JPS59109237A - プラズマト−チcvd用誘導加熱型原料ガス供給器 - Google Patents
プラズマト−チcvd用誘導加熱型原料ガス供給器Info
- Publication number
- JPS59109237A JPS59109237A JP21810582A JP21810582A JPS59109237A JP S59109237 A JPS59109237 A JP S59109237A JP 21810582 A JP21810582 A JP 21810582A JP 21810582 A JP21810582 A JP 21810582A JP S59109237 A JPS59109237 A JP S59109237A
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- plasma torch
- pipe
- induction heating
- quartz glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21810582A JPS59109237A (ja) | 1982-12-13 | 1982-12-13 | プラズマト−チcvd用誘導加熱型原料ガス供給器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21810582A JPS59109237A (ja) | 1982-12-13 | 1982-12-13 | プラズマト−チcvd用誘導加熱型原料ガス供給器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59109237A true JPS59109237A (ja) | 1984-06-23 |
| JPS6328657B2 JPS6328657B2 (sr) | 1988-06-09 |
Family
ID=16714707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21810582A Granted JPS59109237A (ja) | 1982-12-13 | 1982-12-13 | プラズマト−チcvd用誘導加熱型原料ガス供給器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59109237A (sr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH076164U (ja) * | 1993-06-30 | 1995-01-27 | 金沢樹脂工業株式会社 | 小箱体付容体 |
-
1982
- 1982-12-13 JP JP21810582A patent/JPS59109237A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6328657B2 (sr) | 1988-06-09 |
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