JPS59112862A - Atomizer - Google Patents
AtomizerInfo
- Publication number
- JPS59112862A JPS59112862A JP57224259A JP22425982A JPS59112862A JP S59112862 A JPS59112862 A JP S59112862A JP 57224259 A JP57224259 A JP 57224259A JP 22425982 A JP22425982 A JP 22425982A JP S59112862 A JPS59112862 A JP S59112862A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- nozzle
- atomizer
- vibrator
- atomization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
- B05B17/0646—Vibrating plates, i.e. plates being directly subjected to the vibrations, e.g. having a piezoelectric transducer attached thereto
Landscapes
- Special Spraying Apparatus (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、灯油や軽油等の液体燃料・水・薬浴液・記録
液等を、電気的振動子を用いて霧化する液体の霧化装置
に関する。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a liquid atomization device that atomizes liquid fuel such as kerosene or light oil, water, medicinal bath liquid, recording liquid, etc. using an electric vibrator. Regarding.
従来例の構成とその問題点
従来から液体の霧化装置には、種々のものが提案されて
おり、圧電素子等の電気的振動子を用いたものも多く見
うけられる。Conventional Structures and Their Problems Various types of liquid atomization devices have been proposed in the past, and many of them use electrical vibrators such as piezoelectric elements.
例えば、(1)ホーン型の振動子に圧電素子をボルト締
め、又は接着し、圧電素子の機械的撮動振幅をホーン型
振動子で増幅し、ホーン先端の振幅拡大面に液体を供給
、滴下して霧化する撮幅増幅型超音波霧化装置、あるい
は、(2)近年インクジェット記録装置に実用化されて
いる超音波霧化粒子列を噴射するもので、液室の一端に
圧電振動子金膜け、他端にオリフィスを設けた構成で、
圧電振動子の振動による液室内の圧力北昇全液体を介し
てオリフィスに伝え、その結果オリフィスより霧化粒子
をかなりの飛散速度をもって噴射することが出来る霧化
装置がある。For example, (1) a piezoelectric element is bolted or glued to a horn-shaped vibrator, the mechanical vibration amplitude of the piezoelectric element is amplified by the horn-shaped vibrator, and a liquid is supplied and dripped onto the amplitude amplifying surface at the tip of the horn. (2) A device that injects an array of ultrasonic atomized particles, which has been put into practical use in inkjet recording devices in recent years, and has a piezoelectric vibrator at one end of the liquid chamber. It has a gold coating and an orifice on the other end.
There is an atomization device that can increase the pressure in a liquid chamber due to the vibration of a piezoelectric vibrator and transmit it to an orifice via all the liquid, and as a result, spray atomized particles from the orifice at a considerable scattering speed.
しかし、上記従来の超音波霧化装置は種々の欠点を有し
ていた。However, the conventional ultrasonic atomization device described above had various drawbacks.
(1)の霧化装置は、ホーン型振動子の高い加工精度と
、液体を供給するポツプ等が必要となるため高価となら
ざるを得ない上、霧化面への液体供給方法が複雑であっ
た。また、20 cc/minの霧化量を得るためには
、5〜10ワツトとかなり大きな消費電力が必要な上、
その霧化能力も十分なものではなかった。The atomizing device (1) requires high machining precision for the horn-shaped vibrator and a pot for supplying liquid, so it is expensive, and the method for supplying liquid to the atomizing surface is complicated. there were. In addition, in order to obtain an atomization amount of 20 cc/min, a considerably large power consumption of 5 to 10 watts is required, and
Its atomization ability was also not sufficient.
