JPS587941B2 - Tokutei Ino Kangensei Gaso Sentaku Techini Kenshiyutsu Sultame no Fukugogata Gas Kenchisoshi - Google Patents
Tokutei Ino Kangensei Gaso Sentaku Techini Kenshiyutsu Sultame no Fukugogata Gas KenchisoshiInfo
- Publication number
- JPS587941B2 JPS587941B2 JP6718875A JP6718875A JPS587941B2 JP S587941 B2 JPS587941 B2 JP S587941B2 JP 6718875 A JP6718875 A JP 6718875A JP 6718875 A JP6718875 A JP 6718875A JP S587941 B2 JPS587941 B2 JP S587941B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- filter
- electrode carrier
- gases
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003647 oxidation Effects 0.000 claims description 29
- 238000007254 oxidation reaction Methods 0.000 claims description 29
- 239000003054 catalyst Substances 0.000 claims description 20
- 238000001514 detection method Methods 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 18
- 238000005192 partition Methods 0.000 claims description 12
- 229910044991 metal oxide Inorganic materials 0.000 claims description 10
- 150000004706 metal oxides Chemical class 0.000 claims description 10
- 230000035699 permeability Effects 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000002131 composite material Substances 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 239000011148 porous material Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 108
- 230000001590 oxidative effect Effects 0.000 description 25
- NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 description 12
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000001282 iso-butane Substances 0.000 description 6
- XOLBLPGZBRYERU-UHFFFAOYSA-N SnO2 Inorganic materials O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 5
- 229910000510 noble metal Inorganic materials 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 239000010425 asbestos Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000003197 catalytic effect Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 229910052895 riebeckite Inorganic materials 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
【発明の詳細な説明】
本発明は、特定種類の還元性ガスを選択的に検出するた
めの複合型ガス検知素子に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a composite gas detection element for selectively detecting a specific type of reducing gas.
従来のガス検知素子及びこれを用いた装置においては、
種々の還元性ガスが無差別に検出されるものであったた
め、実際の使用にあたって、本来検出の目的とするガス
は、アルコールガス検出用、プロパンガス検出用、CO
ガス検出用等の各用途に応じて限定されるものであるに
もかかわらず、使用される雰囲気中に検出の目的とする
ガス以外の不要な還元性ガスが混入している場合でも検
出に際してこれらを区別することができず、このような
不要なガスによる影響で装置が本来の目的とは異なる誤
動作を起こすことが往々にしてあって精度上極めて信頼
性の乏しいものであった。In conventional gas detection elements and devices using them,
Since various reducing gases were detected indiscriminately, in actual use, the gases originally targeted for detection were gases for alcohol gas detection, propane gas detection, and CO2 gas detection.
Although it is limited depending on each application such as gas detection, it can be used for detection even if unnecessary reducing gases other than the gas to be detected are mixed in the atmosphere used. Because of the influence of such unnecessary gases, the equipment often malfunctions in a way that is not intended for its intended purpose, making it extremely unreliable in terms of accuracy.
本発明は上記従来の欠点を克服するもので、それぞれフ
ィルターを通して選択的にガスが導入される一対のガス
感知部を複合して形成し、この一対の感知部が適当な回
路中において所望の特定種類の還元性ガスだけを選択的
に検出する作用を発揮し、以って、用途に応じてその目
的とする還元性ガスだけを検出し得て検出対象外の還元
性ガスの影響による誤差をなくし、検出装置の精度上の
信頼性を格段に向上せしめることができ、しかも、この
ような一対のガス感知部が複合一体化されて非常にコン
パクトに形成され、且つ、各ガス感知部のそれぞれの電
極からの端子の取出し、及び回路への接続が容易で、装
置への組込みに極めて使利な特定種類の還元性ガスを選
択的に検出するための複合型ガス検知素子を提供せんと
するものであって、その構成は次の通りである。The present invention overcomes the above-mentioned conventional drawbacks by forming a composite pair of gas sensing sections into which gas is selectively introduced through filters, and in which the pair of gas sensing sections is connected to a desired specific sensor in an appropriate circuit. It exhibits the effect of selectively detecting only different types of reducing gases, allowing it to detect only the target reducing gases depending on the application and eliminating errors caused by the effects of reducing gases that are not the target of detection. This makes it possible to significantly improve the accuracy and reliability of the detection device, and furthermore, such a pair of gas sensing sections can be integrated into a very compact structure, and each gas sensing section can be An object of the present invention is to provide a composite gas detection element for selectively detecting a specific type of reducing gas, which is easy to take out a terminal from an electrode and connect to a circuit, and is extremely useful for incorporating into a device. The structure is as follows.
