JPS59200078A - Vacuum exhausting method - Google Patents
Vacuum exhausting methodInfo
- Publication number
- JPS59200078A JPS59200078A JP58074426A JP7442683A JPS59200078A JP S59200078 A JPS59200078 A JP S59200078A JP 58074426 A JP58074426 A JP 58074426A JP 7442683 A JP7442683 A JP 7442683A JP S59200078 A JPS59200078 A JP S59200078A
- Authority
- JP
- Japan
- Prior art keywords
- metal hydride
- hydrogen gas
- vacuum
- temperature
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/32—Hydrogen storage
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Hydrogen, Water And Hydrids (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、真空ポンプ装置の中で、特に金属水素化物が
水素ガス全可逆的に吸蔵と放出をする性質を利用した水
素ガス選択吸収性を利用した真空排気方法に関するもの
であり、電子管工業、半導体工業などで簡易に真空ポン
プ装置と１〜で利用できるＣ
従来例の構成とその問題点
真空ポンプ装置に関して大別すれば、油回転ポンプや油
拡散ポンプに代表されるような機械的ポンプと、クライ
オポンプ、ゲックーポンプ、リープジョンポンプなどの
気体分子の凝縮や吸着などの表面現象全利用した真空ポ
ンプとに分類でさる。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention utilizes the selective absorption of hydrogen gas in a vacuum pump device, particularly by utilizing the property of metal hydride to completely reversibly absorb and release hydrogen gas. This relates to a vacuum evacuation method that can be easily used in the electron tube industry, semiconductor industry, etc. with a vacuum pump device. They can be classified into mechanical pumps, such as diffusion pumps, and vacuum pumps, such as cryopumps, gecko pumps, and leap-john pumps, which make full use of surface phenomena such as condensation and adsorption of gas molecules.
このうち１機械的ポンプは油蒸気を有した真空ポンプで
あることから清浄な真空を得る利用分野では問題が残さ
れていた。One of these mechanical pumps is a vacuum pump that uses oil vapor, so there remains a problem in the field of application for obtaining a clean vacuum.
一方、表面現象を利用した真空ポンプは清浄な真空を必
要とする利用分野に普及しているが、それぞれポンプの
種類によって、構成や取扱いの複雑さ、排気速度、使用
出来る真空度、ガス成分による排気能力の差異、装置価
格などの点で独自の問題点金有している。On the other hand, vacuum pumps that utilize surface phenomena are popular in fields that require a clean vacuum, but each type of pump depends on its configuration, complexity of handling, pumping speed, degree of vacuum that can be used, and gas composition. They have their own problems in terms of differences in exhaust capacity, equipment price, etc.
発明の目的
本発明は装置を小形にし、より清浄度の高い真空排気方
法全提供するものである。OBJECTS OF THE INVENTION The present invention provides an entire vacuum evacuation method that has a more compact device and a higher degree of cleanliness.
発明の構成
本発明の真空排気方法は少なくとも、被真空排気系内の
雰囲気を水素ガスで置換し、その後、金属水素化物をプ
ラトー領域における水素平衡圧カ一温度特性（Ｐ−Ｔ特
性）に基づいて、水素平衡圧力における温度条件からよ
り低温度条件に冷却することによって水素ガス雰囲気を
金属水素化物に吸蔵させて真空排気を行なうものである
。Structure of the Invention The evacuation method of the present invention at least replaces the atmosphere in the system to be evacuated with hydrogen gas, and then replaces the metal hydride with hydrogen gas based on the hydrogen equilibrium pressure, temperature characteristics (P-T characteristics) in the plateau region. By cooling the temperature condition from the hydrogen equilibrium pressure to a lower temperature condition, the metal hydride absorbs a hydrogen gas atmosphere and performs evacuation.
実施例の説明
本発明は、金属水素化物を用いて、水素ガスを選択的に
金属水素化物に反応させ、水素ガス雰囲気の圧゛労金変
化させ、真空排気装置としての機能全書よつとするもの
である。DESCRIPTION OF EMBODIMENTS The present invention uses a metal hydride to selectively react hydrogen gas with the metal hydride to change the pressure of the hydrogen gas atmosphere, thereby providing a complete set of functions as a vacuum evacuation device. be.