?)の霧化装置は、インクジェットニ利用されている事
実からも明らかなように、構成が簡単で動作も安定とい
う長所を有していたが、振動子の振動による液室内の圧
力上昇を液体を介してオリフィスに伝達する構成である
ため、溶存空気全多量に含む一般的な液体を使用した場
合には、液室内にキャビテーション気泡が発生し、この
気泡のために安定した霧化動作を維持できないという欠
点を有していた。そこで、一般の液体を霧化するには溶
存空気全脱気しなければならず、極めて汎用性に欠けて
いた。? )'s atomizer had the advantage of being simple in construction and stable in operation, as is clear from the fact that it is used in inkjet printers. Since the structure is such that the air is transmitted to the orifice through the atomizer, when using a typical liquid that contains a large amount of dissolved air, cavitation bubbles will occur in the liquid chamber, and stable atomization cannot be maintained due to these bubbles. It had the following drawback. Therefore, in order to atomize ordinary liquids, all dissolved air must be removed, making this method extremely lacking in versatility.
発明の目的
不発明はとのような従来の欠点を除去するもの十分な霧
化量を得ると共に、安定な霧化動作を維持する霧化装置
の提供を目的とする。OBJECTS OF THE INVENTION It is an object of the invention to provide an atomizing device which eliminates the conventional drawbacks such as and which obtains a sufficient amount of atomization and maintains stable atomization operation.
発明の構成
この目的を達成するために、本発明は、液体を充填する
加圧室を備えたボディと、前記加圧室に液体を供給する
だめの供給部と、前記加圧室に臨むように設けたノズル
を有するノズル部と、前記ノズル部を付勢して前記ノズ
ルを加振する電気的振動子とで霧化器全構成し、捷た、
前記電気的振動子に流れる電流を検出する電流検出器と
、前記電流検出器の信号を増幅する増幅部と、前記増幅
部からの信号を前記電気的振動子に伝達するインダクタ
とで霧化装置を構成している。Structure of the Invention In order to achieve this object, the present invention includes a body provided with a pressurized chamber filled with liquid, a supply section for supplying liquid to the pressurized chamber, and a body configured to face the pressurized chamber. The atomizer is entirely composed of a nozzle part having a nozzle provided in the turret, and an electric vibrator that energizes the nozzle part and vibrates the nozzle.
An atomization device comprising: a current detector that detects a current flowing through the electric vibrator; an amplification section that amplifies a signal from the current detector; and an inductor that transmits a signal from the amplification section to the electric vibrator. It consists of
この構成により、電気的振動子はインダクタとで電気的
タンク回路をなし、増幅部の供給電圧を昇圧して振動を
行うので低消費電力化が図られると共に、電流検出器か
らの信号を帰還して増幅することにより自励の発振系を
構成して電気的振動子の特性変化を自動的に追尾しう9
定霧化動作を維持している。オた、実際の楊化動作時に
はノズル板の撮動により加圧室が液体の自給ポンプ作用
をし、霧化器システムとしてはコノパクトになる。With this configuration, the electric vibrator forms an electric tank circuit with the inductor, and boosts the voltage supplied to the amplifier section to generate vibrations, which reduces power consumption and also feeds back the signal from the current detector. By amplifying it, a self-excited oscillation system is constructed to automatically track changes in the characteristics of the electrical oscillator9.
Constant atomization operation is maintained. Additionally, during the actual atomization operation, the pressurized chamber acts as a self-sufficient liquid pump by photographing the nozzle plate, making it a conopact atomizer system.
実施例の説明
第1図で本発明の一実施例である霧化器について説明す
る。液体を充填する加圧室1全備えたボディー2は、ビ
ス3で取付板4に固定されている。DESCRIPTION OF EMBODIMENTS Referring to FIG. 1, an atomizer which is an embodiment of the present invention will be described. A body 2 fully equipped with a pressurized chamber 1 filled with liquid is fixed to a mounting plate 4 with screws 3.
液体は供給パイプ5全介して前記加圧室1vc入シ、実
霧化時には気体排出用のバイブロの途中寸で満たされる
。7は加圧室1の一面に臨んで配されたノズル部で、外
周はボディー2に接合されている。The liquid enters the pressurizing chamber 1vc through the entire supply pipe 5, and is filled halfway through the vibro for gas discharge during actual atomization. Reference numeral 7 denotes a nozzle portion facing one side of the pressurizing chamber 1, and its outer periphery is joined to the body 2.
