′□l,'l::
J:, B□ First, microprocessor 105 to m4
11111NJ 0191wl1 (j OKKakeru11J
When H113''kX l l 8 is applied, the drive control circuit 100 outputs a scanning start pulse 1 (36) and starts light emission scanning of the linear light emitting element array 2.

The detection output from the light receiving element 15 is amplified to an appropriate level by an amplifier 104 and then inputted to a ^/D converter 107.

^10 The converter 107 converts the axial scan drive nozzle 102Kfi of the near light emitting element array as shown in Figure 9 (A).
The detection output of the light-receiving element 15 synchronized with the light emission of every 7 light-emitting elements of the linear light-emitting element array is converted from analog to digital in the i1 period. supply.

Here, the ^10f converter 107 is 1g bit (t/2sb
) and a conversion time faster than the scanning frequency of the linear light emitting element array. The microprocessor 105 is one of the linear light emitting crystal arrays.
Light emitting element - FaK compatible light receiving element 1 ≧ 11 A data memo consisting of digital conversion from 16, RAM (random access memory), etc.! Sequentially stored in J-109.

Therefore, in the data memory 10'9, detection outputs from the light-receiving elements 15 corresponding to the first light-emitting elements of the linear light-emitting element array are sequentially stored as digital 1- from the band added in advance. If the light emitting element array is of 77 g elements, data acquisition of sit2g pieces is completed.

The microprocessor 105 stops further data acquisition and at the same time stops the light emitting scan of the linear axis photoreflector array 20, and then manually inputs Kmi1gl+start signal IIM to the drive control circuit @101. -Route 1ull.

Upon receiving the human power of No Mother Rus 119, scanning begins No 4 Rus 1
10 and at the same time, the linear light emitting cord array a is scanned by the original scanning driver @/4 las 10B. The light emitted from the linear light strand array 8 due to this light emission scanning is detected again by the light receiving element lb.

^/Mouth converter 10? After being converted from analog to digital, it is input into the microprocessor 105, and the detection output is stored as a digital 1- in another address of the data memory 109. Next, the microprocessor 105 controls the shutter by a controller control circuit (not shown), and performs one-way processing on the linear light emitting element array 2.8. As a result, all the data has been stored, and the calculation circuit 112 in the microprocessor 105
performs the following processing based on the data written to the data memory 109.

11) t#IIVll of the luminous flux limiting mask is selected by the aperture/mother turn, becomes parallel and tapered by my detection lens, and the detection output tHt detected by each light receiving element is cedar's upper jL? 1 from position
A light emitting point is found, and the position of the light emitting element in the linear light emitting element array is detected.

(3) In the locus system created by the original linear luminescent cord array, determine the locus of each and find its universal formula.

(3) By the method already described, 80'~ in Figure 2-
Generate a 7jIIM formula for a virtual mountain such as 88', and
As their WA, q shown in No. 73 (9), 186' to 8
9' coordinate value at-determined, and from seven points, its center position 84
' Find @ +41 In advance, the four reference positions 11.86 to 89 and their center 840I without inserting the test lens!
The spherical surface number S of the lens to be tested is calculated using the above formulas (3) to (5) from the position of the camphor tree and the position of each point 86' to 89' and 84' obtained in the previous section (3). .

Cylindrical power C, astigmatism axis direction ^X and f9 refractor PxS
Find Py.

The respective values obtained through the above processing are outputted to the display 118 and 7° linter device 114 shown in Figure 7. All of the above processing is performed according to the program stored in the program memory 115, and it is not a special task for those skilled in the art in the related technical field to perform the above processing using a microprocessor. This is something that can be easily achieved.

Although the present invention is limited to the nine embodiments described above, 1',
・This is not just 1, but 1 various modifications. An example of 2.3 will be disclosed below. Figure 1S shows another embodiment in which the arrangement of a linear light emitting element array is bent. Embodiment 781 in FIG. There is no limit to this, and the intersection may be an extension of the linear light emitting element array!It may be arranged to have a virtual V difference (.

Furthermore, based on the principle of the present invention, j! 1 Invention F to be able to understand
i, it is 1ji11 to find the target equation of the m** trace corresponding to the straight line/parallel turn formed on the beam splitting mask.
This is the seventh step of the foot. To find the equation of one line,
It can be determined if at least two points on the straight line can be identified, so
Arrangement of lJ near-emitting diode array that creates a straight line trajectory
You can freely place it as long as it is not parallel to the straight line trajectory you are trying to create.

