JPS59113631A - Winder for bonding wire for semiconductor - Google Patents
Winder for bonding wire for semiconductorInfo
- Publication number
- JPS59113631A JPS59113631A JP57223387A JP22338782A JPS59113631A JP S59113631 A JPS59113631 A JP S59113631A JP 57223387 A JP57223387 A JP 57223387A JP 22338782 A JP22338782 A JP 22338782A JP S59113631 A JPS59113631 A JP S59113631A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- tension
- section
- winding
- linear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H59/00—Adjusting or controlling tension in filamentary material, e.g. for preventing snarling; Applications of tension indicators
- B65H59/38—Adjusting or controlling tension in filamentary material, e.g. for preventing snarling; Applications of tension indicators by regulating speed of driving mechanism of unwinding, paying-out, forwarding, winding, or depositing devices, e.g. automatically in response to variations in tension
- B65H59/384—Adjusting or controlling tension in filamentary material, e.g. for preventing snarling; Applications of tension indicators by regulating speed of driving mechanism of unwinding, paying-out, forwarding, winding, or depositing devices, e.g. automatically in response to variations in tension using electronic means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
- H10W72/07168—Means for storing or moving the material for the connector
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07502—Connecting or disconnecting of bond wires using an auxiliary member
Landscapes
- Wire Bonding (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は半導体用ボンディングワイヤの、渉取装置、詳
しくはワイヤ供帖機構、テンションローラ、トラバース
機構および香取機何金石し、前日己供給機構の供給スプ
ールより繰出すボンディングワイヤをテンションローラ
を介して4椴機構の4取スグールに巻取るようにした巻
取−直 )の改良に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a bonding device for semiconductor bonding wire, specifically a wire handling mechanism, a tension roller, a traverse mechanism, and a wire cutting machine, and a bonding wire that is fed out from a supply spool of a self-supply mechanism. The present invention relates to an improvement in a winding system in which a wire is wound on a four-winding gear of a four-window mechanism via a tension roller.
従来の巻取装置は巻取機構にDCモータを設置して巻取
スグール勿秘動させ、供給スプールからボン1イングワ
イヤを引出し方式により繰出すようにするとともに前6
己fモータにベルト又は−箪伝動機構を介(、てトラバ
ース機41′?!:連動せしめ、はつマイクロスパッチ
の作動による電磁クラッチを9侠えてトラバース機構が
作動するように構成している。In the conventional winding device, a DC motor is installed in the winding mechanism, the winding spool is operated automatically, and the wire is drawn out from the supply spool by a pull-out method.
The traverse mechanism is configured so that the traverse mechanism is operated by interlocking the self-f motor with a belt or a transmission mechanism. .
しかるに従来装置において、ワイヤ供給機構はワイヤの
引出し方式によりボンディングワイヤを裸出すg成のた
めに、供給スプールのワイヤ巻瀘の変化によって繰出し
たワイヤの・魔力が震動するとともにそのバラツキが大
さく、ワイヤ巻取動作が不安定であり、そのためテンシ
ョンローラを使用しているが、張力−゛醍↑ト業が困1
唯であるとともに壱取動r[中に調整作業を行なうこと
ができないばかりでなく、テンションローラを使用して
も巻取り停止1時には引出しされたワイヤがたるむ不具
合がある。However, in the conventional device, the wire supply mechanism uses a wire drawing method to bare the bonding wire, so that the force of the fed wire oscillates and varies greatly due to changes in the wire winding of the supply spool. The wire winding operation is unstable, so a tension roller is used, but the tension is difficult to handle.
Not only is it impossible to perform adjustment work during the first take-up operation, but even if a tension roller is used, there is a problem in that the drawn wire becomes slack when the winding is stopped.
