JPS59164406A - Fluid pressure cylinder - Google Patents
Fluid pressure cylinderInfo
- Publication number
- JPS59164406A JPS59164406A JP3550683A JP3550683A JPS59164406A JP S59164406 A JPS59164406 A JP S59164406A JP 3550683 A JP3550683 A JP 3550683A JP 3550683 A JP3550683 A JP 3550683A JP S59164406 A JPS59164406 A JP S59164406A
- Authority
- JP
- Japan
- Prior art keywords
- piston rod
- fluid pressure
- pressure cylinder
- detection
- detection body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 title claims description 14
- 239000000463 material Substances 0.000 claims abstract description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052802 copper Inorganic materials 0.000 claims abstract description 8
- 239000010949 copper Substances 0.000 claims abstract description 8
- 238000001514 detection method Methods 0.000 claims description 31
- 229910000831 Steel Inorganic materials 0.000 claims description 8
- 239000010959 steel Substances 0.000 claims description 8
- 229910000975 Carbon steel Inorganic materials 0.000 abstract description 2
- 229910000881 Cu alloy Inorganic materials 0.000 abstract description 2
- 239000010962 carbon steel Substances 0.000 abstract description 2
- 230000010355 oscillation Effects 0.000 abstract description 2
- 230000035699 permeability Effects 0.000 abstract description 2
- 239000010935 stainless steel Substances 0.000 abstract description 2
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910000734 martensite Inorganic materials 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/20—Other details, e.g. assembly with regulating devices
- F15B15/28—Means for indicating the position, e.g. end of stroke
- F15B15/2815—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT
- F15B15/2861—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT using magnetic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/20—Other details, e.g. assembly with regulating devices
- F15B15/28—Means for indicating the position, e.g. end of stroke
- F15B15/2815—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT
- F15B15/2846—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT using detection of markings, e.g. markings on the piston rod
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Actuator (AREA)
- Pistons, Piston Rings, And Cylinders (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
Description
【発明の詳細な説明】
（発明の対象、産業上の利用分！Ｆ）
本発明は、ピストンロッドにストローク検出用の目盛を
有する流体圧シリンダに関し、数値制御またはフィード
バンク制御等に用いるサーホシリングとして有用である
。DETAILED DESCRIPTION OF THE INVENTION (Subject of the invention, industrial application!F) The present invention relates to a fluid pressure cylinder having a stroke detection scale on a piston rod, and is applicable as a surf cylinder used for numerical control or feed bank control, etc. Useful.
（従来技術）
流体圧シリンダを制御するためには、ストローク位置を
何らかの方法で検出する必要がある。このための従来の
方法はその一例として、当該シリンダのピストンと連動
する差動変圧器、ポテンショメータまたはディジタル的
な磁気式もしくは光学式のスケール等の測長機器を、流
体圧シリンダと並行して取付けておくことが行われてい
る。しかし、これではこれら測長機器が外方に突出する
ため、寸法形状の増大、他の装置との干渉および組立て
工数の増大等の問題がある。また、他の例として、特開
昭４９−１１７８８１号公報に開示されているように、
ピストンロッドに転接するローラを設けておき、このロ
ーラの回転を回転パルス発振幌等により検出する方法が
ある。この方法によると寸法形状の増大は軽減するが、
ローラとピストンロッドとの間のすべりが生じると誤差
が発生し、またその接触面を當に清浄にし１おくために
ダストワイパーが大がかりになるなど、複雑な構造とな
る難点を有している。(Prior Art) In order to control a fluid pressure cylinder, it is necessary to detect the stroke position by some method. Conventional methods for this include, for example, installing a length measuring device in parallel with the hydraulic cylinder, such as a differential transformer, a potentiometer or a digital, magnetic or optical scale, which is coupled to the piston of the cylinder. Things are being done. However, since these length measuring devices protrude outward, there are problems such as an increase in size, interference with other devices, and an increase in the number of assembly steps. In addition, as another example, as disclosed in Japanese Patent Application Laid-open No. 117881/1981,
There is a method in which a roller is provided in rolling contact with the piston rod, and the rotation of this roller is detected using a rotating pulse oscillating canopy or the like. This method reduces the increase in size and shape, but
When slippage occurs between the roller and the piston rod, errors occur, and a dust wiper is required to keep the contact surface completely clean, resulting in a complicated structure.
