JPS588475B2 - Magnetic flux detection device - Google Patents
Magnetic flux detection deviceInfo
- Publication number
- JPS588475B2 JPS588475B2 JP1532277A JP1532277A JPS588475B2 JP S588475 B2 JPS588475 B2 JP S588475B2 JP 1532277 A JP1532277 A JP 1532277A JP 1532277 A JP1532277 A JP 1532277A JP S588475 B2 JPS588475 B2 JP S588475B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- coil
- magnetic flux
- squid
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Measuring Magnetic Variables (AREA)
Description
【発明の詳細な説明】
本発明は通称スクイド(SQUID)と呼ばれている磁
束検出用の装置の改良に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in a device for detecting magnetic flux, commonly called a SQUID.
スクイドは超伝導物質例えばNbが極低温で超伝導状態
に転移する特性を利用し、超伝導物質で作られているリ
ングの一部に弱い結合部分を設け、この超伝導リングを
極低温に保ちこのリングに測定すべき外部磁束に対応す
る磁束を交叉せしめよって生ずるリング結合部分の状態
の転換を検出することによって外部磁束の変化を検出す
る装置である。SQUID takes advantage of the property of superconducting materials such as Nb to transition to a superconducting state at extremely low temperatures, and creates a weak bond in a part of a ring made of superconducting materials to keep this superconducting ring at extremely low temperatures. This device detects a change in the external magnetic flux by detecting a change in the state of the ring coupling portion caused by crossing the ring with a magnetic flux corresponding to the external magnetic flux to be measured.
第1図はスクイドの原理的な説明図である。図において
、超伝導物質で作られたリング(以下これを超伝導リン
グと呼ぶ)1は一部に弱い結合部分、例えば点接触部分
11をもつ。FIG. 1 is an explanatory diagram of the principle of SQUID. In the figure, a ring 1 made of a superconducting material (hereinafter referred to as a superconducting ring) has a weak bonding portion, for example, a point contact portion 11 in a part.
コイル2はコンデンサ3とともにタンク回路4を形成し
、このタンク回路4は超伝導リング1と誘導的に結合す
る。The coil 2 together with the capacitor 3 forms a tank circuit 4 which is inductively coupled to the superconducting ring 1 .
タンク回路4は高周波電源6から微弱高周波電力の供給
を受け、高周波で共振するLC共振回路である。The tank circuit 4 is an LC resonant circuit that receives weak high frequency power from the high frequency power supply 6 and resonates at high frequencies.
コイル5は外部磁束を捜索するサーチコイル(図示せず
)に接続しこれと閉回路をつくる。The coil 5 is connected to a search coil (not shown) for searching for external magnetic flux to form a closed circuit with this.
このコイル5もまた超伝導リング1と誘導的に結合する
ように配置される。This coil 5 is also arranged to be inductively coupled to the superconducting ring 1.
超伝導リング1、高周波共振回路4、およびコイル5は
点線Bで示されている液体ヘリウムの低温槽内に置かれ
、ヘリウム温度に保たれる。The superconducting ring 1, the high frequency resonant circuit 4, and the coil 5 are placed in a cryostat of liquid helium, indicated by the dotted line B, and maintained at helium temperature.
高周波電源6からの高周波電力により共振回路4に発生
する高周波電圧は増幅器AMPで増幅され整流器で整流
された後出力信号となる。A high frequency voltage generated in the resonant circuit 4 by high frequency power from the high frequency power source 6 is amplified by an amplifier AMP and rectified by a rectifier, and then becomes an output signal.
いま、コイル5に接続せるサーチコイルの交叉する外部
磁束が変化し、超伝導リング1と交叉する磁束が変化す
れば、この磁束変化に対応して超伝導リングの弱い結合
部分11は超伝導状態←常伝導状態のスイッチング動作
を繰返す。Now, if the external magnetic flux crossing the search coil connected to the coil 5 changes and the magnetic flux crossing the superconducting ring 1 changes, the weakly coupled portion 11 of the superconducting ring changes to a superconducting state in response to this magnetic flux change. ←Repeat the switching operation in normal conduction state.
