JPS5883326A - Manufacture of medium for vertical magnetic recording - Google Patents

Abstract

PURPOSE:To obtain a recording medium which provides high-density recording while improving vertical orientaion by forming a metalic layer of hexagonal closed-packed lattice structure of Ti, etc., while an insulating substrate is preheated, and then forming a vertically magnetized film on it. CONSTITUTION:An insulating substrate whose Al surface is converted to Alumite by oxidation is arranged for a vacuum-depositon container. This substrate is heated up to 200 deg.C, gaseous Ar is introduced, and a Ti target is heated by irradiation to form a Ti metallic film on the substrate. While CoCr alloy (20 atom % Co) is regarded as a target, a vertically magnetized film having magnetic anisotropy perpendicular to the substrate surface is formed on the Ti metallic film. Thus, the substrate is preheated and CoCr is vacuum-diposited after the orientation in the C-axis direction of the closest-packed lattice structure of the crystal structure of Ti is increased to increase the vertical magnetism anisotropy, improving the reliability of recording.

Description

DETAILED DESCRIPTION OF THE INVENTION Technical Field of the Invention The present invention relates to a method for manufacturing a perpendicular magnetization recording medium that utilizes magnetization in the perpendicular direction of the film surface.

(2) Background of the technology Vertical magnetization recording media that utilize the perpendicular magnetization of a magnetic film formed on a substrate have higher Perpendicular magnetization recording media have recently come into use because information is recorded at high density.

(8) & Prior Art and Problems Conventionally, when forming such a perpendicular magnetization recording medium, titanium ( A metal film with a hexagonal close-packed lattice structure such as
It is formed to have a thickness of about 100 mm, and furthermore, Or is formed on the metal film of T1 with a thickness of 20
Contains atomic% c.

A perpendicularly magnetized film of Or is formed by sputtering to a thickness of about 1 μm.

However, the perpendicular magnetization recording medium formed in this way is
The degree of perpendicular orientation, in which the direction of magnetization is perpendicular to the film surface, is small.

If such a perpendicular magnetization recording medium with low vertical orientation is used, writing will also be performed in the horizontal direction due to the horizontal component of magnetization, resulting in a low recording density and making highly reliable magnetization recording impossible. When it happens, nine defects arise.

(4) Purpose of the Invention The object of the present invention is to eliminate the above-mentioned drawbacks and to provide a method for manufacturing a perpendicular magnetic recording medium capable of high-density recording with improved perpendicular alignment.

(5) Structure of the Invention A method for manufacturing a perpendicular magnetic recording medium to achieve the above object is to form a metal layer having a hexagonal close-packed lattice structure, such as titanium, on an insulating substrate; In a method for manufacturing a perpendicular magnetic recording medium in which a perpendicularly magnetized film having magnetization perpendicular to the surface of the insulating substrate is formed on the layer, a hexagonal close-packed lattice structure made of titanium or the like is heated while the substrate is crimped and heated. The method is characterized in that a metal layer is formed, and a perpendicular magnetic magnetic film is formed on the metal layer having a hexagonal close-packed lattice structure, such as hind limb titanium.

(6) Embodiment of the Invention Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.

In other words, it is known that in the above-mentioned Suno (ivy) cocr film, the C axis of the hexagonal close-packed lattice structure grows perpendicular to the film surface.In order to improve this vertical orientation, it is necessary to consider the orientation of the four plates. In the present invention, the perpendicular orientation of the CoCr film is increased by increasing the orientation of the underlying metal of the perpendicularly magnetized film, as described below.