金属水素化物は水素ガスとの反応において、可逆的に水
素ガスを吸蔵したり、放出したりすることができる。金
属水素化物の特性を示すために一般的に、Ｐ−Ｃ−Ｔ（
圧力−組成−等温線）線図がよく用いられる。このＰ−
Ｃ−Ｔ線図において組成の変動があっても比較的一定の
平衡圧力金有している部分を一般にプラトー領域と呼ば
れている。すなわちプラトー領域では水素の吸蔵、放出
全行なって水素化物の組成が変動しても平衡圧力は殆ん
ど変化金示さない。このプラトー領域での金属水素化物
の平衡圧力（ＰＨ２）と絶対温度（′ｒ）との間では、
ｊｎＰＨ２と１／Ｔ とが良好な直線関係を示すこと
が知られており、この関係から、金属水素化物の温度を
変化させればその温度に対応した平衡圧力全書ることが
出来る。Metal hydrides can reversibly absorb and release hydrogen gas when reacting with hydrogen gas. To characterize the properties of metal hydrides, P-C-T (
Pressure-composition-isotherm) diagrams are often used. This P-
In the C-T diagram, the portion where the equilibrium pressure remains relatively constant even if the composition varies is generally called the plateau region. That is, in the plateau region, even if the composition of the hydride changes due to absorption and release of hydrogen, the equilibrium pressure shows almost no change. Between the equilibrium pressure (PH2) and absolute temperature ('r) of the metal hydride in this plateau region,
It is known that jnPH2 and 1/T exhibit a good linear relationship, and based on this relationship, if the temperature of the metal hydride is changed, the equilibrium pressure corresponding to the temperature can be completely calculated.
ただし、これ寸で知られていた直線関係の成立する範囲
は、平衡圧力では主として０．１〜１１００ａｔ程度の
範囲であり、本発明に関する真空度の高い領域（大気圧
〜１０ａｔｍ、ｌｉ度）では、その物性ばあ一！り知ら
れていないので真空ポンプに応用した例もなかった。However, the range in which the known linear relationship holds is mainly in the range of about 0.1 to 1100 atm at equilibrium pressure, and in the high vacuum region (atmospheric pressure to 10 atm, li degrees) related to the present invention. , its physical properties! Since this technology was not well known, there were no examples of its application to vacuum pumps.
本発明者らは、各種金属水素化物について、真空領域で
の金属水素化物と水素ガスとの反応について詳細に調べ
た。その結果、金属水素化物材料 □）によっ
てその挙動に差異はあるものの、か々り低い圧力範囲に
おいても、水素の吸蔵、放出の反応が可能であり、可逆
的な真空ポンプ装置としての機能を有していることを確
かめた。すなわち、はとんどの金属水素化物材料が、１
０〜１０ ａｔｍ程度の圧力範囲で、温度全変化させる
ことによって、平衡圧力（ｌ２ｎＰＨ２）と絶対温度（
Ｔ）との間で直線的な関係をほぼ満足した。そして、１
０２Ｌ加よりさらに低い圧力の領域では、いくら温度金
工げてもそれに対応した平衡圧力は得られなく、その直
線的な関係を満足するだめの適当な温度領域寸たは圧力
の範囲が存在することを確認した。The present inventors investigated in detail the reaction of various metal hydrides with hydrogen gas in a vacuum region. As a result, although there are differences in behavior depending on the metal hydride material □), it is possible to absorb and desorb hydrogen even in a very low pressure range, and it has the function of a reversible vacuum pump device. I made sure that I was doing it. That is, most metal hydride materials are
Equilibrium pressure (l2nPH2) and absolute temperature (
A nearly linear relationship was satisfied with T). And 1
In the pressure range even lower than 02L pressure, no matter how much temperature metal work is done, the corresponding equilibrium pressure cannot be obtained, and there is an appropriate temperature range size or pressure range that satisfies the linear relationship. It was confirmed.