本発明は、気密性を有する素材にて形成した両端が開口
せる筒状の容器内の中央に、酸化触媒を用いたフィルタ
ー材または無通気性素材からなる仕切部を設け、該仕切
部の両側にガス敏感性金属酸化物半導体からなるガス感
知部を、容器両端開口部分に酸化触媒を素材とした選択
的なガス透過性を有するフィルターをそれぞれ配備し、
上記両フィルターの酸化能力を相違せしめると共に、こ
れら全体の中心軸部分に絶縁性の電極担持体を貫通せし
め、該電極相持体の周面に、その両端部からそれぞれ中
央近傍部に至るまでの範囲で長手方向にわたって分割さ
れた上記両ガス感知部に対する各一対の電極を形成して
なる特定種類の還元性ガスを選択的に検出するための複
合型ガス検知素子である。The present invention provides a partition made of a filter material using an oxidation catalyst or an air-impermeable material in the center of a cylindrical container made of an airtight material and open at both ends, and both sides of the partition A gas sensing part made of a gas-sensitive metal oxide semiconductor is installed in the container, and a filter with selective gas permeability made of an oxidation catalyst is installed in the openings at both ends of the container.
In addition to making the above-mentioned two filters have different oxidizing abilities, an insulating electrode carrier is passed through the central axis of the entire filter, and a range from both ends to the vicinity of the center is formed on the circumferential surface of the electrode carrier. This is a composite gas sensing element for selectively detecting a specific type of reducing gas, which is formed by forming a pair of electrodes for each of the two gas sensing sections divided in the longitudinal direction.
本発明を具体的に説明するにあたり、先ず本発明の素子
に組込まれるフィルターの透過性について説明しておく
。In explaining the present invention in detail, first, the transmittance of the filter incorporated in the element of the present invention will be explained.
このフィルターの素材としては、Nip,Co203、
Coo,ZnO,Sn02、Fe203、V205、A
g20,CuO等の各種の金属酸化物触媒、或いは金属
酸化物にPd,Pt、Rh、Ir,Ru,Ag,Au等
の貴金属系の酸化触媒の一乃至数種類を添加したもの、
或いはこのような貴金属系の酸化触媒をアスベスト、ア
ルミナ、シリカなどの基材に混入または担持せしめたも
の等酸化触媒として働く任意の素材を採用し得る。The materials for this filter include Nip, Co203,
Coo, ZnO, Sn02, Fe203, V205, A
g20, various metal oxide catalysts such as CuO, or metal oxides added with one or several kinds of noble metal oxidation catalysts such as Pd, Pt, Rh, Ir, Ru, Ag, Au, etc.
Alternatively, any material that functions as an oxidation catalyst may be used, such as a noble metal oxidation catalyst mixed with or supported on a base material such as asbestos, alumina, or silica.
そして、このような酸化触媒を素材とするフィルターは
、その酸化触媒としての能力に応じ、酸化され易い特定
の一乃至数種類の還元性ガスに対しては、大気中の02
と反応せしめて不活性ガスに変えることによりその還元
性ガスとしての透過を阻止し、その他の酸化されにくい
還元性ガスはそのまま透過するという選択的透過性を有
し、且つ、このようにして選択的に透過されるガスの種
類はフィルターの酸化能力の程度に依存するもので、そ
の関係は第1図のグラフに示す如くなる。Depending on its ability as an oxidation catalyst, filters made of such oxidation catalysts can be used to treat one or several types of reducing gases that are easily oxidized.
It has selective permeability in that it reacts with the gas and converts it into an inert gas, thereby blocking its permeation as a reducing gas, while allowing other reducing gases that are less likely to be oxidized to pass through as is. The type of gas that is permeated depends on the degree of oxidizing ability of the filter, and the relationship is as shown in the graph of FIG.
つまり、第1図のグラフは、酸化触媒を素材とするフィ
ルターの酸化能力と各種還元性ガスに対する透過性との
関係を示すもので、同グラフにおいて、縦軸はガス透過
率をパーセントで表わし、横軸はフィルターの酸化能力
即ち酸化触媒としての活性度を表わしており、同グラフ
中の曲線A〜Eは、AがCOガスBがH2ガス、Cがエ
タノール、Dがインブタン、Eがメタンに対するフィル
ターの酸化能力と透過率との関係を示す。In other words, the graph in Figure 1 shows the relationship between the oxidation ability of a filter made from an oxidation catalyst and its permeability to various reducing gases. In the graph, the vertical axis represents the gas permeability in percentage; The horizontal axis represents the oxidation ability of the filter, that is, the activity as an oxidation catalyst. Curves A to E in the same graph are A for CO gas, B for H2 gas, C for ethanol, D for inbutane, and E for methane. The relationship between filter oxidation ability and transmittance is shown.
同グラフに示す如く、これらのガスの中ではCOガスが
最も透過が阻止され易く、フィルターが同グラフの横軸
に符号F1 で示す程度の比較的低い酸化能力を持つ場
合には、COガスのみ透過が阻止されて他のガスは殆ど
透過することとなる。As shown in the same graph, among these gases, CO gas is the most likely to be blocked from permeation, and if the filter has a relatively low oxidizing ability as indicated by the symbol F1 on the horizontal axis of the same graph, only CO gas will be blocked. Permeation is blocked and most other gases are allowed to permeate.
