JPS59167659A - Cryogenic cooling device - Google Patents

Cryogenic cooling device

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Publication number
JPS59167659A
JPS59167659A JP4485683A JP4485683A JPS59167659A JP S59167659 A JPS59167659 A JP S59167659A JP 4485683 A JP4485683 A JP 4485683A JP 4485683 A JP4485683 A JP 4485683A JP S59167659 A JPS59167659 A JP S59167659A
Authority
JP
Japan
Prior art keywords
nitrogen
gas
cooled
nitrogen gas
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4485683A
Other languages
Japanese (ja)
Other versions
JPH0377426B2 (en
Inventor
尾原 昭徳
小河 貞男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4485683A priority Critical patent/JPS59167659A/en
Publication of JPS59167659A publication Critical patent/JPS59167659A/en
Publication of JPH0377426B2 publication Critical patent/JPH0377426B2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 この発明は極低温度の冷却装置に関するものである。[Detailed description of the invention] This invention relates to an extremely low temperature cooling device.

従来この種の装置として第1図に示すものがあった。A conventional device of this type is shown in FIG.

図において、11)は液体窒素タンク、(2)は液体窒
素、(3)は1論送管、”(3a)は@a送/ig出口
、(4)は断熱構造の極低温容器で通称フライオスフッ
ト。
In the figure, 11) is the liquid nitrogen tank, (2) is the liquid nitrogen, (3) is the 1st temperature feed pipe, ``(3a) is the @a feed/ig outlet, and (4) is the cryogenic container with an insulated structure. Fly Osfoot.

(5)は′一式案ガガス出口、(6)は窒素ガス、(7
)は仮冷却体、(7a)は被冷却体の上部、、(7b)
は被冷却体の下部である。
(5) is '1 set plan gas outlet, (6) is nitrogen gas, (7
) is the temporary cooling body, (7a) is the upper part of the cooled body, (7b)
is the lower part of the object to be cooled.

矢印は4股の流れる方向を示す。The arrows indicate the direction in which the four branches flow.

また第2図は縦軸を絶対一度目盛、@軸を経週時間目盛
として、フライオスフット(4)の内部における各部分
の温度変化を表わすもので、 EIfJ線Aは、第1図
の輸送管出口部(3a)の温度波化金9曲線Bは、第1
図の被冷却体の下部(7b)のl都度変化を9曲線Cは
、第1図の被冷却体の上部(7a)の温度変化を示す。
In addition, Fig. 2 shows the temperature changes in each part inside the fly-oss foot (4), with the vertical axis as an absolute once scale and the @ axis as a weekly time scale. The temperature waveforming gold 9 curve B at the pipe outlet part (3a) is the first
Curve C shows the temperature change at the upper part (7a) of the object to be cooled in FIG. 1.

次に動作について説明する。Next, the operation will be explained.

一般に極低温装置において、被冷却体(7)を収納した
クライオスタット(4)の内部全常温(約3QOK)か
ら極低温度である液体窒素!都度(約80K)に冷却す
る場合、液体窒素タンクは)の内部に貯蔵されている液
体窒素+21 全J?熱すj′4Jt1のiu’l送管
(3)を経由して少量ずつクライオスタン) 141に
ノ本り込むことによって、余々に冷却する方法で行なっ
て^る。
Generally, in cryogenic equipment, the temperature inside the cryostat (4) that houses the object to be cooled (7) ranges from normal temperature (approximately 3QOK) to extremely low temperature using liquid nitrogen! When cooling each time (approximately 80K), the liquid nitrogen tank is the liquid nitrogen stored inside the tank +21 total J? This is done by pouring it into the cryo-stan 141 little by little via the heating pipe (3) of J'4Jt1 to cool it down excessively.

送シ込まれた液体窒素は輸送管の出口部(3a)からク
ライオスタット(4)の底部に放出され9周囲や被冷却
体(7)全冷却することによって直に蒸発してず巣カス
(6)となシ1.(斯ガス放出口(5)から大気に放出
される。
The injected liquid nitrogen is discharged from the outlet (3a) of the transport pipe to the bottom of the cryostat (4) and completely cools the surrounding area and the object to be cooled (7), so that it does not directly evaporate and becomes scum (6). ) Tonashi 1. (The gas is released into the atmosphere from the gas release port (5).