その結果、出力信号は外部磁束の増加するに従って揺動
を繰返し第2図に示すような波形の特性曲線を画く。As a result, the output signal repeatedly oscillates as the external magnetic flux increases, forming a waveform characteristic curve as shown in FIG.
そして出力の最大値は外部磁束が1磁束量子(1.)増
加するごとに現われる。The maximum value of the output appears every time the external magnetic flux increases by one flux quantum (1.).
この出力に現われる揺動回数を計数することによってサ
ーチコイルと交叉する磁束の変化値すなわち積分値を測
定することができる。By counting the number of oscillations that appear in this output, it is possible to measure the change value, that is, the integral value, of the magnetic flux that intersects with the search coil.
このような装置において、最近の薄膜製造技術の進歩に
よって、弱い結合部分を薄膜ブリッジで構成したものが
実現できるようになってきた。In such devices, recent advances in thin film manufacturing technology have made it possible to construct weak coupling portions with thin film bridges.
第3図はこのような薄膜スクイドの一例を示す構成図で
ある。FIG. 3 is a block diagram showing an example of such a thin film SQUID.
この薄膜スクイドは、例えばサフアイア基板12上に超
伝導材料、例えばNbを700Å〜1000Åの膜厚と
なるように付着させることによって薄膜13を形成し、
この薄膜に2つの穴14と15を設けるとともに、この
穴14と15を結ぶ細溝16,17の途中に弱い結合部
分に相当する薄膜ブリッジを設けたものである。In this thin film SQUID, a thin film 13 is formed by depositing a superconducting material such as Nb on a sapphire substrate 12 to a thickness of 700 Å to 1000 Å,
Two holes 14 and 15 are provided in this thin film, and a thin film bridge corresponding to a weak connection portion is provided in the middle of narrow grooves 16 and 17 connecting these holes 14 and 15.
このように弱い結合部分を薄膜ブリッジで構成したもの
は、これを点接触形で構成したものに比べ、長期間に亘
って安定な動作を行なうなど種種の特長を有している。A device in which the weak connection portion is formed by a thin film bridge has various advantages, such as stable operation over a long period of time, compared to a structure in which the weak connection portion is formed by a point contact type.
ここにおいて、本発明は前記したような薄膜スクイドと
、このスクイドに効率よく結合したコイルとを含み、全
体として小形、軽量で量産に適する磁束検出装置を提供
しようとするものである。Here, the present invention aims to provide a magnetic flux detection device that includes the above-mentioned thin film SQUID and a coil efficiently coupled to the SQUID, and that is compact and lightweight as a whole and is suitable for mass production.
第4図および第5図は本発明にかかわる装置に使用され
るコイルの一例を示す構成図である。FIGS. 4 and 5 are configuration diagrams showing an example of a coil used in the device according to the present invention.
第4図実施例のものは、基板(例えばガラス・エポキシ
)21の両平面に位置を異にして渦巻状のコイル22
.23を形成し、これらの渦巻状のコイル22.23を
貫通孔24を介して電気的に接続し、全体として略8の
字形のコイルとしたものである。In the embodiment shown in FIG. 4, spiral coils 22 are arranged at different positions on both planes of a substrate (for example, glass epoxy) 21.
.. 23 is formed, and these spiral coils 22 and 23 are electrically connected through a through hole 24 to form an approximately figure-eight-shaped coil as a whole.
25.26はコイルの引出し線である。第5図実施例の
ものは、基板21に複数個の貫通孔を設け、これらの貫
通孔を通って基板21の両平面に跨がり、全体として略
8の字形となるように導線を巻いて2つのコイル22
.23を構成したものである。25 and 26 are lead wires of the coil. In the embodiment shown in FIG. 5, a plurality of through-holes are provided in the substrate 21, and the conductive wire is wound through these through-holes so as to span both planes of the substrate 21 so as to form an approximately figure-eight shape as a whole. two coils 22
.. 23.