FIG. 13 discloses an example of this, in which two linear light emitting element arrays 160 and 161 are arranged parallel to each other on the virtual light source surface S. More specific...: In terms of purpose, 1. The linear light emitting element array 160 is the sixth
In the plane in which the linear light emitting element array 2 shown in FIG.
What is necessary is just to arrange|position these linear near light emitting element arrays so that they may be parallel to each other.

Fig. 76 shows that instead of using the two parallel linear light emitting element arrays described above, one linear light emitting element array is used, and this is combined with a shift optical guide, so that substantially two parallel light emitting element arrays are used. This is an embodiment σ) that uses a linear light emitting element array and has the same effect. In the nib diagram, the optical arrangement in front of the relay lens 8 has the same optical arrangement as in FIG. 6, so one illustration is omitted. Also @6
Components that are the same or equivalent to those of the seventh embodiment in the figures are given the same reference numerals, and their explanations will be omitted. In the previous issue of the linear light-emitting element array 162, a light-emitting element array 162 has a linear light-emitting element array 162 in which the same axis is perpendicular to the incident optical axis and parallel to the arrangement direction of the light-emitting elements σ) of the linear light-emitting element array. shift optical hand &
1?0 is placed.

Is it true? U is dry 1 circuit 1? a, they are rotated in the direction of the arrow 17B by the angle ψ with respect to the i# rotation axis at KIW1 intervals with respect to each other.

When the lens 170 is positioned perpendicular to the output optical axis 176 as shown by the solid line, it passes through the mask 4b of the measurement path and transmits the semi-transparent and semi-reflected tlnVa of the mirror beam. The resulting light beam is projected onto the test lens via the relay lens 8 as a projection light beam having projection light @176 coaxial with the emission source axis 175. Next, the drive Kj of the driver circuit 1721, Deleno J? Larel 17
When 0 is rotated by an angle ψ and moved to a position of 6170', the projected light beam is shifted by the refraction action of the plane t4 parallel, and the projected optical axis of @ is shifted half-blindly from the projected optical axis 176. It is projected onto the test lens via the relay lens 8 as a projection light beam having an optical axis. Note that the light beam passing through the mask 4at in the seventh measurement optical path is also reflected in the half mirror 7.
It goes without saying that the same effect occurs after reflection. Note that, in FIG. 15, /A〆Iσ) If a co-dimensional optical element array is used instead of the linear light emitting element array, the number of detection points can be increased.

In each of the above embodiments, a configuration was described in which the projection optical path is divided into t-1 beams and a total of one light flux limiting mask is arranged for each projection optical path. Referring to the figure, we will examine the implementation of measurement 11 for the bamboo vt position using only one mask.

FIG. 1 shows an example of the arrangement of the optical system of the apparatus of this embodiment, and JtI elements having the same or equivalent configuration as the apparatus of FIG.

In the mask 500, as shown in FIG. 1g, parallel straight line-loba pattern groups 50g and 504 are formed with different V-column directions. Each parallel--sen group 508.504V
Cd, other l of each group II as in the previous example
Since it is on the left side of the #lN'' turn, straight open rotor patterns 501 and 502 with different thicknesses are formed.

FIG. 79 is a schematic diagram showing the relationship between the linear almost original Hayako array 8.8, the light emitting point, and the ms trajectory. Now, the light emitting element array 2 is scanned in one direction so that the light emitted from each light emitting diode passes through the half filter 5 and is emitted and scanned on the light source surface S, and the light flux is transmitted through the mask 500 into a red light beam. selected,
# Under the refraction effect of the transverse lens, light rays parallel to the device's original axis 0 pass through the mirror 18 and relay lens 18 to the bin pole 1.
4, is detected by the light receiving element 15 by the relay lens 18, and the detection output is amplified by the amplifier 104.

Hereinafter, the process will be carried out using a driving/arithmetic circuit that is almost the same as that shown in FIG. 7q. Then, the starting points, d, . . . , and g are determined. Next, the linear light-emitting element array 8 is scanned to emit light, and the element Q! After retracing the above-mentioned optical path, the light-receiving probe 15
The light emitting point coordinates a1c and f% h are determined. Then, a straight line trajectory 511 from the light emitting point coordinates b, a straight line trajectory 51g from the light emitting point coordinates c and d, a nine point coordinate 4 $e%
A linear trajectory 581 is created from t, and a curved trajectory 522 is created from the light emitting point companding gs''. The refractive characteristics of the lens lO to be tested can be obtained.