First, the surface is oxidized and alumite-treated, and the 9A1 substrate is introduced into a vacuum container such as a vacuum jar. After evacuating the inside of the jar, the A1 substrate is heated to 200°C using a heater.
Heat the container to a temperature of about 1 hour and keep it there for about 1 hour, then introduce alcon (〃) gas, etc. for the vine ivy into the container. Then, using T1 as a target, a high voltage is applied between the substrate installation stand on which the substrate is installed and TARDEF 1 to ionize the Ar gas, and the surface of the T1 target F is irradiated with the ionized Ar gas. The layer is deposited on the substrate to a thickness of 600 Angstroms. On top of that, Or is 20 atomic%
Using a target made of an alloy of Co0r added, a high voltage is applied between the CoCr target and the substrate mounting table, and the substrate is heated to a temperature of 150°C to form a 1 μm thick carbon
Deposit an alloy layer of oCr.

The magnetization recording medium of the 0oOr layer formed in this way is measured using an X-ray diffraction apparatus, and the rocking curve of the peak reflected from the (002) plane of the I & dense hexagonal Seizo is determined by the crystal structure of the 0oOr layer. When the dispersion angle Δ050, which is the half width, was measured, the results shown in Table 1 were 2!1! Obtained.

Table 1 As shown in Table 1, 20
A T1 layer is formed on the substrate by heating to 0°C, and a C layer is formed on it.
When the dispersion angle of this perpendicular magnetic recording medium with an oCr layer was measured using two types of samples, values of 5.j and 5.8° were obtained. ”Shi T
When one layer is formed and a Coor layer is formed thereon, the value of the dispersion angle increases to 6.8' and 7.5°. Here, when the value of the dispersion angle is l, the C-axis of the close-packed hexagonal structure of the CoCr magnetization recording medium that is formed has good orientation in the direction perpendicular to the substrate, and cocr @ indicates this C-axis. Since it has perpendicular magnetization anisotropy in the direction, the perpendicular magnetization anisotropy of the magnetization recording medium thus formed is improved.

Here, the first diagram shows the relationship between the value of Δθ60 of 0oOr and the recording density when using a CoCr magnetization recording medium with that value.
As shown in the figure.

In the figure, the horizontal axis shows the dispersion angle Δθ50 of C0Cr, and the vertical axis shows the recording density (black slimmer per inch PRP process) of a CoCr magnetization recording medium having this dispersion angle.
As shown in the figure, the smaller the dispersion angle, the better the orientation in the C-axis direction of the close-packed hexagonal structure of CoCr's crystal structure. The magnetization recording density of the magnetization recording medium is improved. The magnetic bed used in the measurement was a wn-feft type with a gap length of 0.12 μm, and the flying height from the magnetization recording medium was α065 μm.

When an alumite-treated A1 substrate is heated in advance and a T1 layer is formed on it, the substrate is heated in a chamber (1
The T1 layer is formed in a state where the orientation of the close-packed hexagonal structure of the T1 crystal structure in the C-axis direction is increased compared to the conventional case in which the T1 layer is formed on the T1 layer at a temperature of 5°C to 25°C. When a CoCr layer having the same crystal structure as T1 is formed in The CoCr layer has a large anisotropy in the vertical direction and is less likely to have a horizontal magnetization component, thereby improving the magnetic recording density.

(7) Effects of the Invention As described above, according to the method of manufacturing a perpendicular magnetization recording medium of the present invention, the perpendicular orientation of the perpendicular magnetization film of CoCr is improved, and therefore, it is possible to use such a perpendicular magnetization film recording medium. If the magnetization recording density is formed using the same method, there will be an advantage that the recording density of the device will be improved.

It is.

Figure 1 5 10

Claims (1)

[Claims] For perpendicular magnetization recording, in which a metal layer of titanium or the like with a hexagonal close-packed lattice structure is formed on an insulating substrate, and a perpendicular magnetization film having magnetization perpendicular to the surface of the insulating substrate is formed on the metal layer with a hexagonal close-packed lattice structure. In the method for producing a medium, a metal layer having a hexagonal close-packed lattice structure such as titanium is formed on the substrate in a preheated state, and a perpendicular magnetization film is formed on the metal layer having a hexagonal close-packed lattice structure such as hindlimb titanium. A method for manufacturing a perpendicular magnetization recording medium, characterized by: