JPS59230244A - 痕跡成分を真空室内で分析する方法 - Google Patents

痕跡成分を真空室内で分析する方法

Info

Publication number
JPS59230244A
JPS59230244A JP59099667A JP9966784A JPS59230244A JP S59230244 A JPS59230244 A JP S59230244A JP 59099667 A JP59099667 A JP 59099667A JP 9966784 A JP9966784 A JP 9966784A JP S59230244 A JPS59230244 A JP S59230244A
Authority
JP
Japan
Prior art keywords
gas
vacuum chamber
region
curtain
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59099667A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0329126B2 (2
Inventor
ジヨン・ビ−・フレンチ
ネイル・エム・リ−ド
ジヤネツト・エイ・バツクレイ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Toronto
Original Assignee
University of Toronto
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Toronto filed Critical University of Toronto
Priority to JP59099667A priority Critical patent/JPS59230244A/ja
Publication of JPS59230244A publication Critical patent/JPS59230244A/ja
Publication of JPH0329126B2 publication Critical patent/JPH0329126B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP59099667A 1984-05-17 1984-05-17 痕跡成分を真空室内で分析する方法 Granted JPS59230244A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59099667A JPS59230244A (ja) 1984-05-17 1984-05-17 痕跡成分を真空室内で分析する方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59099667A JPS59230244A (ja) 1984-05-17 1984-05-17 痕跡成分を真空室内で分析する方法

Publications (2)

Publication Number Publication Date
JPS59230244A true JPS59230244A (ja) 1984-12-24
JPH0329126B2 JPH0329126B2 (2) 1991-04-23

Family

ID=14253382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59099667A Granted JPS59230244A (ja) 1984-05-17 1984-05-17 痕跡成分を真空室内で分析する方法

Country Status (1)

Country Link
JP (1) JPS59230244A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6686592B1 (en) 1999-09-20 2004-02-03 Hitachi, Ltd. Mass spectrometer, mass spectrometry, and monitoring system
JP2010519526A (ja) * 2007-02-23 2010-06-03 マイクロマス ユーケー リミテッド 質量分析計

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6686592B1 (en) 1999-09-20 2004-02-03 Hitachi, Ltd. Mass spectrometer, mass spectrometry, and monitoring system
US6838664B2 (en) 1999-09-20 2005-01-04 Hitachi, Ltd. Mass spectrometer, mass spectrometry, and monitoring system
JP2010519526A (ja) * 2007-02-23 2010-06-03 マイクロマス ユーケー リミテッド 質量分析計
JP2011137832A (ja) * 2007-02-23 2011-07-14 Micromass Uk Ltd 質量分析計
JP4917155B2 (ja) * 2007-02-23 2012-04-18 マイクロマス ユーケー リミテッド 質量分析計

Also Published As

Publication number Publication date
JPH0329126B2 (2) 1991-04-23

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