又、巻取機構にDC七−タτ(重用しトラバース機構を
連動させるために回転ムラがあって、ワイヤの巻終りy
4をスプールのりr定位置(ワイヤ掛止位置)に一致さ
せることがi−+、4斗であるために余分の線を台込む
ことがあり、さらにトラバース機構はマイクロスイッチ
、すV−の応答速l史ムラ、クラッチのすべり寺が原因
となってメーン位・酢にムラがらり傍1iyすf*度の
向上が望めないとともにピッチ変更を南軍のIrl11
曾わせ方式により行なうために汁意な所4ピッチが得ら
れJ“、しかも構造鍛雄である等の不具合があった〇本
元明は貼る従来事情に4み、ワイヤ供給機14、トラバ
ース機構および@取欣構の各機構に夫々サーボモータ又
はパルスモータからなる駆動硼を設置するとともにテン
ションローラに繰出しワイヤの1速を亀圧茨j処するl
1115I速恢出部及びワイヤの張力全制御+14]す
るテンショナ部を設けて、それらrdm源および線迷侠
出都、テンショナ部を中央処理装置を弁して磁子?bl
I御なし得るようにし、装置の構造を而単にするととも
に作業性全容易にし、且つ巻取!llll音度上させる
ことを目的とする。In addition, the winding mechanism has uneven rotation due to the heavy use of the DC 7-tor
4 to the fixed position (wire hooking position) of the spool r, it is i-+, and because it is 4 dots, extra wire may be inserted, and furthermore, the traverse mechanism is a micro switch, and the response of sv- Due to the unevenness of the speed l history and the slipping of the clutch, there is unevenness in the main position and vinegar, and it is not possible to improve the side 1iysf* degree, and the pitch has to be changed.
Due to the pulling method, 4 pitches were obtained, but there were also problems such as the structure being forged. A driving mechanism consisting of a servo motor or a pulse motor is installed in each mechanism of the @trading structure, and the first speed of the wire fed out to the tension roller is subjected to tortoise pressure.
1115I is provided with a tensioner section that fully controls the tension of the wire, and the central processing unit is used to control the RDM source and the tensioner section. bl
The structure of the device is simplified, the workability is made easy, and the winding is easy! The purpose is to raise the pitch by lllll.
本発明の実施νIJ ’に図面により説明すれば、第1
図において、(1)はワイヤ供座機4#+ % (51
はテンションローラ、四は侍取機捕、(・鞭はトラノく
一ス機何、四は入力家作部、(Cpu)は中央処理装置
で必る0
ワイヤ供給機’r4 (1)はサーボモータ(Ml)、
減速機(2)および供給スプール(3)より構成し、そ
の供給スプール(3)に巻込んであるボンディングワイ
ヤ(4)ヲサーボモータ(Ml)の回転により、賦次に
繰出すO
上記サーボモータ(tVlt)には繰出し制一部(〜を
恢続し、該制御部^Vこよリモータ(Δ1>)の回私動
作金制御するようにし、課出し制一部(4)はシーケン
サ(ト)を介して中央処理装置tIt(cpu)へ機成
する。To implement the present invention νIJ', the first
In the figure, (1) is wire support machine 4#+% (51
is the tension roller, 4 is the samurai machine catch, (whip is the toranokuichisu machine, 4 is the input unit, (CPU) is the central processing unit, 0 is the wire feeder 'r4 (1) is the servo Motor (Ml),
It consists of a reducer (2) and a supply spool (3), and the bonding wire (4) wound around the supply spool (3) is fed out to the next stage by the rotation of the servo motor (Ml). ) is connected to the feeding system part (~) to control the amount of rotation of the control unit ^V remoter (Δ1>), and the charging system part (4) is controlled via the sequencer (g). and is configured into the central processing unit tIt (cpu).
供給スプール(3)より繰出すボンディングワイヤ(4
)はガイドローラ(6) (65、テンションローラ(
5)、接近ガイド(7)を介してき取機構or)の巻取
スグール四へ導出されるようにする。The bonding wire (4) is fed out from the supply spool (3).
) is the guide roller (6) (65, tension roller (
5), so that it is led out to the take-up gear 4 of the take-up mechanism or) via the approach guide (7).