（発明の目的）
本発明は、外部の測長機器を必要とせず、かつピストン
口、ドと非接触でストローク位置を検出することのでき
る流体圧シリンダを提供することを目的としている。(Object of the Invention) An object of the present invention is to provide a fluid pressure cylinder that does not require an external length measuring device and is capable of detecting a stroke position without contacting the piston port or the cylinder.
〈発明の構成）
本発明は、ビオ訝ンロソドの周面部に、該ピストンロノ
Ｆの材質とは異なる材質の検出体よりなる目盛を軸方向
に形成してなることを特徴とするものである。(Structure of the Invention) The present invention is characterized in that a scale made of a detection body made of a material different from that of the piston rotor F is formed in the axial direction on the circumferential surface of the biometer rod.
前記目盛の好ましい形状゛は、前記ピストンロッドの周
面に沿った螺旋状に形成してなるものである。A preferred shape of the scale is a spiral shape along the circumferential surface of the piston rod.
また、前記ピストンロッドは鉄鋼材料よりなり、前記検
出体は銅よりなる。または、前記ピストンロットは鉄鋼
材料よりなり前記検出体は鉛よりなる。または、前記ピ
ストンロットは鉄鋼材料よりなり、前記検出体は該ピス
トンロフトの表面が硬化させられた硬化層よりなる。Further, the piston rod is made of a steel material, and the detection body is made of copper. Alternatively, the piston rod is made of steel and the detection body is made of lead. Alternatively, the piston rod is made of a steel material, and the detection body is made of a hardened layer in which the surface of the piston loft is hardened.
（実施例）
第１図において、１は油圧・空圧等の流体圧によって直
線往復駆動するシリンダであって、シリンダチューブ２
の両端がへソトカハ−３及びロットカバー４で覆われ、
かつシリンダチューブ２内に密に嵌合するピストン５と
、ピストン５に一体的に連結されロットカバ−４を密に
貫通ずるピストンロット６とが、摺動可能に挿入されて
いる。(Example) In FIG. 1, 1 is a cylinder that is linearly reciprocated by fluid pressure such as hydraulic pressure or pneumatic pressure, and cylinder tube 2
Both ends are covered with a bottom cover 3 and a lot cover 4,
A piston 5 that tightly fits into the cylinder tube 2 and a piston rod 6 that is integrally connected to the piston 5 and tightly passes through the rod cover 4 are slidably inserted.
ピストンロット′６の周面部には、ピストンロッド６の
材質とは異なる材質の検出体７よりなる目盛８が、その
軸方向に形成されている。この目盛８は、ピストンロッ
ド６の周面に沿った一定ピノチの螺旋状に形成されてい
る。ロットカバ−４の前面には、ロンド力バー４とほぼ
同径の検出プロ。A scale 8 made of a detection body 7 made of a material different from that of the piston rod 6 is formed in the axial direction on the peripheral surface of the piston rod '6. The scale 8 is formed in a spiral shape with a constant pitch along the circumferential surface of the piston rod 6. On the front of the rotor cover 4, there is a detection pro with approximately the same diameter as the rotor force bar 4.
り９がボルト等により固定されており、検出ブロック９
には、検出体７に対向する位置に検出面が配置されたセ
ンサー１０ａ、１０ｂが、互に周方向に１８０度ずれた
位置でかつ軸方向に同一位置に、その外方より挿入され
ている。１１は、ピストンロッド６に付着したゴミ・油
等を取除いて清浄にするためのダストワイパーである。The detection block 9 is fixed with bolts etc.
In this case, sensors 10a and 10b whose detection surfaces are arranged opposite to the detection body 7 are inserted from the outside at positions shifted by 180 degrees in the circumferential direction and at the same position in the axial direction. . Reference numeral 11 denotes a dust wiper for removing dirt, oil, etc. adhering to the piston rod 6 to clean it.