ノズル部7の中央には、液滴吐出用の微細なノズルを有
する球面状の突起8が形成されている。さらにノズル部
子には、円環状の電気的振動子、ここでは圧電素子9が
装着されている。この圧電素子9ぽ厚さ方向に分極され
た圧電セラミックで、ノズル部子との接合面及び反対側
の面には電極を有している。10は、圧電素子9へ駆動
信号を伝達するリード線で、一方は圧電素子90片面ヘ
ハ/ダ付けされ、他方はボディー2ヘビス11で接続さ
れている。駆動は号により圧電素子9の機械的振動が励
起されるとノズル部7も付勢されて加振するので、結果
として加圧室1内の液体が霧化粒子12となって吐出さ
れる。A spherical protrusion 8 having a fine nozzle for ejecting droplets is formed at the center of the nozzle portion 7 . Further, an annular electric vibrator, here a piezoelectric element 9, is attached to the nozzle element. This piezoelectric element 9 is a piezoelectric ceramic polarized in the thickness direction, and has electrodes on the joint surface with the nozzle part and on the opposite surface. Reference numeral 10 denotes a lead wire for transmitting a drive signal to the piezoelectric element 9. One side of the lead wire is attached to one side of the piezoelectric element 90, and the other side is connected to the body 2 through a helix 11. When the mechanical vibration of the piezoelectric element 9 is excited by the driving signal, the nozzle part 7 is also urged and vibrated, so that as a result, the liquid in the pressurizing chamber 1 is discharged as atomized particles 12.
ところで、加圧室1へ供給される液体は、霧化器設置構
成で前記気体排出用のバイブ6途中まで充填してもよい
が、別手段として、霧化器の設置構成では加圧室1及び
排気バイブロ中は空で、液滴吐出シーケンスに入る前グ
例えば排気バイブ6を通じて負圧を加え、液体を加圧室
1に充填すると共に排気バイブロ途中まで引き上げても
よい。Incidentally, the liquid supplied to the pressurizing chamber 1 may be filled halfway with the gas discharge vibrator 6 in the atomizer installation configuration, but as an alternative, the liquid supplied to the pressurizing chamber 1 may be The exhaust vibrator may be empty, and before entering the droplet ejection sequence, negative pressure may be applied, for example, through the exhaust vibrator 6, to fill the pressurizing chamber 1 with liquid and draw the exhaust vibrator halfway up.
後者の方法によれば、ノズルで液体中の不純物等が固化
し、液滴を噴出できないという不具合が生じない。According to the latter method, impurities in the liquid solidify in the nozzle, and the problem that droplets cannot be ejected does not occur.
次に、第2図で、第1図に示した霧化器の駆動構成を説
明する。13は増幅部で、電気的振動子9に流れる電流
全検出する電流検出器14がらの1言号を増幅し、イン
ダクタL15を介して前記電気的振動子9へ駆動1言号
を伝達している。Next, referring to FIG. 2, the driving configuration of the atomizer shown in FIG. 1 will be explained. Reference numeral 13 denotes an amplification section which amplifies one signal from the current detector 14 that detects the entire current flowing through the electric vibrator 9, and transmits one driving signal to the electric vibrator 9 via the inductor L15. There is.