これはつまり、この程度の酸化能力においては、上記各
ガスの中で最も酸化され易いCOガスがフィルターの触
媒作用で大気中の02で酸化されて不活性なCO2とな
る結果COガス自体の透過は阻止され、一方これより酸
化されにくい他の各ガスは殆ど酸化作用を受けずにその
まま透過されるためである。This means that with this level of oxidation ability, CO gas, which is the most easily oxidized of the above gases, is oxidized by 02 in the atmosphere through the catalytic action of the filter and becomes inactive CO2, resulting in the permeation of CO gas itself. This is because the gases are blocked, while other gases that are less easily oxidized pass through without being oxidized.
また、フィルターの酸化能力がこれよりもう少し高くて
同グラフに符号F2で示す程度である場合には、COガ
スに加えてその次に酸化され易いH2ガスも酸化されて
H20に変わるので、この二種類のガスの透過が阻止さ
れてその他のガスが透過されることとなる。In addition, if the oxidizing ability of the filter is a little higher than this, as shown by the symbol F2 in the same graph, in addition to CO gas, H2 gas, which is the next most easily oxidized gas, will also be oxidized and converted to H20. The permeation of certain gases is blocked, while other gases are allowed to permeate.
以下同様にして、フィルターの酸化能力が高くなるにつ
れて酸化され易いものから順に透過を阻止されるガスの
種類が増し、同グラフに例示したガスについていえば、
同グラフに符号F3で示す程度の酸化能力においてはC
O、H2、アルコールの三者が透過を阻止されてイソブ
タンとメタンが透過し、符号F4で程度の酸化能力にお
いてはメタンだけが透過されることとなる。Similarly, as the oxidizing ability of the filter increases, the types of gases that are blocked from permeation increase in the order of oxidizability, and for the gases illustrated in the same graph,
In the oxidizing ability shown by the symbol F3 in the same graph, C
O, H2, and alcohol are blocked from permeating, and isobutane and methane are permeated, and at an oxidizing ability of F4, only methane is permeated.
このように、酸化触媒にて形成されたフィルターは選択
的なガス透過作用を有し、且つ、選択的に透過し得るガ
スの種類はフィルターの酸化能力即ち酸化触媒としての
活性度に依存することとなるわけである。In this way, a filter formed using an oxidation catalyst has a selective gas permeation effect, and the type of gas that can be selectively permeated depends on the oxidation ability of the filter, that is, the activity as an oxidation catalyst. Therefore,
なお、符号F0で示す程度にまでフィルターの酸化能力
を低くすると同グラフ中にA−Eで示すガスのすべてが
透過される。Note that when the oxidizing ability of the filter is lowered to the level indicated by F0, all of the gases indicated by A-E in the same graph are transmitted.
これら種々の酸化能力を有するフィルターの具体例を次
の(表1)に示しておく。Specific examples of filters having these various oxidizing abilities are shown in the following (Table 1).
同表中の酸化能力を示す符号は、第1図のグラフに示す
符号に対応する。The symbols indicating the oxidizing ability in the same table correspond to the symbols shown in the graph of FIG.
このような酸化触媒を用いたフィルターの特性を利用し
て本発明の素子が構成されており、以下本発明の実施例
を図面に依拠して詳説する。The device of the present invention is constructed by utilizing the characteristics of a filter using such an oxidation catalyst, and examples of the present invention will be described in detail below with reference to the drawings.
第2図において、1はセラミック或いはガラス等の絶縁
性材料または絶縁コートされた金属パイプ等にて形成し
た両端が開口せる筒状の容器で、その周壁からガスが透
過することがないように適度の密度並びに厚みを持たせ
て形成してある。In Figure 2, 1 is a cylindrical container that is open at both ends and is made of an insulating material such as ceramic or glass, or a metal pipe coated with an insulating material. It is formed to have a density and thickness of .
該容器1内には、左右に配置された二つのガス感知部2
a,2bと、該両感知部2a,2bの間に介在する中央
部の仕切部としてのフィルター3と、両端開口部分にそ
れぞれ配置されたフィルター4a,4bとが装備され、
且つ、これらの中心部分に絶縁性材料にて形成された細
長い棒状の電極担持体5が貫通せしめられており、該電
極担持体5の両端部は上記容器1の側方に突出している
。Inside the container 1, there are two gas sensing units 2 arranged on the left and right sides.
a, 2b, a filter 3 as a central partition interposed between the sensing parts 2a, 2b, and filters 4a, 4b disposed at the openings at both ends, respectively.
In addition, an elongated rod-shaped electrode carrier 5 formed of an insulating material is passed through the central portion of these, and both ends of the electrode carrier 5 protrude to the sides of the container 1 .
そして、この電極担持体5の周面には、中央部分を除く
その両側にそれぞれ、長手方向に沿って分割された各一
対の電極6 a ,6 a’及び6b,6b’が形成さ
れている。Pairs of electrodes 6 a , 6 a ′ and 6 b , 6 b ′ divided along the longitudinal direction are formed on the circumferential surface of the electrode carrier 5 on both sides excluding the central portion. .
