JPS59203886A - 真空ポンプ用防爆装置 - Google Patents

真空ポンプ用防爆装置

Info

Publication number
JPS59203886A
JPS59203886A JP58077780A JP7778083A JPS59203886A JP S59203886 A JPS59203886 A JP S59203886A JP 58077780 A JP58077780 A JP 58077780A JP 7778083 A JP7778083 A JP 7778083A JP S59203886 A JPS59203886 A JP S59203886A
Authority
JP
Japan
Prior art keywords
opening
exhaust
explosion
pipe
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58077780A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0433992B2 (cs
Inventor
Junichi Inaba
純一 稲葉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58077780A priority Critical patent/JPS59203886A/ja
Publication of JPS59203886A publication Critical patent/JPS59203886A/ja
Publication of JPH0433992B2 publication Critical patent/JPH0433992B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP58077780A 1983-05-02 1983-05-02 真空ポンプ用防爆装置 Granted JPS59203886A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58077780A JPS59203886A (ja) 1983-05-02 1983-05-02 真空ポンプ用防爆装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58077780A JPS59203886A (ja) 1983-05-02 1983-05-02 真空ポンプ用防爆装置

Publications (2)

Publication Number Publication Date
JPS59203886A true JPS59203886A (ja) 1984-11-19
JPH0433992B2 JPH0433992B2 (cs) 1992-06-04

Family

ID=13643479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58077780A Granted JPS59203886A (ja) 1983-05-02 1983-05-02 真空ポンプ用防爆装置

Country Status (1)

Country Link
JP (1) JPS59203886A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08193573A (ja) * 1995-01-17 1996-07-30 Tel Varian Ltd クライオポンプの安全弁装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08193573A (ja) * 1995-01-17 1996-07-30 Tel Varian Ltd クライオポンプの安全弁装置

Also Published As

Publication number Publication date
JPH0433992B2 (cs) 1992-06-04

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