従来の装dでは以上のようにIIη成されているので、
液体*累の保何している潜熱と顕熱を直接利用して冷却
することになる。゛この時のクライオスタット(4)内
部の各部の温度は、第2図の曲線のように変化する。
In the conventional design, IIη is configured as described above, so
Cooling is achieved by directly utilizing the latent heat and sensible heat held by the liquid. ``At this time, the temperature of each part inside the cryostat (4) changes as shown by the curve in FIG. 2.

つまり、輸送管の出口部(3a]は1曲、・潔Aのよう
に、急激に温度が降下する。塘た伏冷却体の下部(7b
)は、 tt44森Bのように、・田ifも)でAに少
し遅れる程虻でやはり急激な一1i斥下となる。−力抜
冷却体の上部(7a)は曲M、r+1. Cのようにゆ
っくりとした温度降下である。
In other words, the temperature at the exit part (3a) of the transport pipe drops rapidly as shown in Figure 1.
) is like tt44 Mori B, ・田if) is also a little behind A, and it is also a sharp decline in 11i. - The upper part (7a) of the stress relief cooling body is curved M, r+1. As in C, the temperature decreases slowly.

このため冷却の途中ては、被作動体(7)ア内部で大き
な温度差が生じることになり、魚心力による1シリれな
どが兜垂する危険力4あるため、冷J:1」の速度を制
御したり、全組を監視する−3かある等の泊わしさがあ
った。
For this reason, during cooling, a large temperature difference will occur inside the actuated body (7), and there is a risk of sagging due to the fish-centered force. It was difficult to control and monitor all groups.

この発明は上記のような従来のものの欠点を除去するた
めになされたもので、液臣窒素勿貯織し if素ガスを
何する窒素貯ルも岸と、仮冷却体を収納している極低温
容器と、雀索ガスr圧ゐ機で圧KdMし、圧縮した粱裟
ガスを上記窒素貯蔵室の液座鴛素中に設けた冷却器で冷
却し、冷却された4宋ガスを上記極低温容器に放出して
上記仮冷却体を冷やすと共に上記様U: If!谷器か
ら回収した窒素ガスと上記窒素貯蔵室中の窒素ガスの一
部とを上記圧縮機で圧縮して再び上記冷却器に送って循
環させる上記被冷却体の冷却手段と、及び上記窒素貯M
室の窒素ガス中に設けられ、上記圧縮機から上記冷却器
に送られる窒素ガスと冷熱を有する窒素ガスとの間で熱
交換する熱交換器とを備えることによシ、冷熱を有゛効
に利用して上記被冷却体全冷却すると共に。
This invention was made in order to eliminate the drawbacks of the conventional ones as described above. Pressure is set to KdM using a low-temperature container and a gas pressure machine, and the compressed gas is cooled in a cooler installed in the liquid tank in the nitrogen storage chamber, and the cooled 4-song gas is transferred to the above-mentioned electrode. The temporary cooling body is cooled by discharging it into a low-temperature container, and the above U: If! cooling means for the object to be cooled, which compresses the nitrogen gas recovered from the valley vessel and a part of the nitrogen gas in the nitrogen storage chamber with the compressor and sends the compressed air to the cooler again for circulation; M
By including a heat exchanger installed in the nitrogen gas in the room and exchanging heat between the nitrogen gas sent from the compressor to the cooler and the nitrogen gas having cold heat, the cold heat can be effectively used. It is used to completely cool the object to be cooled.

上記被冷却体内部の温度差を小さくシ、黒応力による割
れを防ぐことを目的としている。
The purpose is to reduce the temperature difference inside the object to be cooled and prevent cracking due to black stress.

以下、この発明の一英施例を図をもとにi流用する。Hereinafter, one embodiment of this invention will be used based on the drawings.