つまり、上記各一対の電極6aと6a′及び6bと6b
’は、それぞれ周方向に向き合った状態で、このそれぞ
れの中央寄り部分が上記各ガス感知部4a及び4bに接
し、各電極5a,5a’及び6b,6b’の端部は容器
1の外部に露出するように構成されている。That is, each pair of electrodes 6a and 6a' and 6b and 6b
' are in a state where they face each other in the circumferential direction, and their center portions are in contact with the respective gas sensing parts 4a and 4b, and the ends of each electrode 5a, 5a' and 6b, 6b' are exposed to the outside of the container 1. configured to be exposed.
この各電極5 a , 5 a’及び6b,6b’は、
上記電極相持体20周面の各所定部分にAu,Pt,P
d等の電極材料を被着せしめて形成してお匂
前記両ガス部2a ,2bの素材としては、Sn02、
In203、TiO2、ZnO,NiO、Cr203等
の各種金属酸化物半導体の単体、若しくは複数種類の金
属酸化物半導体を混合したもの、或いはこのような金属
酸化物半導体を主材料としてこれにPd,Pt,Rh、
Ir,Ru,Ag,Au等の触媒を添加したものやアル
ミナ、シリカ等を含有せしめて機械的強度を高めたもの
など、金属酸化物半導体を主体としたガス感知作用を有
する任意のものを採用し得る。These electrodes 5a, 5a' and 6b, 6b' are
Au, Pt, and P are applied to each predetermined portion of the circumferential surface of the electrode supporting body 20.
The materials for the gas portions 2a and 2b include Sn02, Sn02,
A single substance of various metal oxide semiconductors such as In203, TiO2, ZnO, NiO, Cr203, etc., or a mixture of multiple types of metal oxide semiconductors, or using such a metal oxide semiconductor as the main material and adding Pd, Pt, Rh,
Adopt any material that has a gas sensing effect based on metal oxide semiconductors, such as those with added catalysts such as Ir, Ru, Ag, Au, etc., or those containing alumina, silica, etc. to increase mechanical strength. It is possible.
また、前記各フィルター3,4a,4bは、前に説明し
たように、酸化触媒を素材とし、その酸化能力に応じた
選択的なガス透過性を有するものである。Further, as described above, each of the filters 3, 4a, and 4b is made of an oxidation catalyst and has selective gas permeability depending on its oxidation ability.
この各フィルター3 ,4a ,4bの酸化能力は、一
方の端部に位置するフィルター4aより他端部のフィル
ター4bの酸化能力を高くし、中央部のフィルター3は
酸化能力の高い方のフィルター4bと同程度或いはこれ
より高い酸化能力を持たせておくという条件のもとで、
後に詳述する如く、検出すべきガスの種類に応じて適宜
設定しておく。The oxidizing ability of each filter 3, 4a, 4b is such that the oxidizing ability of the filter 4b at the other end is higher than that of the filter 4a located at one end, and the filter 3 at the center has a higher oxidizing ability than the filter 4b located at the other end. Under the condition that it has an oxidizing ability of the same level or higher than that,
As will be described in detail later, it is set appropriately depending on the type of gas to be detected.
容器中央部に設けられる仕切部としては、上記フィルタ
ー3の代りに無通気性素材を用いてもよい。As the partition provided in the center of the container, an air-impermeable material may be used instead of the filter 3 described above.
すなわち、上記仕切部は、上記他端部のフィルター4b
において透過を阻止されるガスが、上記一端部(酸化能
力の低い方)のフィルター4aからガス感知部2aを通
ってガス感知部2bに侵入することを防止するためのも
のである。That is, the partition section is connected to the filter 4b at the other end.
This is to prevent the gas whose permeation is prevented from entering the gas sensing section 2b from the filter 4a at the one end (lower oxidizing ability) through the gas sensing section 2a.
従って、仕切部を無通気性素材により形成しても、こゝ
でガスを遮断することにより、上記の仕切部として必要
な機能が得られる。Therefore, even if the partition is made of an air-impermeable material, by blocking gas there, the necessary function of the partition can be obtained.
ただし、当実施例のように仕切部を酸化触媒を用いたフ
ィルター3により形成して前述のように酸化能力を設定
しておけば、仕切部として必要な機能を満足し、しかも
通気性は良好に保たれるため、より好ましい。However, if the partition part is formed by the filter 3 using an oxidation catalyst as in this embodiment and the oxidation capacity is set as described above, the necessary function as a partition part will be satisfied and the ventilation will be good. It is more preferable because it is maintained at
また、この場合、それぞれのフィルター3,4a,4b
に適当な酸化能力を持たせるには、その素材や温度条件
などを選定しておけばよい。In addition, in this case, each filter 3, 4a, 4b
In order for the material to have an appropriate oxidizing ability, it is sufficient to select the material, temperature conditions, etc.
つまり、例えば金属酸化物やアスベスト、アルミナ、シ
リカなどの基材に貴金属系酸化触媒を添加してフィルタ
ーを形成するような場合、貴金属系酸化触媒の添加量を
多くすれば触媒作用即ち酸化能力が高くなる。In other words, when forming a filter by adding a noble metal oxidation catalyst to a base material such as metal oxide, asbestos, alumina, or silica, increasing the amount of the noble metal oxidation catalyst will increase the catalytic action, that is, the oxidation ability. It gets expensive.