第6図は薄膜スクイド1とコイル2との配置関係を示し
たもので、略8の字形をなすコイル22と23との中心
は、薄膜スクイド1の薄膜に設けてある穴14.15の
中心とほぼ対向するように両者は互いに並行して配置さ
れる。FIG. 6 shows the arrangement relationship between the thin film SQUID 1 and the coil 2. The centers of the coils 22 and 23 forming a substantially figure 8 shape are the centers of the holes 14 and 15 provided in the thin film of the thin film SQUID 1. Both are arranged parallel to each other so as to be substantially opposite to each other.
このようにコイル2を薄膜スクイド1と並行して配置し
、引出し線25,26を介して高周波信号をコイル22
.23に与えると、これによって生ずる磁力線は第1図
に示す通りとなる。In this way, the coil 2 is arranged in parallel with the thin film SQUID 1, and a high frequency signal is transmitted to the coil 22 through the lead wires 25 and 26.
.. 23, the resulting magnetic lines of force are as shown in FIG.
すなわち、いま引出し線25側が+、引出し線26側が
一となっている半周期について考えると、コイル22.
23を流れる電流は第6図の矢印方向に示すように、互
いに近接する2本又は4本の導体には同方向の電流が流
れる。That is, if we consider the half cycle in which the lead wire 25 side is + and the lead wire 26 side is +, then the coil 22.
As shown in the direction of the arrow in FIG. 6, the current flowing through the conductor 23 flows in the same direction through two or four conductors that are close to each other.
したがって、磁力線はこれら2本又は4本の導体を一組
にして第1図矢印に示すように発生し、効率よく薄膜ス
クイド1に交叉する。Therefore, magnetic lines of force are generated by combining these two or four conductors as shown by the arrows in FIG. 1, and efficiently intersect the thin film SQUID 1.
なお、ここでは高周波信号が与えられるコイル2を第4
図および第5図に示すように構成し、これと薄膜スクイ
ドとを配列したものについて示してあるが、サーチコイ
ルに接続される第1図におけるコイル5についても同様
に構成し、これをコイル2とは反対側に配列してもよい
。Note that here, the coil 2 to which the high frequency signal is applied is the fourth coil.
Although the structure shown in FIG. 5 and FIG. 5 is shown in which this and the thin film SQUID are arranged, the coil 5 in FIG. It may be arranged on the opposite side.
また、第4図および第5図に示したコイルは、左右2タ
ーン、合計4ターンのものについて示してあるが、別の
ターン数でもよい。Further, although the coils shown in FIGS. 4 and 5 are shown with two turns on the left and right, a total of four turns, a different number of turns may be used.
このように構成される装置によれば、薄膜スクイドおよ
びコイルを薄形にして組立てることができ、スクイドと
コイルとの結合を高くできるうえに、両者間の機械的な
位置合せが容易で量産可能な磁束検出装置が実現できる
。According to the device constructed in this way, the thin film SQUID and coil can be assembled in a thin shape, the coupling between the SQUID and the coil can be improved, and the mechanical alignment between them is easy, making mass production possible. A magnetic flux detection device can be realized.
第8図は本発明に係る装置の他の実施例を示す組立図で
ある。FIG. 8 is an assembly diagram showing another embodiment of the device according to the present invention.
この図において、7は例えばホワイトメタルで構成した
超伝導リングブロックで、ここには薄膜スクイド1が収
まる溝71と、ブロックを貫通し並行に配列する円筒形
の小孔72,13と、これらの小孔72 ,73に通ず
る空隙14とが設けられている。In this figure, 7 is a superconducting ring block made of white metal, for example, and has a groove 71 in which the thin film SQUID 1 is accommodated, cylindrical small holes 72 and 13 that penetrate the block and are arranged in parallel, and these holes. A void 14 communicating with the small holes 72 and 73 is provided.
8は薄膜スクイド1とコイル2との間に介在される厚さ
1mm程度のスペーサ、9は同軸ケーブルである。8 is a spacer with a thickness of about 1 mm interposed between the thin film SQUID 1 and the coil 2, and 9 is a coaxial cable.
