JPS59108210U - 螢光ｘ線膜厚計用コリメ−タ装置 - Google Patents

螢光ｘ線膜厚計用コリメ−タ装置

Info

Publication number
JPS59108210U
JPS59108210U JP237083U JP237083U JPS59108210U JP S59108210 U JPS59108210 U JP S59108210U JP 237083 U JP237083 U JP 237083U JP 237083 U JP237083 U JP 237083U JP S59108210 U JPS59108210 U JP S59108210U
Authority
JP
Japan
Prior art keywords
collimator
fluorescent
film thickness
ray film
thickness meter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP237083U
Other languages
English (en)
Japanese (ja)
Other versions
JPS641603Y2 (mo
Inventor
渡辺　登志夫
Original Assignee
セイコーインスツルメンツ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコーインスツルメンツ株式会社 filed Critical セイコーインスツルメンツ株式会社
Priority to JP237083U priority Critical patent/JPS59108210U/ja
Publication of JPS59108210U publication Critical patent/JPS59108210U/ja
Application granted granted Critical
Publication of JPS641603Y2 publication Critical patent/JPS641603Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP237083U 1983-01-12 1983-01-12 螢光ｘ線膜厚計用コリメ−タ装置 Granted JPS59108210U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP237083U JPS59108210U (ja) 1983-01-12 1983-01-12 螢光ｘ線膜厚計用コリメ−タ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP237083U JPS59108210U (ja) 1983-01-12 1983-01-12 螢光ｘ線膜厚計用コリメ−タ装置

Publications (2)

Publication Number Publication Date
JPS59108210U true JPS59108210U (ja) 1984-07-21
JPS641603Y2 JPS641603Y2 (mo) 1989-01-13

Family

ID=30134038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP237083U Granted JPS59108210U (ja) 1983-01-12 1983-01-12 螢光ｘ線膜厚計用コリメ−タ装置

Country Status (1)

Country Link
JP (1) JPS59108210U (mo)

Also Published As

Publication number Publication date
JPS641603Y2 (mo) 1989-01-13

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