また酸化能力は加熱温度にも依存するので、このような
素材と加熱温度との関係で上記各フィルター3 , 4
a ,4 bが上述せる条件を満足するような適当能
力を持つようにしておく。In addition, since the oxidation ability also depends on the heating temperature, each of the filters 3 and 4 mentioned above depends on the relationship between the material and the heating temperature.
Make sure that a, 4 and b have appropriate abilities that satisfy the above conditions.
7は上記容器1の外周面部に讐着された膜状のヒーター
で、上記各フィルター3,4a,4b及び前記両ガス感
知部2a,2bを加熱する。Reference numeral 7 denotes a membrane-shaped heater attached to the outer peripheral surface of the container 1, which heats each of the filters 3, 4a, 4b and both gas sensing sections 2a, 2b.
このようにして本発明の素子Sが構成され、この素子S
は、前記電極担持体5の両端部分をそれぞれ、例えば基
盤等に取付けたリード兼用の各一対の導電性支柱8a,
8a’, 8b , 8b’の間に挾止固定するよう
にしておけば前記各電極6a,6a′及び6b,6b’
からの端子の取出し並びに回路への組込み等に便利であ
る。In this way, the element S of the present invention is constructed, and this element S
are a pair of conductive supports 8a, which also serve as leads, each of which has both end portions of the electrode carrier 5 attached to, for example, a base plate, etc.;
If the electrodes 8a', 8b, and 8b' are clamped and fixed, each of the electrodes 6a, 6a' and 6b, 6b'
It is convenient for taking out terminals from the terminal and incorporating them into circuits.
そして、この素子Sは通常第4図に示すような回路に組
込まれて利用される。This element S is usually incorporated into a circuit as shown in FIG. 4 and used.
即ち、この回路は、本発明の素子Sにおいて一体的に装
備された前記両感知部2a,2bを電源9に対して互い
に並列に接続し、且つ、上記感知部2a ,2bにそれ
ぞれ抵抗10a,10bを直列に接続すると共に、この
間に電気作動物11を接続することにより、上記両ガス
感知体2a及び2bから得られる各出力の差にあたる電
圧が電気作動物11にかかるようにしたものである。That is, in this circuit, both the sensing parts 2a and 2b integrally equipped in the element S of the present invention are connected in parallel to a power supply 9, and the sensing parts 2a and 2b are connected with resistors 10a and 2b, respectively. 10b are connected in series and the electric actuator 11 is connected between them, so that a voltage corresponding to the difference between the respective outputs obtained from the two gas sensing elements 2a and 2b is applied to the electric actuator 11. .
上記電気作動物11としては、メーター、警報器、換気
扇、電磁弁やその他各種の制御機器等を任意に採用し得
る。As the electric actuator 11, a meter, an alarm, a ventilation fan, a solenoid valve, and various other control devices may be arbitrarily employed.
次に、上記の如き回路に組込まれた時の本発明の素子の
作用を説明すると、例えば、上記各フィルター3,4a
,4bのうち、一方の端部のフィルター4aの酸化能力
を同グラフに符号F2で示す程度とし、他端部のフィル
ター4b及び中央部のフィルター3の酸化能力を同グラ
フに符号F3で示す程度にした場合、同グラフから解る
ように、同グラフに示す各還元性ガスの中で、COガス
とH2ガスは両端のフィルター4aと4bにおいて共に
透過を阻止されるので前記両感知部3a,3bには殆ど
到達し得す、またイソブタンとメタンは各フィルター4
a ,4a及び3のいずれをも殆んど自由に透過するの
で両感知部2a,2bにおいて同程度に感知される。Next, to explain the operation of the element of the present invention when incorporated into the above circuit, for example, each of the above filters 3, 4a
, 4b, the oxidizing ability of the filter 4a at one end is shown as F2 in the same graph, and the oxidizing ability of the filter 4b at the other end and the filter 3 in the center is shown as F3 in the same graph. As can be seen from the same graph, among the reducing gases shown in the same graph, CO gas and H2 gas are both blocked from permeation by the filters 4a and 4b at both ends, so both the sensing parts 3a and 3b are can be almost reached, and isobutane and methane are
Since the light transmits almost freely through all of a, 4a and 3, it is sensed to the same extent by both sensing sections 2a and 2b.
そして、アルコールは一端部のフィルター4aだげを透
過し得るので、一方の感知部2aには感知され得るが他
方の感知部2bでは感知され得ないこととなる。Since alcohol can pass through the filter 4a at one end, it can be sensed by one sensing part 2a but not by the other sensing part 2b.
従って、このように各フィルター4a,4b及び3の酸
化能力を定めた場合には、第4図の回路に示す如く上記
両感知部2a,2bの出力の差を最終的な出力として取
出すようにしておけば、アルコールだけが充分に検出さ
れ、他の還元性ガスの出力は殆ど打消される。Therefore, when the oxidizing ability of each filter 4a, 4b, and 3 is determined in this way, the difference between the outputs of the two sensing sections 2a, 2b is extracted as the final output, as shown in the circuit of FIG. If this is done, only alcohol will be sufficiently detected, and the output of other reducing gases will be almost negated.