第3図はこのつL明の一天施例による極低η吊冷却装置
If+全示し9図において、 tlol rri液体窒
素f: )71′蔵し、′窒素カスを何する断熱構造の
窒素貯蔵室中スタット(41の窒素ガス放出口(5)に
接続された窒素カス拠り管、 (13]は圧縮ψ(Il
)で圧縮された窒宋ガス?液体窒素中に、投けられた冷
却器(+7)へ送る窒素ガス吐出管、 (+51は冷却
器Q7)を経て冷やされた窒素ガス金クライオスタンド
(4)へ送る断熱構造の低温窒素ガス輸送管、 (15
a )は低温窒素ガス・陥送管出口、 (+6)は窒素
貯蔵室(lO)中の余分な蒸発窒素ガスを放出する放出
口、(国は圧縮機(11)から冷却器(17)に送られ
る窒素ガスと上記放出口(16)よシ放出される冷熱を
有する余分々窒素ガスとの間で熱交換する2流路型熱交
換器である。
Figure 3 shows an ultra-low η hanging cooling system If + fully shown in Figure 9, which is an example of this L Ming Ichiten cooling system. The nitrogen sludge pipe connected to the nitrogen gas discharge port (5) of the middle stat (41), (13) is the compression ψ (Il
) compressed nitrogen song gas? Nitrogen gas discharge pipe thrown into liquid nitrogen to send to cooler (+7), (+51 is cooler Q7) to transport cooled nitrogen gas to gold cryostand (4) with adiabatic structure tube, (15
a) is the low-temperature nitrogen gas/feedback pipe outlet, (+6) is the discharge port that releases excess evaporated nitrogen gas in the nitrogen storage room (lO), This is a two-channel heat exchanger that exchanges heat between the nitrogen gas being sent and the excess nitrogen gas having cold energy released through the outlet (16).

なお、この実施例では正流PA(11)、窒素カス医り
′新f121 、窒素ガス吐出管(+31.均圧官(I
J 、低温ガス輸送管(15)及び冷却器Hにより冷却
千成全構成している。
In addition, in this example, a normal flow PA (11), a nitrogen gas discharger (new F121), a nitrogen gas discharge pipe (+31.
J, low-temperature gas transport pipe (15) and cooler H constitute a complete cooling system.

次に動作((ついて説明する。まず、液体室fタンク(
1)の内部に貯蔵されている液体窒素f21 ’i 。
Next, the operation (( will be explained. First, the liquid chamber f tank (
1) Liquid nitrogen f21'i stored inside.

1釘熱構造の’+M送管(3)を経由して、鷺素貯蔵室
(lO)の規定レベルまで槽送する。その後圧41:%
 4・d to) −を運転して、窒素貯蔵室(10)
円の窒素ガス(6)全均圧’i# +14) を経由し
て1*い込む。圧8拍されて圧力の上昇した窒素カスは
、窒素ガス吐出管(13)から2流路型熱交換器(18
)の−次側を通り、冷却器(1カに導かれる。ここで周
囲の液体窒素12)と熱交換し。
It is sent to the specified level in the Sagi Sod storage room (lO) via the '+M feed pipe (3) with a one-nail thermal structure. Afterwards pressure 41:%
4・d to) -, operate the nitrogen storage room (10)
Inject 1* through the circular nitrogen gas (6) total equal pressure 'i# +14). The nitrogen gas whose pressure has increased by increasing the pressure 8 times is transferred from the nitrogen gas discharge pipe (13) to the two-channel heat exchanger (18).
), and is led to a cooler (1), where it exchanges heat with the surrounding liquid nitrogen 12).

液体窒素温度fi′J80K)にに7却され、lシテ燕
・1苺近の低温ガス輸送管(15) Kよってフライオ
スフット(4)の底部に放出され、内部全冷却する。そ
の吠。
The liquid nitrogen is cooled to a temperature of 80 K) and is discharged to the bottom of the flywheel foot (4) through a low-temperature gas transport pipe (15) near the center of the city, cooling the entire interior. That howl.

4累ガス放出口(5)からi索カス陵り官(国を経由し
て圧紬伽(11)K戻り病ひ圧縮されて[1゛」ループ
を循環する。なお、圧縮機(1りがら窒素貯蔵截!10
)に入る付近では、窒素ガスは一般に常温ンこなってお
り、もし常温より高い吻合は送風機(図示せず〕なとに
よシ冷却される。
From the 4-gas discharge port (5), the gas is returned to the compressor (11) via the country and is compressed and circulates through the [1゛] loop. Gara nitrogen storage! 10
), the nitrogen gas is generally at room temperature; if the temperature is higher than room temperature, the anastomosis is cooled by a blower (not shown).