また、第3図は、前記電気的振動子9を近似した電気的
等価回路であり、160等価並列容量Csと、17,1
8.19のそれぞれ直列インダクタンス分り。、容量分
Go、抵抗分ROで構成されている。第2図のインダク
タL15i1:、等価並列容量Cs f主体とした直列
共振構成とし、霧化器の共振周波数よりも低くなるよう
に選定する。このLとC8でクック回路を形成し、増幅
器13がら伝達される、駆動電圧が電気的振動子9両端
で昇圧される構成である。それ故、L及びC8で決定さ
れる7駆惑回路系の発振周波数を、霧化器の共振周波数
よりも若干低く設定し、系全体として低い消費電力で、
しかも、効率の良い安定した液体噴霧が可能となる。Further, FIG. 3 is an electrical equivalent circuit that approximates the electrical vibrator 9, and has a 160 equivalent parallel capacitance Cs and a 17,1
8. Each series inductance of 19. , a capacitance Go, and a resistance RO. Inductor L15i1 in FIG. 2: Has a series resonance configuration mainly consisting of equivalent parallel capacitance Cs f, and is selected so as to be lower than the resonance frequency of the atomizer. This L and C8 form a Cook circuit, and the drive voltage transmitted from the amplifier 13 is boosted across the electric vibrator 9. Therefore, the oscillation frequency of the 7-driving circuit system determined by L and C8 is set slightly lower than the resonance frequency of the atomizer, and the power consumption of the entire system is low.
Moreover, efficient and stable liquid spraying becomes possible.
ここで、L及びGsf、H主体として決定される自励発
振系の周波数を、霧化器の共振周波数よりも低く設定す
る理由を第4図と共に説明する。第4図のaは、駆動電
圧をインダクタLを介さずに電気的振動子9に加えたと
きの、周波数と電流との関係を示し、f=Jrが電気的
共振周波数、f=farが電気的共振周波数を表わす。Here, the reason why the frequency of the self-oscillation system determined mainly by L, Gsf, and H is set lower than the resonance frequency of the atomizer will be explained with reference to FIG. 4. 4a shows the relationship between frequency and current when a driving voltage is applied to the electrical vibrator 9 without passing through the inductor L, where f=Jr is the electrical resonance frequency and f=far is the electrical resonant frequency. represents the resonant frequency.
f=fmはfrとrarの略中間の周波数で、同図すに
示した周波数と霧化量との関係から明らかなように、霧
化量が最大となる点であり、霧化器の機械的共振点であ
る。この機械的共振点で電気的振動子を励振するときが
最も能率がよい。しかし、構成の簡単な自励発掘方式で
励振するときには、発振周波数が共振周波数に近づいた
とき、急に周波数と電力の飛躍が発生し安定な発振をな
し得ないことがある。この引き込み現象を避けるために
は、駆動段出力部との結合を十分にルーズにする必要が
あり、そのための結合回路が、複雑な構成となる上、効
率も低下してしまう。そこで、前述したように、共振点
よりも低い周波数、例えば、frよりも若干低い点にて
自励発振させれば、霧化量も大きく確保でき、しかも安
定な発振を維持することができる。f = fm is a frequency approximately halfway between fr and rar, and as is clear from the relationship between the frequency and the atomization amount shown in the same figure, it is the point at which the atomization amount is maximum, and the atomizer mechanical This is the resonance point. It is most efficient to excite the electrical vibrator at this mechanical resonance point. However, when exciting using a self-exciting excavation method with a simple configuration, when the oscillation frequency approaches the resonant frequency, a sudden jump in frequency and power occurs, and stable oscillation may not be possible. In order to avoid this pull-in phenomenon, it is necessary to make the coupling with the drive stage output section sufficiently loose, and the coupling circuit for this requires a complicated configuration and also reduces efficiency. Therefore, as described above, if self-oscillation is performed at a frequency lower than the resonance point, for example, at a point slightly lower than fr, a large amount of atomization can be ensured, and stable oscillation can be maintained.