尤も、実際にはこのような設定条件においても、各フィ
ルター4a,4b,3の酸化能力に応じてアルコールよ
り酸化され易いH2ガス等も多少は透過され、またアル
コールより酸化されにくいイソブタン等も多少は透過が
阻止されるので、これらのガスに対しても上記の回路に
おいて少しは最終的な出力が出てくるが、これらの出力
はアルコールに対する出力に比べて非常に小さいため、
アルコールに対して秀れた選択的検出効果が得られるこ
とは間違いない。However, in reality, even under these setting conditions, some amount of H2 gas, etc., which is more easily oxidized than alcohol, will pass through, depending on the oxidation ability of each filter 4a, 4b, 3, and some amount of isobutane, etc., which is less oxidized than alcohol. Since the permeation of these gases is blocked, some final output is produced in the above circuit for these gases, but these outputs are very small compared to the output for alcohol, so
There is no doubt that an excellent selective detection effect for alcohol can be obtained.
同様にして、その他の各還元性ガスについても、それに
応じてフィルター4aとフィルター4b及び3との酸化
能力を適宜しておくことにより、その所望の特定単一種
類の還元性ガスを選定的に検出し得る。Similarly, for each of the other reducing gases, by adjusting the oxidizing abilities of the filters 4a, 4b, and 3 accordingly, the desired specific single type of reducing gas can be selectively selected. Can be detected.
また、フィルター4aとフィルター4b及び3との酸化
能力の差を大きくしておけば、その間において透過率の
変わる数種類の還元性ガスを選択的に検出せしめること
もできる。Further, by increasing the difference in oxidizing ability between the filter 4a and the filters 4b and 3, it is possible to selectively detect several types of reducing gases whose transmittances change between them.
こゝで、本発明の素子を用いた場合の特定種類のガスに
対する選択的検出効果につき、当発明者が行った実験の
結果を次の(表2)に示しておく。The following (Table 2) shows the results of an experiment conducted by the present inventor regarding the selective detection effect for a specific type of gas when using the element of the present invention.
なお、この実験は、イソブタンを選択的に検出するよう
にしたもので、第2図に示す形状の素子において、一端
側のフィルター4aには前記(表1)中の酸化能力F3
に相当するフィルターを、他端側および中央部のフィル
ター4b,3にはともに前記(表1)の酸化能力F4に
相当するフィルターを用いた。In this experiment, isobutane was selectively detected, and in the element having the shape shown in FIG.
A filter corresponding to the oxidation capacity F4 as shown in Table 1 above was used for both the other end side and the central filters 4b and 3.
加熱温度は370℃である。また、ガス感知部2a,2
bの金属酸化物半導体にはそれぞれSnO2の単体を用
いた。The heating temperature is 370°C. In addition, the gas sensing parts 2a, 2
A simple substance of SnO2 was used as the metal oxide semiconductor of b.
そして、第4図に示す回路に組込み、電源9の電圧を1
0V、抵抗10aの抵抗値を6KΩ、抵抗10bの抵抗
値を9KΩとして、(表2)に示す各ガス中でのガス感
知部2a,2bの各抵抗値および電気作動物11にか5
る出力電圧を測定した。Then, it is incorporated into the circuit shown in FIG. 4, and the voltage of the power supply 9 is set to 1
0V, the resistance value of the resistor 10a is 6KΩ, and the resistance value of the resistor 10b is 9KΩ, and the resistance values of the gas sensing parts 2a and 2b in each gas shown in (Table 2) and the electrically actuated member 11 are 5.
The output voltage was measured.
測定は自然流通法で行ったものである。Measurements were performed using the natural flow method.
この表から、上記実験条件によれば、空気中における場
合と比較してイソブタン1 0 0 0 ppm中では
出力電圧が大きく変化し、他のガス中では出力電圧の変
化が小さく、イソブタンが選択的に検出されることが解
る。From this table, it can be seen that under the above experimental conditions, the output voltage changes greatly in 1000 ppm of isobutane compared to in air, and the change in output voltage is small in other gases, indicating that isobutane is selective. It can be seen that it is detected.
第5図は本発明の素子Sの他の実施例を示すものであり
、これは、円筒状の容器1の中心軸部に貫通せる電極担
持体5′をパイプ状に形成してあり、その内部にヒータ
ー7′を挿通している。FIG. 5 shows another embodiment of the element S of the present invention, in which an electrode carrier 5' is formed in the shape of a pipe and can be penetrated through the central axis of the cylindrical container 1. A heater 7' is inserted inside.
該電極相持体5′の周面に設けられる各一対の電極6a
,6a′及び6b,6b’やこの電極担持体5′と容器
1との間に配設される両ガス感知体2a,2b並びに各
フィルター3 ,4a ,4bの構成は前記実施例の場
合と同様である。Each pair of electrodes 6a provided on the circumferential surface of the electrode carrier 5'
, 6a', 6b, 6b', both gas sensing bodies 2a, 2b disposed between the electrode carrier 5' and the container 1, and the respective filters 3, 4a, 4b have the same structure as in the previous embodiment. The same is true.