テンションローラ(5)はAiJ @己ガイドローラ(
6) (6)間で上下揺動且つ回転自在に設!直シ、そ
の上ド位I龜の変化によりワイヤ(4)の+m ak
4咲出する線速検出部(8)を設けるとともVこ亀1眠
テンンヨナ部(9)を設けて、\〜\\〜太\へへ励ム
菟九へへ鬼氏瞥14蓋親嗅連1該テンショナ都(9)の
励磁電流を1張力設定器(9)によりiJ震するように
する〇上記・薩運検出部(8)およびα磁テンショナ笥
5(9)は張力匍J釧都但)に接続し、1咳1釣御部(
均?削記シークンサ(へ)を介して中央処理装置! (
cpu)へ接続する0
線速慣出部(8)はテンションローラ(5)の位置構出
をし、定位置に対する変化IA:t′屯圧変換すること
によりワイヤの、籟速+C検出するもので、テンション
ローラ(5)の位−変化量全中央処理装置(Cpu)へ
入力し、その髪化粧に応じて供ll@4m m (1)
の前記サーボモータ(Ml)の回転数を変化させテンシ
ョンローラ(5) AE足位;藏に復帰するよう’+L
i1J呻する。Tension roller (5) is AiJ @self guide roller (
6) (6) Designed to swing up and down and rotate freely! +mak of the wire (4) due to the change in the straight position and the upper position.
In addition to providing a linear velocity detecting section (8) that generates 4 blooms, a V Kokame 1 sleep tenonyona section (9) is also provided to encourage \〜\\〜fat The excitation current of the tensioner (9) of the 1st tensioner (9) is made to oscillate by 1J using the 1st tension setting device (9). The above-mentioned Sapphire detection unit (8) and the α magnetic tensioner 5 (9) are set to the tensioner 5 (9). 1 cough 1 Tsuriomibu (
Average? Central processing unit via deletion sequencer (to)! (
The linear speed adjusting section (8), connected to CPU), configures the position of the tension roller (5) and detects the linear speed +C of the wire by converting the change in pressure against the fixed position IA:t'. Then, the amount of change in the tension roller (5) is input to the central processing unit (CPU), and the amount of change in the tension roller (5) is inputted according to the hair makeup.
By changing the rotation speed of the servo motor (Ml), the tension roller (5) is adjusted so as to return to the AE foot position;
i1J groans.
軍備テンショナ部(9) t/i、張力投冗器(9)の
l助磁電流を自動的又は手動操作によりロエ敦してワイ
ヤ(4)の張力制御をするようにする。Ordnance tensioner section (9) t/i, the auxiliary current of the tension thrower (9) is controlled automatically or manually to control the tension of the wire (4).
上i己テンショナ部の張力11ilJ御はワイヤ(4)
の巻き開始時より終了時迄の張力を一定にする制御態様
(第2図)又は多層菅の一台において奇1曽−厄に順次
に張力全減少させる?1ilJ岬態休(第3図)とする
。The tension of the upper tensioner part is 11ilJ, and the wire (4)
A control mode in which the tension is kept constant from the start to the end of winding (Fig. 2), or is the tension completely reduced sequentially in one multilayer tube? 1ilJ Misaki Shokyu (Figure 3).
後者の1!ill呻態様において、は、t&述するす二
アノ(ルスモータ(八・13)の反転1時期を検出する
母1こ・魔力設定器(9)の励磁゛4流が一定鼠苑減少
するようにすればよく、この頭体によればワイヤの巻き
形態を安屍させるとともに使用時にほぐしやすい形態を
得ることができる。The latter one! In the illumination mode, the excitation of the magic power setting device (9) is reduced by a certain amount. With this head body, it is possible to reduce the winding of the wire and to obtain a shape that is easy to unravel during use.