ピストンロッド６は、炭素鋼・ステンレス鋼等の鉄鋼材
料により製作されており、検出体７は銅または銅合金よ
りなる。検出体７の製造方法は次のとおりである。すな
わち、ピストンロッド６の周面に十分の数ミリメートル
乃至数ミリメートルの一定のピンチでねじを切って凹溝
を形成しておき、このピストンロッド６を電気メツキ法
または熔融メッキ法等により銅メッキを行って凹溝内を
銅で埋め尽くし、その後ピストンロッド６の表面を研磨
して凹凸のない円柱状に仕上げる（第２図参照）。必要
に応して適当な表面処理を行う。The piston rod 6 is made of a steel material such as carbon steel or stainless steel, and the detection body 7 is made of copper or a copper alloy. The method for manufacturing the detection body 7 is as follows. That is, a concave groove is formed on the circumferential surface of the piston rod 6 by cutting a thread with a fixed pinch of several tenths of a millimeter to several millimeters, and this piston rod 6 is plated with copper by electroplating or hot-dip plating. The inside of the groove is filled with copper, and the surface of the piston rod 6 is then polished to give it a cylindrical shape with no irregularities (see Fig. 2). Perform appropriate surface treatment as necessary.
また、センサー１０ａ、１０ｂは、ピストンロッド６と
検出体７との材質の相違を検出するもので、例えば鉄と
銅の導電率・透磁率等の差により出力を生じる高周波発
振形の近接センサーを用いる。The sensors 10a and 10b detect the difference in materials between the piston rod 6 and the detection body 7, and are, for example, high-frequency oscillation type proximity sensors that generate an output due to the difference in electrical conductivity, magnetic permeability, etc. between iron and copper. use
上述のように構成した流体圧シリンダ１は、負荷に取付
けることによってピストンロッド６の回転止めがなされ
、給排ボート３ａ、 ４ａのいずれかより流体を供給す
ることにより、ピストン５及びピストンロット６は直線
往復駆動する。その際に、センサー１０ａ、１０ｂは、
検出体６を検出して信号を発するので、この信号をパル
スカウンク等によりカウントすることによって、ピスト
ンロットのストローク位置を検出することができる。セ
ンサー１０ａ、１０ｂは、互に周方向１８０度ずらせて
配置されているので、目盛８のピッチの半分毎に各セン
サー１０ａ、１０ｂより交互に信号を発し、目盛８のピ
ンチよりも２細かいストローク位置を検出することがで
きる。この実施例においては、２個のセンサー１（ｌａ
、１０ｂを用いたが、３（固、または４個以上のセンサ
ーを周方向に等分した位置に配置することにより分解能
をたかめ、さらに細かいストローク位置を検出すること
ができる。また、これらセンサーの周方向角度位置を調
整可能にしておけば、検出位置を微妙に調整することが
でき、高精度の検出が可能となる。In the fluid pressure cylinder 1 configured as described above, the piston rod 6 is prevented from rotating by being attached to a load, and the piston 5 and the piston rod 6 are rotated by supplying fluid from either the supply/discharge boat 3a or 4a. Drives linearly back and forth. At that time, the sensors 10a and 10b are
Since the detection body 6 is detected and a signal is emitted, the stroke position of the piston rod can be detected by counting this signal using a pulse counter or the like. Since the sensors 10a and 10b are arranged 180 degrees apart from each other in the circumferential direction, the sensors 10a and 10b alternately emit signals every half of the pitch of the scale 8, and the stroke position is two finer than the pinch of the scale 8. can be detected. In this example, two sensors 1 (la
, 10b was used, but by arranging 3 or more sensors at positions equally divided in the circumferential direction, the resolution can be increased and even finer stroke positions can be detected. If the circumferential angular position is adjustable, the detection position can be finely adjusted and highly accurate detection becomes possible.
