JPS59162405A - 光学式機械量測定装置 - Google Patents

光学式機械量測定装置

Info

Publication number
JPS59162405A
JPS59162405A JP58037017A JP3701783A JPS59162405A JP S59162405 A JPS59162405 A JP S59162405A JP 58037017 A JP58037017 A JP 58037017A JP 3701783 A JP3701783 A JP 3701783A JP S59162405 A JPS59162405 A JP S59162405A
Authority
JP
Japan
Prior art keywords
light
measured
target
dimensional
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58037017A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0326321B2 (2
Inventor
Toshitsugu Ueda
敏嗣 植田
Eiji Ogita
英治 荻田
Daisuke Yamazaki
大輔 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP58037017A priority Critical patent/JPS59162405A/ja
Publication of JPS59162405A publication Critical patent/JPS59162405A/ja
Publication of JPH0326321B2 publication Critical patent/JPH0326321B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02029—Combination with non-interferometric systems, i.e. for measuring the object
    • G01B9/0203—With imaging systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP58037017A 1983-03-07 1983-03-07 光学式機械量測定装置 Granted JPS59162405A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58037017A JPS59162405A (ja) 1983-03-07 1983-03-07 光学式機械量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58037017A JPS59162405A (ja) 1983-03-07 1983-03-07 光学式機械量測定装置

Publications (2)

Publication Number Publication Date
JPS59162405A true JPS59162405A (ja) 1984-09-13
JPH0326321B2 JPH0326321B2 (2) 1991-04-10

Family

ID=12485893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58037017A Granted JPS59162405A (ja) 1983-03-07 1983-03-07 光学式機械量測定装置

Country Status (1)

Country Link
JP (1) JPS59162405A (2)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0914914A (ja) * 1994-06-06 1997-01-17 Kishimoto Sangyo Kk レーザスペックルパターンによる移動量の測定装置におけるレーザ光の照射方法ならびにその装置
CN102359814A (zh) * 2011-07-04 2012-02-22 苏州舜新仪器有限公司 三维激光运动姿态测量系统及方法
US8797549B2 (en) 2008-02-28 2014-08-05 Statoil Petroleum As Interferometric methods and apparatus for seismic exploration

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6441205A (en) * 1987-08-07 1989-02-13 Nec Corp Inductance element for microwave

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6441205A (en) * 1987-08-07 1989-02-13 Nec Corp Inductance element for microwave

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0914914A (ja) * 1994-06-06 1997-01-17 Kishimoto Sangyo Kk レーザスペックルパターンによる移動量の測定装置におけるレーザ光の照射方法ならびにその装置
US8797549B2 (en) 2008-02-28 2014-08-05 Statoil Petroleum As Interferometric methods and apparatus for seismic exploration
CN102359814A (zh) * 2011-07-04 2012-02-22 苏州舜新仪器有限公司 三维激光运动姿态测量系统及方法
CN102359814B (zh) 2011-07-04 2012-11-07 苏州舜新仪器有限公司 三维激光运动姿态测量系统及方法

Also Published As

Publication number Publication date
JPH0326321B2 (2) 1991-04-10

Similar Documents

Publication Publication Date Title
US4470696A (en) Laser doppler velocimeter
US4512661A (en) Dual differential interferometer
CN109975820A (zh) 基于Linnik型干涉显微镜的同步偏振相移检焦系统
EP0244275A2 (en) Angle measuring interferometer
US6954273B2 (en) Laser-based measuring apparatus for measuring an axial run-out in a cylinder of rotation and method for measuring the same utilizing opposing incident measuring light beams
CN105784129A (zh) 一种用于激光波前检测的低频外差干涉仪
US12228399B2 (en) Heterodyne light source for use in metrology system
JPS59162405A (ja) 光学式機械量測定装置
US4346999A (en) Digital heterodyne wavefront analyzer
JP2007163479A (ja) 干渉計
JPS58225304A (ja) 光学式機械量測定装置
JPH045122B2 (2)
US3419331A (en) Single and double beam interferometer means
JPH0141205B2 (2)
JPH0444922B2 (2)
JPS62106310A (ja) 平行平面板の平行度測定装置
JPS58225302A (ja) 光学式機械量測定装置
JPS63218827A (ja) 光スペクトル検出装置
JPH0719842A (ja) 表面形状の光学的測定装置
JPH02228512A (ja) 固体表面の高精度レーザ計測方法及び装置
EP0050144A1 (en) Process for measuring motion- and surface characterizing physical parameters of a moving body.
JPH02259506A (ja) 縞走査型干渉測定装置
JPH04289401A (ja) 二波動干渉計
JPS58225305A (ja) 光学式形状測定装置
JPS6212442B2 (2)