一方、液体窒素溜め[iolの内部で7g発したMi索
カス(6)は蒸発によシ1替熱を失なったたけで、jM
1度はほとんど上昇しておらず、この瑣燕を百幼に利用
すれば液体盆紫の消費型を少ニジくすることかできる。
On the other hand, the 7g of Mi scum (6) emitted inside the liquid nitrogen reservoir [iol] lost 1 replacement heat through evaporation, and
1 degree has hardly increased, and if you use this Deng Yan to the hundredth point, you can reduce the consumption type of Liquid Bon Purple.

つまシ、蒸発した窒素ガス(6)を、 2 L7iE 
:、[岱型燕父挨器(18)の二次側全1山して、黒発
壁素ガスi出口(16)より大気に放出させれば、−次
倶」ヲυ1られている圧縮機(11)からの吐出窒木カ
ス定冷却できる。
Take the evaporated nitrogen gas (6), 2 L7iE
:, [If all the secondary side of the Dai-type Yanchi evaporator (18) is discharged into the atmosphere from the black wall element gas i outlet (16), - next ヲυ1 compression will be achieved. The nitrogen scum discharged from the machine (11) can be constantly cooled.

葦だ、均圧管(14)は圧軸機(11)の運転の、防期
に必要な窒素ガスの供給と、フライオスフット(4)の
内部か冷却されることによ’) b”y’;:縮する窒
素ガスの補給のためのものである。
The pressure equalization pipe (14) is used to supply nitrogen gas necessary for the operation of the pressure shaft machine (11) and to cool the inside of the fly-oss foot (4). ';: This is for replenishing the nitrogen gas that is shrinking.

第5凶は、この発明の他の′叉施例盆示すもので、熱交
換器として、第37yの27hr路型た〜交侯器(18
)の替わりに31ルj俗型為交候語(19)を用いてい
る。ぼた、フライオスフット(4)からの窒・1セカス
灰り管(國を断熱1b造とし、3流路型熱父換1、i;
(191の2次側全面した後に圧、陥公tll)にノ嗅
いているので、窒素貯蔵室(10)内のベベ発窒宋カス
(6)とり夷に。
The fifth example shows another embodiment of the present invention, in which the heat exchanger is a 27-hour cross section (18
) is used instead of 31 Ruj vulgar type Tame conjunctive word (19). Nitrogen and 1 SECAS ash pipe from Bota and Flyosfoot (4) (insulated 1B construction, 3 channel heat exchanger 1, i;
(After cleaning the entire secondary side of 191, the pressure is low and the pressure is low), so I removed the slag (6) from the nitrogen storage room (10).

−次側を流れる序λ+IL;機(11)からの吐出ぺ一
部カス全冷却することがてきる。
- Order λ+IL flowing on the next side: Part of the waste discharged from the machine (11) can be completely cooled.

このよう(で、熱交換器として3流路型のもの(19)
音用いれば、2流路型(18)に比べ、よシ伺゛効に冷
熱に利用するこ′とができる。
A three-channel heat exchanger like this (19)
If sound is used, it can be used for cooling and heat more effectively than the two-channel type (18).

第4.第6図は、第2図と同動く、フライオスフット(
4)の内部における各部分の一反変化r表わすもので9
曲線A、B、Oはそれぞれ第5図の低温ガス帖送管出口
(15a)部、被冷却体の下部(7b) 、被冷却体の
上部(7a)の温度歿化を示す。この図から明らかなよ
うに、冷却の途中でも被冷却体(7)の上部(7a〕と
下部(7b)との温度差が小さくなり1割2tなどの心
配が少な  4゜く、冷却の速度を制御したり、歪量の
監視rする必要がなく、操作が容易なものとなる。
4th. Figure 6 shows the Flyos foot (
4) represents the reverse change r of each part inside 9
Curves A, B, and O indicate the temperature changes at the outlet (15a) of the low-temperature gas pipe, the lower part (7b) of the object to be cooled, and the upper part (7a) of the object to be cooled, respectively, in FIG. As is clear from this figure, even during cooling, the temperature difference between the upper part (7a) and the lower part (7b) of the object to be cooled (7) is small, so there is less concern about 10% 2t, etc., and the cooling speed is reduced. There is no need to control or monitor the amount of distortion, making the operation easy.