上述の実施例においては、検出体７を銅としたが、これ
は鉛でもよい。またこのように、ピストンロッド６と検
出体７との材料そのものを異種とする以外に、ピストン
ロッド６の表面に物理的または化学的処理を施して材質
の異なる層を形成することとしてもよい。すなわち、鉄
鋼材料からなるピストンロッド６の表面に、高周波焼入
れまたは窒化等を施すことにより、その部分がマルテン
サイトに組織変化して硬化したｖＩ旋状の検出体７が形
成される。このようにして形成された検出体７は、ピス
トンロッド６とは磁気的性質を異にするので、磁界と組
合せたセンサーにより容易に検出することができる。ま
た、ピストンロット６の表面に硬化した層よりなる検出
体７を形成する方法として、第３図に示すごとく、ロー
ラ１２をピストンロッド６に強く押し当てつつ周面に沿
って螺旋状に回転させると、押圧された部分の結晶が砕
かれて塑性変形を起こすとともに若干収縮するので、そ
の後ピストンロッド６の表面を研磨して凹凸のない円柱
状に仕上げることとしてもよい。In the above embodiment, the detection body 7 is made of copper, but it may also be lead. In addition to using different materials for the piston rod 6 and the detection body 7 as described above, the surface of the piston rod 6 may be physically or chemically treated to form layers of different materials. That is, by subjecting the surface of the piston rod 6 made of a steel material to induction hardening, nitriding, or the like, the structure of that portion changes to martensite, and a hardened vI spiral detection body 7 is formed. The detection body 7 formed in this way has different magnetic properties from the piston rod 6, and therefore can be easily detected by a sensor combined with a magnetic field. Further, as a method of forming the detection body 7 made of a hardened layer on the surface of the piston rod 6, as shown in FIG. Then, the crystals in the pressed part are crushed, plastically deformed, and slightly contracted, so the surface of the piston rod 6 may then be polished to give it a cylindrical shape with no irregularities.
上述の各実施例においては、目盛８をピストンロッド６
の周面に沿った螺旋状に形成したが、これを例えばピス
トンロッド６の周方向に連続した円環状の検出体を、軸
方向に等ピンチに配列してもよい。また、センサー１０
としては、検出コイル、磁性抵抗素子、ホール素子また
はこれらと磁石との組合せによる電磁気的検出方式の他
、静電容量の変化またはピストンロット６と検出体７と
の光の反射率、吸収スペクトルの相違等を検出する光学
的検出方式のものをも適宜採用することができる。また
流体圧シリンダ１に、ピストンロッド６の回転防止装置
を設けてもよい。In each of the above-mentioned embodiments, the scale 8 is connected to the piston rod 6.
Although the detection bodies are formed in a spiral shape along the circumferential surface of the piston rod 6, for example, annular detection bodies continuous in the circumferential direction of the piston rod 6 may be arranged at equal intervals in the axial direction. Also, sensor 10
In addition to electromagnetic detection methods using detection coils, magnetic resistance elements, Hall elements, or a combination of these and magnets, changes in capacitance, light reflectance between the piston rod 6 and the detection object 7, and absorption spectrum An optical detection method for detecting differences etc. can also be appropriately adopted. Further, the fluid pressure cylinder 1 may be provided with a device for preventing rotation of the piston rod 6.
（発明の効果）
本発明によると、ピストンロットに目盛を形成している
ので外部の測長機器を必要とせず、かつピストンロット
と非接触でストローク位置を検出でき、構造簡単で小型
であり、またスリップ等による誤差が絶無であるという
効果が得られる。(Effects of the Invention) According to the present invention, since a scale is formed on the piston rod, an external length measuring device is not required, and the stroke position can be detected without contacting the piston rod, and the structure is simple and small. Further, the effect that errors due to slips and the like are completely eliminated can be obtained.
図面は本発明の実施例であって、第１図は断面図、第２
図はピストンロッド６の一部断面図、第３図は目盛８を
形成する方法の一例を示す図である。
１・・・流体圧シリンダ、６・・・ピストンロット、７
・・・検出体、８・・・目盛。
出願人 太陽鉄工株式会社
デ
１ち
づ
ｆ−７Ｌ
第１図
第２図
り
第３１墳。The drawings show embodiments of the present invention, in which Figure 1 is a sectional view and Figure 2 is a sectional view.