FIG. 20 shows that, whereas the above-described moxibustion embodiment uses at least two fixed linear light emitting element arrays, one linear light emitting element array is moved within the plane of the light valve. It is a figure which shows the Example which measures by K. Pottery,
41I elements having a -1- or equivalent structure to those of the above-mentioned embodiments are given the same reference numerals and their explanations will be omitted.

The linear light emitting element array 21213 is attached to a master motor 214 (which rotates under the control of the linear Nf tree array rotation angle control circuit 21B), and is rotated by a predetermined angle about the main axis of the device. Now, as shown in the figure, the shutter 158fi of the first optical path 152 is retracted out of the optical path, and the first optical path 1
With the 52 shutters 158 inserted into the optical path, the linear array 212 is first set at the l-th position,
Scan the light emission. The light flux from the linear array 212 passes through the half mirror 5 and is selected by the mask 4a. From the detection output of the light receiving collector 15, the light emitting point 1112° in FIG.
""17 is determined. Next, the pulse motor 21411 rotates once [7, the linear light emitting table array 212 is activated by the main pulse signal of the drive-1 (from the linear light emitting system 1,000 array rotation control circuit 218 under the 111Hkl of the microprocessor 105 of the 2 arithmetic circuit 1). The light emitting element array 8 is rotated and rotated to the position of the linear light emitting element array 8 shown in the figure, and the light emitting element is scanned again at this position, and from the detection output of the light receiving element 15, ff...
...S1. 1112 Determine the light emitting point. Next, the shutter 158a% l 58b & is switched to open the second optical path, and the linear light emitting element array 91
The light emitting points '211', 22, .
, and then re-scan the light emitting point e2. .

・, 2...29"20.Then, from these determined light emitting points, the location is determined, a straight line trajectory is created, and the lens to be tested is refracted based on the equation. The method of calculating the characteristics is the above-mentioned embodiment and IW1&-.

Note that instead of rotating one line sensor, it may be moved horizontally within a plane continuously or in multiple steps.
The projected light beam may be rotated or translated in a continuous or multi-step manner by fixing a book line-emitting probe sensor, rotating a known optical image rotator, and continuously rotating a plane mirror. good. It goes without saying that this image low cheetah and Deleno 9 larel should be placed between the mask and the 2-in sensor.

Alternatively, it may be detected by a line sensor (1) K2-dimensional thousand-plane sensor. According to this embodiment, more detection points can be detected than in the above-mentioned embodiment-1, and measurement precision can be improved.

Figures 21 and 22 are diagrams showing sixth and seventh embodiments of the present invention. On the mask means or on one mask means, the arrangement directions of the turns 11 and turn groups are different, but instead, only one parallel turn group f is formed on one mask means, Place the # ~ square hand - in front of the lens to be tested, and ~
l of the luminous flux that passes through the lens and enters the test lens! This embodiment is such that the arrangement direction of the I-line pattern group differs by at least one time relative to the lens to be tested, and has the same effect as the above-mentioned embodiment.

FIG. 111/Figure 111 is a diagram showing an embodiment in which all of the light beams from the nine turns of the mask of the array to be tested Ki4 are made incident by rotating the seven mask means to the near array injection source.

In Part 1 @, 1! l! Light 1 entering the square lens 10! 1. Through the relay lens 8. selectively ejected from the mask means. Here, the masking means is a mask having parallel straight line nonaturns of Vc interlacing or the arrangement direction thereof only in the /7j direction, such as the mask 4a shown in FIG. 7a, and this mask 4a is tv'm in the optical path so as to be in the array direction (.Then, the light fluxes emitted from this mask 4a are linear It is aligned with the emitted scanning light beam of the original optical element array 2.8, and then controlled by the mask 4at motor drive controller 215K, etc. - The master motor \116 is rotated by a predetermined angle about the sub-lighting axis 0. After rotation, the light beam from the linear light-emitting element array is made to enter the mask 4a again, and is similarly detected by the fluorescent light emitting element 15.