尚、上記各実施例に示す如き構成において、両ガス感知
部2a,2bに対する各一対の電極6a,6a′及び6
b,6b’は、図例では長手方向に沿つた直線帯状にし
てあるが、かかる構造以外にも、例えば、各一対の電極
をそれぞれ一定間隔を保たしめた状態で周方向に捩った
形のスパイラル状にし、或いは一対の電極の相対向する
辺部を、互いの凹部と凸部とが対向し合うような鋸刃状
その他の凹凸形状にした構造なども任意に採用し得ると
ころであり、このようにすれば各一対の電極の対向面積
が大きくなって電極間の抵抗値を低くすることができる
。In addition, in the configuration shown in each of the above embodiments, each pair of electrodes 6a, 6a' and 6 for both gas sensing parts 2a and 2b is
b and 6b' are shown as straight strips along the longitudinal direction in the illustrated example, but in addition to this structure, for example, each pair of electrodes may be twisted in the circumferential direction with a constant interval maintained between them. It is also possible to arbitrarily adopt a structure in which the electrodes have a spiral shape, or the opposing sides of a pair of electrodes have a saw blade shape or other uneven shape in which the concave portions and convex portions face each other. In this way, the opposing area of each pair of electrodes becomes larger, and the resistance value between the electrodes can be lowered.
また、両ガス感知部2a ,2bのそれぞれに対する各
一方の電極6aと6bとを長手力向に連成して両ガス感
知部2a,2bに共通する電極として形成しておいても
よい。Alternatively, one electrode 6a and 6b for each of the gas sensing sections 2a and 2b may be connected in the longitudinal direction to form an electrode common to both the gas sensing sections 2a and 2b.
ただしこの場合には、第4図に示す如き回路に組込むに
あたっては上記の両ガス感知部2a ,2bに共通する
電極が電源9に接続されることを要する。However, in this case, it is necessary that the electrode common to both the gas sensing sections 2a and 2b be connected to the power source 9 in order to incorporate it into a circuit as shown in FIG.
その他各部の構造は、本発明の要旨を逸脱しない範囲で
任意に設計変更して差し支えないことは言うまでもない
。It goes without saying that the structure of the other parts may be modified as desired without departing from the gist of the present invention.
叙上の如く、本発明のガス検知素子は、一対のガス感知
部を備え、この両ガス感知部に対してそれぞれ、酸化能
力に応じた選択的なガス透過性を有するフィルターを配
設することにより、両感知部がそれぞれのフィルターを
透過する還元性ガスだけを選択的に感知するようにし、
且つ、それぞれの感知部に対する各フィルターの酸化能
力を相違せしめることによって各フィルターを透過し得
る還元性ガスの種類即ち各感知部において感知し得るガ
スの種類に差を持たせ、以って、この差にあたる特定種
類の還元性ガスに対してのみ両感知部の感度が顕著に異
なるようにしてあるため、該両感知部の出力の差を取出
すブリッジ回路等に組込まれることにより、特定種類の
還元性ガスだけを選択的に検出せしめてその他の還元性
ガスによる影響を非常に小さくすることができる。As described above, the gas sensing element of the present invention includes a pair of gas sensing sections, and a filter having selective gas permeability depending on the oxidizing ability is provided for each of the two gas sensing sections. This allows both sensing parts to selectively sense only the reducing gas that passes through their respective filters.
In addition, by making the oxidizing ability of each filter different for each sensing part, the type of reducing gas that can pass through each filter, that is, the type of gas that can be sensed in each sensing part, is made different. Since the sensitivity of both sensing parts is made to be significantly different only for the specific type of reducing gas corresponding to the difference, by being incorporated into a bridge circuit etc. that extracts the difference in the output of the two sensing parts, it is possible to detect the specific type of reducing gas. By selectively detecting only the reducing gases, the influence of other reducing gases can be greatly reduced.
そして、第1図のグラフから解る如く、各フィルターの
酸化能力の選定の仕方によって所望の特定還元性ガスを
上述せるようにして選択的に検出し得るので、任意の用
途において、その用途に応じた検出の目的とする特定還
元性ガスだけを選択的に検出せしめ、検出対象外の不要
な還元性ガスによる装置の誤動作を防止し得て検出精度
を格段に向上することができる。As can be seen from the graph in Figure 1, a desired specific reducing gas can be selectively detected as described above by selecting the oxidizing capacity of each filter. By selectively detecting only the specific reducing gas that is the object of detection, it is possible to prevent malfunction of the device due to unnecessary reducing gases that are not the object of detection, and the detection accuracy can be significantly improved.
しかも、上記両ガス感知部及び各感知部に対するフィル
ターなどを筒状の容器内に配列装備して複合一体化した
構造に形成してあるため、構造が合理化されて非常にコ
ンパクトになる。Furthermore, since both of the gas sensing sections and the filters for each sensing section are arranged and equipped in a cylindrical container to form a composite and integrated structure, the structure is streamlined and extremely compact.
