JPS5891666A - 半導体素子の冷却方法 - Google Patents
半導体素子の冷却方法Info
- Publication number
- JPS5891666A JPS5891666A JP56190225A JP19022581A JPS5891666A JP S5891666 A JPS5891666 A JP S5891666A JP 56190225 A JP56190225 A JP 56190225A JP 19022581 A JP19022581 A JP 19022581A JP S5891666 A JPS5891666 A JP S5891666A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- pressure
- liquid
- phase flow
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W40/00—Arrangements for thermal protection or thermal control
- H10W40/70—Fillings or auxiliary members in containers or in encapsulations for thermal protection or control
- H10W40/73—Fillings or auxiliary members in containers or in encapsulations for thermal protection or control for cooling by change of state
Landscapes
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56190225A JPS5891666A (ja) | 1981-11-26 | 1981-11-26 | 半導体素子の冷却方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56190225A JPS5891666A (ja) | 1981-11-26 | 1981-11-26 | 半導体素子の冷却方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5891666A true JPS5891666A (ja) | 1983-05-31 |
| JPS6137792B2 JPS6137792B2 (2) | 1986-08-26 |
Family
ID=16254559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56190225A Granted JPS5891666A (ja) | 1981-11-26 | 1981-11-26 | 半導体素子の冷却方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5891666A (2) |
-
1981
- 1981-11-26 JP JP56190225A patent/JPS5891666A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6137792B2 (2) | 1986-08-26 |
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