この１０ａｔｍよすさらに低圧力の領域では、もはや水
素ガスは、金属水素化物を形成する反応ではなく、一般
的なガス吸着が支配的になるものと考えられる。In this lower pressure region of 10 atm or more, it is thought that the reaction of hydrogen gas to form a metal hydride no longer occurs, but general gas adsorption becomes dominant.
このように、被真空排気系内の雰囲気ガス金、あらかじ
め水素ガスで置換しておき、金属水素化物’ｉ１ａｔｍ
前後の温度から、冷却して行けば、金属水素化物は、そ
の冷却温度に対応する平衡圧力を維持するために、素早
く被真空排気系内の水素ガス金吸蔵し、真空ポンプとし
ての機能を得ることが出来る。金属水素化物は、水素ガ
スの貯蔵能力が大さく、１グラムの金属水素化物を用い
れば、１気圧の水素ガス全豹１００〜２０００Ｃ程度吸
蔵することから非常に小さな容量で太さな排気能力を実
現でさるという特徴を有している。この装置に使用する
金属水素化物は、水素貯蔵能力が高いこと、ヒステリン
ス特性が優れていること、反応速度が速いこと、長寿命
であることなどが重要な因子であるが、その使用条件か
ら金属水素化物の平衡解離圧力が一５０°Ｃ〜３００℃
の温度において１気圧である特性を有しているものが好
ましい。In this way, the atmospheric gas in the system to be evacuated is replaced with hydrogen gas in advance, and the metal hydride 'i1atm
If the metal hydride is cooled from the previous or subsequent temperature, it will quickly absorb hydrogen gas in the evacuated system to maintain the equilibrium pressure corresponding to its cooling temperature, and obtain the function as a vacuum pump. I can do it. Metal hydrides have a large storage capacity for hydrogen gas, and if 1 gram of metal hydride is used, it will absorb about 100 to 2000 C of hydrogen gas at 1 atm, so it achieves a large exhaust capacity with a very small capacity. It has the characteristic of being a monkey. Important factors for the metal hydride used in this device include high hydrogen storage capacity, excellent hysteresis characteristics, fast reaction rate, and long life. Equilibrium dissociation pressure of hydride is 150°C to 300°C
It is preferable that the pressure is 1 atm at a temperature of .
この温度範囲内の金属水素化物は、比較的良好な真空ポ
ンプとしての機能を有しているが、３００℃以上のく）
のは、温度条件として高温が必要であること、反応の可
逆性に乏しいなどの問題金有しており、逆に一６０℃以
下のものは、室温での平衡圧が１０ａｔｍ以上にもなり
、系内の圧力全面くさせないだめの温度管理を必要とす
る。Metal hydrides within this temperature range have a relatively good function as a vacuum pump, but at temperatures above 300°C
However, there are problems such as the need for high temperature conditions and poor reversibility of the reaction.On the other hand, if the temperature is below -60°C, the equilibrium pressure at room temperature can be over 10 atm. Temperature control is required to prevent the pressure within the system from decreasing.
なお、本発明において、被真空排気系内を真空排気する
場合、室温での平衡圧が１ａｔｍより低い金属水素化物
を用いる場合には、適当な平衡圧力になるよりに、真空
排気前に金属水素化物を加熱することが有効であった。In the present invention, when evacuating the system to be evacuated, if a metal hydride whose equilibrium pressure at room temperature is lower than 1 atm is used, it is necessary to evacuate the metal hydride before evacuation to reach an appropriate equilibrium pressure. Heating the compound was effective.
本発明では、水素ガス選択性吸収するので、水素ガスで
置換した後の被真空排気系内には、わずかな不純物ガス
成分が存在する。これらの不純物ガスに対して、金属水
素化物は強い吸着能力を有しているため水素ガスと同時
に吸着除去することが可能である。In the present invention, since hydrogen gas is selectively absorbed, a small amount of impurity gas components are present in the evacuated system after being replaced with hydrogen gas. Since metal hydride has a strong adsorption ability for these impurity gases, it is possible to adsorb and remove them simultaneously with hydrogen gas.