巻取機構αりは可動台1.lす、サーボモータ(Mり、
減速截u′4およびS散スプールリより構成し、i11
自己ワイヤ(4)ヲサーボモータ(Ml)の回’kによ
り巻取スプール四に巻取るもので、MiJii己サーボ
モータ(Ml)には巻取り制#部0紫依続しで該制御扉
0によりモータ(+vi、)の回鴨動f@’r、i市1
+するようにし、巻取り制御部Ωはシーケンサ(時を介
して中央処理装)ば(cpu)へ接続する0
トラバ一ス機構明は巻取機構(11の前記町動台圓を水
平方向直癲状に往復動させるリニア・くルスモータ(M
a)υよび該モータ(Ms)の反=e起動させるリセッ
トスイッチリ(シ(ロ)により構成し、削6ピモータ(
Ma)はドライバ(L)lf:介して中央処理装置(o
pu)へ接続し、リセットスイッチ91すηは人力イン
タフェイスV)ヲ弁してシーケンサ(ト)および中央処
理装置(cpu)へ依続する。The winding mechanism α is movable base 1. l, servo motor (M,
Consisting of a deceleration cut u'4 and a S dispersion spool, i11
The self-wire (4) is wound onto the take-up spool 4 by the rotation of the servo motor (Ml), and the winding control section #0 is connected to the MiJii self-servo motor (Ml), and the motor is (+vi,) rotation f@'r, i city 1
The winding control unit Ω is connected to the sequencer (central processing unit) (CPU). A linear/crus motor (M
a) υ and the motor (Ms) are configured with a reset switch (Sh (B)) that activates the reverse = e of the motor (Ms), and
Ma) is connected to the central processing unit (o) via the driver (L)lf:
The reset switch 91 is connected to the human power interface V) and is connected to the sequencer (V) and the central processing unit (CPU).
入力操作部−は中央処理装置(cpu)に法統され一巻
取スグール0J上におけるワイヤ(4)の巻取粂件、例
えばピッチσつ、巻+1j14及び多1曽巻の3&台に
おける各層苑の巷巾減少鼠(へ)を入力するもので、置
数キー(テンキー)、指令キー(ファンクションキー)
勢ヲ用いて入力操作をするようにする。The input operation section is controlled by the central processing unit (CPU) and is used to control the winding conditions of the wire (4) on the single winding group 0J, such as pitch σ, winding +1j14, and multilayer winding in 3 & machine. It is used to input the width decrease mouse (to), number keys (numeric keypad), command keys (function keys)
Make input operations using force.
上記ピッチV)はサーボモータ(MO(Mt)及びパル
スモータ(Ma)の回転速度を設定する入力1g号によ
り決定きれ、巷中σ力はパルスモータ(M、)の回転数
(!−設定する入力イキ号により決定され、巷rjJ減
少に1眞)1はパルスモータ(Ma)の反転母における
回転数の減少値を1足する人力信号により決定される。The above pitch V) can be determined by the input number 1g that sets the rotation speed of the servo motor (MO (Mt) and pulse motor (Ma), and the σ force in the middle is determined by the rotation speed (!-) of the pulse motor (M,). It is determined by the input power signal, and 1 is determined by a human input signal that adds 1 to the decrease value of the rotational speed at the reverse mother of the pulse motor (Ma).
向、図中の(へ)tよシーケンサ、−は回転計基板、e
ηはナーグガイド、qは書取艮ざ衣示器、・24は4奴
、側jリー表示七J11→はリセットスイッチ、曽はス
タートスイッチ、「橢はストップスイッチでめる。Direction, (to) t in the figure is the sequencer, - is the tachometer board, e
η is the nag guide, q is the calligraphy outfit display, ・24 is the 4th person, side J Lee display 7 J11 → is the reset switch, Zeng is the start switch, and "Ki" is the stop switch.