さらに、これらの中心部分に貫通せしめた電極相持体の
周面に上記両素子のそれぞれに対する各一対の電極を形
成し、この各電極が電極相持体に担持せしめられた状態
で外部に導出されているため、各電極からの端子の取出
しゃ回路への接続、取付け等が容易になって装置への組
込みに極めて便利である等、実用に適した多大の効果を
奏するものである。Further, a pair of electrodes for each of the above-mentioned elements is formed on the circumferential surface of an electrode supporting body which is penetrated through the central portion of these, and each electrode is led out to the outside while being supported by the electrode supporting body. Because of this, it is easy to take out the terminals from each electrode, connect them to the circuit, attach them, etc., and it is extremely convenient to incorporate them into a device, which brings about many practical effects.
第1図は本発明の素子において用いられるフィルターの
酸化能力と各種還元性ガスに対する透過率との関係を示
すグラフ、第2図は本発明の実施例を示す断面図、第3
図は電極相持体の斜視図、第4図は本発明の素子を用い
たガス検出装置の回路構成の一例を示す回路図、第5図
は本発明の他の実施例を示す断面図である。
1……容器、2a ,2b……ガス感知部、3……中央
仕切部、4a ,4b……フィルター、5,5′……電
極担持体、6a ,6a’,6b,6b’……上記両ガ
ス感知部に対する各一対の電極。FIG. 1 is a graph showing the relationship between the oxidizing ability of the filter used in the element of the present invention and the transmittance for various reducing gases, FIG. 2 is a cross-sectional view showing an example of the present invention, and FIG.
4 is a circuit diagram showing an example of the circuit configuration of a gas detection device using the element of the present invention, and FIG. 5 is a sectional view showing another embodiment of the present invention. . DESCRIPTION OF SYMBOLS 1... Container, 2a, 2b... Gas sensing part, 3... Central partition part, 4a, 4b... Filter, 5, 5'... Electrode carrier, 6a, 6a', 6b, 6b'... Above Each pair of electrodes for both gas sensing parts.
Claims (1)
状の容器内の中央に、酸化触媒を用いたフィルター材ま
たは無通気性素材からなる仕切部を設け、該仕切部の両
側にガス敏感性金属酸化物半導体からなるガス感知部を
、容器両端開口部分に酸化触媒を素材とした選択的なガ
ス透過性を有するフィルターをそれぞれ配備し、上記両
フィルターの酸化能力を相違せしめると共に、これら全
体の中心軸部分に絶縁性の電極担持体を貫通せしめ、該
電極相持体の周面に、その両端部からそれぞれ中央近傍
部に至るまでの範囲で長手力向にわたって分割された上
記両ガス感知部に対する各一対の電極を形成してなる特
定種類の還元性ガスを選択的に検出するための複合型ガ
ス検知素子。1 A partition made of a filter material using an oxidation catalyst or a non-porous material is provided in the center of a cylindrical container made of an airtight material and open at both ends, and a gas-sensitive material is provided on both sides of the partition. A gas sensing section made of a chemical metal oxide semiconductor is provided, and a filter with selective gas permeability made of an oxidation catalyst is provided at the openings at both ends of the container. an insulating electrode carrier is passed through the central axis portion of the electrode carrier, and the gas sensing portions are divided along the longitudinal direction from both ends of the electrode carrier to the respective central portions on the peripheral surface of the electrode carrier. A composite gas detection element for selectively detecting a specific type of reducing gas, which is formed by forming a pair of electrodes for each of the two electrodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6718875A JPS587941B2 (en) | 1975-06-03 | 1975-06-03 | Tokutei Ino Kangensei Gaso Sentaku Techini Kenshiyutsu Sultame no Fukugogata Gas Kenchisoshi |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6718875A JPS587941B2 (en) | 1975-06-03 | 1975-06-03 | Tokutei Ino Kangensei Gaso Sentaku Techini Kenshiyutsu Sultame no Fukugogata Gas Kenchisoshi |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51143396A JPS51143396A (en) | 1976-12-09 |
| JPS587941B2 true JPS587941B2 (en) | 1983-02-14 |
Family
ID=13337664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6718875A Expired JPS587941B2 (en) | 1975-06-03 | 1975-06-03 | Tokutei Ino Kangensei Gaso Sentaku Techini Kenshiyutsu Sultame no Fukugogata Gas Kenchisoshi |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS587941B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6354353U (en) * | 1986-09-30 | 1988-04-12 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5336296A (en) * | 1976-09-16 | 1978-04-04 | Saginomiya Seisakusho Inc | Gas detecting element with selective filtering function |
| JP2008014662A (en) * | 2006-07-03 | 2008-01-24 | New Cosmos Electric Corp | Gas filter and gas sensor |
-
1975
- 1975-06-03 JP JP6718875A patent/JPS587941B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6354353U (en) * | 1986-09-30 | 1988-04-12 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51143396A (en) | 1976-12-09 |
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