なお、本発明は比較的小さな温度差での冷却によって、
真空排気が可能であるといつ特徴金持つと共に、−要冷
却された金属水素化物の冷却を停止するだけで、容易に
再生が出来るという特徴も有している。Note that the present invention achieves cooling with a relatively small temperature difference.
Not only does it have the advantage of being able to be evacuated, but it also has the advantage of being easily regenerated by simply stopping the cooling of the metal hydride that needs to be cooled.
次に具体的実施例について説明する。図面は本発明の一
実施例の真空排気方法を具体化した真空ポンプ装置の構
Ｆｙ、？：第１図に示す。第１図で金属水素化物粉末１
はアルミニウムや銅で作られた密閉容器２に収容した。Next, specific examples will be described. The drawing shows the structure of a vacuum pump device embodying the evacuation method of one embodiment of the present invention. : Shown in Figure 1. In Figure 1, metal hydride powder 1
was housed in a sealed container 2 made of aluminum or copper.
そして密閉容器２はポンプバルブ３を介して、被真空排
気系である真空チャンバー４に接続した。真空チャンバ
ー４には水素ガスを置換するためのガス入（出）ロバル
ブらと真空計６全接続した。才だ金属水素化物を冷却す
るために密閉容器２０周辺に冷却剤容器７を設け。The sealed container 2 was connected via a pump valve 3 to a vacuum chamber 4 which is a system to be evacuated. A gas inlet (output) valve for replacing hydrogen gas and a vacuum gauge 6 were all connected to the vacuum chamber 4 . A coolant container 7 is provided around the closed container 20 to cool the metal hydride.
その容器内に冷却剤８金入れた。A coolant of 8 gold was placed in the container.
このような構成の装置で、金属水素化物として各種の平
衡圧力の異なるＬａＮｉ５− Ｈｘ 。In an apparatus with such a configuration, various types of LaNi5-Hx with different equilibrium pressures are used as metal hydrides.
Ｔｉ□、６Ｚｒ（１，４Ｍｎ１．２Ｃｒ（、，６Ｃｕｏ
、２ Ｈｘ、 ＺｒＭｎ２ ＨＸ＋ Ｍｇ２ＮＩ Ｈ
ｘについて谷１ｏＯｇずつ用いて別々に真空ポンプとし
ての性能を求めた。Ti□, 6Zr(1,4Mn1.2Cr(,,6Cuo
, 2 Hx, ZrMn2 HX+ Mg2NI H
The performance as a vacuum pump was determined separately using 100g of valleys for x.
この場合の密閉容器２の内容積に約７０ＣＣ１真空チヤ
ンバー４の内容積は約５１である。そして各金属水素化
物は、あらかじめ水素と反応を数回性なって、充分活性
化してからプラトー領域の下限の水素量１で調整してセ
ットした。In this case, the internal volume of the closed container 2 is approximately 70 CC1, and the internal volume of the vacuum chamber 4 is approximately 51 CC. Each metal hydride was reacted with hydrogen several times in advance to fully activate it, and then adjusted and set at a hydrogen amount of 1, which is the lower limit of the plateau region.
真空排気の方法として％ＬａＮｉ ５の場合について説
明する。１ずＬａＮｉ ５− Ｈｘの入っている密閉容
器２を室温の状態で保持した。このＬａＮｉ ５− Ｈ
ｘは、２０℃で約１．２ａｔｍの平衡圧力金有していた
。こ □）の時ポンプバルブ３は閉じであ
る。真空チャンバー４内全ガス入（出）ロバルブ５から
水素ガス金導入して、水素ガスで置換した。そして、ガ
ス入（出）ロバルブ６を閉じた。この状態で真空ポンプ
全運転する前準備が完了する。１ず、ＬａＮ１５−Ｈｘ
を冷却するために冷却剤容器７に、冷却剤８として液体
窒素（−１９６℃）を入れ、ポンプバルブ３′ｆｆ：素
早く開放した。As a method of vacuum evacuation, the case of 5% LaNi will be explained. 1. The closed container 2 containing LaNi 5-Hx was kept at room temperature. This LaNi 5-H
x had an equilibrium pressure of about 1.2 atm at 20°C. At this time □), the pump valve 3 is closed. Hydrogen gas was introduced into the vacuum chamber 4 through the gas inlet (outlet) valve 5, and the atmosphere was replaced with hydrogen gas. Then, the gas in/out valve 6 was closed. In this state, preparations for full operation of the vacuum pump are completed. 1. LaN15-Hx
Liquid nitrogen (-196° C.) was put into the coolant container 7 as the coolant 8 to cool the pump, and the pump valve 3'ff was quickly opened.