第6図は、本発明の具体的実施例である。前回と同一番
号は、同一機能を有する構成要素を示も20は電流検出
器を構成する抵抗で、この検出信号カコ/デノサ−21
を介して、コンプリ°メックIJ −S E P P型
増幅回路へ送られ、この出方段のスイノチノグトランジ
スタ32.33の動作にてインダクタ15を介して、電
気的振動子9へ伝達されている。@記増幅回路に、抵抗
22.23゜24.25,27,29.30と、トラン
ジスタ26.31,32.33と、コツプ/す28とか
ら構成されている。この閉ルーズにて、L及び前記Gs
にて決する発振周期の自励発振回路系をなしている。な
お、出力段がスイノチノグ動作のた ′め、トランジ
スタ自体の損失が少なく、増幅部としても低消費電力化
が図られている。この具体的実施例では、コンプリメツ
タリーであるが、例えば、LCsの電荷放出用にスイソ
テノグ素子を設ける構成にしてもよい。FIG. 6 shows a specific embodiment of the present invention. The same numbers as last time indicate components having the same function. 20 is a resistor that constitutes a current detector, and this detection signal cap/denosaur 21
The signal is sent to the complete MEC IJ-SEP type amplifier circuit through the inductor 15 and transmitted to the electric vibrator 9 by the operation of the output stage Suinochinog transistors 32 and 33. ing. The amplifier circuit described in @ is composed of resistors 22.23, 24.25, 27, 29.30, transistors 26.31, 32.33, and a switch 28. In this closed loose state, L and the Gs
It forms a self-excited oscillation circuit system with an oscillation period determined by . Furthermore, since the output stage operates in an inverted mode, the loss of the transistor itself is low, and the power consumption of the amplifier section is also low. In this specific embodiment, the structure is complementary, but a structure may be adopted in which, for example, a Swissotenog element is provided for discharging charges from the LCs.
発明の効果
本発明の霧化装置によれば、次のような効果が得られる
。Effects of the Invention According to the atomization device of the present invention, the following effects can be obtained.
(1) コンパクトな霧化器自体の構成に加えて、駆
動装置の低電力化が図られ、霧化装置として低消費電力
化、すなわち、効率化が実現できる。(1) In addition to the compact configuration of the atomizer itself, the power consumption of the drive device can be reduced, and the atomizer can achieve lower power consumption, that is, higher efficiency.
(2〕電気的振動子の温度特性による機械的共振点の変
化に対し、その変化割合に追随して変化する等価並列容
量Csと、温度特性が小さいインダクタLとで略決まる
発振系を構成し、しかも、自励発振系としては安定な周
波数に設定するので、霧化量も確保できる上、簡単な構
成で周波数の自動追尾が実現できる。(2) Construct an oscillation system that is approximately determined by an equivalent parallel capacitance Cs that changes according to the rate of change in the mechanical resonance point due to the temperature characteristics of the electrical vibrator, and an inductor L that has small temperature characteristics. Moreover, since the frequency is set to be stable for a self-excited oscillation system, the amount of atomization can be ensured, and automatic frequency tracking can be realized with a simple configuration.
第1図は本発明の一実施例の要部断面図、第2図は本発
明の一実施例の霧化装置の構成を示すブロック図、第3
図は圧電素子の電気的等価回路図、第4図aは駆動周波
数と電流の関係図、第4図すに駆動周波数と霧化量の関
係図、第5図は同回路図である。
1・・・・・加圧室、2・・・・・ボディー、6・・・
・・・供給台1(7・・・ノズル部、9・・・・・パ覗
気的振動子、14・・・・・・電流検出器、13・・・
・・・増幅部、16・・・・・・インダクタ0
代理人の氏名 弁理士 中 尾 敏 男 ほか1名第1
図
10
第2図
第3図
第4図
第5図FIG. 1 is a sectional view of essential parts of an embodiment of the present invention, FIG. 2 is a block diagram showing the configuration of an atomization device of an embodiment of the present invention, and FIG.
The figure is an electrical equivalent circuit diagram of the piezoelectric element, FIG. 4a is a diagram showing the relationship between driving frequency and current, FIG. 1...pressure chamber, 2...body, 6...
... Supply stand 1 (7... Nozzle part, 9... Peephole vibrator, 14... Current detector, 13...