以上のように、この発明によると1・1ぞ体奮素2貯蔵
し、窒素ガスを何する窒素貯蔵室と、仮作胛体を収納し
ている極低温容器と、窒祷ガス全圧九機で圧縮し、圧縮
した窒素ガスr、J:記そ素貯M室の液体(#中に設け
た冷却器で冷却し。
As described above, according to the present invention, 1.1 is comprised of a nitrogen storage chamber for storing body oxygen 2 and nitrogen gas, a cryogenic container storing a temporary production body, and a nitrogen gas total pressure of 9. Nitrogen gas R, J: Liquid in storage chamber M (cooled with a cooler installed in #).

冷却された窒累ガス全上記A所低温容器(で放出して、
上記被冷却体を冷やすと共に上記1、:1(温容器から
回収した窒素ガスと上記貢赤貯蔵室中の窒素カスの一部
と全上記圧)fliJ機で圧縮して円ひ上記冷却器に送
って循環させる上記級?′げ胛体の冷人ノ手段と、及び
上記窒素貯蔵室の買糸ガス中に設けられ、上記圧縮機か
ら上記冷却器〆に送られる2素ガスと冷熱をイイする窒
素ガスとの同で然又供する熱交換器と?備えたので、冷
然を有効に利用]−て上記被冷却体を冷却すると共に、
上占己被冷却体内部の温度差を小さくシ、燕応力による
割れを防ぐことが可能となる。
All of the cooled nitrous gas is released in the cryogenic container (A) above,
While cooling the above object to be cooled, the above 1:1 (nitrogen gas recovered from the hot container, a part of the nitrogen scum in the above-mentioned red storage room, and the total above pressure) is compressed with a fliJ machine and sent to the above cooler. The above grade to be sent and circulated? ``Means for cooling the body, and nitrogen gas that is provided in the purchased yarn gas in the nitrogen storage room and sent from the compressor to the cooler and the nitrogen gas that provides cold heat. And the heat exchanger provided? Since it is prepared, the cooling body can be effectively utilized] and the object to be cooled can be cooled.
It is possible to reduce the temperature difference inside the upper self-cooled body and prevent cracking due to swallow stress.

【図面の簡単な説明】[Brief explanation of the drawing]

端・1図は従来の極低温冷却装置φ・示す断面罰1戊図
、第2凶は第1図の従来装置における7微)代部容器内
部の各部分の湿度変化を示す曲線図。 第3図はこの発明の一部て彪し1」による極低7m冷却
装置を示す断面構成図、第4図は第3図の装置における
極低温容器内部の各部分の湿度変化を示す曲線図、第5
因はこの今し明の他の実施例による4全低温冷却装置・
?示す断面1:、)成図、16図は′A′5図の装置d
Kおける・画低温、1!器内部の各1jls分0′)湿
度変化を示す曲線図である。 図において、(l]は液体窒#タンク、(2)は液体窒
素、(3)はll61送管、(4)は極低温容器、(6
)は窒にガス、(7)は被冷却イ4C、(10)は電紮
貯M室+ (11) 01圧、1ilJ桜、 il力は
窒メ1ソガス仄り菅、(13・は窒素ガス吐出管、 (
141は均圧管、 (15)は低温カスra送管、 (
lηは冷却器、 (18) 、’ (+9)は熱交換器
であシ、英施例でば。 1f絹槻(11) 、窒素ガス灰り管睦、窒濃ガス吐出
管(13+ 、均lf管+14] +低温ガス輛送似;
(15)および冷却器j171により冷却手段を構成し
ている。 なお1図中同一符号は回−1だは1り目当1)13分合
示すものとする。 代理人  葛 野  ig  − 第1図 第2図 一晴間 第3図 1 第4図 一一叫間 第6図 第6図 −8う閘
The first figure is a cross-sectional diagram showing the conventional cryogenic cooling device φ, and the second figure is a curve diagram showing humidity changes in each part inside the container in the conventional device shown in FIG. Fig. 3 is a cross-sectional configuration diagram showing an ultra-low 7 m cooling device according to part of the present invention, and Fig. 4 is a curve diagram showing humidity changes in each part inside the cryogenic container in the device of Fig. 3. , 5th
The reason is that 4 total low temperature cooling equipment according to other embodiments of the present day.
? Cross section 1 shown: , ) diagram, Figure 16 is the device d in Figure 'A'5.
K setting/image low temperature, 1! It is a curve diagram showing the humidity change inside the container for each 1jls minute 0'). In the figure, (l) is liquid nitrogen tank, (2) is liquid nitrogen, (3) is ll61 pipe, (4) is cryogenic container, (6
) is nitrogen gas, (7) is cooled I4C, (10) is electrolytic storage M chamber + (11) 01 pressure, 1ilJ Sakura, il force is nitrogen meso gas pipe, (13. is nitrogen Gas discharge pipe, (
141 is a pressure equalization pipe, (15) is a low-temperature waste RA pipe, (
lη is a cooler, (18), '(+9) is a heat exchanger, in the English example. 1f Kinatsuki (11), nitrogen gas ash pipe, nitrogen concentrated gas discharge pipe (13+, uniform LF pipe +14) + low temperature gas conveyance;
(15) and the cooler j171 constitute a cooling means. Note that the same reference numerals in Figure 1 indicate the 13th minute of the first round. Agent Kuzuno ig - Fig. 1 Fig. 2 Ichiharuma Fig. 3 Fig. 4 Fig. 11 Era Fig. 6 Fig. 6-8 Lock

