JPS59230245A - 交流検出方式質量分析計 - Google Patents

交流検出方式質量分析計

Info

Publication number
JPS59230245A
JPS59230245A JP58104284A JP10428483A JPS59230245A JP S59230245 A JPS59230245 A JP S59230245A JP 58104284 A JP58104284 A JP 58104284A JP 10428483 A JP10428483 A JP 10428483A JP S59230245 A JPS59230245 A JP S59230245A
Authority
JP
Japan
Prior art keywords
ion
ions
ion source
type
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58104284A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354828B2 (fr
Inventor
Fumio Watanabe
文夫 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Seiko Instruments and Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc, Seiko Instruments and Electronics Ltd filed Critical Seiko Instruments Inc
Priority to JP58104284A priority Critical patent/JPS59230245A/ja
Publication of JPS59230245A publication Critical patent/JPS59230245A/ja
Publication of JPH0354828B2 publication Critical patent/JPH0354828B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP58104284A 1983-06-13 1983-06-13 交流検出方式質量分析計 Granted JPS59230245A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58104284A JPS59230245A (ja) 1983-06-13 1983-06-13 交流検出方式質量分析計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58104284A JPS59230245A (ja) 1983-06-13 1983-06-13 交流検出方式質量分析計

Publications (2)

Publication Number Publication Date
JPS59230245A true JPS59230245A (ja) 1984-12-24
JPH0354828B2 JPH0354828B2 (fr) 1991-08-21

Family

ID=14376624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58104284A Granted JPS59230245A (ja) 1983-06-13 1983-06-13 交流検出方式質量分析計

Country Status (1)

Country Link
JP (1) JPS59230245A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105021494A (zh) * 2015-07-20 2015-11-04 中国科学院光电研究院 一种材料分压放气率测试装置及方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105021494A (zh) * 2015-07-20 2015-11-04 中国科学院光电研究院 一种材料分压放气率测试装置及方法

Also Published As

Publication number Publication date
JPH0354828B2 (fr) 1991-08-21

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