...Amplification section, 16...Inductor 0 Name of agent: Patent attorney Toshio Nakao and 1 other person 1st
Figure 10 Figure 2 Figure 3 Figure 4 Figure 5
Claims (2)
加圧室に液体を供給するための供給部と、前記加圧室に
臨むように設けたノズルを有するノズル部と、前記ノズ
ル部を付勢して前記ノズル全加娠する電気的振動子とか
らなる霧化器と、前記霧化器の電気的振動子に流れる電
流を検出する屯流慣出器と、前記電流検出器の信号を増
幅する増幅器と、前記眠気的撮動子の等価容量分とで系
の発振周期を略決定するイノダクタとからなる自励発振
器とで構成された霧化装置。(1) A body including a pressurizing chamber filled with liquid, a supply section for supplying liquid to the pressurizing chamber, a nozzle section having a nozzle facing the pressurizing chamber, and the nozzle. an atomizer comprising an electric vibrator that fully energizes the nozzle; a torrent flow acclimatizer that detects a current flowing through the electric vibrator of the atomizer; and the current detector. An atomizing device comprising a self-excited oscillator comprising an amplifier that amplifies a signal of the drowsy camera, and an inductor that approximately determines the oscillation period of the system based on the equivalent capacitance of the drowsy camera element.
共振周波数よりも低く設定した特許請求の範囲第1項記
載の霧化装置。(2) The atomization device according to claim 1, wherein the oscillation frequency of the self-excited oscillator is set lower than the resonance frequency of the electric vibrator.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57224259A JPS59112862A (en) | 1982-12-20 | 1982-12-20 | Atomizer |
| US06/563,522 US4632311A (en) | 1982-12-20 | 1983-12-20 | Atomizing apparatus employing a capacitive piezoelectric transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57224259A JPS59112862A (en) | 1982-12-20 | 1982-12-20 | Atomizer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59112862A true JPS59112862A (en) | 1984-06-29 |
| JPS6327066B2 JPS6327066B2 (en) | 1988-06-01 |
Family
ID=16810968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57224259A Granted JPS59112862A (en) | 1982-12-20 | 1982-12-20 | Atomizer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59112862A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007536179A (en) * | 2004-05-10 | 2007-12-13 | デティエール,リヴィン,フェルナンド,ジョルジュ | A device for winding and unwinding hoses, cables, etc. |
-
1982
- 1982-12-20 JP JP57224259A patent/JPS59112862A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007536179A (en) * | 2004-05-10 | 2007-12-13 | デティエール,リヴィン,フェルナンド,ジョルジュ | A device for winding and unwinding hoses, cables, etc. |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6327066B2 (en) | 1988-06-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA1206996A (en) | Ultrasonic liquid ejecting apparatus | |
| US4632311A (en) | Atomizing apparatus employing a capacitive piezoelectric transducer | |
| US3357641A (en) | Aerosol generator | |
| JPS59112862A (en) | Atomizer | |
| JPH0118785B2 (en) | ||
| JPS59112864A (en) | atomization device | |
| JPS6366266B2 (en) | ||
| JPH0119944B2 (en) | ||
| JPS59112865A (en) | atomization device | |
| JPS58139757A (en) | Atomizer | |
| JPS6054762A (en) | atomization device | |
| JPS632223B2 (en) | ||
| JPS59230659A (en) | Atomizing apparatus | |
| JPS60132670A (en) | atomization device | |
| JPS645947B2 (en) | ||
| JPS6366267B2 (en) | ||
| JPS58202070A (en) | Atomizer | |
| JPS59162974A (en) | Atomizer | |
| JPS59201962A (en) | Atomizing apparatus | |
| JPS6051571A (en) | atomization device | |
| JPS60172376A (en) | Atomizing device | |
| JPS5912776A (en) | atomization device | |
| JPS59203663A (en) | Atomizer | |
| JPS58202071A (en) | atomization device | |
| JPH0141381B2 (en) |