JPS5939939U - ウエハ運搬用器具 - Google Patents

ウエハ運搬用器具

Info

Publication number
JPS5939939U
JPS5939939U JP1982137576U JP13757682U JPS5939939U JP S5939939 U JPS5939939 U JP S5939939U JP 1982137576 U JP1982137576 U JP 1982137576U JP 13757682 U JP13757682 U JP 13757682U JP S5939939 U JPS5939939 U JP S5939939U
Authority
JP
Japan
Prior art keywords
wafer transport
transport equipment
wafer
air vent
abstract
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1982137576U
Other languages
English (en)
Inventor
理 石原
三井　邦昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1982137576U priority Critical patent/JPS5939939U/ja
Publication of JPS5939939U publication Critical patent/JPS5939939U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図は本考案の一実施例であるウェハ運搬用器具を示
す構成図、第２図は本考案の他の実施例であるウェハ運
搬用器具を示す構成図である。 １・・・ウェハ、２・・・吸盤、３・・・中空のパイプ
、４・・・中空のゴム球体、５・・・空気抜き栓、６・
・・空気抜き孔。なお、図中、同一符号は同一、又は相
当部分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. ウェハを吸引して保持する吸盤を、中空パイプを介して
    空気抜き栓又は空気抜き孔を有する中空の弾性球体に連
    結してなる構成としたウェハ運搬用器具。
JP1982137576U 1982-09-08 1982-09-08 ウエハ運搬用器具 Pending JPS5939939U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982137576U JPS5939939U (ja) 1982-09-08 1982-09-08 ウエハ運搬用器具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982137576U JPS5939939U (ja) 1982-09-08 1982-09-08 ウエハ運搬用器具

Publications (1)

Publication Number Publication Date
JPS5939939U true JPS5939939U (ja) 1984-03-14

Family

ID=30308970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982137576U Pending JPS5939939U (ja) 1982-09-08 1982-09-08 ウエハ運搬用器具

Country Status (1)

Country Link
JP (1) JPS5939939U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6273821U (ja) * 1985-10-29 1987-05-12
JPH0368805U (ja) * 1989-11-06 1991-07-08

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6273821U (ja) * 1985-10-29 1987-05-12
JPH0368805U (ja) * 1989-11-06 1991-07-08

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