8L82は押えネジで、薄膜スクイド1を溝11に収納
した後、スペーサ8、コイル2を重ねてこれらのネジ8
1,82を締付けることにより、超伝導リングブロック
7、薄膜スクイド1、スペーサ8およびコイル2が一体
に組立てられる。8L82 is a holding screw, and after storing the thin film SQUID 1 in the groove 11, stack the spacer 8 and coil 2 and tighten these screws 8.
1 and 82, the superconducting ring block 7, thin film SQUID 1, spacer 8 and coil 2 are assembled together.
そして、この実施例装置においては、超伝導リングブロ
ック7に設けた円筒形小孔72 .73に測定磁界を与
えるためのコイル5を挿入するようにしている。In the device of this embodiment, a small cylindrical hole 72. is provided in the superconducting ring block 7. A coil 5 for applying a measurement magnetic field is inserted into 73.
なお、このコイル5には円筒形状ボビンに導線を巻回し
たものを用いている。Note that this coil 5 is made of a cylindrical bobbin wound with a conducting wire.
この実施例装置のように、薄膜スクイドを超伝導リング
ブロックで保持させると、超伝導ブロック7と薄膜スク
イドとが結合し、弱い結合部分を共用する全体で1つの
スクイドを構成するもので、全体のインダクタンスが小
さくなって、検出感度が増大するという利点がある。When the thin film SQUID is held by a superconducting ring block as in this example device, the superconducting block 7 and the thin film SQUID are combined, and the whole forms one SQUID sharing a weak bonding part. This has the advantage that the inductance is reduced and the detection sensitivity is increased.
Claims (1)
穴とこの2つの穴を結ぶ細溝の途中に弱い結合部分とを
設けて構成した薄膜スクイド、平板基板の両平面に分け
て全体が略8の字形に形成されたコイルを具備し、前記
薄膜スクイドと前記コイルとを前記薄膜に設けた2つの
穴と前記8の字を構成するコイルの中心とがそれぞれ対
応するように配置した磁束検出装置。 2 互いに並行に配列する2つの円筒形状の小孔と、こ
れらの小孔に通ずる空隙とを有する超伝導リングブロッ
クによって薄膜スクイドを保持するようにした特許請求
の範囲第1項記載の磁束検出装置。[Claims] 1. A thin film SQUID, which is constructed by providing two holes in a thin film of superconducting material adhered to an insulating substrate and a weak bonding part in the middle of a thin groove connecting the two holes, and a flat plate substrate. The coil is divided into both planes and formed into a generally figure-eight shape, and the thin film SQUID and the coil are connected to the two holes provided in the thin film and the center of the coil forming the figure-eight, respectively. Magnetic flux detection device arranged to correspond. 2. The magnetic flux detection device according to claim 1, wherein the thin film SQUID is held by a superconducting ring block having two cylindrical small holes arranged in parallel with each other and a gap communicating with these small holes. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1532277A JPS588475B2 (en) | 1977-02-15 | 1977-02-15 | Magnetic flux detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1532277A JPS588475B2 (en) | 1977-02-15 | 1977-02-15 | Magnetic flux detection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53100874A JPS53100874A (en) | 1978-09-02 |
| JPS588475B2 true JPS588475B2 (en) | 1983-02-16 |
Family
ID=11885527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1532277A Expired JPS588475B2 (en) | 1977-02-15 | 1977-02-15 | Magnetic flux detection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS588475B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03114183U (en) * | 1990-01-19 | 1991-11-22 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6370089U (en) * | 1986-10-28 | 1988-05-11 | ||
| JPH0166081U (en) * | 1987-10-22 | 1989-04-27 | ||
| JP7052261B2 (en) * | 2017-09-04 | 2022-04-12 | 日本製鉄株式会社 | Magnetic flux density detection coil and magnetic characteristic measuring instrument |
-
1977
- 1977-02-15 JP JP1532277A patent/JPS588475B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03114183U (en) * | 1990-01-19 | 1991-11-22 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53100874A (en) | 1978-09-02 |
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