而して、入力操作部(7)の操作によりピッチV)、心
中n及び合巾減少鼠(旬などの巷取栄汗を中央処理g
if (cpu)へ人力改定し、スタートスイッチ@を
ONさせることによって、モータ(ivlt)(iVl
t)(M、、)が夫々起動回転し、供給スプール(3)
の回転により繰出サルるボンディングワイヤ(4)がテ
ンションローラ(5)へ導出さn、モータ(Mt)(i
wtρにより回転且つ住偵動する巻取スプールIQによ
って巻取すされ、前i己繰出しされるワイヤ(4)には
電磁テンショナ部(9)により設定される張力がかかっ
た状態で巻取り動作がなされ、巻取スプール四の回転に
よりテンションローラ(5)が上下潜動し、その位置検
出を検出部(8)により検出してサーボモータ(Mi)
の回転数を変化させワイヤ(4)の線速が一定となるよ
うに制御し、ワイヤの張力を設定値に保持せしめる。Therefore, by operating the input operation unit (7), central processing of pitch V), suicide n, and width reduction mouse (shun, etc.) can be performed centrally.
If (cpu) is manually revised and the start switch @ is turned on, the motor (ivlt) (ivl
t) (M,,) respectively start and rotate, supply spool (3)
The bonding wire (4) that is fed out by the rotation of is led out to the tension roller (5), and the motor (Mt) (i
The wire (4) is wound by the take-up spool IQ which is rotated and moved by wtρ, and the wire (4) that is unreeled is subjected to the tension set by the electromagnetic tensioner part (9), and the winding operation is performed. The tension roller (5) moves up and down as the take-up spool 4 rotates, and its position is detected by the detection unit (8) and the servo motor (Mi)
The linear speed of the wire (4) is controlled to be constant by changing the rotation speed of the wire (4), and the tension of the wire is maintained at a set value.
本発明は叙上の如く、ワイヤ供給機(J4及び巻取機構
の駆動源に夫々サーボモータ又はパルスモータを用いて
供給機淘の供給スプールk 目11記、・駆動源により
回転させボンナインクワイヤを味出す方式としたので、
従来の巻取スプールの回転によって供給スプールからワ
イヤを引出す方式に軟べて1、顧出しワイヤの・並方の
変動が少ないとともにテンションローラのテンショナ部
によりワイヤに751r定の張力がかかるように眩足し
且つ線速検出部により1線速を便出し供給機構の駆動僚
を中央処理装置を介し制御するので、繰出しワイヤの張
力に7Jr定の設定値(+工ま稼状又は14’段状)に
保持しながら巻取スプールに@取ることができ、巻取ス
プールにおけるワイヤの壱取形態を良好ならしめる。As mentioned above, the present invention provides a supply spool for the wire feeder (using a servo motor or a pulse motor as the drive source of J4 and the winding mechanism, respectively). We decided to use the method to bring out the flavor,
The conventional method of pulling out the wire from the supply spool by rotating the take-up spool has been adopted. 1. The wire is softened by the rotation of the take-up spool, and there is less variation in the alignment of the wire, and the tensioner part of the tension roller applies a constant tension of 751 r to the wire. Since the drive unit of the feeding mechanism is controlled via the central processing unit, the tension of the feeding wire is set at a constant value of 7Jr (+ machine running state or 14' stage). The wire can be taken up onto the take-up spool while being held in place, and the wire can be taken up in a good manner on the take-up spool.
又、トラバース機構の駆動源にもサーボモータ又はパル
スモータ倉用い、前1己2慎(4の駆動源と共に中央処
m ′A@(cpu)に候dし、入力操作部より人力さ
れる巻取乗汗に応じて前^己3機構のメ枢動諒を゛電子
制御するようにしたので、巻収条汗の1定操作が容易で
めす作菜・品に・凌れるとともにr31J記3機14の
動作梢j丈が晶く、巻取スプールの回転又はターン位1
4にムラがなく、ハri4の巻取長さ、巻d」、ピッチ
、ワイヤ終端位置などが正確な巻取形ノ諒で侍られ、し
かも仮、4な遅IIILII愼構、歯車機構をなくして
量系な構造の心数装置を提供する。In addition, a servo motor or a pulse motor is used as the drive source for the traverse mechanism. Since the pivoting of the front three mechanisms is electronically controlled according to the sweat of the rider, one-time operation of the winding and collecting sweat is easy, and it is superior to the female preparation and product. Operation of the machine 14 The length of the tree is crystallized, the rotation or turn of the take-up spool
4. There is no unevenness, and the winding length, winding d'', pitch, wire end position, etc. of the wire 4 can be maintained in accordance with the exact winding shape, and the temporary, 4-speed IIILII structure eliminates the gear mechanism. The present invention provides a core count device with a quantitative structure.