The figure is a partial sectional view of the piston rod 6, and FIG. 3 is a diagram showing an example of a method for forming the scale 8. 1... Fluid pressure cylinder, 6... Piston rod, 7
... Detection object, 8... Scale. Applicant Taiyo Tekko Co., Ltd. De1chizuf-7L Figure 1 Figure 2 Mound No. 31.
Claims (1)
材質とは異なる材質の検出体よりなる目盛を軸方向に形
成してなることを特徴とする流体圧シリンダ。 （２）、前記目盛は、前記ピストンロットの周面に沿っ
た螺旋状に形成してなる特許請求の範囲第１項記載の流
体圧シ′リンダ。 （３）、前記ピストンロットは鉄鋼材料よりなり、前記
検出体は銅よりなる特許請求の範囲第１項または第２項
記載の流体圧シリンダ。 （４）、前記ピストンロットは鉄鋼材料よりなり前記検
出体は鉛よりなる特許請求の範囲第１項または第２項記
載の流体圧シリンダ。 （５）、前記ピストンロットは鉄鋼材料よりなり、前記
検出体は該ピストンロットの表面が硬化させられた硬化
層からなる特許請求の範囲第１項または第２項記載の流
体圧シリンダ。[Scope of Claims] (A fluid pressure cylinder characterized in that a scale made of a detecting body made of a material different from that of the piston rod is formed in the axial direction on the circumferential surface of the piston rod. (2) ), The fluid pressure cylinder according to claim 1, wherein the scale is formed in a spiral along the circumferential surface of the piston rod. (3) The piston rod is made of a steel material, The fluid pressure cylinder according to claim 1 or 2, wherein the detection body is made of copper. (4) The piston rod is made of a steel material and the detection body is made of lead. Claim 1 or the fluid pressure cylinder according to claim 2. (5) The piston rod is made of a steel material, and the detection body is a hardened layer formed by hardening the surface of the piston rod. The fluid pressure cylinder according to item 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3550683A JPS59164406A (en) | 1983-03-03 | 1983-03-03 | Fluid pressure cylinder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3550683A JPS59164406A (en) | 1983-03-03 | 1983-03-03 | Fluid pressure cylinder |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33992090A Division JPH03265704A (en) | 1990-11-30 | 1990-11-30 | Fluid pressure cylinder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59164406A true JPS59164406A (en) | 1984-09-17 |
| JPH0132366B2 JPH0132366B2 (en) | 1989-06-30 |
Family
ID=12443640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3550683A Granted JPS59164406A (en) | 1983-03-03 | 1983-03-03 | Fluid pressure cylinder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59164406A (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6235202A (en) * | 1985-08-09 | 1987-02-16 | S G:Kk | Absolute position detecting device |
| JPS62161001A (en) * | 1986-11-07 | 1987-07-17 | S G:Kk | Apparatus for detecting absolute position |
| JPH02138508A (en) * | 1988-11-18 | 1990-05-28 | Komatsu Ltd | Rod with absolute type bit pattern |
| US5004264A (en) * | 1988-07-29 | 1991-04-02 | Nippondenso Co., Ltd. | Position control device and automotive suspension system employing same |
| FR2746457A1 (en) * | 1996-03-22 | 1997-09-26 | Valeo | Hydraulic slave cylinder for operating clutch thrust bearing for motor vehicles |
| JP2006101582A (en) * | 2004-09-28 | 2006-04-13 | Chugoku Electric Power Co Inc:The | Low-voltage divider |
| JP2007107574A (en) * | 2005-10-12 | 2007-04-26 | Koganei Corp | Fluid pressure drive apparatus equipped with displacement detector |
| JP2007240531A (en) * | 2006-03-08 | 2007-09-20 | Liebherr-France Sas | Localization system of hydraulic pressure cylinder |
| JP2008215911A (en) * | 2007-03-01 | 2008-09-18 | Iai:Kk | Linear encoder and actuator |
