JPS5941847A - パタ−ン欠陥の表示装置 - Google Patents

パタ−ン欠陥の表示装置

Info

Publication number
JPS5941847A
JPS5941847A JP57153251A JP15325182A JPS5941847A JP S5941847 A JPS5941847 A JP S5941847A JP 57153251 A JP57153251 A JP 57153251A JP 15325182 A JP15325182 A JP 15325182A JP S5941847 A JPS5941847 A JP S5941847A
Authority
JP
Japan
Prior art keywords
image
pattern
standard
chip
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57153251A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6314496B2 (2
Inventor
Yuji Ebihara
雄二 海老原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57153251A priority Critical patent/JPS5941847A/ja
Publication of JPS5941847A publication Critical patent/JPS5941847A/ja
Publication of JPS6314496B2 publication Critical patent/JPS6314496B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP57153251A 1982-08-31 1982-08-31 パタ−ン欠陥の表示装置 Granted JPS5941847A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57153251A JPS5941847A (ja) 1982-08-31 1982-08-31 パタ−ン欠陥の表示装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57153251A JPS5941847A (ja) 1982-08-31 1982-08-31 パタ−ン欠陥の表示装置

Publications (2)

Publication Number Publication Date
JPS5941847A true JPS5941847A (ja) 1984-03-08
JPS6314496B2 JPS6314496B2 (2) 1988-03-31

Family

ID=15558365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57153251A Granted JPS5941847A (ja) 1982-08-31 1982-08-31 パタ−ン欠陥の表示装置

Country Status (1)

Country Link
JP (1) JPS5941847A (2)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6147635A (ja) * 1984-08-14 1986-03-08 Nippon Jido Seigyo Kk パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法
JPS62127987A (ja) * 1985-11-28 1987-06-10 Yokogawa Electric Corp プリント板パタ−ン検査方法
US6831998B1 (en) 2000-06-22 2004-12-14 Hitachi, Ltd. Inspection system for circuit patterns and a method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6147635A (ja) * 1984-08-14 1986-03-08 Nippon Jido Seigyo Kk パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法
JPS62127987A (ja) * 1985-11-28 1987-06-10 Yokogawa Electric Corp プリント板パタ−ン検査方法
US6831998B1 (en) 2000-06-22 2004-12-14 Hitachi, Ltd. Inspection system for circuit patterns and a method thereof

Also Published As

Publication number Publication date
JPS6314496B2 (2) 1988-03-31

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