第1図は苓党明咬直のブロック図、第2図及び第3図は
テンショナ部の張力1tilJ−の態様を示す張力I原
図でめる〇
図中、(1)はワイヤ供+@’a<;*% <3)+i
供1eスグール、(4)kまボンティングワイヤ、(5
)はテンションローラ、(8)は標速検出部、(9)に
テンショナ部、QIは巻取機構、鋳は4収スグール1.
I4はトラバース機構、四は入力操作部、(At) <
LVlt)はサーボモータ、(Ms)はパルスモータで
hる。Fig. 1 is a block diagram of the Reitou Mingbakucho, Fig. 2 and Fig. 3 are the tension I original drawings showing the mode of tension 1tilJ- in the tensioner part. a<;*% <3)+i
Supply 1e Sgur, (4) Kma bonding wire, (5
) is a tension roller, (8) is a standard speed detection part, (9) is a tensioner part, QI is a winding mechanism, and casting is a 4-piece suguru 1.
I4 is the traverse mechanism, 4 is the input operation section, (At) <
LVlt) is a servo motor, and (Ms) is a pulse motor.
Claims (1)
よび巻取機構を有し、前記・供給機構の供給スプールよ
り繰出すボンディングワイヤをテンションローラを介し
て巻取域構の巻取スプールに一傍取るようにした半環体
用ボンディングワイヤの壱収装dにpいて、上記3憾・
溝にサーボモータ又はパルスモータの駆切弾を設置する
とともにテンションローラにpm出しワイヤのI−速t
−電圧変換する1腺速恢出都及びワイヤの張力を’rt
ilJ岬するテンショナ部茫設け、nil g; 3
;躯動詠および線速慣出部、テンンヨナ都τ中央処理装
置(Cpu)に毅就して動性制御せしめ、また前記中央
処理装置(cpu)には巻取条件を歳疋する人力l栗1
′「都を接続して収けた香取表鉦。It has a wire supply system, a tension roller, a traverse mechanism, and a take-up mechanism, and the bonding wire fed out from the supply spool of the supply mechanism is taken up to the take-up spool of the take-up area structure via the tension roller. In step 1 of the bonding wire for the semicircular body, the above three points and
Install a servo motor or pulse motor cutting bullet in the groove, and set the tension roller to the I-speed t of the pm wire.
- Convert the voltage to the wire tension output and the wire tension.
Tensioner part is provided with ilJ cape, nil g; 3
The rolling motion and line speed adjustment section is used to control the movement of the central processing unit (CPU), and the central processing unit (CPU) is also equipped with human power to adjust the winding conditions. 1
``Katori Omote gong that connects the capital.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57223387A JPS59113631A (en) | 1982-12-20 | 1982-12-20 | Winder for bonding wire for semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57223387A JPS59113631A (en) | 1982-12-20 | 1982-12-20 | Winder for bonding wire for semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59113631A true JPS59113631A (en) | 1984-06-30 |
| JPH0234459B2 JPH0234459B2 (en) | 1990-08-03 |
Family
ID=16797345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57223387A Granted JPS59113631A (en) | 1982-12-20 | 1982-12-20 | Winder for bonding wire for semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59113631A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03123044A (en) * | 1989-10-05 | 1991-05-24 | Rohm Co Ltd | Manufacture of semiconductor device |
-
1982
- 1982-12-20 JP JP57223387A patent/JPS59113631A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03123044A (en) * | 1989-10-05 | 1991-05-24 | Rohm Co Ltd | Manufacture of semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0234459B2 (en) | 1990-08-03 |
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