そうすると真空チャンバー４内は１ ａｔｍがら非常に
早く圧力が下降し、約２分でＱ、８ ｔｏｒｒ に寸
で達した。最終的にＬａＮ１５−Ｈｘで到達し得た真空
度１ｒＪ−ｏ−６ｔｏｒｒ テあッ’ｆ’ｃ □結果
がら、ＬａＮ１５−Ｈｘの場合は約−８５℃程度の温度
１では、平衡圧力と温度とが直線関係を成立すると予測
された。Then, the pressure inside the vacuum chamber 4 dropped from 1 atm very quickly, and reached Q, 8 torr in about 2 minutes. Finally, the degree of vacuum achieved with LaN15-Hx was 1rJ-o-6torr. □As a result, in the case of LaN15-Hx, at a temperature of about -85℃, the equilibrium pressure and temperature are It was predicted that a linear relationship would be established.
この冷却された状態から冷却剤８を抜き取り冷却を停止
すると、金属水素化物は室温葦で温度上昇を行ない、温
度上昇と共に平衡圧力も約１ ａｔｍまで復帰した。こ
のようにして、 ＬａＮ１５−Ｈｘ ｆ数十回、冷却
と冷却停止を繰り返えしたが、殆んど同様の排気速度と
到達真空度を維持することができた。When the coolant 8 was removed from this cooled state and cooling was stopped, the temperature of the metal hydride rose at room temperature, and as the temperature rose, the equilibrium pressure returned to about 1 atm. In this way, the LaN15-Hxf was repeatedly cooled and stopped several dozen times, but it was possible to maintain almost the same pumping speed and ultimate vacuum.
以上のＬａＮｉ ５− Ｈｘと同様のこと金、Ｔｉ、）
、６Ｚｒ ｏ、４Ｍｎ １，２Ｃｒ １ｌＬ６ｃｕ Ｏ
，２−Ｈｘ 、 ＺｒＭｎ２− Ｈｘ 。Similar to LaNi 5-Hx above (gold, Ti,)
, 6Zr o, 4Mn 1,2Cr 1lL6cu O
,2-Hx, ZrMn2-Hx.
Ｍｇ２Ｎｉ −Ｈｘについても行なった。その結果、平
衡圧力が低い材料はど、真空排気全行なう前に金属水素
化物を加熱して平衡圧刃金０．１〜１ ａｔｍ程度にし
ておいた方が有効であった。また平衡圧力の低いものは
、液体窒素々ど非常に低い温度の冷却剤など使用しなく
ても、通常のドライアイス寒剤や、氷寒剤で十分効果が
得られることがわかった。The experiment was also carried out for Mg2Ni-Hx. As a result, for materials with low equilibrium pressures, it was more effective to heat the metal hydride to bring the equilibrium pressure to about 0.1 to 1 atm before performing full vacuum evacuation. It was also found that for objects with low equilibrium pressures, ordinary dry ice or ice cryogens can be used to achieve sufficient effects, without the need for extremely low-temperature coolants such as liquid nitrogen.
これらの金属水素化物粉末の場合も、非常に短時間に１
ｔｏｒｒ 前後の真空度孕得ることが可能であった０
発明の効果
本発明の真空排気方法においては、次のような効果金有
している。In the case of these metal hydride powders, 1
It was possible to obtain a vacuum degree of around 0 torr. Effects of the Invention The evacuation method of the present invention has the following effects.