Fig. 22 shows that in contrast to the embodiment shown in Fig. 1sJ1 in which the light flux incident on the test lens 10 is changed by rotating the mask means, the mask means is fixed and the light flux itself incident on the test lens is measured. This is an embodiment configured to rotate with respect to the original axis Ot rotation axis. Therefore, it is sufficient to make the KFi or mask emitted light beam incident on a light flux crystallization means such as a known image roach p-a8o, and rotate this image roach once.

Before passing through the relay lens 8, the incident light flux is placed in a predetermined nine-point [K] and then rotated with the image low cheater, that is, it passes through the four fixed mask angles. The light beam #'i is rotated by a predetermined angle. Hereinafter, the 80 light emission scans of the linear light emitting element array B are detected by the light receiving probe 15 in the same manner as in the previous embodiment. Next, the image low cheater is rotated by a predetermined amount of horn, the light beam passing through the mask is passed through again, the light beam is rotated to an angle different from the ffn times, and the light beam is incident on the II detection lens 1G, and this is detected by the light receiving element 15. .

In each of the above embodiments, V stands for light (- and j7 stands for a planar @element array in which a large number of light emitting diodes are arranged in a linear pattern arranged in a planar shape, or a linear light emitting element. However, the present invention is not limited to this, but has a large number of units densely emitting a diverging light beam on a real or virtual plane, and Any type of light source that can scan light can be used as a light source. An example thereof is shown in FIG.
? is driven and controlled by the lJA# control circuit 802, and a rotating polygon mirror that deflects the beam 807 from the Rade light source 801, a galvanometer swing @0, and tdit*ft.

Beam scanning device using optical elements etc. 1180875
It will be 1. A diffusing or diverging optical element 805a is arranged in a line in a plurality of planar shapes, each of which deflects a deflected beam 801d, inputs a collimator lens part 8t) and emits a beam. Array 8 (16K is incident on the array 806, and the diffused light emitted from this array 806 is scanned sequentially in time series by scan 1fe1111808.

It is needless to explain to those skilled in the art that the present invention can be implemented even if the double line arm turn of the mask M is a reflection type 11 mother turn that selectively reflects the light beam.

[Brief explanation of drawings]

2 and 2 are perspective views of the projection system illustrating the principle of the present invention, and FIG. 4 is a diagram showing the 11gk of the orthogonal coordinate system and the cylindrical coordinate system, FIG. A schematic diagram of the optical system showing an example of the Fi mask turning. (^) - axis) is a timing chart diagram showing the relationship between the output of the light receiving element and coordinate values, the mio diagram is an element layout diagram of a linear array showing the method of determining coordinate values from the light emitting point of the linear array, and Figure 7, Figure 1 and Figure 13
The figure is a schematic diagram for explaining the measurement according to the principle of this defense.
FIG. 14 is a block diagram showing an example of an arithmetic circuit, and FIG. 15 is an uninvented #! Figure 76 is a partial schematic diagram of the optical system showing the third embodiment of the present invention, and Figure 1 shows the arrangement of the linear array according to the third embodiment of the present invention. A schematic diagram of the optical system; Figure 1g is a diagram showing the mask turn of the second embodiment; Figure 19 is a diagram showing the method for creating the light emitting point and direct trajectory in the second embodiment; rj A schematic diagram of part 1a of the optical system showing the fifth embodiment 1, FIG. 27 is the sixth embodiment.
FIG. 22 is an optical layout diagram showing the seventh embodiment, FIG. 23 is a diagram showing another embodiment of the light source of the present invention. l... Drive-arithmetic circuit, 2.8... Linear output jt,
Element array, 4 crows, =b...mask, 8...relay lens. lO...Test lens, 11...Temporary lens holding means. 18... Condenser lens, 15... Light receiving element, 16. l
?・・・Shutter・ Early 5th figure 6th figure 12th figure 13th figure

Claims (1)

