JPS59123981A - 楕円画像の中心位置検出方式 - Google Patents
楕円画像の中心位置検出方式Info
- Publication number
- JPS59123981A JPS59123981A JP57231956A JP23195682A JPS59123981A JP S59123981 A JPS59123981 A JP S59123981A JP 57231956 A JP57231956 A JP 57231956A JP 23195682 A JP23195682 A JP 23195682A JP S59123981 A JPS59123981 A JP S59123981A
- Authority
- JP
- Japan
- Prior art keywords
- center position
- longest
- image
- rotation angle
- ellipse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Collating Specific Patterns (AREA)
- Image Analysis (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57231956A JPS59123981A (ja) | 1982-12-29 | 1982-12-29 | 楕円画像の中心位置検出方式 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57231956A JPS59123981A (ja) | 1982-12-29 | 1982-12-29 | 楕円画像の中心位置検出方式 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59123981A true JPS59123981A (ja) | 1984-07-17 |
| JPH0143352B2 JPH0143352B2 (2) | 1989-09-20 |
Family
ID=16931690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57231956A Granted JPS59123981A (ja) | 1982-12-29 | 1982-12-29 | 楕円画像の中心位置検出方式 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59123981A (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016192462A (ja) * | 2015-03-31 | 2016-11-10 | 株式会社東京精密 | ウェーハ位置決め検出装置、方法およびプログラム |
-
1982
- 1982-12-29 JP JP57231956A patent/JPS59123981A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016192462A (ja) * | 2015-03-31 | 2016-11-10 | 株式会社東京精密 | ウェーハ位置決め検出装置、方法およびプログラム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0143352B2 (2) | 1989-09-20 |
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