（１）水素ガスを選択的に吸蔵、放出する金属水素化物
を利用しており、真空排気の速度が早い。(1) Metal hydride that selectively absorbs and releases hydrogen gas is used, and the evacuation speed is fast.
（２）金属水素化物全冷却することにより、清浄な真空
が得られ、構成が簡単であり、また取扱いが容易である
。(2) By completely cooling the metal hydride, a clean vacuum can be obtained, the structure is simple, and it is easy to handle.
（３）水素ガスに対して高い貯蔵密度があるために小型
化が容易である。(3) It is easy to downsize because it has a high storage density for hydrogen gas.
（４）再生に高温での加熱が不要であり再生条件が容易
で、かつ長寿命である。(4) High-temperature heating is not required for regeneration, the regeneration conditions are easy, and the life is long.
（５）装置全構成したとき可動部分がなく、無振動。(5) When the entire device is configured, there are no moving parts and no vibration.
無、騒音で作動する。No, it works with no noise.
図は本発明一実施例の真空排気方法の説明図である。
１・・・・・・金属水素化物粉末、２・・・・・・密閉
容器、３・・・・・・ポンプバルブ、４°゛°・・・真
空チャンバー、５・°・・・・ガス人（出）ロバルブ、
６・・・・・・真空計、７・・・・・冷却剤容器、８・
・・・・・冷却剤。The figure is an explanatory diagram of a vacuum evacuation method according to an embodiment of the present invention. 1... Metal hydride powder, 2... Sealed container, 3... Pump valve, 4°゛°... Vacuum chamber, 5... Gas People (out) Robalbaru,
6... Vacuum gauge, 7... Coolant container, 8...
...coolant.
Claims (2)
置換し、その後、金属水素化物を、その水素平衡圧力に
おける温度条件より低温度に冷却することによって、前
記水素ガス雰囲気を金属水素化物に吸蔵させて真空排気
を行なうことを特徴とする真空排気方法。(1) At least the atmosphere in the system to be evacuated is replaced with hydrogen gas, and then the metal hydride is cooled to a temperature lower than the temperature condition at its hydrogen equilibrium pressure, thereby converting the hydrogen gas atmosphere into a metal hydride. A vacuum evacuation method characterized by occlusion and evacuation.
０℃の温度において１気圧（ａｔｍ ）である特性を有
する材料を用いることを特徴とする特許請求の範囲第１
項記載の真空排気方法。(2) Dissociation equilibrium pressure of metal hydride is -60'C~30
Claim 1, characterized in that a material having a property of 1 atm (atm) at a temperature of 0° C. is used.
Vacuum evacuation method described in section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58074426A JPS59200078A (en) | 1983-04-27 | 1983-04-27 | Vacuum exhausting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58074426A JPS59200078A (en) | 1983-04-27 | 1983-04-27 | Vacuum exhausting method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59200078A true JPS59200078A (en) | 1984-11-13 |
| JPS6310309B2 JPS6310309B2 (en) | 1988-03-05 |
Family
ID=13546865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58074426A Granted JPS59200078A (en) | 1983-04-27 | 1983-04-27 | Vacuum exhausting method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59200078A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0243938A (en) * | 1988-06-16 | 1990-02-14 | Hwt G Fuer Hydrid & Wasserstofftechnik Mbh | Generation of vacuum |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59180082A (en) * | 1983-03-31 | 1984-10-12 | Suzuki Shiyoukan:Kk | Cryo-pump |
-
1983
- 1983-04-27 JP JP58074426A patent/JPS59200078A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59180082A (en) * | 1983-03-31 | 1984-10-12 | Suzuki Shiyoukan:Kk | Cryo-pump |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0243938A (en) * | 1988-06-16 | 1990-02-14 | Hwt G Fuer Hydrid & Wasserstofftechnik Mbh | Generation of vacuum |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6310309B2 (en) | 1988-03-05 |
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