[Scope of Claims] (11) A holding means for holding a test optical system, a light source having a large number of light emitting units that project a light beam onto the test optical system essentially in a two-dimensional plane, and the vanguard and @ @1IllL-Pattern review and acknowledgment consisting of at least two parallel kinship patterns arranged between the plate analysis systems, with different arrangement directions and selecting the light beam from the original monument in each inner σ. 1fL
IIi1 mother turn group and the first and #8J straight leg z4 turn groups are traced, and the optical system to be tested is used to tighten the parallelism, and a condensing means for focusing only the nine tapers into the aperture means, and a hook. # from the light emitting position information of the light emitting unit of Aj + light distribution source when the detection means detects the original - which passed through the opening ten attack r, and the detection means detects the cedar nine -! iIkml and y4 calculating means for calculating the light character of the touch test subject 4 based on the sac pot locus on the plane corresponding to the second Naoga pattern set. Kouji's optical property measuring device is characterized by: (2) The first and second VA and powder pattern groups are transmission-type main turns that transmit the light flux, and the device for measuring the optical characteristics of a light-shaped yarn according to Claim No. +11 . (31 Said 1st and Ua142m1#A/+1-7%+1
,/sheet of mask means. An apparatus for measuring optical characteristics of an optical system according to Claim No. 11 or No. 21JJ. (4) The light source and the handling habit. An elite method is to divide the dark optical path of the optical system into two, with the first straight pattern eaves as one divided optical path, and the first core pattern eaves as the other divided optical path. Allowance* range No. 1 or No. 2
) The light-shaped renal constant device of the light-shaped thread described in item ).俤) Each of the above-mentioned first, #p, and second straight/9-turn pillars has a straight mother turn to the south that is different in thickness, transmission, or reflectance from other straight arm turns. An apparatus for determining optical characteristics #j of an optical system according to any one of claims to (4). (6) The optical path in front of both or one of the #14 and -th linear mother turn groups is divided into t-U, and the light source is arranged in each divided optical path. Measurement of optical characteristics of the optical system according to any one of items (2) to (6). (7) The light source is a flat rkJ in which a large number of light emitting units are arranged in a two-dimensional plane and the light emitting units are emitted and moved in time series.
(6) The apparatus for measuring the optical properties of an optical thread according to any one of claims 1 to 4, characterized in that it is a light emitting element play. (8) The light source comprises a large number of light emitting units. (2) IA to (6) Iso (9) The light source is composed of a single giant aperture light element array, and these linear light beams are virtually measured in the two-dimensional plane. An apparatus for measuring optical characteristics of an optical system according to claim (8), characterized in that the axis intersects with the axis. Claim (9), characterized in that the intersection is orthogonal. An apparatus for measuring optical characteristics of an optical system according to Claim 1. An apparatus for measuring optical properties of an optical system according to scope (8).The ring according to the patent claim, wherein the light source is composed of an array of seven linear light-emitting cords rotating in a two-dimensional plane. An optical property measuring device for an optical system according to item (8).
A luminous flux rotator between both or one of the direct-flowing turn eaves! Optical characteristics of the optical system according to claim ta+J)4, characterized in that the optical system is t-controlled.・L < is a source that shifts the light flux in the direction perpendicular to the optical axis of the device between both the element array and the turn group of the straight line t, L< is the source that shifts the luminous flux in the direction perpendicular to the optical axis of the device. The apparatus for measuring optical characteristics of an optical system according to item (8), wherein the range of the axis to be determined is similar to that of the shift means by t%. a! # The calculation means is configured to calculate the optical characteristics of the '4i analyzing system from changes in the pitch and inclination of the linear locus on the plane.
The optical characteristic measuring device for an optical thread according to any one of items 11 to 01. ae The calculation means calculates the gauze straight line based on at least the cocoon heavy emission position information. Compatible with turf [secondary above! [-Create the equation of the wake, and calculate the above m based on the equation τ
1. An optical characteristic measuring device for an optical system as claimed in claim 1, characterized in that the pitch and slope of the mIL trace are determined to be rhombic. Touge The above-mentioned operation Jl Soju creates a virtual parallelogram from the equation of the previous year's trajectory, and changes the virtual parallelogram by extending one position where the optical system exists in the optical path of the device and one position where it does not exist in the optical path of the device. Adding -1 to the lightness of the previous - 4ll Kengenji thread is the range of Ikei Sabimu, which has all the characteristics α51; j4 or younger brother Q #
JJ k * optical system axis determination device. 69. The device for measuring optical characteristics of an optical thread according to any one of claims 1 to 69, wherein the light emitting unit is a light emitting diode. a- The scope of the Ushi-revised Sabagyu, which is based on t-V, that the light-emitting unit is a diffusing optical element that diffuses the light of Rede glass (
Optical object L@1 of the optical system described in section 1) or one of Kazuma's younger brothers.