| US7737685B2 (en) * | 2003-05-06 | 2010-06-15 | Sri International | Compositions for a magnetically hard layer on a piston rod |
| US7755350B2 (en) | 2005-04-13 | 2010-07-13 | Sri International | System and method of perpendicularly magnetizing position information in a magnetically hard layer of a moving component |
| JP2013256886A (en) * | 2012-06-12 | 2013-12-26 | Toyota Central R&D Labs Inc | Free piston generator |
| JP2018197592A (en) * | 2017-05-24 | 2018-12-13 | 住友重機械工業株式会社 | Air actuator device |
| JP2022171794A (en) * | 2017-11-30 | 2022-11-11 | 株式会社Ihi | CONTROL METHOD FOR ENGINE SYSTEM AND VARIABLE COMPRESSION DEVICE |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52104094U (en) * | 1976-02-05 | 1977-08-08 | ||
| JPS5436231U (en) * | 1977-08-17 | 1979-03-09 | ||
| JPS57171204A (en) * | 1981-04-10 | 1982-10-21 | Festo Maschf Stoll G | Position detector for working cylinder |
| JPS57208303A (en) * | 1981-06-12 | 1982-12-21 | Youshin Giken Kk | Stroke control device in hydraulic cylinder |
-
1983
- 1983-03-03 JP JP3550683A patent/JPS59164406A/en active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52104094U (en) * | 1976-02-05 | 1977-08-08 | ||
| JPS5436231U (en) * | 1977-08-17 | 1979-03-09 | ||
| JPS57171204A (en) * | 1981-04-10 | 1982-10-21 | Festo Maschf Stoll G | Position detector for working cylinder |
| JPS57208303A (en) * | 1981-06-12 | 1982-12-21 | Youshin Giken Kk | Stroke control device in hydraulic cylinder |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6235202A (en) * | 1985-08-09 | 1987-02-16 | S G:Kk | Absolute position detecting device |
| JPS62161001A (en) * | 1986-11-07 | 1987-07-17 | S G:Kk | Apparatus for detecting absolute position |
| US5004264A (en) * | 1988-07-29 | 1991-04-02 | Nippondenso Co., Ltd. | Position control device and automotive suspension system employing same |
| JPH02138508A (en) * | 1988-11-18 | 1990-05-28 | Komatsu Ltd | Rod with absolute type bit pattern |
| FR2746457A1 (en) * | 1996-03-22 | 1997-09-26 | Valeo | Hydraulic slave cylinder for operating clutch thrust bearing for motor vehicles |
| US7737685B2 (en) * | 2003-05-06 | 2010-06-15 | Sri International | Compositions for a magnetically hard layer on a piston rod |
| JP2006101582A (en) * | 2004-09-28 | 2006-04-13 | Chugoku Electric Power Co Inc:The | Low-voltage divider |
| US7755350B2 (en) | 2005-04-13 | 2010-07-13 | Sri International | System and method of perpendicularly magnetizing position information in a magnetically hard layer of a moving component |
| JP2007107574A (en) * | 2005-10-12 | 2007-04-26 | Koganei Corp | Fluid pressure drive apparatus equipped with displacement detector |
| JP2007240531A (en) * | 2006-03-08 | 2007-09-20 | Liebherr-France Sas | Localization system of hydraulic pressure cylinder |
| JP2008215911A (en) * | 2007-03-01 | 2008-09-18 | Iai:Kk | Linear encoder and actuator |
| JP2013256886A (en) * | 2012-06-12 | 2013-12-26 | Toyota Central R&D Labs Inc | Free piston generator |
| JP2018197592A (en) * | 2017-05-24 | 2018-12-13 | 住友重機械工業株式会社 | Air actuator device |
| JP2022171794A (en) * | 2017-11-30 | 2022-11-11 | 株式会社Ihi | CONTROL METHOD FOR ENGINE SYSTEM AND VARIABLE COMPRESSION DEVICE |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0132366B2 (en) | 1989-06-30 |
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