Claims (2)

【特許請求の範囲】[Claims] (1)  液体窒素を貯蔵し、V素ガスを有する窒素貯
蔵室、#冷却体を収納している極低温容器。 賓巣ガスを圧縮機で圧縮し・、圧縮した′窒素ガス全上
記窒素貯蔵室の液体窒素中に設けた冷却器で冷却し、冷
却されたづメ禰ガス會上記−1jlli低胤谷器に放出
して上記被冷却体をt市やすと共に上記極吐温谷器から
回収した。、′索ガスと上記窒紫貯蔵蚕中の4素ガスの
一部とを上記圧縮機で圧縮して再び上記冷却器に送って
循環させる上記被冷却体の冷却手段、&び上記窒素貯蔵
室のイ素ガス中に設けられ、上記圧廊機から上記冷却器
に送られる頌苔カスと冷熱全角する窒素ガスとの間で熱
交侯するば〜交換器をuもえた極低温冷却装置。
(1) A cryogenic container that stores liquid nitrogen, a nitrogen storage chamber containing V gas, and a cooling body. The compressed gas is compressed by a compressor, and all of the compressed nitrogen gas is cooled in a cooler installed in liquid nitrogen in the nitrogen storage chamber, and then released into the cooled gas chamber above-1. Then, the object to be cooled was cooled and recovered from the hot trough. , a means for cooling the body to be cooled, which compresses the gas and a part of the four-element gas in the nitrogen-purple storage silkworm with the compressor and sends it again to the cooler for circulation; and the nitrogen storage chamber. A cryogenic cooling device equipped with an exchanger which is installed in the ion gas and exchanges heat between the moss scum sent from the pressure gallery machine to the cooler and the nitrogen gas which is full of cold and heat.
(2)  冷然を伯する窒素カスは、窒素貯蔵室から排
気される窒素ガスである特許請求の範囲第1項記載の極
低温冷却装置。 +31  冷熱を有する窒素ガスは、極低温容器から回
収した窒素ガスである特許6白求の軛囲オ1項捷たはオ
゛2項記載の極低温冷却装置。
(2) The cryogenic cooling device according to claim 1, wherein the nitrogen scum that impairs cooling is nitrogen gas exhausted from the nitrogen storage chamber. +31 The cryogenic cooling device described in Section 1 or Section 2 of Patent No. 6, in which the nitrogen gas having cold energy is nitrogen gas recovered from a cryogenic container.
JP4485683A 1983-03-15 1983-03-15 Cryogenic cooling device Granted JPS59167659A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4485683A JPS59167659A (en) 1983-03-15 1983-03-15 Cryogenic cooling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4485683A JPS59167659A (en) 1983-03-15 1983-03-15 Cryogenic cooling device

Publications (2)

Publication Number Publication Date
JPS59167659A true JPS59167659A (en) 1984-09-21
JPH0377426B2 JPH0377426B2 (en) 1991-12-10

Family

ID=12703120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4485683A Granted JPS59167659A (en) 1983-03-15 1983-03-15 Cryogenic cooling device

Country Status (1)

Country Link
JP (1) JPS59167659A (en)

Also Published As

Publication number Publication date
JPH0377426B2 (en) 1991-12-10

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